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1. 发明申请

US20120043857A1 ACTUATOR AND METHOD FOR DRIVING ACTUATOR 有权
标题翻译：执行器和驱动执行器的方法
公开(公告)号：US20120043857A1
公开(公告)日：2012-02-23
申请号：US13282089
申请日：2011-10-26
申请人： Michihito UEDA , Takakiyo Harigai , Yoshiaki Tanaka , Hideaki Adachi , Eiji Fujii
发明人： Michihito UEDA , Takakiyo Harigai , Yoshiaki Tanaka , Hideaki Adachi , Eiji Fujii
IPC分类号： H01L41/18
CPC分类号： H01L41/094 , H01L41/042 , H01L41/187 , H01L41/316
摘要： The purpose of the present invention is to provide a method for driving an actuator in which unnecessary deformation is suppressed.The present invention provides a method for driving an actuator, comprising the following steps (a) and (b): a step (a) of preparing the actuator, wherein the actuator comprises a first electrode, a piezoelectric layer composed of (Bi,Na,Ba)TiO3, and a second electrode, the piezoelectric layer is interposed between the first electrode and the second electrode, +X direction, +Y direction, and +Z direction denote [100] direction, [01-1] direction, and [011] direction, respectively, and the piezoelectric layer is preferentially oriented along the +Z direction; and a step (b) of applying a potential difference between the first electrode and the second electrode to drive the actuator.
摘要翻译：本发明的目的是提供一种驱动致动器的方法，其中不必要的变形被抑制。本发明提供一种用于驱动致动器的方法，包括以下步骤（a）和（b）：制备致动器的步骤（a），其中致动器包括第一电极，由（Bi，Na ，Ba）TiO 3和第二电极，压电层插入在第一电极和第二电极之间，+ X方向，+ Y方向和+ Z方向表示[100]方向，[01-1]方向，以及方向，并且压电层优先沿着+ Z方向取向; 以及在第一电极和第二电极之间施加电位差以驱动致动器的步骤（b）。

2. 发明授权

US08093784B2 Piezoelectric power generating element, and method of generating electric power using the piezoelectric power generating element 有权
标题翻译：压电发电元件，以及使用压电发电元件发电的方法
公开(公告)号：US08093784B2
公开(公告)日：2012-01-10
申请号：US13191139
申请日：2011-07-26
申请人： Takakiyo Harigai , Michihito Ueda , Hideaki Adachi , Eiji Fujii
发明人： Takakiyo Harigai , Michihito Ueda , Hideaki Adachi , Eiji Fujii
IPC分类号： H02N2/00 , H01L41/107
CPC分类号： H02N2/186 , H01L41/1134
摘要： Provided is a relatively easy-to-fabricate piezoelectric power generating element capable of generating a large amount of electric power while comprising a bridge-type vibration beam that is resistant to damage from external vibration. This element comprises a support member, a strip-shaped vibration beam, a piezoelectric layer, and electrodes. The first and second ends of the vibration beam are fixed to the support member. The piezoelectric layer and the electrodes are provided on the surface of the vibration beam. The vibration beam extends in a plane when it is not vibrating. The vibration beam has a first portion that extends from the first end fixed to the support member, a second portion that extends from the second end fixed to the support member, and a third portion that connects the end of the first portion opposite to the first end and the end of the second portion opposite to the second end. The vibration beam has a shape such that, when viewed in a direction perpendicular to the plane, a first direction in which the first portion extends is a direction closer to the second end, and a second direction in which the second portion extends is a direction closer to the first end, the first and second directions each make an angle of more than 0° and less than 90° with respect to a straight line connecting the center of the first end and the center of the second end, and the third portion intersects once the straight line.
摘要翻译：提供一种相对容易制造的能够产生大量电力的压电发电元件，同时包括耐外部振动损坏的桥式振动梁。该元件包括支撑构件，条形振动梁，压电层和电极。振动梁的第一和第二端固定在支撑构件上。压电层和电极设置在振动梁的表面上。当振动梁不振动时，振动梁在平面内延伸。振动梁具有从固定到支撑构件的第一端延伸的第一部分，从固定到支撑构件的第二端延伸的第二部分，以及连接第一部分的与第一部分相对的端部的第三部分端部和第二部分的与第二端相对的端部。所述振动梁具有这样的形状：当从垂直于所述平面的方向观察时，所述第一部分延伸的第一方向是更靠近所述第二端的方向，并且所述第二部分延伸的第二方向是方向更靠近第一端，第一和第二方向相对于连接第一端的中心和第二端的中心的直线大于0°且小于90°，并且第三部分相交一次直线。

