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1. 发明授权

US07209339B2 Electrostatic chuck for an electrically insulative substrate, and a method of using same 有权
标题翻译：一种用于电绝缘衬底的静电吸盘及其使用方法
公开(公告)号：US07209339B2
公开(公告)日：2007-04-24
申请号：US10857068
申请日：2004-05-28
申请人： Tetsuo Kitabayashi , Hiroaki Hori , Takeshi Uchimura , Noriaki Tateno , Koh Fuwa , Ken Maehara
发明人： Tetsuo Kitabayashi , Hiroaki Hori , Takeshi Uchimura , Noriaki Tateno , Koh Fuwa , Ken Maehara
IPC分类号： H01H1/00
CPC分类号： B23Q3/15 , B23Q3/154 , H01L21/6833 , H02N13/00
摘要： An electrostatic chuck for attracting an insulative substrate to be processed, the electrostatic chuck comprising a dielectric layer having a first surface which attracts an insulative substrate, and a second surface on which are provided a plurality of electrodes, and an insulative support base plate fixing said dielectric layer. A distance between adjacent ones of the electrodes and the thickness of the dielectric layer are adjusted such that when a potential difference is established between the electrodes, a non-uniform electric field is formed in which the insulative substrate is partially polarized and attracted to the first surface by gradient force.
摘要翻译：一种用于吸引待处理的绝缘基板的静电卡盘，所述静电卡盘包括具有吸引绝缘基板的第一表面的电介质层和设置有多个电极的第二表面，以及固定所述绝缘基板的绝缘支撑基板，电介质层。调整相邻的电极之间的距离和电介质层的厚度，使得当在电极之间建立电位差时，形成不均匀的电场，其中绝缘衬底被部分偏振并吸引到第一由梯度力表示。

2. 发明授权

US06768627B1 Electrostatic chuck and processing apparatus for insulative substrate 有权
标题翻译：用于绝缘衬底的静电吸盘和加工设备
公开(公告)号：US06768627B1
公开(公告)日：2004-07-27
申请号：US09979627
申请日：2002-02-11
申请人： Tetsuo Kitabayashi , Hiroaki Hori , Takeshi Uchimura , Noriaki Tateno , Koh Fuwa , Ken Maehira
发明人： Tetsuo Kitabayashi , Hiroaki Hori , Takeshi Uchimura , Noriaki Tateno , Koh Fuwa , Ken Maehira
IPC分类号： H01T2300
CPC分类号： B23Q3/15 , B23Q3/154 , H01L21/6833 , H02N13/00
摘要： According to the present invention, there is provided an electrostatic chuck for electrostatically attracting an insulative substrate, an apparatus for heating/cooling an insulative substrate using the electrostatic chuck, and a method for controlling the temperature of an insulative substrate. The shape and the properties of the dielectric, and the shape of the electrodes, which form the electrostatic chuck, are disclosed. Also the apparatus for heating/cooling an insulative substrate comprising a plate, a gas supply conduit and a temperature controlling system, and the apparatus for processing an insulative substrate in which the apparatus for heating/cooling an insulative substrate is installed are disclosed.
摘要翻译：一种用于吸引在真空气氛下使用的绝缘衬底的静电吸盘包括：具有吸引绝缘衬底的第一表面的介电层和在其上设有多个电极的第二表面; 绝缘支撑基板，其上固定所述电介质层; 设置在所述绝缘支撑基板上的多个导电端子; 以及电极和导电端子之间的电连接。

