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1. 发明授权

US4597669A Pattern detector 失效
标题翻译：图案检测器
公开(公告)号：US4597669A
公开(公告)日：1986-07-01
申请号：US539760
申请日：1983-10-07
申请人： Tsuneo Terasawa , Shinji Kuniyoshi , Akihiro Takanashi , Toshiei Kurosaki , Yoshio Kawamura , Sumio Hosaka
发明人： Tsuneo Terasawa , Shinji Kuniyoshi , Akihiro Takanashi , Toshiei Kurosaki , Yoshio Kawamura , Sumio Hosaka
IPC分类号： G01B11/00 , G03F9/00 , G05D3/12 , H01L21/027 , H01L21/30 , G01N21/86
CPC分类号： G03F9/70 , H01L21/30
摘要： A pattern detector according to the present invention adopts a processing method wherein means is provided anew with which the intensity distribution of light reflected from or transmitted through an illuminated specimen is photoelectrically converted, and a pattern position is detected at high speed from the ratio between the primary moment and integral value of a detection signal thus derived, whereupon a symmetry calculation is executed within a narrow range around the detected value, whereby the pattern position is found fast and precisely.
摘要翻译：根据本发明的图案检测器采用一种处理方法，其中重新提供装置，其中从被照射的样品反射或透射的光的光强分布被光电转换，并且以高速的比例检测图案位置这样得到的检测信号的初始矩和积分值，由此在检测值附近的窄范围内执行对称计算，从而快速且精确地找到图案位置。

2. 发明授权

US4614432A Pattern detector 失效
标题翻译：图案检测器
公开(公告)号：US4614432A
公开(公告)日：1986-09-30
申请号：US545642
申请日：1983-10-26
申请人： Shinji Kuniyoshi , Tsuneo Terasawa , Toshiei Kurosaki , Yoshio Kawamura , Sumio Hosaka , Akihiro Takanashi
发明人： Shinji Kuniyoshi , Tsuneo Terasawa , Toshiei Kurosaki , Yoshio Kawamura , Sumio Hosaka , Akihiro Takanashi
IPC分类号： H01L21/30 , G03F9/00 , H01L21/027 , G01B11/00
CPC分类号： G03F9/70
摘要： A pattern detector for precise position measurement of a wafer, used in a mask aligner used in manufacturing a semiconductor device is disclosed. A positioning pattern on the wafer is magnified and projected by a magnifying optical system and the magnified projected image is precisely detected to determine a position of the positioning pattern. As a light to form the magnified projected image, plurality of monochromatic lights of different wavelengths are available through optical filters and the magnifying optical systems are arranged one for each of the monochromatic lights. By selecting one of the optical filters, the magnified projected image of the positioning pattern is formed by the monochromatic light having an optimum wavelength to the wafer and the precise position of the positioning pattern on the wafer can be detected.
摘要翻译：公开了一种用于在用于制造半导体器件的掩模对准器中使用的用于晶片的精确位置测量的图案检测器。晶片上的定位图案由放大光学系统放大和投影，并且精确地检测放大的投影图像以确定定位图案的位置。作为形成放大投影图像的光，通过光学滤光器可以获得不同波长的多个单色光，并且放大光学系统针对每个单色光布置一个。通过选择一个滤光器，通过对晶片具有最佳波长的单色光来形成定位图案的放大投影图像，并且可以检测晶片上的定位图案的精确位置。

