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    • 1. 发明授权
    • Circuit and method of fabricating a memory cell for a static random access memory
    • 制造用于静态随机存取存储器的存储单元的电路和方法
    • US06295224B1
    • 2001-09-25
    • US09475101
    • 1999-12-30
    • Tsiu Chiu ChanMehdi ZamanianDavid Charles McClure
    • Tsiu Chiu ChanMehdi ZamanianDavid Charles McClure
    • G11C1100
    • H01L27/11G11C11/412
    • A circuit and method is disclosed for a memory cell for a static random access memory. The memory cell includes a pair of cross-coupled CMOS logic inverters that are connected together to form a latch, and a pair of p-channel transmission gate transistors that are connected to the logic inverters for selectively providing access to the latch. The layout of the memory cell includes a rectangular active area in which the p-channel transistors of the memory cell are located. The rectangular active area abuts a similar active area of an adjacent memory cell along a row of memory cells so as to form a single rectangular active area for the p-channel memory cell transistors. The rectangular active area reduces the occurrence of fabrication-related phenomena that adversely effect the performance of the memory cell.
    • 公开了一种用于静态随机存取存储器的存储单元的电路和方法。 存储单元包括连接在一起以形成锁存器的一对交叉耦合CMOS逻辑反相器,以及连接到逻辑反相器的一对p沟道传输栅极晶体管,用于选择性地提供对锁存器的访问。 存储单元的布局包括存储单元的p沟道晶体管位于其中的矩形有源区。 矩形有源区域沿着一行存储器单元邻接相邻存储器单元的类似有效区域,以形成用于p沟道存储单元晶体管的单个矩形有源区域。 矩形有源区减少了不利地影响存储单元的性能的制造相关现象的发生。
    • 2. 发明授权
    • Method of fabricating a memory cell for a static random access memory
    • 制造用于静态随机存取存储器的存储单元的方法
    • US06486007B2
    • 2002-11-26
    • US09910396
    • 2001-07-20
    • Tsiu Chiu ChanMehdi ZamanianDavid Charles McClure
    • Tsiu Chiu ChanMehdi ZamanianDavid Charles McClure
    • H01L21335
    • H01L27/11G11C11/412
    • A method is disclosed for a memory cell for a static random access memory. The memory cell includes a pair of cross-coupled CMOS logic inverters that are connected together to form a latch, and a pair of p-channel transmission gate transistors that are connected to the logic inverters for selectively providing access to the latch. The layout of the memory cell includes a rectangular active area in which the p-channel transistors of the memory cell are located. The rectangular active area abuts a similar active area of an adjacent memory cell along a row of memory cells so as to form a single rectangular active area for the p-channel memory cell transistors. The rectangular active area reduces the occurrence of fabrication-related phenomena that adversely effect the performance of the memory cell.
    • 公开了一种用于静态随机存取存储器的存储单元的方法。 存储单元包括连接在一起以形成锁存器的一对交叉耦合CMOS逻辑反相器,以及连接到逻辑反相器的一对p沟道传输栅极晶体管,用于选择性地提供对锁存器的访问。 存储单元的布局包括存储单元的p沟道晶体管位于其中的矩形有源区。 矩形有源区域沿着一行存储器单元邻接相邻存储器单元的类似有效区域,以形成用于p沟道存储单元晶体管的单个矩形有源区域。 矩形有源区减少了不利地影响存储单元的性能的制造相关现象的发生。
    • 4. 发明授权
    • Method of forming submicron contacts and vias in an integrated circuit
    • US6033980A
    • 2000-03-07
    • US978382
    • 1997-11-25
    • Fu-Tai LiouMehdi Zamanian
    • Fu-Tai LiouMehdi Zamanian
    • H01L21/302H01L21/3065H01L21/768H01L23/522H01L21/31
    • H01L21/76831H01L21/76807
    • A method is provided of forming a small geometry via or contact of a semiconductor integrated circuit, and an integrated circuit formed according to the same, is disclosed. According to a first disclosed embodiment, an opening is formed partially through an insulating layer overlying a conductive region. Sidewall spacers are formed along the sidewalls of the opening. The remaining insulating layer is etched to expose the underlying conductive region. The contact dimension of the opening is smaller than the opening which can be printed from modern photolithography techniques. According to an alternate embodiment, the opening in the insulating layer expose the underlying conductive region. A polysilicon layer is formed over the insulating layer and in the opening. The polysilicon is oxidized to form a thick oxide in the opening and is etched back to form oxidized polysilicon sidewall spacers which decrease the contact dimension of the opening. According to a further alternate embodiment, an etch stop layer is formed between the insulating layer and conductive region and an opening is formed in the insulating layer exposing the etch stop layer. A sidewall spacer film is formed over the insulating layer and the etch stop layer, both layers having a similar etch rate for a given etchant. The etch stop and spacer layers are etched in the opening to expose the underlying conductive layer thereby forming a contiguous sidewall spacer and etch stop layer on the sides of and under the insulating layer, thereby decreasing the contact dimension of the opening.
