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    • 1. 发明授权
    • Ultra flat polishing
    • 超平面抛光
    • US5733182A
    • 1998-03-31
    • US354907
    • 1994-12-12
    • Tomoaki MuramatsuTakashi Yoshida
    • Tomoaki MuramatsuTakashi Yoshida
    • B24B37/04B24B37/30B24B41/06H01L21/304B24B5/00
    • B24B37/04B24B41/068
    • A polishing apparatus comprises a pressure container having a first opening at its bottom and being rotatable about an axis perpendicular to a plane of the first opening; a wafer support coupled elastically to the first opening, sealing the first opening hermetically and having a wafer supporting surface; and a lower surface plate disposed underneath the wafer supporting surface and having a polishing surface approximately parallel to the wafer supporting surface. The wafer support may be provided with flatness adjusting means for selectively applying a larger pressure on a region of the wafer held on the wafer supporting surface than a pressure on other region. The flatness adjusting means may comprise a plurality of pressing pins, or may comprise a hollow within the wafer support, a surface plate having elasticity and sealing the hollow, and means for applying pressure to the hollow. Wafer can be polished under uniform pressure applied on the back surface. Flatness of the wafer can be improved.
    • 抛光装置包括:压力容器,其底部具有第一开口,并可围绕垂直于第一开口平面的轴线旋转; 晶片支撑件,其弹性耦合到所述第一开口,密封所述第一开口并具有晶片支撑表面; 以及设置在晶片支撑表面下方并具有大致平行于晶片支撑表面的抛光表面的下表面板。 晶片支撑件可以设置有平坦度调节装置,用于在保持在晶片支撑表面上的晶片的区域上选择性地施加比在其它区域上的压力更大的压力。 平坦度调节装置可以包括多个按压销,或者可以包括晶片支撑件内的中空部分,具有弹性并密封中空部分的表面板以及向中空部分施加压力的装置。 晶圆可以在施加在背面的均匀压力下抛光。 可以提高晶片的平坦度。
    • 2. 发明授权
    • Vibration transducer and its manufacturing method
    • 振动传感器及其制造方法
    • US09063023B2
    • 2015-06-23
    • US13228855
    • 2011-09-09
    • Takashi Yoshida
    • Takashi Yoshida
    • G01L9/08G01H13/00G01L9/00G01L1/10B81B3/00
    • G01L9/0019B81B3/001B81B2201/025B81B2201/0264B81B2201/0285B81B2203/0118G01L1/106G01L9/0013H03H9/2457H03H2009/02496
    • A vibration transducer includes a silicon single crystal vibration beam provided over a silicon single crystal substrate, the vibration beam having a sectional shape that is longer in a direction perpendicular to a surface of the silicon single crystal substrate than in a direction parallel with it, a shell made of silicon, surrounding the vibration beam with a gap, and forming a vacuum room together with the silicon single crystal substrate, a plate-like first electrode plate disposed parallel with the surface of the silicon single crystal substrate, the first electrode plate having one end connected to the vibration beam, plate-like second and third electrode plates disposed parallel with the surface of the silicon single crystal substrate so as to be opposed to each other with the vibration beam interposed in between, and asperities formed on confronting side surfaces of the vibration beam and the second and third electrode plates.
    • 振动传感器包括设置在硅单晶衬底上的硅单晶振动束,所述振动束具有在垂直于所述硅单晶衬底的表面的方向上比在与其平行的方向上更长的截面形状, 由硅制成的壳体,围绕振动梁间隙,并与硅单晶基板一起形成真空室,与硅单晶基板的表面平行布置的板状第一电极板,第一电极板具有 一端与振动束相连接,板状的第二和第三电极板与硅单晶衬底的表面平行设置,以便彼此相对地插入振动束,并且形成在相对侧面上的凹凸 的振动束和第二和第三电极板。
    • 4. 发明授权
    • Disc changer with detachable optical disc storage magazine for storing multiple optical discs
    • 带有可拆卸光盘存储盒的光盘更换器,用于存储多个光盘
    • US08695024B2
    • 2014-04-08
    • US13034494
    • 2011-02-24
    • Takashi YoshidaOsamu KawamaeYuji Ishikawa
    • Takashi YoshidaOsamu KawamaeYuji Ishikawa
    • G11B17/22
    • G11B17/30G11B17/28
    • A magazine detachably installed in a main body of a disc changer is divided into sections by partitions for storing a large number of optical discs. The magazine is provided with a belt set around rollers, which carries the optical disc in contact with the belt. In the disc changer, the belt is rotated by a gear of the roller, which is engaged with an external drive gear for taking the optical disc through rotating movement. Among the optical discs which have been taken, a target optical disc opposite the slit of the disc control plate passes through the slit, and the other optical discs stop while abutting against the disc control plate. The optical disc which has passed through the slit is inserted into disc carriage rollers, and further carried to the drive for recording/reproducing.
    • 可拆卸地安装在盘片更换器的主体中的盒子通过用于存储大量光盘的分区被划分成多个部分。 该盒具有围绕辊子的带组,其带有光盘与带接触。 在换盘器中,皮带通过滚子的齿轮旋转,该齿轮与外部驱动齿轮接合,用于通过旋转运动来取得光盘。 在已经拍摄的光盘中,与盘片控制板的狭缝相对的目标光盘通过狭缝,另一个光盘在与盘控制板抵接的同时停止。 已经通过狭缝的光盘被插入到盘托架辊中,并进一步传送到驱动器进行记录/再现。
    • 8. 发明授权
    • X-ray image diagnostic system, image processing apparatus and image processing method
    • X射线图像诊断系统,图像处理装置和图像处理方法
    • US08452070B2
    • 2013-05-28
    • US13295244
    • 2011-11-14
    • Katsuyuki HagiwaraTakashi Yoshida
    • Katsuyuki HagiwaraTakashi Yoshida
    • G06K9/00G21C17/00
    • G06T11/005H04N19/172H04N19/176H04N19/70H04N19/89H04N19/895
    • The present invention is an image processing apparatus that reconstructs one frame of image data using block-level image data, including a unit that receives the block-level image data to which position information has been added, a unit that determines whether or not there was an error in the transmission of the received position information, a first storage area used for storing the block-level image data corresponding to the position information for which a transmission error did not occur, a second storage area used for storing the block-level image data corresponding to the position information for which a transmission error occurred, a unit that infers correct position information for the block-level image data stored in the second storage area based on the first storage area and the second storage area, and a unit that reconstructs the one frame of image data using the inferred position information.
    • 本发明是一种图像处理装置,其使用块级图像数据重构一帧图像数据,该图像数据包括接收已经添加了位置信息的块级图像数据的单元,确定是否存在 接收到的位置信息的发送错误,用于存储对应于未发生传输错误的位置信息的块级图像数据的第一存储区域,用于存储块级图像的第二存储区域 对应于发生错误发生的位置信息的数据,基于第一存储区域和第二存储区域推定存储在第二存储区域中的块级图像数据的正确位置信息的单元,以及重建单元 使用推断的位置信息的一帧图像数据。