3. 发明授权

US4477183A Automatic focusing apparatus 失效
标题翻译：自动对焦装置
公开(公告)号：US4477183A
公开(公告)日：1984-10-16
申请号：US445079
申请日：1982-11-29
申请人： Yoshio Kawamura , Akihiro Takanashi , Toshiei Kurosaki , Shinji Kuniyoshi , Sumio Hosaka , Tsuneo Terasawa
发明人： Yoshio Kawamura , Akihiro Takanashi , Toshiei Kurosaki , Shinji Kuniyoshi , Sumio Hosaka , Tsuneo Terasawa
IPC分类号： H01L21/30 , G02B7/28 , G03F9/00 , H01L21/027 , G03B27/52
CPC分类号： G03F9/7026 , G02B7/28 , G03F9/7057
摘要： An automatic focusing apparatus according to the present invention is constructed of a base on which a substrate is placed, detection means for detecting a pressure of air which is caused to flow out of an interspace between the substrate and an orifice by spurting the air from the orifice toward the substrate, reference pressure generation means for generating a reference pressure which is necessary for setting a standard distance between the substrate and the orifice, a pressure transducer which receives pressure signals from said detection means and said reference pressure generation means and which converts a pressure difference between these pressure signals into an electric signal, base drive means for moving the substrate in parallel with the orifice on the basis of the output signal from said pressure transducer, and offset signal generation means for generating a signal which, when superposed on the output signal from said pressure transducer, serves to shift the substrate from the standard distance.
摘要翻译：根据本发明的自动对焦装置由放置基板的基座构成，检测装置用于检测从基板和孔之间的空隙流出的空气的压力，基准压力产生装置，用于产生设置基板和孔口之间的标准距离所必需的参考压力;压力传感器，其接收来自所述检测装置和所述基准压力产生装置的压力信号，这些压力信号之间的压力差成为电信号;基础驱动装置，用于基于来自所述压力传感器的输出信号与所述孔平行地移动所述基板，以及偏移信号产生装置，用于产生当叠加在所述压力信号上时，来自所述压力传感器的输出信号用于使衬底移动标准距离。

4. 发明授权

US4504726A Pattern generator 失效
标题翻译：模式生成器
公开(公告)号：US4504726A
公开(公告)日：1985-03-12
申请号：US327627
申请日：1981-12-04
申请人： Sumio Hosaka , Akihiro Takanashi , Toshiei Kurosaki , Shinji Kuniyoshi , Yoshio Kawamura , Tsuneo Terasawa
发明人： Sumio Hosaka , Akihiro Takanashi , Toshiei Kurosaki , Shinji Kuniyoshi , Yoshio Kawamura , Tsuneo Terasawa
IPC分类号： B23K26/08 , B23K26/12 , B41M5/24 , G03F7/20 , H01L21/027 , H01L21/30 , H01L21/428
CPC分类号： B23K26/0861 , B23K26/12 , B23K26/1224 , B23K26/123 , B41M5/24 , G03F1/76 , G03F7/704 , G03F7/70875 , H01L21/30
摘要： A pattern generator in which a workpiece to be machined into a desired pattern shape is held in vacuum and is irradiated with a laser beam condensed to be fine, while scanning the laser beam so as to depict the desired pattern shape, whereby the workpiece is directly machined in conformity with the desired pattern shape. As the workpiece, one in which a shading film (for example, chromium film) is deposited on a transparent glass substrate is employed, and it is irradiated with the laser beam in the vacuum, whereby the irradiated parts of the shading film are vaporized to fabricate a shading mask pattern of good quality.
摘要翻译：一种图案发生器，其中待加工成所需图案形状的工件被保持在真空中并且被激光束照射以被精细地聚焦，同时扫描激光束以便描绘所需的图案形状，由此工件直接根据所需的图案形状加工。作为工件，使用在透明玻璃基板上沉积遮光膜（例如，铬膜）的工件，并在真空中照射激光束，使遮光膜的照射部分蒸发至制作质量好的遮光罩图案。

