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1. 发明授权

US4057347A Optical exposure apparatus 失效
标题翻译：光学曝光装置
公开(公告)号：US4057347A
公开(公告)日：1977-11-08
申请号：US670830
申请日：1976-03-26
申请人： Shigeo Moriyama , Tatsuo Harada , Yoshio Kawamura , Seiya Hashimoto , Akihiro Takanashi , Toshiei Kurosaki , Shinji Kuniyoshi , Sumio Hosaka
发明人： Shigeo Moriyama , Tatsuo Harada , Yoshio Kawamura , Seiya Hashimoto , Akihiro Takanashi , Toshiei Kurosaki , Shinji Kuniyoshi , Sumio Hosaka
IPC分类号： G03B27/32 , G02B27/18 , G03F9/00 , G05D3/12 , H01L21/027 , H01L21/30 , G01B11/26 , G03B27/54
CPC分类号： G03F9/70
摘要： An improved optical exposure apparatus for use in exposing a workpiece to a desired light pattern with a high alignment accuracy and a high operational speed is disclosed. The apparatus comprises a moving table on which a workpiece to be exposed is disposed, a movable holder on which a mask having an original pattern is disposed, a light source for irradiating said mask, a reduction lens for projecting a reduced pattern of said original pattern onto said workpiece, means for positioning said moving table to a predetermined position, means for detecting the error of said table positioning, means for calculating a value of the error of positioning the workpiece divided by the reduction rate of the reduction lens, and means for automatically shifting said movable holder by the calculated value so as to cancel said error.
摘要翻译：公开了一种用于以高对准精度和高操作速度将工件暴露于期望的光图案的改进的光学曝光装置。该装置包括：移动台，设置待曝光的工件;可移动的保持器，其上设置有原始图案的掩模;用于照射所述掩模的光源;还原透镜，用于将所述原始图案的缩小图案投影在所述工件上，用于将所述移动台定位到预定位置的装置，用于检测所述工作台定位误差的装置，用于计算所述工件定位误差值除以所述还原透镜的减速率的装置，自动地将所述活动支架移动所述计算值，以便消除所述误差。

2. 发明授权

US4480910A Pattern forming apparatus 失效
标题翻译：图案形成装置
公开(公告)号：US4480910A
公开(公告)日：1984-11-06
申请号：US358436
申请日：1982-03-15
申请人： Akihiro Takanashi , Tatsuo Harada , Masamoto Akeyama , Yataro Kondo , Toshiei Kurosaki , Shinji Kuniyoshi , Sumio Hosaka , Yoshio Kawamura
发明人： Akihiro Takanashi , Tatsuo Harada , Masamoto Akeyama , Yataro Kondo , Toshiei Kurosaki , Shinji Kuniyoshi , Sumio Hosaka , Yoshio Kawamura
IPC分类号： H01L21/30 , G03F7/20 , H01L21/027 , G03B27/52 , G03B27/68
CPC分类号： G03F7/70241 , G03F7/2041 , G03F7/70341
摘要： There is disclosed a pattern forming apparatus for projecting a pattern which is formed on a reticle upon a photoresist layer on a substrate which comprises an illumination system for illuminating the pattern for forming an optical image, a reduction lenses for reducing the optical pattern image at a certain reduction ratio and projecting the reduced optical pattern image upon the photoresist layer formed on the substrate for exposing the photoresist layer, and liquid sustaining means for filling a gap between at least a portion of the reduction lenses and the photoresist layer with an optically transparent liquid having a refractive index of more than 1 (one).
摘要翻译：公开了一种图案形成装置，用于将形成在掩模版上的图案投影在基板上的光致抗蚀剂层上，该基板包括用于照射用于形成光学图像的图案的照明系统，用于减少光学图案图像的缩小透镜特定的缩小率，并且将减小的光学图案图像投影到形成在用于曝光光致抗蚀剂层的基板上的光致抗蚀剂层上;以及液体维持装置，用于用光学透明液体填充至少一部分还原透镜和光致抗蚀剂层之间的间隙折射率大于1（1）。