    • 6. 发明申请
    • Regulator circuitry and method
    • 调节器电路和方法
    • US20050088152A1
    • 2005-04-28
    • US10695294
    • 2003-10-27
    • David McClureMehdi Zamanian
    • David McClureMehdi Zamanian
    • G05F1/40G05F3/24
    • G05F3/247Y10T307/615Y10T307/696
    • A regulator circuit and method are disclosed for a system. The regulator circuit may include a compare circuit for comparing a first supply voltage to a predetermined voltage level and generating an enable signal based upon the comparison. A selectively enabled voltage regulator is adapted to make available a predetermined current level at a regulated voltage when enabled by the compare circuit. When disabled, the voltage regulator circuit is prohibited from providing current. The voltage regulator may include an output transistor that is normally biased in a saturation mode of operation and is deactivated by the enable signal. By controlling the output transistor based upon the output of the compare circuit, the need for a relatively large transistor for connecting to the first supply voltage is eliminated.
    • 公开了一种用于系统的调节器电路和方法。 调节器电路可以包括用于将第一电源电压与预定电压电平进行比较并基于该比较产生使能信号的比较电路。 当由比较电路使能时,有选择地使能的电压调节器适于使得在调节电压下可用的预定电流电平。 禁用时,电压调节器电路禁止提供电流。 电压调节器可以包括通常在饱和运行模式下被偏置并由使能信号禁用的输出晶体管。 通过基于比较电路的输出控制输出晶体管,消除了用于连接到第一电源电压的相对大的晶体管的需要。
    • 7. 发明授权
    • Method of forming submicron contacts and vias in an integrated circuit
    • 在集成电路中形成亚微米触点和通孔的方法
    • US06180517B2
    • 2001-01-30
    • US08948904
    • 1997-10-10
    • Fu-Tai LiouMehdi Zamanian
    • Fu-Tai LiouMehdi Zamanian
    • H01L214763
    • H01L21/76831H01L21/76802H01L21/76807
    • A method is provided of forming a small geometry via or contact of a semiconductor integrated circuit, and an integrated circuit formed according to the same, is disclosed. According to a first disclosed embodiment, an opening is formed partially through an insulating layer overlying a conductive region. Sidewall spacers are formed along the sidewalls of the opening. The remaining insulating layer is etched to expose the underlying conductive region. The contact dimension of the opening is smaller than the opening which can be printed from modern photolithography techniques. According to an alternate embodiment, the opening in the insulating layer expose the underlying conductive region. A polysilicon layer is formed over the insulating layer and in the opening. The polysilicon is oxidized to form a thick oxide in the opening and is etched back to form oxidized polysilicon sidewall spacers which decrease the contact dimension of the opening. According to a further alternate embodiment, an etch stop layer is formed between the insulating layer and conductive region and an opening is formed in the insulating layer exposing the etch stop layer. A sidewall spacer film is formed over the insulating layer and the etch stop layer, both layers having a similar etch rate for a given etchant. The etch stop and spacer layers are etched in the opening to expose the underlying conductive layer thereby forming a contiguous sidewall spacer and etch stop layer on the sides of and under the insulating layer, thereby decreasing the contact dimension of the opening.
