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    • 7. 发明授权
    • Solid-state imaging device and its production method
    • 固态成像装置及其制作方法
    • US08319878B2
    • 2012-11-27
    • US12723086
    • 2010-03-12
    • Takashi TeradaKeisuke Hatano
    • Takashi TeradaKeisuke Hatano
    • H04N5/335H01L21/339H01L27/148
    • H04N5/3728H01L27/14683H01L27/14806
    • A solid-state imaging device of the type having photoelectric conversion elements formed in a matrix pattern on a semiconductor substrate, vertical transfer elements each of which reads signal charges from the photoelectric conversion elements arranged in the column direction and transfers the signal charges in the vertical direction, and a horizontal transfer element which transfers in the horizontal direction the signal charges sent from each of the vertical transfer elements, the horizontal transfer element includes: a charge transfer channel; a first transfer electrode; a second transfer electrode; and an interelectrode insulating film; with the first transfer electrode and the second transfer electrode being at the same potential.
    • 一种具有在半导体基板上以矩阵图案形成的光电转换元件的类型的固态成像装置,每个从沿列方向布置的光电转换元件读取信号电荷的垂直传送元件,并将信号电荷传输到垂直方向 水平传送元件,其在水平方向上传送从每个垂直传送元件发送的信号电荷,水平传送元件包括:电荷传输通道; 第一转移电极; 第二转移电极; 和电极间绝缘膜; 第一转印电极和第二转印电极处于相同的电位。
    • 9. 发明授权
    • Pneumatically driven liquid supply apparatus
    • 气动驱动液体供应装置
    • US06186171B1
    • 2001-02-13
    • US09268183
    • 1999-03-15
    • Hiroshi TanakaYasuhiro ChounoTakashi TeradaSatoshi Nakashima
    • Hiroshi TanakaYasuhiro ChounoTakashi TeradaSatoshi Nakashima
    • F04B4900
    • F04B9/1372Y10T137/86043
    • In a pneumatically driven liquid supply apparatus comprising a circulation pump 26 or constant-volume pump 34 for supplying a washing liquid or chemical to a washing tank 20 for semiconductor wafers used during the fabrication of semiconductor devices; an electromagnetic switching valve 51 and a pressure regulator 52 that configure an air-pressure adjustment means 50 are connected to an air source 60; and air supply pipelines 41a, 41b, 41d, and 41e are each connected to the air-pressure adjustment means 50, the circulation pump 26 and the constant-volume pump 34. A leakage sensor 70 is interposed within each of the air supply pipelines 41a, 41b, 41d, and 41e between the air-pressure adjustment means 50 and the circulation pump 26 or constant-volume pump 34, so that any liquid that flows backward through the circulation pump 26 or the constant-volume pump 34 and into the air supply pipeline 41a, 41b, 41d, or 41e is detected by the leakage sensor 70. This makes it possible to prevent damage or halting of the functions of the air-pressure adjustment means due to liquid flowing into the air supply pipelines via one of the pumps.
    • 在气动驱动液体供给装置中,包括循环泵26或恒定容积泵34,用于将洗涤液或化学品供应到半导体器件制造期间使用的半导体晶片的洗涤槽20; 构成气压调节装置50的电磁切换阀51和压力调节器52连接到空气源60; 空气供给管道41a,41b,41d,41e分别与气压调节机构50,循环泵26,恒定容积泵34连接。另外,在各供气管41a 空气压力调节装置50与循环泵26或恒定体积泵34之间的流体,41b,41d和41e,使得流过循环泵26或恒定容积泵34并进入空气的任何液体 供给管道41a,41b,41d或41e由泄漏传感器70检测。这使得可以防止由于液体经由空气供应管线中的一个流入空气供应管道而导致的空气压力调节装置的功能的损坏或停止 泵。