3. 发明授权

US4455485A Laser beam scanning system 失效
标题翻译：激光束扫描系统
公开(公告)号：US4455485A
公开(公告)日：1984-06-19
申请号：US324791
申请日：1981-11-25
申请人： Sumio Hosaka , Tatsuo Harada , Akihiro Takanashi
发明人： Sumio Hosaka , Tatsuo Harada , Akihiro Takanashi
IPC分类号： H01S3/00 , G02B26/10 , G02F1/33 , G03F7/20 , H01J3/14
CPC分类号： G03F7/704 , G02B26/108 , G02F1/33
摘要： A laser beam scanning system for focusing a laser beam to a fine spot and for scanning precisely a large field includes an acousto-optical deflector enabled to deflect a laser beam in the direction of one axis or in the directions of two axes, while maintaining the fine spot diameter, to scan a small field, a relay lens for projecting said deflection point to the center of an objective lens, to effect the focusing of the beam to a fine spot, a high speed carriage enabled to move with high accuracy in biaxial directions, a precise position detector enabled to detect the position of the carriage, and a controller for organically controlling the aforementioned respective functions thereby to make it possible to precisely deflect the laser beam over a large field, whereby a scanning operation of a large field at a high speed and with a high accuracy is performed by the laser beam.
摘要翻译：用于将激光束聚焦到细小点并且精确地扫描大场的激光束扫描系统包括能够使激光束沿着一个轴线或两个轴线的方向偏转的声光偏转器，同时保持精细直径，扫描小场，用于将所述偏转点投影到物镜中心的中继透镜，以实现将光束聚焦到细微点，能够以双轴向高精度移动的高速滑架方向，能够检测托架的位置的精确位置检测器和用于有机地控制上述各个功能的控制器，从而使得可以在大场上精确地偏转激光束，由此大场的扫描操作通过激光束执行高速度和高精度。

4. 发明授权

US5078495A Monochromator 失效
标题翻译：单色器
公开(公告)号：US5078495A
公开(公告)日：1992-01-07
申请号：US478568
申请日：1990-02-12
申请人： Tatsuo Harada , Toshiei Kurosaki , Tsuneo Terasawa , Toshiaki Kita
发明人： Tatsuo Harada , Toshiei Kurosaki , Tsuneo Terasawa , Toshiaki Kita
IPC分类号： G01J3/18 , G02B5/18
CPC分类号： G01J3/1804 , G01J2003/1847
摘要： A plane grating, particularly for a monochronomator, is provided with varied-spaced straight and parallel grooves in a light beam path to compensate for other light affecting components, for example a spherical mirror used for collimating or focusing the light beam. The angle of incidence with respect to the light for each of the grooves may vary and the angle of diffraction with respect to the light for each groove may be required to vary with the imperfection of collimation and focusing of the beam. The grooves are varied in their spacing to compensate for the variation of both incidence and diffraction direction.
摘要翻译：特别是用于单声道同步器的平面光栅在光束路径中设置有不同间隔的直的和平行的凹槽，以补偿其它影响光的部件，例如用于准直或聚焦光束的球面镜。相对于每个凹槽的光的入射角可以变化，并且可能需要相对于每个凹槽的光的衍射角度随着光束的准直和聚焦的不完善而变化。凹槽的间距是变化的，以补偿入射和衍射方向的变化。

5. 发明授权

US4983039A Spectrometer 失效
标题翻译：光谱仪
公开(公告)号：US4983039A
公开(公告)日：1991-01-08
申请号：US370034
申请日：1989-06-22
申请人： Tatsuo Harada , Toshiei Kurosaki , Toshiaki Kita , Tsuneo Terasawa
发明人： Tatsuo Harada , Toshiei Kurosaki , Toshiaki Kita , Tsuneo Terasawa
IPC分类号： G01J3/18 , G01J3/00 , G01J3/04 , G01J3/28 , G01J3/30 , G01J3/443 , G01J9/00 , G03F7/20 , H01S3/137 , H01S3/225
CPC分类号： G03F7/70575 , G01J3/04 , G01J3/28 , G01J9/00 , H01S3/137 , G01J2003/047 , G01J2003/1847 , G01J2003/2866 , G01J3/0294 , G01J3/1804 , G01J3/2803 , H01S3/225
摘要： A spectrometer is disclosed, in which plural entrance slits are mounted, and a reference light passing through one entrance slit and the light to be measured passing through the other entrance slit are simultaneously focused on a photo-sensitive surface of a detector through a diffraction grating and a focusing optical system, to measure the wavelength of the light to be measured precisely by using the reference light as a standard.
摘要翻译：公开了一种光谱仪，其中安装有多个入口狭缝，并且通过一个入口狭缝的参考光和通过另一个入口狭缝的被测光同时通过衍射光栅聚焦在检测器的光敏表面上以及聚焦光学系统，通过使用参考光作为标准，精确地测量要测量的光的波长。

