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1. 发明申请

US20150116062A1 MAGNET, ATTACHING DEVICE, ATTACHING ARRANGEMENT AND METHOD FOR ATTACHING TO AN OBJECT 审中-公开
标题翻译：磁铁，连接装置，连接装置和连接对象的方法
公开(公告)号：US20150116062A1
公开(公告)日：2015-04-30
申请号：US14117522
申请日：2012-05-25
申请人： Reijo Natti , Janne Pulkkinen
发明人： Reijo Natti , Janne Pulkkinen
IPC分类号： H01F7/06 , H01F7/02
CPC分类号： B23Q3/1546 , B23Q3/154 , B23Q3/1543 , H01F7/0226 , H01F7/0273 , H01F7/064 , H01F7/206 , H01F2007/208 , Y10T29/49998
摘要： The invention relates to a magnet, which comprises a first permanent magnet for creating a magnetic field, and a shell and a centre, which are arranged to guide a magnetic flux to an object to be gripped. The magnet further comprises a slide, which is arranged to be movable in relation to the shell and the centre, which slide comprises said first permanent magnet, and an electric magnet for moving the slide. The invention also relates to an attaching device, and attaching arrangement and a method for attaching to an object.
摘要翻译：本发明涉及一种磁体，其包括用于产生磁场的第一永久磁体，以及壳体和中心，其被布置成将磁通量引导到待夹持的物体。磁体还包括滑动件，其被布置成相对于壳体和中心可移动，该滑动件包括所述第一永久磁体和用于移动滑块的电磁体。本发明还涉及一种附接装置，以及附接装置和一种用于附接到物体的方法。

2. 发明申请

US20130055551A1 ATTACHING DEVICE, ATTACHING ARRANGEMENT AND METHOD FOR ATTACHING AN OBJECT TO BE WORKED TO A WORKING BASE 有权
标题翻译：连接装置，连接装置和将对象连接到工作基础的方法
公开(公告)号：US20130055551A1
公开(公告)日：2013-03-07
申请号：US13698557
申请日：2011-05-25
申请人： Reijo Nätti , Janne Pulkkinen
发明人： Reijo Nätti , Janne Pulkkinen
IPC分类号： B23Q3/15 , H01F7/02 , H01F5/00
CPC分类号： B23Q3/1546 , B23Q3/154 , B23Q3/1543 , H01F7/0226 , H01F7/0273 , H01F7/064 , H01F7/206 , H01F2007/208 , Y10T29/49998
摘要： The invention relates to an attaching device, an arrangement and a method for attaching an object to be worked to a working base. The attaching device comprises: a first holder in the first end of the attaching device for attaching the attaching device to the working base or to another attaching device or to the object to be worked; a second holder in the second end of the attaching device for attaching the attaching device to the working base or to another attaching device or to the object to be worked; and a controller for controlling the holding forces produced by the first and second holders.
摘要翻译：本发明涉及一种用于将待加工物体附接到工作基座的附接装置，装置和方法。所述安装装置包括：所述安装装置的第一端的第一保持件，用于将所述安装装置附接到所述工作基座或附接装置或与所述加工对象物接合; 在附接装置的第二端的第二保持器，用于将附接装置附接到工作基座或另一附接装置或与待加工物体相连接; 以及用于控制由第一和第二保持器产生的保持力的控制器。

3. 发明申请

US20120013426A1 FAST ANCHORING MAGNETIC HOLDER INCLUDING MULTIPLE ATTRACTIVE SURFACES 失效
标题翻译：快速安装磁力支架，包括多个吸引表面
公开(公告)号：US20120013426A1
公开(公告)日：2012-01-19
申请号：US12839180
申请日：2010-07-19
申请人： Wen-Hsuan CHIANG
发明人： Wen-Hsuan CHIANG
IPC分类号： H01F7/04
CPC分类号： H01F7/04 , B23Q3/154
摘要： A fast anchoring magnetic holder including multiple attractive surfaces comprises a first magnet, a second magnet, a first insertion rod and a second insertion rod. The first magnet has a magnetic workstation surface. The second magnet has a magnetic anchor surface. The first and second magnets are stacked together. The first insertion rod and second insertion rod are respectively inserted into the first magnet and second magnet, and are turned to change distribution of the magnetic field of the first magnet and second magnet to alter the magnetic workstation surface and magnetic anchor surface from a non-magnetic state to a magnetic state to attract a working piece to a workstation.
摘要翻译：包括多个吸引表面的快速固定磁性保持器包括第一磁体，第二磁体，第一插入杆和第二插入杆。第一个磁体具有磁性工作站表面。第二磁体具有磁性锚固表面。第一和第二磁体堆叠在一起。第一插入杆和第二插入杆分别插入到第一磁体和第二磁体中，并且转动以改变第一磁体和第二磁体的磁场分布，以改变磁性工作站表面和磁性锚固表面的非磁性，磁状态到磁状态以将工件吸引到工作站。

