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    • 7. 发明授权
    • Measuring device in a scanning probe microscope
    • 扫描探针显微镜中的测量装置
    • US5136162A
    • 1992-08-04
    • US730475
    • 1991-07-16
    • Hirofumi MiyamotoTsugiko TakaseHiroshi KajimuraAkitoshi Toda
    • Hirofumi MiyamotoTsugiko TakaseHiroshi KajimuraAkitoshi Toda
    • G01B7/34G01N37/00G01Q30/18G01Q60/10G01Q70/08G05D3/12H01J37/252H01J37/26H01J37/28H01L41/09
    • G01Q60/16B82Y35/00G01Q10/04G01Q20/04Y10S977/86
    • A probe for scanning a sample is attached to a probe electrode supported by a cylindrical piezoelectric actuator. The actuator has four drive electrodes on its periphery, and deforms in the three axial directions in accordance with the voltage applied to the drive electrodes. A girdling electrode is provided between the actuator and the probe electrode. The girdling electrode is insulated from the probe electrode and the drive electrodes by insulator members provided on its upper and lower surfaces. A bias voltage signal S1 is input to an operational amplifier of which the output is connected to the girdling electrode. The amplifier is a voltage follower for equalizing the potential of the girdling electrode to that of the bias voltage signal S1. An operational amplifier has a non-inversion input to which the bias voltage signal S1 is input, and an inversion input connected to the probe electrode. While equalizing the potential of the probe electrode to that of the bias input voltage S1, the amplifier converts a tunnel current flowing between the probe and the sample to a voltage signal S2. An operational amplifier subtracts a bias voltage component from the voltage signal S2, and outputs a tunnel current signal S3.
    • 用于扫描样品的探针连接到由圆柱形压电致动器支撑的探针电极。 致动器在其周围具有四个驱动电极,并且根据施加到驱动电极的电压在三个轴向方向上变形。 在致动器和探针电极之间提供环形电极。 环形电极通过设置在其上表面和下表面上的绝缘体与探针电极和驱动电极绝缘。 偏置电压信号S1输入到输出与环绕电极连接的运算放大器。 放大器是用于使环形电极的电位与偏置电压信号S1的电位相等的电压跟随器。 运算放大器具有输入偏置电压信号S1的非反相输入端和连接到探针电极的反相输入端。 在使探针电极的电位与偏置输入电压S1的电位相等的同时,放大器将在探头和样品之间流动的隧道电流转换为电压信号S2。 运算放大器从电压信号S2中减去偏置电压分量,并输出隧道电流信号S3。