6. 发明授权

US4358198A Apparatus for moving table on stage 失效
标题翻译：用于在舞台上移动桌子的装置
公开(公告)号：US4358198A
公开(公告)日：1982-11-09
申请号：US188511
申请日：1980-09-18
申请人： Shigeo Moriyama , Tatsuo Harada , Masaaki Ito
发明人： Shigeo Moriyama , Tatsuo Harada , Masaaki Ito
IPC分类号： B26D7/20 , B23Q1/26 , B23Q1/62 , G02B21/32 , G03F7/20 , H01L21/027 , H01L21/30 , H01L21/68 , H05K13/00 , G03B27/42
CPC分类号： G03F7/70716 , B23Q1/26 , B23Q1/621 , G02B21/32 , H01L21/30 , H05K13/0015
摘要： An apparatus for moving a table or a stage having movable parts adapted to be guided by guide rail means slidingly and rectilinearly. At least the movable parts are made of a non-iron light metal material. The sliding surfaces of the movable parts making sliding contact with the guide rail means are made of a self-lubricating material, while the sliding surfaces of the guide rail means making sliding contact with the movable parts are made of a material having a higher hardness and wear resistance than the non-iron light metal material, so that the weight of at least the movable parts is reduced to decrease the weight of the apparatus as a whole.
摘要翻译：一种用于移动桌子或台架的装置，其具有适于被导轨装置滑动且直线地引导的可移动部件。至少可移动部件由非铁轻金属材料制成。与导轨装置滑动接触的可移动部件的滑动表面由自润滑材料制成，而与可移动部件滑动接触的导轨装置的滑动表面由具有较高硬度的材料制成，耐磨性比非铁轻金属材料低，使得至少可移动部件的重量减小，从而降低整体装置的重量。

7. 发明授权

US4409860A Apparatus for precisely moving a table 失效
标题翻译：用于精确移动桌子的装置
公开(公告)号：US4409860A
公开(公告)日：1983-10-18
申请号：US138095
申请日：1980-04-07
申请人： Shigeo Moriyama , Masaaki Ito , Tatsuo Harada
发明人： Shigeo Moriyama , Masaaki Ito , Tatsuo Harada
IPC分类号： G05G23/00 , B23Q1/62 , G03F7/20 , G05G11/00 , A47B11/00
CPC分类号： G03F7/70716 , B23Q1/621 , Y10T74/20354
摘要： In an apparatus for precisely moving a table, rectilinear drive systems for both X- and Y-axes are fixed to a support frame, a movable stage is constructed so as to have its motion in the direction of one of these axes constrained by the motion of the rectilinear drive system for the one axis and to have its motion in the direction of the other axis constrained by the rectilinear motion of the rectilinear drive system for the other axis, and means for coupling the rectilinear drive system for at least one of the axes and the movable stage so as to have a backlash.
摘要翻译：在用于精确移动工作台的装置中，用于X轴和Y轴两者的直线驱动系统固定在支撑框架上，可动台被构造成使得其运动沿这些轴中的一个受到运动约束的方向的直线驱动系统，并且沿着另一个轴线的直线运动限制的另一个轴线的方向运动;以及用于将直线驱动系统耦合到至少一个的直线驱动系统的装置，轴和可动台以具有间隙。

