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1. 发明授权

US5436452A Uncooled tunneling infrared sensor 失效
标题翻译：未冷却隧道红外传感器
公开(公告)号：US5436452A
公开(公告)日：1995-07-25
申请号：US79507
申请日：1993-06-21
申请人： Thomas W. Kenny , William J. Kaiser , Judith A. Podosek , Erika C. Vote , Richard E. Muller , Paul D. Maker
发明人： Thomas W. Kenny , William J. Kaiser , Judith A. Podosek , Erika C. Vote , Richard E. Muller , Paul D. Maker
IPC分类号： G01J1/42 , G01J5/00 , G01J5/42 , G01Q10/00 , G01Q30/10 , G01Q60/16 , G01Q70/14 , G01Q70/18 , H01J37/00
CPC分类号： G01J5/42 , B82Y35/00 , G01J2005/425
摘要： An uncooled infrared tunneling sensor in which the only moving part is a diaphragm which is deflected into contact with a micromachined silicon tip electrode prepared by a novel lithographic process. Similarly prepared deflection electrodes employ electrostatic force to control the deflection of a silicon nitride, flat diaphragm membrane. The diaphragm exhibits a high resonant frequency which reduces the sensor's sensitivity to vibration. A high bandwidth feedback circuit controls the tunneling current by adjusting the deflection voltage to maintain a constant deflection of the membrane. The resulting infrared sensor can be miniaturized to pixel dimensions smaller than 100 .mu.m. An alternative embodiment is implemented using a corrugated membrane to permit large deflection without complicated clamping and high deflection voltages. The alternative embodiment also employs a pinhole aperture in a membrane to accommodate environmental temperature variation and a sealed chamber to eliminate environmental contamination of the tunneling electrodes and undesireable accoustic coupling to the sensor.
摘要翻译：非制冷红外隧道传感器，其中唯一的移动部分是偏转成与通过新颖的光刻工艺制备的微机加工的硅尖端电极接触的膜片。类似地制备的偏转电极采用静电力来控制氮化硅，平膜片的偏转。振膜表现出高谐振频率，可降低传感器对振动的敏感度。高带宽反馈电路通过调节偏转电压来控制隧穿电流，以保持膜的恒定偏转。所得到的红外传感器可以小于100μm的像素尺寸。使用波纹膜实现替代实施例，以允许大的偏转而不需要复杂的钳位和高偏转电压。替代实施例还在膜中采用针孔以适应环境温度变化和密封室，以消除隧道电极的环境污染和对传感器的不合需要的声耦合。

2. 发明授权

US5298748A Uncooled tunneling infrared sensor 失效
标题翻译：未冷却隧道红外传感器
公开(公告)号：US5298748A
公开(公告)日：1994-03-29
申请号：US898682
申请日：1992-06-15
申请人： Thomas W. Kenny , William J. Kaiser , Judith A. Podosek , Erika C. Vote , Howard K. Rockstad , Joseph K. Reynolds
发明人： Thomas W. Kenny , William J. Kaiser , Judith A. Podosek , Erika C. Vote , Howard K. Rockstad , Joseph K. Reynolds
IPC分类号： G01J1/42 , G01J5/00 , G01J5/42 , G01Q10/00 , G01Q30/10 , G01Q60/16 , G01Q70/14 , G01Q70/18 , H01J37/00
CPC分类号： G01J5/42 , B82Y15/00 , G01J2005/425
摘要： An uncooled infrared tunneling sensor in which the only moving part is a diaphragm which is deflected into contact with a micromachined silicon tip electrode prepared by a novel lithographic process. Similarly prepared deflection electrodes employ electrostatic force to control the deflection of a silicon nitride, flat diaphragm membrane. The diaphragm exhibits a high resonant frequency which reduces the sensor's sensitivity to vibration. A high bandwidth feedback circuit controls the tunneling current by adjusting the deflection voltage to maintain a constant deflection of the membrane which would otherwise change deflection depending upon incident infrared radiation. The resulting infrared sensor will meet or exceed the performance of all other broadband, uncooled, infrared sensors and can be miniaturized to pixel dimensions smaller than 100 .mu.m. The technology is readily implemented as a small-format linear array suitable for commercial and spacecraft applications.
摘要翻译：非制冷红外隧道传感器，其中唯一的移动部分是偏转成与通过新颖的光刻工艺制备的微机加工的硅尖端电极接触的膜片。类似地制备的偏转电极采用静电力来控制氮化硅，平膜片的偏转。振膜表现出高谐振频率，可降低传感器对振动的敏感度。高带宽反馈电路通过调节偏转电压来控制隧道电流，以保持膜的恒定偏转，否则将根据入射的红外辐射而改变偏转。所产生的红外传感器将达到或超过所有其他宽带，非制冷红外传感器的性能，并且可以小于小于100（我）m的像素尺寸。该技术很容易实现为适用于商业和航天器应用的小格式线性阵列。