5. 发明授权

US4441206A Pattern detecting apparatus 失效
标题翻译：图案检测装置
公开(公告)号：US4441206A
公开(公告)日：1984-04-03
申请号：US330778
申请日：1981-12-14
申请人： Shinji Kuniyoshi , Akihiro Takanashi , Toshiei Kurosaki , Sumio Hosaka , Yoshio Kawamura , Tsuneo Terasawa
发明人： Shinji Kuniyoshi , Akihiro Takanashi , Toshiei Kurosaki , Sumio Hosaka , Yoshio Kawamura , Tsuneo Terasawa
IPC分类号： G01B11/00 , G03F9/00 , H01L21/027 , H01L21/30 , H01L21/67 , H01L21/68 , G06K9/20 , G06K9/00 , H04N7/00
CPC分类号： G03F9/7088 , H01L21/30
摘要： A pattern detecting apparatus is disclosed which comprises, in order to detect the center of a positioning pattern on a sample with high accuracy in a wide range, means for illuminating the positioning pattern, means for defining an illumination range in which the positioning pattern is illuminated, means for focusing reflected light from the positioning pattern on a predetermined image plane, means for electrically detecting a bright and dark image on the image plane in accordance with positions on the image plane, means for removing a signal corresponding to the outside of the illumination range from the output signal of the detecting means and for holding, in place of the removed signal, a level of the output signal produced within the illumination range, and means for detecting a position of the center of the positioning pattern from the output signal of the holding means.
摘要翻译：公开了一种图案检测装置，其包括为了在宽范围内高精度地检测样品上的定位图案的中心，用于照亮定位图案的装置，用于限定定位图案被照亮的照明范围的装置用于将来自定位图案的反射光聚焦在预定图像平面上的装置，用于根据图像平面上的位置电学检测图像平面上的亮和暗图像的装置，用于去除对应于照明外部的信号的装置范围从检测装置的输出信号，并且代替去除的信号，保持在照明范围内产生的输出信号的电平，以及用于从位置图的输出信号中检测定位图案的中心的位置的装置持有手段。

6. 发明授权

US4480910A Pattern forming apparatus 失效
标题翻译：图案形成装置
公开(公告)号：US4480910A
公开(公告)日：1984-11-06
申请号：US358436
申请日：1982-03-15
申请人： Akihiro Takanashi , Tatsuo Harada , Masamoto Akeyama , Yataro Kondo , Toshiei Kurosaki , Shinji Kuniyoshi , Sumio Hosaka , Yoshio Kawamura
发明人： Akihiro Takanashi , Tatsuo Harada , Masamoto Akeyama , Yataro Kondo , Toshiei Kurosaki , Shinji Kuniyoshi , Sumio Hosaka , Yoshio Kawamura
IPC分类号： H01L21/30 , G03F7/20 , H01L21/027 , G03B27/52 , G03B27/68
CPC分类号： G03F7/70241 , G03F7/2041 , G03F7/70341
摘要： There is disclosed a pattern forming apparatus for projecting a pattern which is formed on a reticle upon a photoresist layer on a substrate which comprises an illumination system for illuminating the pattern for forming an optical image, a reduction lenses for reducing the optical pattern image at a certain reduction ratio and projecting the reduced optical pattern image upon the photoresist layer formed on the substrate for exposing the photoresist layer, and liquid sustaining means for filling a gap between at least a portion of the reduction lenses and the photoresist layer with an optically transparent liquid having a refractive index of more than 1 (one).
摘要翻译：公开了一种图案形成装置，用于将形成在掩模版上的图案投影在基板上的光致抗蚀剂层上，该基板包括用于照射用于形成光学图像的图案的照明系统，用于减少光学图案图像的缩小透镜特定的缩小率，并且将减小的光学图案图像投影到形成在用于曝光光致抗蚀剂层的基板上的光致抗蚀剂层上;以及液体维持装置，用于用光学透明液体填充至少一部分还原透镜和光致抗蚀剂层之间的间隙折射率大于1（1）。

