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1. 发明授权

US07976950B2 Transparent conductive film and electronic device including same 有权
标题翻译：透明导电膜及其电子器件
公开(公告)号：US07976950B2
公开(公告)日：2011-07-12
申请号：US12791336
申请日：2010-06-01
申请人： Makoto Okai , Motoyuki Hirooka
发明人： Makoto Okai , Motoyuki Hirooka
IPC分类号： B32B9/00
CPC分类号： H01B1/04 , B82Y30/00 , B82Y40/00 , C01B32/186 , C01B2204/02 , C01B2204/04 , C01B2204/22 , C01B2204/32 , H01L51/442 , Y02E10/549 , Y10T428/26 , Y10T428/261 , Y10T428/30
摘要： The transparent conductive film according to the present invention comprises graphene platelets which overlap one another to form a multilayer structure. The average size of the graphene platelets is 50 nm or more and the number of layers of the graphene platelets is 9 or less. The transparent conductive film has an electrical resistivity of 1.0×10−6 (Ωm) or less and a light transmission at a wavelength of 550 nm of 80% or more.
摘要翻译：根据本发明的透明导电膜包括彼此重叠以形成多层结构的石墨烯片晶。石墨烯血小板的平均尺寸为50nm以上，石墨烯片的层数为9个以下。透明导电膜的电阻率为1.0×10 -6（Ω·cm）以下，波长550nm下的透光率为80％以上。

2. 发明申请

US20120090056A1 MICROCONTACT PROBER 有权
公开(公告)号：US20120090056A1
公开(公告)日：2012-04-12
申请号：US13378286
申请日：2010-05-26
申请人： Motoyuki Hirooka , Makoto Okai
发明人： Motoyuki Hirooka , Makoto Okai
IPC分类号： G01Q30/02
CPC分类号： G01Q60/40 , G01Q70/12 , G01R1/06727 , G01R1/06744 , G01R31/2887
摘要： The stress due to contact between a probe and a measurement sample is improved when using a microcontact prober having a conductive nanotube, nanowire, or nanopillar probe, the insulating layer at the contact interface is removed, thereby the contact resistance is reduced, and the performance of semiconductor device examination is improved. The microcontact prober comprises a cantilever probe in which each cantilever is provided with a nanowire, nanopillar, or a metal-coated carbon nanotube probe projecting by 50 to 100 nm from a holder provided at the fore end and a vibrating mechanism for vibrating the cantilever horizontally with respect to the subject. The fore end of the holder may project from the free end of the cantilever, and the fore end of the holder can be checked from above the cantilever.
摘要翻译：当使用具有导电纳米管，纳米线或纳米柱探针的微探针探针时，探针和测量样品之间的接触引起的应力得到改善，接触界面处的绝缘层被去除，从而降低了接触电阻，并且性能的半导体器件检查得到改进。微接触探针包括悬臂探针，其中每个悬臂设置有从设置在前端的保持器突出50至100nm的纳米线，纳米柱或金属涂覆的碳纳米管探针和用于水平振动悬臂的振动机构关于这个问题。支架的前端可以从悬臂的自由端突出，并且可以从悬臂上方检查支架的前端。

