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    • 1. 发明授权
    • Substrate processing apparatus and method of manufacturing semiconductor device
    • 基板处理装置及半导体装置的制造方法
    • US09028191B2
    • 2015-05-12
    • US13163165
    • 2011-06-17
    • Takeshi YasuiYukitomo HirochiSatoshi TakanoRitsuo HoriiMakoto Kawabata
    • Takeshi YasuiYukitomo HirochiSatoshi TakanoRitsuo HoriiMakoto Kawabata
    • H01L21/67H01J37/32
    • H01L21/67196H01J37/32743H01J37/32788H01J37/32889H01J37/32899H01L21/67201
    • Reduction in cooling rate of a substrate having a lower temperature is suppressed because the substrate having a lower temperature is not affected by radiant heat of a substrate having a higher temperature while cooling a plurality of substrates in a cooling chamber. The substrate processing apparatus includes a load lock chamber configured to accommodate stacked substrates; a first transfer mechanism having a first transfer arm provided with a first end effector, and configured to transfer the substrates into/from the load lock chamber at a first side of the load lock chamber; a second transfer mechanism having a second transfer arm provided with a second end effector, and configured to transfer the substrates into/from the load lock chamber at a second side of the load lock chamber; a barrier installed between the substrates to be spaced apart from the substrates supported by a substrate support provided in the load lock chamber; and an auxiliary barrier unit installed between the substrate support and the barrier, wherein the auxiliary barrier unit is installed at places other than standby spaces of the end effectors.
    • 由于具有较低温度的基板在冷却室中冷却多个基板的同时不受具有较高温度的基板的辐射热的影响,因此抑制了具有较低温度的基板的冷却速率的降低。 基板处理装置包括:负载锁定室,被配置为容纳堆叠的基板; 第一传送机构,其具有设置有第一端部执行器的第一传送臂,并且被配置为在所述负载锁定室的第一侧将所述基板传送到所述负载锁定室中或从所述负载锁定室传送; 第二传送机构,具有设置有第二端部执行器的第二传送臂,并且被配置为在所述负载锁定室的第二侧将所述基板传送到所述负载锁定室中或从所述负载锁定室传送; 安装在基板之间的屏障,其与由设置在负载锁定室中的基板支撑件支撑的基板间隔开; 以及安装在所述基板支撑件和所述屏障之间的辅助屏障单元,其中所述辅助屏障单元安装在所述末端执行器的备用空间以外的位置。
    • 10. 发明申请
    • High-Resolution High-Speed Terahertz Spectrometer
    • 高分辨率高速太赫兹光谱仪
    • US20080165355A1
    • 2008-07-10
    • US11885335
    • 2005-08-30
    • Takeshi YasuiTsutomu ArakiEisuke Saneyoshi
    • Takeshi YasuiTsutomu ArakiEisuke Saneyoshi
    • G01J3/433
    • G01N21/3586
    • A high-resolution high-speed terahertz spectrometry for measuring a terahertz frequency spectrum at high speed with a laser mode-locking frequency which is the theoretical limitation frequency resolution of the terahertz time-domain spectroscopy. The mode-locking frequencies of two femtosecond laser light sources are controlled so that they are stabilized at high degree and the difference between the mode-locking frequencies is constant. The output of the laser light sources are used as a pumping light for generating terahertz pulses and a probe pulse light for terahertz detection. Since the time delay timings of the terahertz pulses and the probe pulse light the pulse periods of which are slightly different from each other shift from each other and the difference increases. Therefore, the temporally expanded terahertz pulses are measured by high-speed sampling without using any mechanical stage for time delay scanning. Part of the laser beams are extracted and time origin signals are generated by trigger signal generating means and used as trigger signals. Consequently the influence of the timing jitter can be eliminated. The terahertz electric field time waveform measured by high-speed sampling with the measurement time window of the pulse period is subjected to time-scale conversion and Fourier transform. Therefore, a terahertz frequency spectrum can be measured with high resolution of the theoretical limitation frequency resolution (=mode-locking frequency) and at high speed.
    • 高分辨率高速太赫兹光谱法,用于以激光锁模频率高速测量太赫兹频谱,这是太赫兹时域光谱的理论极限频率分辨率。 控制两个飞秒激光的模式锁定频率,使其稳定在高度,并且模式锁定频率之间的差异是恒定的。 激光源的输出用作产生太赫兹脉冲的泵浦光和用于太赫兹检测的探针脉冲光。 由于太赫兹脉冲和探针脉冲的时间延迟定时彼此稍微不同的脉冲周期彼此偏移并且差异增大。 因此,通过高速采样来测量时间上扩展的太赫兹脉冲,而不用任何用于时间延迟扫描的机械级。 部分激光束被提取,时间原点信号由触发信号发生装置产生并用作触发信号。 因此,可以消除定时抖动的影响。 用脉冲周期测量时间窗高速采样测得的太赫兹电场时间波形进行时标转换和傅里叶变换。 因此,可以以理论限制频率分辨率(=锁模频率)的高分辨率和高速度测量太赫兹频谱。