8. 发明授权

US4012843A Concave diffraction grating and a manufacturing method thereof 失效
$Concave diffraction grating and a manufacturing method thereof$
标题翻译：凹面衍射光栅及其制造方法
公开(公告)号：US4012843A
公开(公告)日：1977-03-22
申请号：US531156
申请日：1974-12-09
申请人： Tatsuo Harada , Shigeo Moriyama , Toshiaki Kita , Hidenori Yamaguchi
发明人： Tatsuo Harada , Shigeo Moriyama , Toshiaki Kita , Hidenori Yamaguchi
IPC分类号： G02B5/18 , B43L13/24
CPC分类号： G02B5/1852
摘要： A tool for ruling grating grooves is reciprocated on a diffraction grating blank with the tool being restrained within a plane inclined at an arbitrary angle relative to a plane lying in contact with one point on a spherical concave of the diffraction grating blank. Translation for a variable pitch-groove spacing which changes as a function of the groove number or groove position is imparted to the diffraction grating blank in interlocking relationship with the reciprocation, thereby mechanically ruling the desired sphere of the grating blank with the grating grooves, whereby a concave diffraction grating which forms diffracted light of a specific wavelength into a completely stigmatic image at high diffraction efficiency can be manufactured.
摘要翻译：用于排列光栅槽的工具在衍射光栅坯料上往复运动，其中工具被限制在相对于与衍射光栅坯料的球形凹部上的一个点接触的平面倾斜任意角度的平面内。对于作为凹槽编号或凹槽位置的函数而变化的可变节距间距的平移被赋予与往复运动互锁关系的衍射光栅坯料，由此用光栅槽机械地划定光栅坯料的所需球体，由此可以制造以高衍射效率将特定波长的衍射光形成为完全眩晕图像的凹面衍射光栅。

9. 发明授权

US4219933A Diffraction grating ruling engine 失效
$Diffraction grating ruling engine$
标题翻译：衍射光栅定尺引擎
公开(公告)号：US4219933A
公开(公告)日：1980-09-02
申请号：US56257
申请日：1979-07-10
申请人： Toshiaki Kita , Shigeo Moriyama , Tatsuo Harada
发明人： Toshiaki Kita , Shigeo Moriyama , Tatsuo Harada
IPC分类号： G01J3/20 , B23D1/26 , B24B13/04 , B24B19/02 , B26D3/08 , G02B5/18 , B43L13/24
CPC分类号： B26D3/08 , B24B13/046 , B24B19/02 , G02B5/1852
摘要： A device for the fabrication of a concave diffraction grating wherein grating grooves are mechanically ruled on a spherical surface of a diffraction grating blank and wherein a tool for ruling the grating grooves is reciprocated along the spherical surface of the diffraction grating blank, guided by a cylindrical cam, to form grooves having a uniform sectional shape over their whole area, whereby a concave diffraction grating of high diffraction efficiency and little scattering light is fabricated.
摘要翻译：一种用于制造凹衍射光栅的装置，其中光栅槽机械地刻划在衍射光栅坯料的球形表面上，并且其中用于刻划光栅槽的工具沿衍射光栅坯料的球形表面往复运动，由圆柱形凸轮形成在其整个区域上具有均匀截面形状的凹槽，由此制造高衍射效率和少量散射光的凹形衍射光栅。

10. 发明授权

US4568187A Concave grating spectrometer 失效
标题翻译：凹面光栅光谱仪
公开(公告)号：US4568187A
公开(公告)日：1986-02-04
申请号：US504437
申请日：1983-06-15
申请人： Toshiaki Kita , Tatsuo Harada
发明人： Toshiaki Kita , Tatsuo Harada
IPC分类号： G01J3/18 , G01J3/20
CPC分类号： G01J3/18
摘要： In a concave grating spectrometer for creating a spectral image by dispersing a light to be measured according to the wavelength, an arrangement comprising a concave grating with varied spacing and/or curved grooves formed on a concave spherical surface, and an entrance slit located at such a position on a vertical focal line passing through the center of curvature of the spherical surface, that the sum of the square of the difference between horizontal and vertical focal lengths at each wavelength in the wavelength range takes a minimum value. The light to be measured projected through the entrance slit is dispersed by the concave grating according to the wavelength and an image is focused on the vertical focal line passing through the center of curvature of the spherical grating.
摘要翻译：在凹面光栅光谱仪中，用于通过根据波长分散待测量的光来产生光谱图像，包括形成在凹球面上的具有不同间隔和/或弯曲凹槽的凹形光栅的布置，以及位于其上的入口狭缝在通过球面的曲率中心的垂直焦线上的位置，在波长范围内的每个波长处的水平和垂直焦距之间的差的平方和之和为最小值。通过入口狭缝投射的被测光通过凹面光栅根据波长分散，并且图像聚焦在穿过球形光栅的曲率中心的垂直焦线上。

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