3. 发明申请

US20110278991A1 PIEZOELECTRIC POWER GENERATING ELEMENT, AND METHOD OF GENERATING ELECTRIC POWER USING THE PIEZOELECTRIC POWER GENERATING ELEMENT 有权
标题翻译：压电发电元件及使用压电发电元件生成电力的方法
公开(公告)号：US20110278991A1
公开(公告)日：2011-11-17
申请号：US13191139
申请日：2011-07-26
申请人： Takakiyo HARIGAI , Michihito Ueda , Hideaki Adachi , Eiji Fujii
发明人： Takakiyo HARIGAI , Michihito Ueda , Hideaki Adachi , Eiji Fujii
IPC分类号： H02N2/18
CPC分类号： H02N2/186 , H01L41/1134
摘要： Provided is a relatively easy-to-fabricate piezoelectric power generating element capable of generating a large amount of electric power while comprising a bridge-type vibration beam that is resistant to damage from external vibration. This element comprises a support member, a strip-shaped vibration beam, a piezoelectric layer, and electrodes. The first and second ends of the vibration beam are fixed to the support member. The piezoelectric layer and the electrodes are provided on the surface of the vibration beam. The vibration beam extends in a plane when it is not vibrating. The vibration beam has a first portion that extends from the first end fixed to the support member, a second portion that extends from the second end fixed to the support member, and a third portion that connects the end of the first portion opposite to the first end and the end of the second portion opposite to the second end. The vibration beam has a shape such that, when viewed in a direction perpendicular to the plane, a first direction in which the first portion extends is a direction closer to the second end, and a second direction in which the second portion extends is a direction closer to the first end, the first and second directions each make an angle of more than 0° and less than 90° with respect to a straight line connecting the center of the first end and the center of the second end, and the third portion intersects once the straight line.
摘要翻译：提供一种相对容易制造的能够产生大量电力的压电发电元件，同时包括耐外部振动损坏的桥式振动梁。该元件包括支撑构件，条形振动梁，压电层和电极。振动梁的第一和第二端固定在支撑构件上。压电层和电极设置在振动梁的表面上。当振动梁不振动时，振动梁在平面内延伸。振动梁具有从固定到支撑构件的第一端延伸的第一部分，从固定到支撑构件的第二端延伸的第二部分，以及连接第一部分的与第一部分相对的端部的第三部分端部和第二部分的与第二端相对的端部。所述振动梁具有这样的形状：当从垂直于所述平面的方向观察时，所述第一部分延伸的第一方向是更靠近所述第二端的方向，并且所述第二部分延伸的第二方向是方向更靠近第一端，第一和第二方向相对于连接第一端的中心和第二端的中心的直线大于0°且小于90°，并且第三部分相交一次直线。

