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1. 发明授权

US5436452A Uncooled tunneling infrared sensor 失效
标题翻译：未冷却隧道红外传感器
公开(公告)号：US5436452A
公开(公告)日：1995-07-25
申请号：US79507
申请日：1993-06-21
申请人： Thomas W. Kenny , William J. Kaiser , Judith A. Podosek , Erika C. Vote , Richard E. Muller , Paul D. Maker
发明人： Thomas W. Kenny , William J. Kaiser , Judith A. Podosek , Erika C. Vote , Richard E. Muller , Paul D. Maker
IPC分类号： G01J1/42 , G01J5/00 , G01J5/42 , G01Q10/00 , G01Q30/10 , G01Q60/16 , G01Q70/14 , G01Q70/18 , H01J37/00
CPC分类号： G01J5/42 , B82Y35/00 , G01J2005/425
摘要： An uncooled infrared tunneling sensor in which the only moving part is a diaphragm which is deflected into contact with a micromachined silicon tip electrode prepared by a novel lithographic process. Similarly prepared deflection electrodes employ electrostatic force to control the deflection of a silicon nitride, flat diaphragm membrane. The diaphragm exhibits a high resonant frequency which reduces the sensor's sensitivity to vibration. A high bandwidth feedback circuit controls the tunneling current by adjusting the deflection voltage to maintain a constant deflection of the membrane. The resulting infrared sensor can be miniaturized to pixel dimensions smaller than 100 .mu.m. An alternative embodiment is implemented using a corrugated membrane to permit large deflection without complicated clamping and high deflection voltages. The alternative embodiment also employs a pinhole aperture in a membrane to accommodate environmental temperature variation and a sealed chamber to eliminate environmental contamination of the tunneling electrodes and undesireable accoustic coupling to the sensor.
摘要翻译：非制冷红外隧道传感器，其中唯一的移动部分是偏转成与通过新颖的光刻工艺制备的微机加工的硅尖端电极接触的膜片。类似地制备的偏转电极采用静电力来控制氮化硅，平膜片的偏转。振膜表现出高谐振频率，可降低传感器对振动的敏感度。高带宽反馈电路通过调节偏转电压来控制隧穿电流，以保持膜的恒定偏转。所得到的红外传感器可以小于100μm的像素尺寸。使用波纹膜实现替代实施例，以允许大的偏转而不需要复杂的钳位和高偏转电压。替代实施例还在膜中采用针孔以适应环境温度变化和密封室，以消除隧道电极的环境污染和对传感器的不合需要的声耦合。

2. 发明授权

US5393634A Continuous phase and amplitude holographic elements 失效
标题翻译：连续相位和幅度全息元件
公开(公告)号：US5393634A
公开(公告)日：1995-02-28
申请号：US71131
申请日：1993-05-27
申请人： Paul D. Maker , Richard E. Muller
发明人： Paul D. Maker , Richard E. Muller
IPC分类号： G03F7/00 , G03H1/02 , G03H1/04 , H01J37/22 , G03C5/00 , G03H5/00
CPC分类号： G03F7/001 , G03H1/08 , G03H1/0891 , G03H2001/0292 , G03H2001/0478 , G03H2001/2615 , G03H2224/04 , G03H2240/42 , G03H2240/43 , G03H2260/63 , H01J2237/3175 , Y10S430/143
摘要： A method for producing a phase hologram using e-beam lithography provides n-ary levels of phase and amplitude by first producing an amplitude hologram on a transparent substrate by e-beam exposure of a resist over a film of metal by exposing n.ltoreq.m.times.m spots of an array of spots for each pixel, where the spots are randomly selected in proportion to the amplitude assigned to each pixel, and then after developing and etching the metal film producing a phase hologram by e-beam lithography using a low contrast resist, such as PMMA, and n-ary levels of low doses less than approximately 200 .mu.C/cm.sup.2 and preferably in the range of 20-200 .mu.C/cm.sup.2, and aggressive development using pure acetone for an empirically determined time (about 6 sec.) controlled to within 1/10 sec. to produce partial development of each pixel in proportion to the n-ary level of dose assigned to it.
摘要翻译：使用电子束光刻产生相位全息图的方法通过首先通过在金属膜上曝光抗蚀剂而在透明衬底上产生振幅全息图，从而提供相位和幅度的n阶电平，每个像素的点阵列的m×m个点，其中斑点随分配给每个像素的幅度成比例地随机选择，然后在通过使用低对比度抗蚀剂的电子束光刻产生相位全息图的金属膜显影和蚀刻之后，例如PMMA，低剂量低于约200μC/ cm2，优选在20-200μC/ cm2范围内的n-ary水平，以及使用纯丙酮进行经验确定的时间（约6秒）。）控制在1/10秒内。以与分配给其的剂量的n-ary水平成比例地产生每个像素的部分发育。

