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    • 2. 发明申请
    • MONOCHROMATIC MEASUREMENT SYSTEM
    • 单色测量系统
    • US20110188036A1
    • 2011-08-04
    • US13019254
    • 2011-02-01
    • Ding-Hsiang PanHsin-Yueh SungTsung-Hsien OuYu-Hsuan LinHung-Ta Chien
    • Ding-Hsiang PanHsin-Yueh SungTsung-Hsien OuYu-Hsuan LinHung-Ta Chien
    • G01J3/42
    • G01J3/42
    • The present invention relates to a monochromatic measurement system. The system mainly includes a monochromator, a light-detecting device and a filter device. The monochromator functions to split light under test into respective light beams with different wavelengths. The filter device modulates the transmission efficiency of the respective light beams, so that the wavelengths of the light beams to which the light-detecting device displays a better response have a lower transmission efficiency while the wavelengths of the light beams to which the light-detecting device displays a lower response have a higher transmission efficiency. The response values measured by the light-detecting device with respect to different wavelength intervals are normalized accordingly. The measurement errors attributed to the measurement precision of the instrument and the environmental noise are independent from the variation of wavelength. The reliability of the measurement instrument is elevated.
    • 本发明涉及一种单色测量系统。 该系统主要包括单色仪,光检测装置和滤光装置。 单色仪用于将被测光分成具有不同波长的各个光束。 滤波器装置调制各个光束的传输效率,使得光检测装置显示更好响应的光束的波长具有较低的传输效率,而光检测的光束的波长 设备显示较低的响应具有较高的传输效率。 由光检测装置测量的相对于不同波长间隔的响应值被相应地归一化。 归因于仪器的测量精度和环境噪声的测量误差与波长的变化无关。 测量仪器的可靠性提高。
    • 3. 发明授权
    • Imaging apparatus and method thereof
    • 成像装置及其方法
    • US08638445B2
    • 2014-01-28
    • US13163862
    • 2011-06-20
    • Yu-Hsuan LinShih-Yao PanHsin-Yueh SungAlvin ChangHung-Ta Chien
    • Yu-Hsuan LinShih-Yao PanHsin-Yueh SungAlvin ChangHung-Ta Chien
    • G01B11/02
    • G01B11/24G01B11/2441
    • An imaging apparatus includes a light source; a first beam splitter for reflecting a projection beam emitted by the light source; an objective lens unit including a reflection reference surface for reproducing the projection beam into a measurement beam projected onto an object to generate a first reflection beam and a reference beam projected onto the reflection reference surface to generate a second reflection beam mixing with the first reflection beam and passing through the first splitter and forming an operating beam; a second beam splitter for modulating the operating beam into first and second sub-beams; a monochrome image detection device for passage of the first sub-beam to obtain an interferometric image with monochrome from a first interference region; and an image detection device for permitting passage of the second sub-beam in order to obtain a non-interferometric image from a second interference region.
    • 一种成像装置,包括光源; 用于反射由光源发射的投影光束的第一分束器; 物镜单元,包括用于将投影光束再现成投射到物体上的测量光束以产生第一反射光束的反射参考表面和投影到反射参考表面上的参考光束,以产生与第一反射光束混合的第二反射光束 并穿过第一分流器并形成操作梁; 第二分束器,用于将操作光束调制成第一和第二子光束; 用于通过第一子光束以从第一干涉区域获得具有单色的干涉图像的单色图像检测装置; 以及用于允许第二子光束通过以从第二干涉区域获得非干涉图像的图像检测装置。