4. 发明授权

US08217555B2 Actuator and method for driving actuator 有权
标题翻译：执行机构及其驱动方法
公开(公告)号：US08217555B2
公开(公告)日：2012-07-10
申请号：US13282089
申请日：2011-10-26
申请人： Michihito Ueda , Takakiyo Harigai , Yoshiaki Tanaka , Hideaki Adachi , Eiji Fujii
发明人： Michihito Ueda , Takakiyo Harigai , Yoshiaki Tanaka , Hideaki Adachi , Eiji Fujii
IPC分类号： H01L41/187 , H01L41/24
CPC分类号： H01L41/094 , H01L41/042 , H01L41/187 , H01L41/316
摘要： The purpose of the present invention is to provide a method for driving an actuator in which unnecessary deformation is suppressed.The present invention provides a method for driving an actuator, comprising the following steps (a) and (b): a step (a) of preparing the actuator, wherein the actuator comprises a first electrode, a piezoelectric layer composed of (Bi,Na,Ba)TiO3, and a second electrode, the piezoelectric layer is interposed between the first electrode and the second electrode, +X direction, +Y direction, and +Z direction denote [100] direction, [01-1] direction, and [011] direction, respectively, and the piezoelectric layer is preferentially oriented along the +Z direction; and a step (b) of applying a potential difference between the first electrode and the second electrode to drive the actuator.
摘要翻译：本发明的目的是提供一种驱动致动器的方法，其中不必要的变形被抑制。本发明提供一种用于驱动致动器的方法，包括以下步骤（a）和（b）：制备致动器的步骤（a），其中致动器包括第一电极，由（Bi，Na ，Ba）TiO 3和第二电极，压电层插入在第一电极和第二电极之间，+ X方向，+ Y方向和+ Z方向表示[100]方向，[01-1]方向，以及方向，并且压电层优先沿着+ Z方向取向; 以及在第一电极和第二电极之间施加电位差以驱动致动器的步骤（b）。

5. 发明授权

US08393719B2 Piezoelectric film, ink jet head, method of forming image by the ink jet head, angular velocity sensor, method of measuring angular velocity by the angular velocity sensor, piezoelectric generating element, and method of generating electric power using the piezoelectric generating element 有权
标题翻译：压电膜，喷墨头，通过喷墨头形成图像的方法，角速度传感器，角速度传感器测量角速度的方法，压电发生元件以及使用压电发生元件产生电力的方法
公开(公告)号：US08393719B2
公开(公告)日：2013-03-12
申请号：US13280022
申请日：2011-10-24
申请人： Takakiyo Harigai , Yoshiaki Tanaka , Hideaki Adachi , Eiji Fujii
发明人： Takakiyo Harigai , Yoshiaki Tanaka , Hideaki Adachi , Eiji Fujii
IPC分类号： B41J2/045 , H01L41/00 , H02N2/00
CPC分类号： H01L41/187 , B41J2/14032 , G01C19/5621 , G01C19/5628 , H01L41/0478 , H01L41/0815 , H01L41/0973 , H01L41/1136 , H01L41/316
摘要： The purpose of the present invention is to provide a lead-free piezoelectric film including a lead-free ferroelectric material and having low dielectric loss and high piezoelectric performance comparable to that of PZT, and a method of manufacturing the lead-free piezoelectric film.The present invention is directed to a piezoelectric film comprising a NaxLa1-xNiO3-x layer with a (001) orientation and a (Na,Bi)TiO3—BaTiO3 layer with a (001) orientation, wherein x is not less than 0.01 and not more than 0.1, and the NaxLa1-xNiO3-x layer (0.01≦x≦0.1) and the (Na,Bi)TiO3—BaTiO3 layer are laminated.
摘要翻译：本发明的目的是提供一种包含无铅铁电材料的无铅压电膜，其具有与PZT相当的低介电损耗和高压电性能，以及制造无铅压电膜的方法。本发明涉及一种包括具有（001）取向的NaxLa1-xNiO3-x层和（001）取向的（Na，Bi）TiO3-BaTiO3层的压电膜，其中x不小于0.01而不是大于0.1，NaxLa1-xNiO3-x层（0.01＆nlE; x＆nlE; 0.1）和（Na，Bi）TiO3-BaTiO3层层叠。