3. 发明申请

US20110198558A1 GRAPHENE CIRCUIT BOARD HAVING IMPROVED ELECTRICAL CONTACT BETWEEN GRAPHENE AND METAL ELECTRODE, AND DEVICE INCLUDING SAME 失效
标题翻译：具有改善的石墨和金属电极之间的电气接触的石墨电路板和包括其的装置
公开(公告)号：US20110198558A1
公开(公告)日：2011-08-18
申请号：US13013984
申请日：2011-01-26
申请人： Makoto Okai , Motoyuki Hirooka , Yasuo Wada
发明人： Makoto Okai , Motoyuki Hirooka , Yasuo Wada
IPC分类号： H01L29/06
CPC分类号： H01L29/1606 , G02B6/4246 , H01L21/2855 , H01L29/41 , H01L29/45 , H01L29/7781 , H01L29/78603 , H01L29/78684
摘要： A circuit board having a graphene circuit according to the present invention includes: a base substrate; a patterned aluminum oxide film formed on the base substrate, the patterned aluminum oxide film having an average composition of Al2-xO3+x (where x is 0 or more), the patterned aluminum oxide film having a recessed region whose surface has one or more cone-shaped recesses therein; a graphene film preferentially grown only on the patterned aluminum oxide film, the graphene film having one or more graphene atomic layers, the graphene film having a contact region that covers the recessed region, the graphene film growing parallel to a flat surface of the recessed region and parallel to an inner wall surface of each cone-shaped recess of the recessed region; and a patterned metal film, a part of the patterned metal film covering and having electrical contact with the contact region, the patterned metal film filling each recess covered by the graphene film.
摘要翻译：根据本发明的具有石墨烯电路的电路板包括：基底; 形成在基底基板上的图案化氧化铝膜，图案化的氧化铝膜具有平均组成为Al 2-x O 3 + x（其中x为0或更大）的图案化氧化铝膜，图案化的氧化铝膜具有凹陷区域，其表面具有一个或多个锥形凹槽; 优选仅在图案化的氧化铝膜上生长的石墨烯膜，所述石墨烯膜具有一个或多个石墨烯原子层，所述石墨烯膜具有覆盖所述凹陷区域的接触区域，所述石墨烯膜平行于所述凹陷区域的平坦表面生长并且平行于凹陷区域的每个锥形凹部的内壁表面; 以及图案化的金属膜，所述图案化的金属膜的一部分覆盖并与所述接触区域电接触，所述图案化金属膜填充由所述石墨烯膜覆盖的每个凹部。

4. 发明授权

US08635710B2 Scanning probe microscope and method of observing sample using the same 有权
标题翻译：扫描探针显微镜及使用其的观察样品的方法
公开(公告)号：US08635710B2
公开(公告)日：2014-01-21
申请号：US13446279
申请日：2012-04-13
申请人： Toshihiko Nakata , Masahiro Watanabe , Takashi Inoue , Kishio Hidaka , Makoto Okai , Toshiaki Morita , Motoyuki Hirooka
发明人： Toshihiko Nakata , Masahiro Watanabe , Takashi Inoue , Kishio Hidaka , Makoto Okai , Toshiaki Morita , Motoyuki Hirooka
IPC分类号： G01B11/14 , G01Q60/06
CPC分类号： G01Q60/06 , G01N21/648 , G01Q60/22 , G01Q70/12
摘要： Optical information and topographic information of the surface of a sample are measured at a nanometer-order resolution and with high reproducibility without damaging a probe and the sample by combining a nanometer-order cylindrical structure with a nanometer-order microstructure to form a plasmon intensifying near-field probe having a nanometer-order optical resolution and by repeating approach/retreat of the probe to/from each measurement point on the sample at a low contact force.
摘要翻译：以纳米级分辨率和高重现性测量样品表面的光学信息和地形信息，而不损害探针和样品，通过将纳米级圆柱结构与纳米级微结构组合以形成等离子体激元附近具有纳米级光学分辨率并且以低接触力重复将样品上的每个测量点的探针接近/退回。

5. 发明授权

US08278658B2 Electrically connected graphene-metal electrode device, and electronic device, electronic integrated circuit and electro-optical integrated circuit using same 有权
标题翻译：电气连接的石墨烯 - 金属电极器件，电子器件，电子集成电路和使用其的电光集成电路
公开(公告)号：US08278658B2
公开(公告)日：2012-10-02
申请号：US12766960
申请日：2010-04-26
申请人： Makoto Okai , Motoyuki Hirooka
发明人： Makoto Okai , Motoyuki Hirooka
IPC分类号： H01L29/40 , H01B1/02
CPC分类号： H01L29/1606
摘要： An device according to the present invention comprises: graphene; and a metal electrode, the metal electrode and the graphene being electrically connected, the following relationship of Eq. (1) being satisfied: coth ⁡ ( r GP r C ⁢ S )
摘要翻译：根据本发明的装置包括：石墨烯; 和金属电极，金属电极和石墨烯电连接，等式（1）满足：coth⁡（r GP r C S）<1.3，等式（1）其中rGP（以＆OHgr / /μm2为单位）表示每单位面积的石墨烯层的电阻，rC（以＆OHgr;μm2为单位）表示石墨烯层与金属之间的单位面积的接触电阻电极，S表示石墨烯层和金属电极之间的接触面积（以μm2为单位）。

