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1. 发明授权

US08635710B2 Scanning probe microscope and method of observing sample using the same 有权
标题翻译：扫描探针显微镜及使用其的观察样品的方法
公开(公告)号：US08635710B2
公开(公告)日：2014-01-21
申请号：US13446279
申请日：2012-04-13
申请人： Toshihiko Nakata , Masahiro Watanabe , Takashi Inoue , Kishio Hidaka , Makoto Okai , Toshiaki Morita , Motoyuki Hirooka
发明人： Toshihiko Nakata , Masahiro Watanabe , Takashi Inoue , Kishio Hidaka , Makoto Okai , Toshiaki Morita , Motoyuki Hirooka
IPC分类号： G01B11/14 , G01Q60/06
CPC分类号： G01Q60/06 , G01N21/648 , G01Q60/22 , G01Q70/12
摘要： Optical information and topographic information of the surface of a sample are measured at a nanometer-order resolution and with high reproducibility without damaging a probe and the sample by combining a nanometer-order cylindrical structure with a nanometer-order microstructure to form a plasmon intensifying near-field probe having a nanometer-order optical resolution and by repeating approach/retreat of the probe to/from each measurement point on the sample at a low contact force.
摘要翻译：以纳米级分辨率和高重现性测量样品表面的光学信息和地形信息，而不损害探针和样品，通过将纳米级圆柱结构与纳米级微结构组合以形成等离子体激元附近具有纳米级光学分辨率并且以低接触力重复将样品上的每个测量点的探针接近/退回。

2. 发明申请

US20100325761A1 Scanning Probe Microscope and Method of Observing Sample Using the Same 有权
标题翻译：扫描探针显微镜及其使用方法
公开(公告)号：US20100325761A1
公开(公告)日：2010-12-23
申请号：US12864196
申请日：2008-12-18
申请人： Toshihiko Nakata , Masahiro Watanabe , Takashi Inoue , Kishio Hidaka , Makoto Okai , Toshiaki Morita , Motoyuki Hirooka
发明人： Toshihiko Nakata , Masahiro Watanabe , Takashi Inoue , Kishio Hidaka , Makoto Okai , Toshiaki Morita , Motoyuki Hirooka
IPC分类号： G01Q60/24
CPC分类号： G01Q60/06 , G01N21/648 , G01Q60/22 , G01Q70/12
摘要： Optical information and topographic information of the surface of a sample are measured at a nanometer-order resolution and with high reproducibility without damaging a probe and the sample by combining a nanometer-order cylindrical structure with a nanometer-order microstructure to form a plasmon intensifying near-field probe having a nanometer-order optical resolution and by repeating approach/retreat of the probe to/from each measurement point on the sample at a low contact force.
摘要翻译：以纳米级分辨率和高重现性测量样品表面的光学信息和地形信息，而不损害探针和样品，通过将纳米级圆柱结构与纳米级微结构组合以形成等离子体激元附近具有纳米级光学分辨率并且以低接触力重复将样品上的每个测量点的探针接近/退回。

3. 发明申请

US20120204297A1 Scanning Probe Microscope and Method of Observing Sample Using the Same 有权
标题翻译：扫描探针显微镜及其使用方法
公开(公告)号：US20120204297A1
公开(公告)日：2012-08-09
申请号：US13446279
申请日：2012-04-13
申请人： Toshihiko NAKATA , Masahiro Watanabe , Takashi Inoue , Kishio Hidaka , Makoto Okai , Toshiaki Morita , Motoyuki Hirooka
发明人： Toshihiko NAKATA , Masahiro Watanabe , Takashi Inoue , Kishio Hidaka , Makoto Okai , Toshiaki Morita , Motoyuki Hirooka
IPC分类号： G01Q60/06 , G01Q60/18 , B82Y15/00
CPC分类号： G01Q60/06 , G01N21/648 , G01Q60/22 , G01Q70/12
摘要： Optical information and topographic information of the surface of a sample are measured at a nanometer-order resolution and with high reproducibility without damaging a probe and the sample by combining a nanometer-order cylindrical structure with a nanometer-order microstructure to form a plasmon intensifying near-field probe having a nanometer-order optical resolution and by repeating approach/retreat of the probe to/from each measurement point on the sample at a low contact force.
摘要翻译：以纳米级分辨率和高重现性测量样品表面的光学信息和地形信息，而不损害探针和样品，通过将纳米级圆柱结构与纳米级微结构组合以形成等离子体激元附近具有纳米级光学分辨率并且以低接触力重复将样品上的每个测量点的探针接近/退回。