6. 发明授权

US08390179B2 Piezoelectric film and method of manufacturing the same, ink jet head, method of forming image by the ink jet head, angular velocity sensor, method of measuring angular velocity by the angular velocity sensor, piezoelectric generating element, and method of generating electric power using the piezoelectric generating element 有权
标题翻译：压电膜及其制造方法，喷墨头，通过喷墨头形成图像的方法，角速度传感器，角速度传感器测量角速度的方法，压电发生元件以及使用该方法产生电力的方法压电发电元件
公开(公告)号：US08390179B2
公开(公告)日：2013-03-05
申请号：US13551018
申请日：2012-07-17
申请人： Takakiyo Harigai , Yoshiaki Tanaka , Hideaki Adachi , Eiji Fujii
发明人： Takakiyo Harigai , Yoshiaki Tanaka , Hideaki Adachi , Eiji Fujii
IPC分类号： H01L41/08
CPC分类号： C01G23/006 , B41J2/14274 , C01G29/006 , C01P2002/50 , C01P2002/52 , C01P2002/72 , C01P2006/32 , C01P2006/40 , C23C14/0021 , C23C14/025 , C23C14/088 , G01C19/5621 , G01C19/5628 , H01L41/0973 , H01L41/1136 , H01L41/1871
摘要： It is an object of the present invention to provide a lead-free piezoelectric film including a lead-free ferroelectric material and having low dielectric loss and high piezoelectric performance comparable to that of PZT, and a method of manufacturing the lead-free piezoelectric film.The present invention is directed to a piezoelectric film comprising a (NaxBiy)TiO0.5x+1.5y+2—BaTiO3 layer with a (111) orientation, where 0.30≦x≦0.46 and 0.51≦y≦0.62.
摘要翻译：本发明的目的是提供一种无铅压电薄膜，其包括无铅铁电材料，并且具有与PZT相当的低介电损耗和高压电性能，以及制造无铅压电薄膜的方法。本发明涉及一种包括具有（111）取向的（NaxBiy）TiO0.5x + 1.5y + 2-BaTiO3层的压电膜，其中0.30和n1E; x和nlE; 0.46和0.51≤n1E; y＆nlE; 0.62。

7. 发明授权

US07870787B2 Piezoelectric thin film and method of manufacturing the same, angular velocity sensor, method of measuring angular velocity by the angular velocity sensor, piezoelectric generating element, and method of generating electric power using the piezoelectric generating element 有权
标题翻译：压电薄膜及其制造方法，角速度传感器，通过角速度传感器测量角速度的方法，压电发电元件以及使用压电发电元件发电的方法
公开(公告)号：US07870787B2
公开(公告)日：2011-01-18
申请号：US12755180
申请日：2010-04-06
申请人： Takakiyo Harigai , Hideaki Adachi , Eiji Fujii
发明人： Takakiyo Harigai , Hideaki Adachi , Eiji Fujii
IPC分类号： G01P9/04 , G01C19/56
CPC分类号： C23C14/08 , C04B35/475 , C04B2235/3201 , C04B2235/3215 , C04B2235/3236 , G01C19/5607 , G01C19/5642 , H01L41/187 , H01L41/316 , Y10T29/42
摘要： Provided are a piezoelectric thin film including a lead-free ferroelectric material and exhibiting high piezoelectric performance comparable to that of PZT, and a method of manufacturing the piezoelectric thin film. The piezoelectric thin film of the present invention has a multilayer structure in which a metal electrode film having a plane orientation of (100), a (Bi,Na)TiO3 film, and a (Bi,Na,Ba)TiO3 film having a plane orientation of (001) are laminated in this order. The piezoelectric thin film of the present invention can be applied to a wide range of fields and uses. For example, with the piezoelectric thin film of the present invention, an angular velocity sensor of the present invention having high sensitivity and a piezoelectric generating element of the present invention having excellent power generation characteristics can be constructed.
摘要翻译：提供一种包含无铅铁电材料并具有与PZT相当的高压电性能的压电薄膜，以及制造压电薄膜的方法。本发明的压电薄膜具有多层结构，其中具有平面取向为（100）的金属电极膜，（Bi，Na）TiO 3膜和（Bi，Na，Ba）TiO 3膜具有平面（001）的取向依次层叠。本发明的压电薄膜可以应用于广泛的领域和用途。例如，利用本发明的压电薄膜，可以构成具有高灵敏度的本发明的角速度传感器和具有优异发电特性的本发明的压电发生元件。