    • 公开了一种通过半导体集成电路或接触形成小几何形状的方法,以及根据该半导体集成电路形成的集成电路。 根据第一公开的实施例,部分地通过覆盖导电区域的绝缘层形成开口。 沿着开口的侧壁形成侧壁间隔物。 蚀刻剩余的绝缘层以暴露下面的导电区域。 开口的接触尺寸小于可以用现代光刻技术印刷的开口。 根据替代实施例,绝缘层中的开口暴露下面的导电区域。 在绝缘层和开口中形成多晶硅层。 多晶硅被氧化以在开口中形成厚的氧化物并被回蚀以形成减小开口的接触尺寸的氧化的多晶硅侧壁间隔物。 根据另一替代实施例,在绝缘层和导电区域之间形成蚀刻停止层,并且在暴露蚀刻停止层的绝缘层中形成开口。 在绝缘层和蚀刻停止层上形成侧壁间隔膜,两层对于给定的蚀刻剂具有相似的蚀刻速率。 蚀刻停止层和间隔层在开口中被蚀刻以暴露下面的导电层,从而在绝缘层上和下方形成连续的侧壁间隔物和蚀刻停止层,从而减小开口的接触尺寸。
    • 8. 发明授权
    • Radiation hardened semiconductor memory
    • 辐射硬化半导体存储器
    • US6091630A
    • 2000-07-18
    • US393125
    • 1999-09-10
    • Tsiu C. ChanMehdi Zamanian
    • Tsiu C. ChanMehdi Zamanian
    • H01L21/8244H01L27/11G11C11/00
    • H01L27/1104
    • A radiation hardened memory device having static random access memory cells includes active gate isolation structures placed in series with oxide isolation regions between the active regions of a memory cell array. The active gate isolation structure includes a gate oxide and polycrystalline silicon gate layer electrically coupled to a supply terminal resulting in an active gate isolation structure that prevents a conductive channel extending from adjacent active regions from forming. The gate oxide of the active gate isolation structures is relatively thin compared to the conventional oxide isolation regions and thus, will be less susceptible to any adverse influence from trapped charges caused by radiation exposure.
    • 具有静态随机存取存储器单元的辐射硬化存储器件包括与存储器单元阵列的有源区之间的氧化物隔离区域串联设置的有源栅极隔离结构。 有源栅极隔离结构包括电耦合到电源端的栅极氧化物和多晶硅栅极层,导致有源栅极隔离结构,其防止从相邻的有源区域延伸的导电沟道形成。 与常规的氧化物隔离区域相比,有源栅极隔离结构的栅极氧化物相对较薄,因此不太容易受到由辐射暴露引起的俘获电荷的任何不利影响。
    • 10. 发明授权
    • Built-in frequency test circuit for testing the frequency of the output of a frequency generating circuit
    • 内置频率测试电路,用于测试频率发生电路的输出频率
    • US06486649B1
    • 2002-11-26
    • US09539057
    • 2000-03-30
    • Rong YinMehdi Zamanian
    • Rong YinMehdi Zamanian
    • G01R2302
    • G01R31/2824
    • A frequency test circuit (200) includes a built-in self test (BIST) circuit (212) which provides for testing of a frequency generating circuit such as an oscillator circuit (100). The test circuit (200) includes circuit stages (202-208) which help produce a reference signal (210) which has substantially the same frequency as that produced by the oscillator circuit (100) when it is operational. Since the low current oscillator circuit (100) can fail at any one of the divider or level shifting stages (106-112), the test circuit (200) can determine if the reference signal and the output signal of the oscillator have substantially the same frequency and produce a test condition signal indicative of either a pass or failed test at test port (214).
    • 频率测试电路(200)包括内置自测试(BIST)电路(212),其提供诸如振荡器电路(100)的频率产生电路的测试。 测试电路(200)包括电路级(202-208),其有助于产生参考信号(210),该参考信号具有与振荡器电路(100)工作时产生的频率基本相同的频率。 由于低电流振荡器电路(100)可能在分压器或电平移位级(106-112)中的任何一个故障,所以测试电路(200)可以确定参考信号和振荡器的输出信号是否基本相同 并产生指示测试端口(214)的通过或失败测试的测试条件信号。