6. 发明申请

US20100270512A1 ELECTRICALLY CONNECTED GRAPHENE-METAL ELECTRODE DEVICE, AND ELECTRONIC DEVICE, ELECTRONIC INTEGRATED CIRCUIT AND ELECTRO-OPTICAL INTEGRATED CIRCUIT USING SAME 有权
标题翻译：电连接的石墨 - 金属电极装置和电子装置，电子集成电路和电光集成电路
公开(公告)号：US20100270512A1
公开(公告)日：2010-10-28
申请号：US12766960
申请日：2010-04-26
申请人： Makoto Okai , Motoyuki Hirooka
发明人： Makoto Okai , Motoyuki Hirooka
IPC分类号： H01B1/04 , H01B1/02
CPC分类号： H01L29/1606
摘要： An device according to the present invention comprises: graphene; and a metal electrode, the metal electrode and the graphene being electrically connected, the following relationship of Eq. (1) being satisfied: coth  ( r GP r C  S )
摘要翻译：根据本发明的装置包括：石墨烯; 和金属电极，金属电极和石墨烯电连接，等式（1）满足：coth（r GP r C S）<1.3，等式（1）其中rGP（以＆OHgr; /μm2为单位）表示每单位面积的石墨烯层的电阻，rC（以＆OHgr;μm2为单位）表示石墨烯层和金属之间的每单位面积的接触电阻电极，S表示石墨烯层和金属电极之间的接触面积（以μm2为单位）。

7. 发明申请

US20100218287A1 SCANNING PROBE MICROSCOPE AND METHOD OF OBSERVING SAMPLE USING THE SAME 有权
标题翻译：扫描探针显微镜及其使用方法观察样品
公开(公告)号：US20100218287A1
公开(公告)日：2010-08-26
申请号：US12712745
申请日：2010-02-25
申请人： Toshihiko NAKATA , Masahiro Watanabe , Takashi Inoue , Kishio Hidaka , Makoto Okai , Motoyuki Hirooka
发明人： Toshihiko NAKATA , Masahiro Watanabe , Takashi Inoue , Kishio Hidaka , Makoto Okai , Motoyuki Hirooka
IPC分类号： G01Q20/02 , G01Q60/18
CPC分类号： G01Q60/22 , G01Q70/12
摘要： In a scanning probe microscope, a nanotube and metal nano-particles are combined together to configure a plasmon-enhanced near-field probe having an optical resolution on the order of nanometers as a measuring probe in which a metal structure is embedded, and this plasmon-enhanced near-field probe is installed in a highly-efficient plasmon exciting unit to repeat approaching to and retracting from each measuring point on a sample with a low contact force, so that optical information and profile information of the surface of the sample are measured with a resolution on the order of nanometers, a high S/N ratio, and high reproducibility without damaging both of the probe and the sample.
摘要翻译：在扫描探针显微镜中，将纳米管和金属纳米粒子组合在一起构成具有纳米数量级的光学分辨率的等离子体增强型近场探针作为嵌入金属结构的测量探针，该等离子体激元增强的近场探头安装在高效的等离子体激元单元中，以低接触力重复接近和缩回样品上的每个测量点，从而测量样品表面的光学信息和轮廓信息分辨率为纳米级，高S / N比，高重现性，不损伤探头和样品。

8. 发明授权

US08476739B2 Graphene grown substrate and electronic/photonic integrated circuits using same 失效
标题翻译：石墨烯生长衬底和电子/光子集成电路使用相同
公开(公告)号：US08476739B2
公开(公告)日：2013-07-02
申请号：US12624437
申请日：2009-11-24
申请人： Makoto Okai , Motoyuki Hirooka , Takashi Kyotani , Hironori Orikasa
发明人： Makoto Okai , Motoyuki Hirooka , Takashi Kyotani , Hironori Orikasa
IPC分类号： H01L23/58
CPC分类号： H01L21/0242 , C23C16/26 , C23C16/56 , C30B25/02 , C30B29/02 , H01L21/02381 , H01L21/02488 , H01L21/02527 , H01L21/0262 , H01L29/78603 , H01L29/78684
摘要： A graphene-on-oxide substrate according to the present invention includes: a substrate having a metal oxide layer formed on its surface; and, formed on the metal oxide layer, a graphene layer including at least one atomic layer of the graphene. The graphene layer is grown generally parallel to the surface of the metal oxide layer, and the inter-atomic-layer distance between the graphene atomic layer adjacent to the surface of the metal oxide layer and the surface atomic layer of the metal oxide layer is 0.34 nm or less. Preferably, the arithmetic mean surface roughness Ra of the metal oxide layer is 1 nm or less.
摘要翻译：根据本发明的石墨烯氧化物衬底包括：在其表面上形成有金属氧化物层的衬底; 并且在所述金属氧化物层上形成包括所述石墨烯的至少一个原子层的石墨烯层。石墨烯层通常平行于金属氧化物层的表面生长，并且与金属氧化物层的表面相邻的石墨烯原子层与金属氧化物层的表面原子层之间的原子间距离为0.34 nm以下。优选地，金属氧化物层的算术平均表面粗糙度Ra为1nm以下。