3. 发明授权

US5315247A Method and apparatus for measuring a magnetic field using a deflectable energized loop and a tunneling tip 失效
标题翻译：使用可偏转的通电回路和隧道末端来测量磁场的方法和装置
公开(公告)号：US5315247A
公开(公告)日：1994-05-24
申请号：US996613
申请日：1992-12-24
申请人： William J. Kaiser , Steven B. Waltman , Thomas W. Kenny
发明人： William J. Kaiser , Steven B. Waltman , Thomas W. Kenny
IPC分类号： G01P15/08 , G01P15/125 , G01P15/13 , G01Q60/12 , G01Q60/16 , G01R33/02
CPC分类号： G01P15/0894 , G01P15/125 , G01P15/131 , G01P15/132 , G01P15/133 , G01P2015/0828 , Y10S977/852 , Y10S977/865
摘要： Methods and apparatus for measuring gravitational and inertial forces, magnetic fields, or wave or radiant energy acting on an object or fluid in space provide an electric tunneling current through a gap between an electrode and that object or fluid in space and vary that gap with any selected one of such forces, magnetic fields, or wave or radiant energy acting on that object or fluid. These methods and apparatus sense a corresponding variation in an electric property of that gap and determine the latter force, magnetic fields, or wave or radiant energy in response to that corresponding variation, and thereby sense or measure such parameters as acceleration, position, particle mass, velocity, magnetic field strength, presence or direction, or wave or radiant energy intensity, presence or direction.
摘要翻译：用于测量作用在空间上的物体或流体的重力和惯性力，磁场或波或辐射能的方法和装置提供通过电极和空间中的物体或流体之间的间隙的电穿隧电流，并且与任何选择一个这样的力，磁场或作用在该物体或流体上的波或辐射能。这些方法和装置感测到该间隙的电性质的相应变化，并响应于相应的变化确定后者的力，磁场或波或辐射能，从而感测或测量诸如加速度，位置，粒子质量，速度，磁场强度，存在或方向，或波或辐射能量强度，存在或方向。

4. 发明授权

US5293781A Tunnel effect measuring systems and particle detectors 失效
公开(公告)号：US5293781A
公开(公告)日：1994-03-15
申请号：US996565
申请日：1992-12-24
申请人： William J. Kaiser , Steven B. Waltman , Thomas W. Kenny
发明人： William J. Kaiser , Steven B. Waltman , Thomas W. Kenny
IPC分类号： G01P15/08 , G01P15/125 , G01P15/13 , G01Q60/12 , G01Q60/16 , G01L1/04
CPC分类号： G01P15/131 , G01P15/0894 , G01P15/125 , G01P15/132 , G01P15/133 , G01P2015/0828 , Y10S977/852
摘要： Methods and apparatus for measuring gravitational and inertial forces, magnetic fields, or wave or radiant energy acting on an object or fluid in space provide an electric tunneling current through a gap between an electrode and that object or fluid in space and vary that gap with any selected one of such forces, magnetic fields, or wave or radiant energy acting on that object or fluid. These methods and apparatus sense a corresponding variation in an electric property of that gap and determine the latter force, magnetic fields, or wave or radiant energy in response to that corresponding variation, and thereby sense or measure such parameters as acceleration, position, particle mass, velocity, magnetic field strength, presence or direction, or wave or radiant energy intensity, presence or direction.