4. 发明授权

US08181268B2 Scanning probe microscope and method of observing sample using the same 有权
标题翻译：扫描探针显微镜及使用其的观察样品的方法
公开(公告)号：US08181268B2
公开(公告)日：2012-05-15
申请号：US12864196
申请日：2008-12-18
申请人： Toshihiko Nakata , Masahiro Watanabe , Takashi Inoue , Kishio Hidaka , Makoto Okai , Toshiaki Morita , Motoyuki Hirooka
发明人： Toshihiko Nakata , Masahiro Watanabe , Takashi Inoue , Kishio Hidaka , Makoto Okai , Toshiaki Morita , Motoyuki Hirooka
IPC分类号： G01N13/10
CPC分类号： G01Q60/06 , G01N21/648 , G01Q60/22 , G01Q70/12
摘要： Optical information and topographic information of the surface of a sample are measured at a nanometer-order resolution and with high reproducibility without damaging a probe and the sample by combining a nanometer-order cylindrical structure with a nanometer-order microstructure to form a plasmon intensifying near-field probe having a nanometer-order optical resolution and by repeating approach/retreat of the probe to/from each measurement point on the sample at a low contact force.
摘要翻译：以纳米级分辨率和高重现性测量样品表面的光学信息和地形信息，而不损害探针和样品，通过将纳米级圆柱结构与纳米级微结构组合以形成等离子体激元附近具有纳米级光学分辨率并且以低接触力重复将样品上的每个测量点的探针接近/退回。

5. 发明申请

US20100218287A1 SCANNING PROBE MICROSCOPE AND METHOD OF OBSERVING SAMPLE USING THE SAME 有权
标题翻译：扫描探针显微镜及其使用方法观察样品
公开(公告)号：US20100218287A1
公开(公告)日：2010-08-26
申请号：US12712745
申请日：2010-02-25
申请人： Toshihiko NAKATA , Masahiro Watanabe , Takashi Inoue , Kishio Hidaka , Makoto Okai , Motoyuki Hirooka
发明人： Toshihiko NAKATA , Masahiro Watanabe , Takashi Inoue , Kishio Hidaka , Makoto Okai , Motoyuki Hirooka
IPC分类号： G01Q20/02 , G01Q60/18
CPC分类号： G01Q60/22 , G01Q70/12
摘要： In a scanning probe microscope, a nanotube and metal nano-particles are combined together to configure a plasmon-enhanced near-field probe having an optical resolution on the order of nanometers as a measuring probe in which a metal structure is embedded, and this plasmon-enhanced near-field probe is installed in a highly-efficient plasmon exciting unit to repeat approaching to and retracting from each measuring point on a sample with a low contact force, so that optical information and profile information of the surface of the sample are measured with a resolution on the order of nanometers, a high S/N ratio, and high reproducibility without damaging both of the probe and the sample.
摘要翻译：在扫描探针显微镜中，将纳米管和金属纳米粒子组合在一起构成具有纳米数量级的光学分辨率的等离子体增强型近场探针作为嵌入金属结构的测量探针，该等离子体激元增强的近场探头安装在高效的等离子体激元单元中，以低接触力重复接近和缩回样品上的每个测量点，从而测量样品表面的光学信息和轮廓信息分辨率为纳米级，高S / N比，高重现性，不损伤探头和样品。