3. 发明申请

US20130026720A1 ELECTROSTATIC CHUCK 审中-公开
标题翻译：静电卡
公开(公告)号：US20130026720A1
公开(公告)日：2013-01-31
申请号：US13635757
申请日：2011-03-23
申请人： Hiroaki Hori , Shunpei Kondo , Yuki Anai , Ikuo Itakura , Takeshi Uchimura , Kazuki Anada
发明人： Hiroaki Hori , Shunpei Kondo , Yuki Anai , Ikuo Itakura , Takeshi Uchimura , Kazuki Anada
IPC分类号： H01L21/683
CPC分类号： H01L21/6833 , Y10T279/23
摘要： An electrostatic chuck comprises: a ceramic plate provided with recesses on a major surface and provided with an electrode in an inner part of the ceramic plate; a temperature regulating plate bonded to the major surface of the ceramic plate; a first bonding agent provided between the ceramic plate and the temperature regulating plate; and a heater provided in the each of the recesses of the ceramic plate. The first bonding agent has a first major agent including an organic material, a first amorphous filler including an inorganic material, and a first spherical filler including an inorganic material. The first amorphous filler and the first spherical filler are dispersion-compounded into the first major agent. The first major agent, the first amorphous filler, and the first spherical filler are made of an electrically insulating material. An average diameter of the first spherical filler is greater than a maximum value of a minor axis of the first amorphous filler. A thickness of the first bonding agent is greater than or equal to the average diameter of the first spherical filler. A width of the each of the recesses is greater than a width of the heater, and a depth of the each of the recesses is greater than a thickness of the heater. The heater is adhered within the each of the recesses by a second bonding agent. A first distance between a major surface of the heater on the side of the temperature regulating plate and a major surface of the temperature regulating plate is greater than a second distance between the major surface between the recesses of the ceramic plate and the major surface of the temperature regulating plate.
摘要翻译：静电卡盘包括：陶瓷板，其在主表面上设置有凹部，并在陶瓷板的内部设置有电极; 温度调节板结合到陶瓷板的主表面; 设置在陶瓷板和温度调节板之间的第一粘合剂; 以及设置在陶瓷板的每个凹部中的加热器。第一粘结剂具有包括有机材料的第一主剂，包含无机材料的第一无定形填料和包含无机材料的第一球形填料。将第一无定形填料和第一球形填料分散混合到第一主剂中。第一主剂，第一无定形填料和第一球形填料由电绝缘材料制成。第一球形填料的平均直径大于第一无定形填料的短轴的最大值。第一粘合剂的厚度大于或等于第一球形填料的平均直径。每个凹部的宽度大于加热器的宽度，并且每个凹部的深度大于加热器的厚度。加热器通过第二粘合剂粘附在每个凹部内。加热器在温度调节板一侧的主表面和温度调节板的主表面之间的第一距离大于陶瓷板的凹部与主表面之间的主表面之间的第二距离调温板。

4. 发明授权

US5235245A Metallic frame including leads incorporating a deformable part for use in a fluorescent display panel 失效
标题翻译：金属框架包括引入用于荧光显示面板的可变形部分的引线
公开(公告)号：US5235245A
公开(公告)日：1993-08-10
申请号：US779814
申请日：1991-10-21
申请人： Takeshi Uchimura , Masaharu Satonaka
发明人： Takeshi Uchimura , Masaharu Satonaka
IPC分类号： H01J9/24 , H01J17/49 , H01J29/96 , H01J31/15
CPC分类号： H01J17/491 , Y10T29/49121
摘要： A metallic frame for use in a fluorescent display panel having a CIG (chip in glass) structure and containing a driver IC chip in a vacuum chamber. The metallic frame includes a box-type metallic shield covering the IC chip, metallic external leads, and a deformable part coupled between the box-type metallic shield and the metallic external leads. The deformable part deforms more easily than the metallic shield and the leads upon receiving a tensile force. The deformable part is preferably formed at a bent section of the metallic shield or near a shield side end of the metallic external leads. The deformable part preferably consists of two bent or curved elements which are positioned to form a circle, ellipse, or polygon.
摘要翻译：一种金属框架，用于具有CIG（玻璃片）结构的荧光显示面板，并在真空室中包含驱动IC芯片。金属框架包括覆盖IC芯片的盒型金属屏蔽，金属外部引线和耦合在盒式金属屏蔽和金属外部引线之间的可变形部分。可变形部分在受到拉力时比金属屏蔽和引线更容易变形。可变形部分优选地形成在金属屏蔽件的弯曲部分或金属外部引线的屏蔽侧端附近。可变形部分优选地由两个弯曲或弯曲元件组成，其被定位成形成圆形，椭圆形或多边形。

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