9. 发明授权

US08407811B2 Scanning probe microscope and method of observing sample using the same 有权
标题翻译：扫描探针显微镜及使用其的观察样品的方法
公开(公告)号：US08407811B2
公开(公告)日：2013-03-26
申请号：US12712745
申请日：2010-02-25
申请人： Toshihiko Nakata , Masahiro Watanabe , Takashi Inoue , Kishio Hidaka , Makoto Okai , Motoyuki Hirooka
发明人： Toshihiko Nakata , Masahiro Watanabe , Takashi Inoue , Kishio Hidaka , Makoto Okai , Motoyuki Hirooka
IPC分类号： G01Q60/24
CPC分类号： G01Q60/22 , G01Q70/12
摘要： In a scanning probe microscope, a nanotube and metal nano-particles are combined together to configure a plasmon-enhanced near-field probe having an optical resolution on the order of nanometers as a measuring probe in which a metal structure is embedded, and this plasmon-enhanced near-field probe is installed in a highly-efficient plasmon exciting unit to repeat approaching to and retracting from each measuring point on a sample with a low contact force, so that optical information and profile information of the surface of the sample are measured with a resolution on the order of nanometers, a high S/N ratio, and high reproducibility without damaging both of the probe and the sample.
摘要翻译：在扫描探针显微镜中，将纳米管和金属纳米粒子组合在一起构成具有纳米数量级的光学分辨率的等离子体增强型近场探针作为嵌入金属结构的测量探针，该等离子体激元增强的近场探头安装在高效的等离子体激元单元中，以低接触力重复接近和缩回样品上的每个测量点，从而测量样品表面的光学信息和轮廓信息分辨率为纳米级，高S / N比，高重现性，不损伤探头和样品。

10. 发明申请

US20110175060A1 GRAPHENE GROWN SUBSTRATE AND ELECTRONIC/PHOTONIC INTEGRATED CIRCUITS USING SAME 失效
标题翻译：石墨基片和电子/光电集成电路
公开(公告)号：US20110175060A1
公开(公告)日：2011-07-21
申请号：US13010075
申请日：2011-01-20
申请人： Makoto Okai , Motoyuki Hirooka , Yasuo Wada
发明人： Makoto Okai , Motoyuki Hirooka , Yasuo Wada
IPC分类号： H01L29/16 , H01L21/20 , B82Y99/00 , B82Y40/00
CPC分类号： H01L21/02645 , B82Y40/00 , H01L21/02381 , H01L21/0242 , H01L21/02488 , H01L21/02494 , H01L21/02502 , H01L21/02527 , H01L21/0262 , H01L27/1218 , H01L29/1606 , H01L29/7781 , H01L29/78603 , H01L29/78684 , H01L31/028 , H01L31/08 , H01L31/1136 , H01L33/40 , Y02E10/547
摘要： A substrate having a graphene film grown thereon according to the present invention includes: a base substrate; a patterned aluminum oxide film formed on the base substrate, the patterned aluminum oxide film having an average composition of Al2-xO3+x (where x is 0 or more); and a graphene film preferentially grown only on the patterned aluminum oxide film, the graphene film having one or more graphene atomic layers, the graphene film growing parallel to a surface of the patterned aluminum oxide film, the graphene film having an electrical conductivity of 1×104 S/cm or more measured by a four-probe resistive method using an inter-voltage-probe distance of 0.2 mm.
摘要翻译：根据本发明的在其上生长的石墨烯膜的基板包括：基底; 形成在基底基板上的图案化氧化铝膜，平均组成为Al 2-x O 3 + x（x为0以上）的图案化氧化铝膜; 并且仅在图案化的氧化铝膜上生长的石墨烯膜，所述石墨烯膜具有一个或多个石墨烯原子层，所述石墨烯膜平行于所述图案化氧化铝膜的表面生长，所述石墨烯膜的导电率为1× 通过使用0.2mm的电压 - 探针距离的四探针电阻法测量为104S / cm以上。

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