3. 发明授权

US06522403B2 Computed tomography imaging spectrometer (CTIS) with 2D reflective grating for ultraviolet to long-wave infrared detection especially useful for surveying transient events 失效
公开(公告)号：US06522403B2
公开(公告)日：2003-02-18
申请号：US09734242
申请日：2000-12-04
申请人： Daniel W. Wilson , Paul D. Maker , Richard E. Muller , Pantazis Z. Mouroulis
发明人： Daniel W. Wilson , Paul D. Maker , Richard E. Muller , Pantazis Z. Mouroulis
IPC分类号： G01J318
CPC分类号： G01J3/02 , G01J3/0208 , G01J3/18 , G01J3/2823 , G02B5/1861
摘要： The optical system of this invention is an unique type of imaging spectrometer, i.e. an instrument that can determine the spectra of all points in a two-dimensional scene. The general type of imaging spectrometer under which this invention falls has been termed a computed-tomography imaging spectrometer (CTIS). CTIS's have the ability to perform spectral imaging of scenes containing rapidly moving objects or evolving features, hereafter referred to as transient scenes. This invention, a reflective CTIS with an unique two-dimensional reflective grating, can operate in any wavelength band from the ultraviolet through long-wave infrared. Although this spectrometer is especially useful for rapidly occurring events it is also useful for investigation of some slow moving phenomena as in the life sciences.

4. 发明授权

US06480333B1 Diffractive optical elements on non-flat substrates using electron beam lithography 有权
$Diffractive optical elements on non-flat substrates using electron beam lithography$
标题翻译：使用电子束光刻的非平坦基板上的衍射光学元件
公开(公告)号：US06480333B1
公开(公告)日：2002-11-12
申请号：US09196612
申请日：1998-11-18
申请人： Paul D. Maker , Richard E. Muller , Daniel W. Wilson
发明人： Paul D. Maker , Richard E. Muller , Daniel W. Wilson
IPC分类号： G02B518
CPC分类号： G02B5/1857
摘要： The present disclosure describes a technique for creating diffraction gratings on curved surfaces with electron beam lithography. The curved surface can act as an optical element to produce flat and aberration-free images in imaging spectrometers. In addition, the fabrication technique can modify the power structure of the grating orders so that there is more energy in the first order than for a typical grating. The inventors noticed that by using electron-beam lithography techniques, a variety of convex gratings that are well-suited to the requirements of imaging spectrometers can be manufactured.
摘要翻译：本公开描述了一种用电子束光刻在曲面上产生衍射光栅的技术。曲面可以作为光学元件在成像光谱仪中产生平坦且无像差的图像。此外，制造技术可以改变光栅级的功率结构，使得在一阶中存在比对于典型光栅更多的能量。发明人注意到，通过使用电子束光刻技术，可以制造出非常适合成像光谱仪要求的各种凸形光栅。

5. 发明授权

US4801805A Method of measuring multicomponent constituency of gas emission flow 失效
标题翻译：测量气体排放流量多组分选区的方法
公开(公告)号：US4801805A
公开(公告)日：1989-01-31
申请号：US87171
申请日：1987-08-19
申请人： James W. Butler , Paul D. Maker , Thomas J. Korniski , Alex D. Colvin
发明人： James W. Butler , Paul D. Maker , Thomas J. Korniski , Alex D. Colvin
IPC分类号： G01J3/45 , G01J3/28 , G01J3/453 , G01N1/28 , G01N1/38 , G01N21/35 , G01N33/00 , G01N21/37
CPC分类号： G01N33/0016 , G01J3/453 , G01N21/3504 , G01J2003/2866 , G01N1/38 , G01N2001/383 , G01N2001/388 , G01N2021/3595 , G01N2201/1215
摘要： A method is disclosed of making an on-line gas analysis of a multicomponent gas emission flow by (a) continuously sequestering a sample flow from the gas emission flow, which sample flow has been filtered to substantially eliminate solid or liquid particles, diluted to lower its dew point to below room temperature, and changed in either temperature and/or pressure to be substantially the same in temperature and pressure as that of gases used to create reference transmission frequency spectral data deployed in step (d); (b) continuously irradiating the sample flow with an electromagnetic radiation beam while modulating the amplitude of infrared frequencies in the audio frequency range of the beam, either prior to or immediately subsequent to irradiation of the sample flow, to produce electromagnetic signals having discernible amplitude variations resulting from spectral interference patterns; (c) detecting and collecting the signals at a sufficiently high rate to substantially completely distinguish between adjacent spectral pattern amplitude peaks without mutual spectral interference and to permit analysis of the signals in real time; and (d) analyzing the signals in real time by (i) mathematically manipulating the signals in accordance with Beer's Law to create reformed background-corrected data, and (ii) applying reference transmission frequency spectral data to the reformed data for each suspected gaseous component to give a linear quantitative measure of the presence of each and every suspected gas component in the gas emission flow.

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