4. 发明申请

US20100052832A1 PERMANENT ELECTROMAGNETIC INDEXING APPARATUS 审中-公开
标题翻译：永久电磁指示装置
公开(公告)号：US20100052832A1
公开(公告)日：2010-03-04
申请号：US12257135
申请日：2008-10-23
申请人： Richard Wang
发明人： Richard Wang
IPC分类号： B23B31/28
CPC分类号： B23Q3/152 , B23Q3/154
摘要： A permanent electromagnetic indexing apparatus includes a chassis, a carrier pivoted to the chassis, and a plurality of magnetic sets. Each of the magnetic sets includes a first permanent magnet, a magnetic-conductive member, a second permanent magnet, and a magnetizing coil. Each of the first permanent magnets is mounted to the magnetic-conductive member. Each of the magnetic-conductive members is mounted onto the second permanent magnet. Each of the magnetizing coils surrounds the second permanent magnet. The magnetic sets are mounted to the carrier to enable the magnetic-conductive members to become a working surface for placing a workpiece thereon. When each of the magnetizing coils is electrically conducted, the polarity of each of the magnetic-conductive members can be changed and then the workpiece can be fixed to or removed from the working surface. In this way, the workability can be enhanced to enable preferably flexible and variable processing.
摘要翻译：永久电磁分度装置包括底架，枢转到底盘的托架和多个磁性组件。每个磁性组包括第一永磁体，导磁部件，第二永磁体和磁化线圈。每个第一永磁体被安装到导磁部件上。每个导磁部件安装在第二永久磁铁上。每个磁化线圈包围第二永磁体。磁性体安装到载体上，使得导电构件能够成为将工件放置在其上的工作表面。当每个磁化线圈被导电时，可以改变每个导磁部件的极性，然后将工件固定到工作表面或从工作表面移除。以这种方式，可以提高可加工性，以实现优选的灵活和可变的加工。

5. 发明申请

US20060111028A1 Parallel surfae jig 审中-公开
标题翻译：平行冲浪夹具
公开(公告)号：US20060111028A1
公开(公告)日：2006-05-25
申请号：US10993718
申请日：2004-11-22
申请人： Andrew Novak
发明人： Andrew Novak
IPC分类号： B24B19/00 , B24B1/00
CPC分类号： B23Q3/154 , B24B3/00 , B25B11/002
摘要： A device for orienting a work surface of a workpiece. The device has a holding means having a receiving surface generally parallel to a plane of reference. The device also has a pulling means for orienting the work surface of the workpiece to the receiving surface of the holding means.
摘要翻译：一种用于定向工件的工作表面的装置。该装置具有保持装置，其具有大致平行于参考平面的接收表面。该装置还具有用于将工件的工作表面定向到保持装置的接收表面的拉动装置。

6. 发明申请

US20050045106A1 Electrostatic chuck having a low level of particle generation and method of fabricating same 审中-公开
标题翻译：具有低水平颗粒产生的静电卡盘及其制造方法
公开(公告)号：US20050045106A1
公开(公告)日：2005-03-03
申请号：US10955422
申请日：2004-09-30
申请人： Wendell Boyd , Jose-Antonio Marin , Ho Fang
发明人： Wendell Boyd , Jose-Antonio Marin , Ho Fang
IPC分类号： B23B5/22 , B23Q3/154 , C23C14/50 , H01L21/683 , C23C16/00
CPC分类号： H01L21/6831 , B23Q3/154 , C23C14/50 , Y10T279/23
摘要： An electrostatic chuck having either a conformal or non-conformal upon a surface for supporting a substrate. The coating reduces a of particles generated by the electrostatic chuck.
摘要翻译：一种静电卡盘，其具有在用于支撑基底的表面上的共形或不共形。涂层减少由静电卡盘产生的颗粒。

7. 发明授权

US06771483B2 Electrostatic chuck member and method of producing the same 有权
标题翻译：静电卡盘部件及其制造方法
公开(公告)号：US06771483B2
公开(公告)日：2004-08-03
申请号：US10169755
申请日：2002-07-19
申请人： Yoshio Harada , Junichi Takeuchi , Kenichiro Togoe
发明人： Yoshio Harada , Junichi Takeuchi , Kenichiro Togoe
IPC分类号： H02N1300
CPC分类号： B23Q3/154 , H01L21/6833
摘要： It is to provide an electrostatic chuck member having a strong adsorption force and an excellent responsibility (release property) in the stop of voltage application and is an electrostatic chuck member comprising a substrate, an undercoat of a metallic layer formed on at least one surface thereof, a lower insulating layer of Al2O3 ceramic formed on the undercoat, a metallic electrode layer formed on the lower insulating layer and an upper insulating layer of Al2O3 ceramic formed on the electrode layer as a topcoat.
摘要翻译：本发明提供一种静电卡盘部件，其具有强的吸附力和在施加电压停止时的优异的责任（释放特性），并且是静电卡盘部件，其包括基板，在其至少一个表面上形成的金属层的底涂层形成在底涂层上的Al 2 O 3陶瓷的下绝缘层，形成在下绝缘层上的金属电极层和形成在作为顶涂层的电极层上的Al 2 O 3陶瓷的上绝缘层。