6. 发明授权

US08407811B2 Scanning probe microscope and method of observing sample using the same 有权
标题翻译：扫描探针显微镜及使用其的观察样品的方法
公开(公告)号：US08407811B2
公开(公告)日：2013-03-26
申请号：US12712745
申请日：2010-02-25
申请人： Toshihiko Nakata , Masahiro Watanabe , Takashi Inoue , Kishio Hidaka , Makoto Okai , Motoyuki Hirooka
发明人： Toshihiko Nakata , Masahiro Watanabe , Takashi Inoue , Kishio Hidaka , Makoto Okai , Motoyuki Hirooka
IPC分类号： G01Q60/24
CPC分类号： G01Q60/22 , G01Q70/12
摘要： In a scanning probe microscope, a nanotube and metal nano-particles are combined together to configure a plasmon-enhanced near-field probe having an optical resolution on the order of nanometers as a measuring probe in which a metal structure is embedded, and this plasmon-enhanced near-field probe is installed in a highly-efficient plasmon exciting unit to repeat approaching to and retracting from each measuring point on a sample with a low contact force, so that optical information and profile information of the surface of the sample are measured with a resolution on the order of nanometers, a high S/N ratio, and high reproducibility without damaging both of the probe and the sample.
摘要翻译：在扫描探针显微镜中，将纳米管和金属纳米粒子组合在一起构成具有纳米数量级的光学分辨率的等离子体增强型近场探针作为嵌入金属结构的测量探针，该等离子体激元增强的近场探头安装在高效的等离子体激元单元中，以低接触力重复接近和缩回样品上的每个测量点，从而测量样品表面的光学信息和轮廓信息分辨率为纳米级，高S / N比，高重现性，不损伤探头和样品。

7. 发明授权

US07732764B2 Field emission electron gun and electron beam applied device using the same 有权
标题翻译：场发射电子枪和电子束施加装置使用相同
公开(公告)号：US07732764B2
公开(公告)日：2010-06-08
申请号：US11831989
申请日：2007-08-01
申请人： Tadashi Fujieda , Makoto Okai , Kishio Hidaka , Mitsuo Hayashibara , Shunichi Watanabe
发明人： Tadashi Fujieda , Makoto Okai , Kishio Hidaka , Mitsuo Hayashibara , Shunichi Watanabe
IPC分类号： H01J31/073 , H01J37/26 , H01J37/30
CPC分类号： H01J37/073 , B82Y10/00 , B82Y40/00 , H01J1/3044 , H01J9/025 , H01J37/3174 , H01J2201/3043 , H01J2201/30434 , H01J2201/30469 , H01J2201/30484 , H01J2201/30488 , H01J2201/30496 , H01J2237/06341 , H01J2237/26
摘要： The object of the present invention is to enable the optical axis of an electron beam of a field emission electron gun mounting thereon an electron gun composed of a fibrous carbon material to be adjusted easily. Moreover, it is also to obtain an electron beam whose energy spread is narrower than that of the electron gun. Further, it is also to provide a high resolution electron beam applied device mounting thereon the field emission electron gun. The means for achieving the objects of the present invention is in that the fibrous carbon material is coated with a material having a band gap, in the field emission electron gun including an electron source composed of a fibrous carbon material and an electrically conductive base material for supporting the fibrous carbon material, an extractor for field-emitting electrons, and an accelerator for accelerating the electrons. Moreover, it is also to apply the field emission electron gun to various kinds of electron beam applied devices.
摘要翻译：本发明的目的是使得能够容易地调整由其上安装有由纤维状碳材料构成的电子枪的场发射电子枪的电子束的光轴。此外，还要获得能量扩散比电子枪窄的电子束。此外，还提供安装在其上的高分辨率电子束施加装置的场致发射电子枪。用于实现本发明的目的的手段在于，在场发射电子枪中包括具有带隙的材料的纤维状碳材料包括由纤维状碳材料构成的电子源和用于支撑纤维状碳材料，用于场发射电子的提取器和用于加速电子的加速器。此外，还将场致发射电子枪应用于各种电子束施加装置。