5. 发明授权

US5290102A Tunnel effect measuring systems and particle detectors 失效
标题翻译：隧道效应测量系统和粒子探测器
公开(公告)号：US5290102A
公开(公告)日：1994-03-01
申请号：US996682
申请日：1992-12-24
申请人： William J. Kaiser , Steven B. Waltman , Thomas W. Kenny
发明人： William J. Kaiser , Steven B. Waltman , Thomas W. Kenny
IPC分类号： G01P15/08 , G01P15/125 , G01P15/13 , G01Q60/12 , G01Q60/16 , G01K1/16 , G01L9/00
CPC分类号： G01P15/0894 , G01P15/125 , G01P15/131 , G01P15/132 , G01P15/133 , G01P2015/0828 , Y10S977/852
摘要： Methods and apparatus for measuring gravitational and inertial forces, magnetic fields, or wave or radiant energy acting on an object or fluid in space provide an electric tunneling current through a gap between an electrode and that object or fluid in space and vary that gap with any selected one of such forces, magnetic fields, or wave or radiant energy acting on that object or fluid. These methods and apparatus sense a corresponding variation in an electric property of that gap and determine the latter force, magnetic fields, or wave or radiant energy in response to that corresponding variation, and thereby sense or measure such parameters as acceleration, position, particle mass, velocity, magnetic field strength, presence or direction, or wave or radiant energy intensity, presence or direction.
摘要翻译：用于测量作用在空间上的物体或流体的重力和惯性力，磁场或波或辐射能的方法和装置提供通过电极和空间中的物体或流体之间的间隙的电穿隧电流，并且与任何选择一个这样的力，磁场或作用在该物体或流体上的波或辐射能。这些方法和装置感测到该间隙的电性质的相应变化，并响应于相应的变化确定后者的力，磁场或波或辐射能，从而感测或测量加速度，位置，粒子质量，速度，磁场强度，存在或方向，或波或辐射能量强度，存在或方向。

6. 发明授权

US5563344A Dual element electron tunneling accelerometer 失效
标题翻译：双元素电子隧道加速度计
公开(公告)号：US5563344A
公开(公告)日：1996-10-08
申请号：US493432
申请日：1995-06-22
申请人： William J. Kaiser , Thomas W. Kenny , Howard K. Rockstad , Joseph K. Reynolds , Thomas R. Van Zandt
发明人： William J. Kaiser , Thomas W. Kenny , Howard K. Rockstad , Joseph K. Reynolds , Thomas R. Van Zandt
IPC分类号： G01P15/08 , G01P15/13
CPC分类号： G01P15/131 , G01P15/0894
摘要： The use of a dual element approach provides high resolution position sensors based on electron tunneling. This approach allows miniaturization while utilizing the position sensitivity of electron tunneling to give high resolution. The dual-element tunneling structure overcomes the narrow bandwidth limitations of a single-element structure. A sensor with an operating range of 5 Hz to 10 kHz, which can have applications as an acoustic sensor, is disclosed. Noise is analyzed for fundamental thermal vibration of the suspended masses and is compared to electronic noise. It is shown that miniature tunnel accelerometers can achieve resolution such that thermal noise in the suspended masses is the dominant cause of the resolution limit. With a proof mass of order 100 mg, noise analysis predicts limiting resolutions approaching 10.sup.-9 g/.sqroot.Hz in a 300 Hz band and 10.sup.-8 g/.sqroot.Hz at 1 kHz.
摘要翻译：使用双元件方法提供了基于电子隧穿的高分辨率位置传感器。这种方法允许小型化，同时利用电子隧道的位置灵敏度来提供高分辨率。双元件隧道结构克服了单元件结构的窄带宽限制。公开了具有5Hz至10kHz的操作范围的传感器，其可以用作声学传感器。分析噪声对悬浮质量的基本热振动，并与电子噪声进行比较。显示微型隧道加速度计可以实现分辨率，使得悬浮质量中的热噪声是分辨率极限的主要原因。使用100毫克级的检测质量，噪声分析预测在300 Hz频带内接近10-9 g / 2ROOT + E，rad Hz + EE的限制分辨率和1 kHz时的10-8 g / 2ROOT + E，rad Hz + EE 。

