会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 6. 发明授权
    • High resolution and large dynamic range resonant pressure sensor based
on Q-factor measurement
    • 基于Q因子测量的高分辨率和大动态范围谐振压力传感器
    • US6085594A
    • 2000-07-11
    • US158163
    • 1998-09-04
    • Roman C. GutierrezChristopher B. StellTony K. TangVatche VorperianJaroslava WilcoxKirill ShcheglovWilliam J. Kaiser
    • Roman C. GutierrezChristopher B. StellTony K. TangVatche VorperianJaroslava WilcoxKirill ShcheglovWilliam J. Kaiser
    • G01L9/00G01L11/00
    • G01L9/0008
    • A pressure sensor has a high degree of accuracy over a wide range of pressures. Using a pressure sensor relying upon resonant oscillations to determine pressure, a driving circuit drives such a pressure sensor at resonance and tracks resonant frequency and amplitude shifts with changes in pressure. Pressure changes affect the Q-factor of the resonating portion of the pressure sensor. Such Q-factor changes are detected by the driving/sensing circuit which in turn tracks the changes in resonant frequency to maintain the pressure sensor at resonance. Changes in the Q-factor are reflected in changes of amplitude of the resonating pressure sensor. In response, upon sensing the changes in the amplitude, the driving circuit changes the force or strength of the electrostatic driving signal to maintain the resonator at constant amplitude. The amplitude of the driving signals become a direct measure of the changes in pressure as the operating characteristics of the resonator give rise to a linear response curve for the amplitude of the driving signal. Pressure change resolution is on the order of 10.sup.-6 torr over a range spanning from 7,600 torr to 10.sup.-6 torr. No temperature compensation for the pressure sensor of the present invention is foreseen. Power requirements for the pressure sensor are generally minimal due to the low-loss mechanical design of the resonating pressure sensor and the simple control electronics.
    • 压力传感器在宽范围的压力下具有高精度。 使用依赖于谐振振荡的压力传感器来确定压力,驱动电路在谐振下驱动这样的压力传感器,并随着压力的变化跟踪谐振频率和幅度偏移。 压力变化影响压力传感器谐振部分的Q因子。 这种Q因子变化由驱动/感测电路检测,驱动/感测电路又跟踪谐振频率的变化,以保持压力传感器共振。 Q因子的变化反映在谐振压力传感器的幅度变化中。 作为响应,在感测振幅的变化时,驱动电路改变静电驱动信号的力或强度,以使谐振器保持恒定的振幅。 当谐振器的工作特性产生驱动信号的幅度的线性响应曲线时,驱动信号的振幅变为对压力变化的直接测量。 在从7600托到10-6托的范围内,压力变化分辨率为10-6托的数量级。 本发明的压力传感器不需要温度补偿。 由于谐振压力传感器和简单的控制电子设备的低损耗机械设计,压力传感器的功率要求通常很小。