8. 发明申请

US20080315747A1 Electron emitting element, electron gun, and electron beam applied equipment using the same 审中-公开
标题翻译：电子发射元件，电子枪和使用其的电子束施加设备
公开(公告)号：US20080315747A1
公开(公告)日：2008-12-25
申请号：US12076888
申请日：2008-03-25
申请人： Makoto Okai , Tadashi Fujieda , Kishio Hidaka , Mitsuo Hayashibara , Shun-ichi Watanabe
发明人： Makoto Okai , Tadashi Fujieda , Kishio Hidaka , Mitsuo Hayashibara , Shun-ichi Watanabe
IPC分类号： H01J29/46
CPC分类号： H01J37/073 , H01J37/28
摘要： An electron emitting element having a cap portion 103 with a closed structure and a columnar axis portion 101a comprising a tubular material composed mostly of carbon and a conductive base material for immobilizing the tubular material, characterized in that; the cap portion 103 includes a plurality of five-membered ring structures 104 made by atoms which constitute the tubular material and the distance between the five-membered ring structures 104 is 30 nm or more.
摘要翻译：电子发射元件具有封闭结构的盖部分103和包括主要由碳组成的管状材料的柱状轴线部分101a和用于固定管状材料的导电基底材料，其特征在于：盖部分103包括由构成管状材料的原子制成的多个五元环结构104，并且五元环结构104之间的距离为30nm以上。

9. 发明授权

US07976950B2 Transparent conductive film and electronic device including same 有权
标题翻译：透明导电膜及其电子器件
公开(公告)号：US07976950B2
公开(公告)日：2011-07-12
申请号：US12791336
申请日：2010-06-01
申请人： Makoto Okai , Motoyuki Hirooka
发明人： Makoto Okai , Motoyuki Hirooka
IPC分类号： B32B9/00
CPC分类号： H01B1/04 , B82Y30/00 , B82Y40/00 , C01B32/186 , C01B2204/02 , C01B2204/04 , C01B2204/22 , C01B2204/32 , H01L51/442 , Y02E10/549 , Y10T428/26 , Y10T428/261 , Y10T428/30
摘要： The transparent conductive film according to the present invention comprises graphene platelets which overlap one another to form a multilayer structure. The average size of the graphene platelets is 50 nm or more and the number of layers of the graphene platelets is 9 or less. The transparent conductive film has an electrical resistivity of 1.0×10−6 (Ωm) or less and a light transmission at a wavelength of 550 nm of 80% or more.
摘要翻译：根据本发明的透明导电膜包括彼此重叠以形成多层结构的石墨烯片晶。石墨烯血小板的平均尺寸为50nm以上，石墨烯片的层数为9个以下。透明导电膜的电阻率为1.0×10 -6（Ω·cm）以下，波长550nm下的透光率为80％以上。

10. 发明申请

US20120090056A1 MICROCONTACT PROBER 有权
公开(公告)号：US20120090056A1
公开(公告)日：2012-04-12
申请号：US13378286
申请日：2010-05-26
申请人： Motoyuki Hirooka , Makoto Okai
发明人： Motoyuki Hirooka , Makoto Okai
IPC分类号： G01Q30/02
CPC分类号： G01Q60/40 , G01Q70/12 , G01R1/06727 , G01R1/06744 , G01R31/2887
摘要： The stress due to contact between a probe and a measurement sample is improved when using a microcontact prober having a conductive nanotube, nanowire, or nanopillar probe, the insulating layer at the contact interface is removed, thereby the contact resistance is reduced, and the performance of semiconductor device examination is improved. The microcontact prober comprises a cantilever probe in which each cantilever is provided with a nanowire, nanopillar, or a metal-coated carbon nanotube probe projecting by 50 to 100 nm from a holder provided at the fore end and a vibrating mechanism for vibrating the cantilever horizontally with respect to the subject. The fore end of the holder may project from the free end of the cantilever, and the fore end of the holder can be checked from above the cantilever.
摘要翻译：当使用具有导电纳米管，纳米线或纳米柱探针的微探针探针时，探针和测量样品之间的接触引起的应力得到改善，接触界面处的绝缘层被去除，从而降低了接触电阻，并且性能的半导体器件检查得到改进。微接触探针包括悬臂探针，其中每个悬臂设置有从设置在前端的保持器突出50至100nm的纳米线，纳米柱或金属涂覆的碳纳米管探针和用于水平振动悬臂的振动机构关于这个问题。支架的前端可以从悬臂的自由端突出，并且可以从悬臂上方检查支架的前端。

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