7. 发明授权

US5265470A Tunnel effect measuring systems and particle detectors 失效
标题翻译：隧道效应测量系统和粒子探测器
公开(公告)号：US5265470A
公开(公告)日：1993-11-30
申请号：US685553
申请日：1991-04-15
申请人： William J. Kaiser , Steven B. Waltman , Thomas W. Kenny
发明人： William J. Kaiser , Steven B. Waltman , Thomas W. Kenny
IPC分类号： G01P15/08 , G01P15/125 , G01P15/13 , G01Q60/12 , G01Q60/16 , G01C21/00 , G01L1/04
CPC分类号： G01P15/0894 , G01P15/125 , G01P15/131 , G01P15/132 , G01P15/133 , G01P2015/0828 , Y10S977/852
摘要： Methods and apparatus for measuring gravitational and inertial forces, magnetic fields, or wave or radiant energy acting on an object or fluid in space provide an electric tunneling current through a gap between an electrode and that object or fluid in space and vary that gap with any selected one of such forces, magnetic fields, or wave or radiant energy acting on that object or fluid. These methods and apparatus sense a corresponding variation in an electric property of that gap and determine the latter force, magnetic fields, or wave or radiant energy in response to that corresponding variation, and thereby sense or measure such parameters as acceleration, position, particle mass, velocity, magnetic field strength, presence or direction, or wave or radiant energy intensity, presence or direction.
摘要翻译：用于测量作用在空间上的物体或流体的重力和惯性力，磁场或波或辐射能的方法和装置提供通过电极和空间中的物体或流体之间的间隙的电穿隧电流，并且与任何选择一个这样的力，磁场或作用在该物体或流体上的波浪或辐射能。这些方法和装置感测到该间隙的电性质的相应变化，并响应于相应的变化确定后者的力，磁场或波或辐射能，从而感测或测量诸如加速度，位置，粒子质量，速度，磁场强度，存在或方向，或波或辐射能量强度，存在或方向。

8. 发明授权

US5449909A Tunnel effect wave energy detection 失效
标题翻译：隧道效应波能量检测
公开(公告)号：US5449909A
公开(公告)日：1995-09-12
申请号：US140854
申请日：1993-10-25
申请人： William J. Kaiser , Steven B. Waltman , Thomas W. Kenny
发明人： William J. Kaiser , Steven B. Waltman , Thomas W. Kenny
IPC分类号： G01P15/08 , G01P15/125 , G01P15/13 , G01Q60/12 , G01Q60/16 , G01L1/04
CPC分类号： G01P15/131 , G01P15/0894 , G01P15/125 , G01P15/132 , G01P15/133 , G01P2015/0828 , Y10S977/852
摘要： Methods and apparatus for measuring gravitational and inertial forces, magnetic fields, or wave or radiant energy acting on an object or fluid in space provide an electric tunneling current through a gap between an electrode and that object or fluid in space and vary that gap with any selected one of such forces, magnetic fields, or wave or radiant energy acting on that object or fluid. These methods and apparatus sense a corresponding variation in an electric property of that gap and determine the latter force, magnetic fields, or wave or radiant energy in response to that corresponding variation, and thereby sense or measure such parameters as acceleration, position, particle mass, velocity, magnetic field strength, presence or direction, or wave or radiant energy intensity, presence or direction.
摘要翻译：用于测量作用在空间上的物体或流体的重力和惯性力，磁场或波或辐射能的方法和装置提供通过电极和空间中的物体或流体之间的间隙的电穿隧电流，并且与任何选择一个这样的力，磁场或作用在该物体或流体上的波浪或辐射能。这些方法和装置感测到该间隙的电性质的相应变化，并响应于相应的变化确定后者的力，磁场或波或辐射能，从而感测或测量诸如加速度，位置，粒子质量，速度，磁场强度，存在或方向，或波或辐射能量强度，存在或方向。

