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    • 1. 发明授权
    • Optically controlled MEM switches
    • 光控MEM开关
    • US06803559B2
    • 2004-10-12
    • US10439624
    • 2003-05-15
    • Tsung-Yuan HsuRobert Y. LooGreg TangonanJuan F. Lam
    • Tsung-Yuan HsuRobert Y. LooGreg TangonanJuan F. Lam
    • G01J136
    • H01H59/0009H01H1/0036H01H47/24H01H67/22
    • An optically controlled micro-electromechanical (MEM) switch is described which desirably utilizes photoconductive properties of a semiconductive substrate upon which MEM switches are fabricated. In one embodiment the bias voltage provided for actuation of the switch is altered by illuminating an optoelectric portion of the switch to deactivate the switch. In an alternative embodiment, a photovoltaic device provides voltage to actuate the switch without any bias lines at all. Due to the hysteresis of the electromechanical switching as a function of applied voltage, only modest variation of voltage applied to the switch is necessary to cause the switch to open or close sharply under optical control.
    • 描述了一种光学控制的微机电(MEM)开关,其理想地利用其上制造有MEM开关的半导体基板的光导特性。 在一个实施例中,通过照亮开关的光电部分来改变为开关的启动提供的偏置电压,以使开关失效。 在替代实施例中,光伏器件提供电压以完全启动开关而没有任何偏置线。 由于作为施加电压的函数的机电开关的滞后,仅需要施加到开关的电压的适度变化,以使开关在光学控制下急剧地打开或闭合。
    • 2. 发明授权
    • Optically controlled MEM switches
    • 光控MEM开关
    • US06310339B1
    • 2001-10-30
    • US09429234
    • 1999-10-28
    • Tsung-Yuan HsuRobert Y. LooGreg TangonanJuan F. Lam
    • Tsung-Yuan HsuRobert Y. LooGreg TangonanJuan F. Lam
    • H01L3100
    • H01H59/0009H01H1/0036H01H47/24H01H67/22
    • An optically controlled micro-electromechanical (MEM) switch is described which desirably utilizes photoconductive properties of a semiconductive substrate upon which MEM switches are fabricated. In one embodiment the bias voltage provided for actuation of the switch is altered by illuminating an optoelectric portion of the switch to deactivate the switch. In an alternative embodiment, a photovoltaic device provides voltage to actuate the switch without any bias lines at all. Due to the hysteresis of the electromechanical switching as a function of applied voltage, only modest variation of voltage applied to the switch is necessary to cause the switch to open or close sharply under optical control.
    • 描述了一种光学控制的微机电(MEM)开关,其理想地利用其上制造有MEM开关的半导体基板的光导特性。 在一个实施例中,通过照亮开关的光电部分来改变为开关的启动提供的偏置电压,以使开关失效。 在替代实施例中,光伏器件提供电压以完全启动开关而没有任何偏置线。 由于作为施加电压的函数的机电开关的滞后,仅需要对开关施加的适当的电压变化使得开关在光学控制下急剧地打开或闭合。
    • 3. 发明授权
    • Optically controlled MEM switches
    • 光控MEM开关
    • US06639205B2
    • 2003-10-28
    • US09978314
    • 2001-10-15
    • Tsung-Yuan HsuRobert Y. LooGreg TangonanJuan F. Lam
    • Tsung-Yuan HsuRobert Y. LooGreg TangonanJuan F. Lam
    • G01J136
    • H01H59/0009H01H1/0036H01H47/24H01H67/22
    • An optically controlled micro-electromechanical (MEM) switch is described which desirably utilizes photoconductive properties of a semiconductive substrate upon which MEM switches are fabricated. In one embodiment the bias voltage provided for actuation of the switch is altered by illuminating an optoelectric portion of the switch to deactivate the switch. In an alternative embodiment, a photovoltaic device provides voltage to actuate the switch without any bias lines at all. Due to the hysteresis of the electromechanical switching as a function of applied voltage, only modest variation of voltage applied to the switch is necessary to cause the switch to open or close sharply under optical control.
    • 描述了一种光学控制的微机电(MEM)开关,其理想地利用其上制造有MEM开关的半导体基板的光导特性。 在一个实施例中,通过照亮开关的光电部分来改变为开关的启动提供的偏置电压,以使开关失效。 在替代实施例中,光伏器件提供电压以完全启动开关而没有任何偏置线。 由于作为施加电压的函数的机电开关的滞后,仅需要施加到开关的电压的适度变化,以使开关在光学控制下急剧地打开或闭合。