7. 发明授权

US4057347A Optical exposure apparatus 失效
标题翻译：光学曝光装置
公开(公告)号：US4057347A
公开(公告)日：1977-11-08
申请号：US670830
申请日：1976-03-26
申请人： Shigeo Moriyama , Tatsuo Harada , Yoshio Kawamura , Seiya Hashimoto , Akihiro Takanashi , Toshiei Kurosaki , Shinji Kuniyoshi , Sumio Hosaka
发明人： Shigeo Moriyama , Tatsuo Harada , Yoshio Kawamura , Seiya Hashimoto , Akihiro Takanashi , Toshiei Kurosaki , Shinji Kuniyoshi , Sumio Hosaka
IPC分类号： G03B27/32 , G02B27/18 , G03F9/00 , G05D3/12 , H01L21/027 , H01L21/30 , G01B11/26 , G03B27/54
CPC分类号： G03F9/70
摘要： An improved optical exposure apparatus for use in exposing a workpiece to a desired light pattern with a high alignment accuracy and a high operational speed is disclosed. The apparatus comprises a moving table on which a workpiece to be exposed is disposed, a movable holder on which a mask having an original pattern is disposed, a light source for irradiating said mask, a reduction lens for projecting a reduced pattern of said original pattern onto said workpiece, means for positioning said moving table to a predetermined position, means for detecting the error of said table positioning, means for calculating a value of the error of positioning the workpiece divided by the reduction rate of the reduction lens, and means for automatically shifting said movable holder by the calculated value so as to cancel said error.
摘要翻译：公开了一种用于以高对准精度和高操作速度将工件暴露于期望的光图案的改进的光学曝光装置。该装置包括：移动台，设置待曝光的工件;可移动的保持器，其上设置有原始图案的掩模;用于照射所述掩模的光源;还原透镜，用于将所述原始图案的缩小图案投影在所述工件上，用于将所述移动台定位到预定位置的装置，用于检测所述工作台定位误差的装置，用于计算所述工件定位误差值除以所述还原透镜的减速率的装置，自动地将所述活动支架移动所述计算值，以便消除所述误差。

8. 发明授权

US4455485A Laser beam scanning system 失效
标题翻译：激光束扫描系统
公开(公告)号：US4455485A
公开(公告)日：1984-06-19
申请号：US324791
申请日：1981-11-25
申请人： Sumio Hosaka , Tatsuo Harada , Akihiro Takanashi
发明人： Sumio Hosaka , Tatsuo Harada , Akihiro Takanashi
IPC分类号： H01S3/00 , G02B26/10 , G02F1/33 , G03F7/20 , H01J3/14
CPC分类号： G03F7/704 , G02B26/108 , G02F1/33
摘要： A laser beam scanning system for focusing a laser beam to a fine spot and for scanning precisely a large field includes an acousto-optical deflector enabled to deflect a laser beam in the direction of one axis or in the directions of two axes, while maintaining the fine spot diameter, to scan a small field, a relay lens for projecting said deflection point to the center of an objective lens, to effect the focusing of the beam to a fine spot, a high speed carriage enabled to move with high accuracy in biaxial directions, a precise position detector enabled to detect the position of the carriage, and a controller for organically controlling the aforementioned respective functions thereby to make it possible to precisely deflect the laser beam over a large field, whereby a scanning operation of a large field at a high speed and with a high accuracy is performed by the laser beam.
摘要翻译：用于将激光束聚焦到细小点并且精确地扫描大场的激光束扫描系统包括能够使激光束沿着一个轴线或两个轴线的方向偏转的声光偏转器，同时保持精细直径，扫描小场，用于将所述偏转点投影到物镜中心的中继透镜，以实现将光束聚焦到细微点，能够以双轴向高精度移动的高速滑架方向，能够检测托架的位置的精确位置检测器和用于有机地控制上述各个功能的控制器，从而使得可以在大场上精确地偏转激光束，由此大场的扫描操作通过激光束执行高速度和高精度。