9. 发明授权

US5364185A High performance miniature hygrometer and method thereof 失效
标题翻译：高性能微型湿度计及其方法
公开(公告)号：US5364185A
公开(公告)日：1994-11-15
申请号：US046760
申请日：1993-04-16
申请人： Thomas R. VanZandt , William J. Kaiser , Thomas W. Kenny , David Crisp
发明人： Thomas R. VanZandt , William J. Kaiser , Thomas W. Kenny , David Crisp
IPC分类号： G01N25/68 , G01N25/02
CPC分类号： G01N25/68
摘要： An uncoated interdigitated transducer is cooled from a temperature above the dew point to a temperature below the dew point, while a parameter of a signal of the transducer is measured. The reduction in temperature causes a monotonic change in transducer signal because that signal is sensitive primarily to the water loading of the transducer surface as water forms on that surface due to the reduction in temperature. As the dew point is approached with temperature reduction, the slope of the curve of transducer signal with respect to temperature, remains relatively constant. However, as the dew point is reached the slope of that curve increases and because of changes in the structure of the water layer on the surface of the transducer, at the dew point the transducer responds with a clear shift in the rate at which the transducer signal changes. The temperature at which the second derivative of signal vs. temperature peaks can be readily used to identify with extreme accuracy, the precise dew point. The measurement technique employed by the present invention is relatively immune to surface contamination which remains significantly unchanged during the brief measurement period.
摘要翻译：将未涂覆的叉指传感器从露点以上的温度冷却到低于露点的温度，同时测量换能器的信号的参数。温度的降低导致换能器信号的单调变化，因为由于温度的降低，该信号主要受到换能器表面的水负荷敏感，因为水在该表面上形成。随着温度降低接近露点，传感器信号相对于温度的曲线的斜率保持相对恒定。然而，当达到露点时，该曲线的斜率增加，并且由于换能器表面上的水层的结构的变化，在露点，换能器响应于传感器的速率的明显偏移信号变化。信号对温度峰值的二阶导数的温度可以很容易地用于以极高的精确度，精确的露点来识别。本发明采用的测量技术相对于在短期测量期间保持显着不变的表面污染相对免疫。

10. 发明授权

US5211051A Methods and apparatus for improving sensor performance 失效
标题翻译：提高传感器性能的方法和设备
公开(公告)号：US5211051A
公开(公告)日：1993-05-18
申请号：US735628
申请日：1991-07-25
申请人： William J. Kaiser , Thomas W. Kenny , Joseph K. Reynolds , Thomas R. Van Zandt , Steven B. Waltman
发明人： William J. Kaiser , Thomas W. Kenny , Joseph K. Reynolds , Thomas R. Van Zandt , Steven B. Waltman
IPC分类号： G01P15/08 , G01P15/125 , G01P15/13
CPC分类号： G01P15/0894 , G01P15/125 , G01P15/131 , G01P15/132 , G01P15/133
摘要： Methods and apparatus for improving performance of a sensor having a sensor proof mass elastically suspended at an initial equilibrium position by a suspension force, provide a tunable force opposing that suspension force and preset the proof mass with that tunable force to a second equilibrium position less stable than the initial equilibrium position. The sensor is then operated from that preset second equilibrium position of the proof mass short of instability. The spring constant of the elastic suspension may be continually monitored, and such continually monitored spring constant may be continually adjusted to maintain the sensor at a substantially constant sensitivity during its operation.
摘要翻译：具有通过悬挂力弹性悬挂在初始平衡位置的具有传感器检测质量的传感器的性能的方法和装置提供与该悬挂力相反的可调力并将该可调力预设到不稳定的第二平衡位置比初始平衡位置。然后，传感器从不稳定性的证明物质的预设第二平衡位置进行操作。可以连续地监测弹性悬架的弹簧常数，并且可以连续地调节这种持续监控的弹簧常数，以在传动器的操作过程中将传感器保持在基本上恒定的灵敏度。

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