8. 发明申请

US20040124595A1 Electrostatic chuck and production method therefor 失效
标题翻译：静电吸盘及其制作方法
公开(公告)号：US20040124595A1
公开(公告)日：2004-07-01
申请号：US10737816
申请日：2003-12-18
申请人： NHK SPRING CO., LTD.
发明人： Shinya Miyaji , Shinji Saito
IPC分类号： B23B031/28
CPC分类号： B23Q3/154 , Y10T279/23
摘要： The present invention relates to an electrostatic chuck in which unification of a dielectric layer and a heating and cooling flange is omitted, whereby production cost can be decreased, resulting in having adequate corrosion resistance especially for high temperature processes for semiconductor. The electrostatic chuck comprises a stage and a dielectric layer formed on an upper surface of the stage by thermal spraying, and the dielectric layer is made of magnesium oxide.
摘要翻译：本发明涉及一种静电卡盘，其中省略了电介质层和加热和冷却法兰的统一，从而可以降低生产成本，从而具有足够的耐腐蚀性，特别是对于半导体的高温工艺。静电卡盘包括通过热喷涂形成在台的上表面上的载物台和电介质层，并且电介质层由氧化镁制成。

9. 发明授权

US06687113B2 Electrostatic chuck 失效
标题翻译：静电吸盘
公开(公告)号：US06687113B2
公开(公告)日：2004-02-03
申请号：US09840691
申请日：2001-04-20
申请人： Shinji Saito , Toshihiko Hanamachi , Takashi Kayamoto
发明人： Shinji Saito , Toshihiko Hanamachi , Takashi Kayamoto
IPC分类号： B23B3128
CPC分类号： B23Q3/154 , H01L21/6831 , H01L21/6833 , H02N13/00 , Y10T279/23
摘要： An electrostatic chuck comprising a ceramic chuck body having an adsorption face and an electrode for applying a potential to the adsorption face, the chuck body including a ceramic consisting mainly of MgO. The ceramic that consists mainly of MgO is doped with one or more additives selected from a group including TiC, TiO2, ZrO2, V2O5, Nb2O5, Ta2O5, Co3O4, Cr2O3, and NiO so that its electrical resistivity in a working temperature region ranges from 1×108 to 1×1012 &OHgr;·cm. This electrostatic chuck is highly resistant to a corrosive environment such as fluoride plasma.
摘要翻译：一种静电吸盘，包括具有吸附面的陶瓷卡盘体和用于向吸附面施加电位的电极，卡盘主体包括主要由MgO组成的陶瓷。主要由MgO组成的陶瓷掺杂有选自TiC，TiO2，ZrO2，V2O5，Nb2O5，Ta2O5，Co3O4，Cr2O3和NiO的一种或多种添加剂，使得其在工作温度范围内的电阻率范围为1×10 8至1×10 12Ω·cm。这种静电卡盘对诸如氟化物等离子体的腐蚀性环境具有很高的抵抗力。

10. 发明申请

US20030090070A1 Chucking apparatus and production method for the same 有权
标题翻译：夹头装置及其制作方法相同
公开(公告)号：US20030090070A1
公开(公告)日：2003-05-15
申请号：US10235585
申请日：2002-09-05
申请人： Sumitomo Osaka Cement Co., Ltd.
发明人： Kazunori Endou , Hiroshi Inazumachi
IPC分类号： B23B031/28
CPC分类号： B23Q3/154 , Y10T279/23
摘要： One object of the present invention is to provide a chucking apparatus and its production method that is capable of carrying out holding, alignment, transport and so forth without causing problems such as the generation of particles. In order to achieve this object, the present invention provides a chucking apparatus provided with a base in which protrusions or grooves are formed on one of its faces to form an irregular surface, and the apical surfaces of protrusions of the irregular surface serve as a chucking surface for chucking and holding a plate-shaped sample, wherein the apical and lateral surfaces of the above protrusions, and the bottom surfaces of the above indentations, are all polished.
摘要翻译：本发明的一个目的是提供一种能够进行保持，对准，运输等的夹持装置及其制造方法，而不会产生诸如颗粒的产生的问题。为了达到上述目的，本发明提供了一种夹持装置，其具有在其一个面上形成突起或槽的基部，形成不规则的表面，并且不规则表面的突起的顶端面用作夹紧用于夹紧和保持板状样品的表面，其中上述突起的顶部和侧表面以及上述凹陷的底表面都被抛光。

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