9. 发明授权

US07932508B2 Multi-value recording phase-change memory device, multi-value recording phase-change channel transistor, and memory cell array 有权
标题翻译：多值记录相变存储器件，多值记录相变沟道晶体管和存储单元阵列
公开(公告)号：US07932508B2
公开(公告)日：2011-04-26
申请号：US12838985
申请日：2010-07-19
申请人： Sumio Hosaka , Hayato Sone , Masaki Yoshimaru , Takashi Ono , Mayumi Nakasato
发明人： Sumio Hosaka , Hayato Sone , Masaki Yoshimaru , Takashi Ono , Mayumi Nakasato
IPC分类号： H01L29/02
CPC分类号： G11C11/5678 , G11C13/0004 , H01L27/2436 , H01L45/06 , H01L45/1226 , H01L45/144 , H01L45/148
摘要： A multi-value recording phase-change memory device that can stably record multi-value information, and that can reproduce information with high reliability, comprises a first electrode layer 26, a second electrode layer 28, and a memory layer 30 provided between the first and second electrode layers 26 and 28 and containing a phase-change material layer formed from a phase-change material which is stable in either an amorphous phase or a crystalline phase at room temperature, wherein the memory layer 30 includes a plurality of mutually isolated sub-memory layers 32, 34, 36, and 38 between the first and second electrode layers 26 and 28.
摘要翻译：可以稳定地记录多值信息并且可以高可靠性再现信息的多值记录相变存储器件包括：第一电极层26，第二电极层28和存储层30，和第二电极层26和28，并且包含由在室温下在非晶相或结晶相中稳定的相变材料形成的相变材料层，其中存储层30包括多个相互隔离的子内存层32,34,36和38在第一和第二电极层26和28之间。

10. 发明授权

US06534206B1 Information recording media and information recording drive 失效
标题翻译：信息记录媒体和信息记录驱动
公开(公告)号：US06534206B1
公开(公告)日：2003-03-18
申请号：US09604132
申请日：2000-06-27
申请人： Fumiyoshi Kirino , Nobuyuki Inaba , Hiroki Yamamoto , Takashi Naitou , Ken Takahashi , Eiji Koyama , Motoyasu Terao , Sumio Hosaka , Hiroki Kuramoto
发明人： Fumiyoshi Kirino , Nobuyuki Inaba , Hiroki Yamamoto , Takashi Naitou , Ken Takahashi , Eiji Koyama , Motoyasu Terao , Sumio Hosaka , Hiroki Kuramoto
IPC分类号： G11B566
CPC分类号： G11B11/10584 , G11B5/656 , G11B5/66 , G11B5/7325 , G11B11/10586 , Y10S428/90 , Y10T428/265
摘要： A magneto-optical storage apparatus including an ultra-high density information recording media having an inorganic compound layer 12 on a substrate 11, and in the inorganic compound layer 12, an oxide of at least one kind selected from silicon oxide, aluminum oxide, titanium oxide, tantalum oxide, and zinc oxide exists in an amorphous state at a grain boundary of crystal grain of an oxide of at least one kind selected from cobalt oxide, iron oxide, and nickel oxide. The media has a magnetic layer 13 made of an artificial lattice multilayer obtained by alternately laminating a Co layer or an alloy layer consisting of Co as a main phase and a metal element layer of at least one kind selected from Pt and Pd onto the layer 12. Thus, a distribution of magnetic properties serving as a pinning site of the movement of a magnetic wall in case of recording information to the magnetic layer 13 is formed in the magnetic layer 13.
摘要翻译：一种磁光存储装置，包括在基板11上具有无机化合物层12的超高密度信息记录介质，在无机化合物层12中，选自氧化硅，氧化铝，钛氧化物，氧化钽和氧化锌以选自氧化钴，氧化铁和氧化镍中的至少一种的氧化物的晶粒的晶界处于非晶态存在。介质具有通过将由Co组成的Co层或合金层交替层叠到层12上的由人造晶格多层构成的磁性层13，所述Co层或合金层选自Pt和Pd中的至少一种的金属元素层因此，在磁性层13中形成作为磁性层记录信息的情况下的磁性壁移动的钉扎部位的磁特性的分布。

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