8. 发明授权

US08176781B2 Multilayer piezoelectric thin film and method of manufacturing the same, angular velocity sensor, piezoelectric generating element, and method of generating electric power using the piezoelectric 有权
标题翻译：多层压电薄膜及其制造方法，角速度传感器，压电发电元件及使用压电产生电力的方法
公开(公告)号：US08176781B2
公开(公告)日：2012-05-15
申请号：US12963223
申请日：2010-12-08
申请人： Takakiyo Harigai , Hideaki Adachi , Eiji Fujii
发明人： Takakiyo Harigai , Hideaki Adachi , Eiji Fujii
IPC分类号： G01C19/56 , H01L41/18 , H01L41/047 , H01L41/22 , H02N2/18
CPC分类号： C23C14/08 , C04B35/475 , C04B2235/3201 , C04B2235/3215 , C04B2235/3236 , G01C19/5607 , G01C19/5642 , H01L41/187 , H01L41/316 , Y10T29/42
摘要： Provided are a piezoelectric thin film including a lead-free ferroelectric material and exhibiting high piezoelectric performance comparable to that of PZT, and a method of manufacturing the piezoelectric thin film. The piezoelectric thin film of the present invention has a multilayer structure in which a metal electrode film having a plane orientation of (100), a (Bi,Na)TiO3 film, and a (Bi,Na,Ba) TiO3 film having a plane orientation of (001) are laminated in this order. The piezoelectric thin film of the present invention can be applied to a wide range of fields and uses. For example, with the piezoelectric thin film of the present invention, an angular velocity sensor of the present invention having high sensitivity and a piezoelectric generating element of the present invention having excellent power generation characteristics can be constructed.
摘要翻译：提供一种包含无铅铁电材料并具有与PZT相当的高压电性能的压电薄膜，以及制造压电薄膜的方法。本发明的压电薄膜具有多层结构，其中具有平面取向为（100）的金属电极膜，（Bi，Na）TiO 3膜和（Bi，Na，Ba）TiO 3膜具有平面（001）的取向依次层叠。本发明的压电薄膜可以应用于广泛的领域和用途。例如，利用本发明的压电薄膜，可以构成具有高灵敏度的本发明的角速度传感器和具有优异发电特性的本发明的压电发生元件。

9. 发明申请

US20120038715A1 PIEZOELECTRIC FILM, INK JET HEAD, METHOD OF FORMING IMAGE BY THE INK JET HEAD, ANGULAR VELOCITY SENSOR, METHOD OF MEASURING ANGULAR VELOCITY BY THE ANGULAR VELOCITY SENSOR, PIEZOELECTRIC GENERATING ELEMENT, AND METHOD OF GENERATING ELECTRIC POWER USING THE PIEZOELECTRIC GENERATING ELEMENT 有权
标题翻译：压电薄膜，喷墨头，由喷墨头形成图像的方法，角速度传感器，通过角速度传感器测量角速度的方法，压电发生元件以及使用压电发生元件生成电力的方法
公开(公告)号：US20120038715A1
公开(公告)日：2012-02-16
申请号：US13280022
申请日：2011-10-24
申请人： Takakiyo HARIGAI , Yoshiaki Tanaka , Hideaki Adachi , Eiji Fujii
发明人： Takakiyo HARIGAI , Yoshiaki Tanaka , Hideaki Adachi , Eiji Fujii
IPC分类号： B41J2/045 , H02N2/18 , B32B9/00 , G01C19/56
CPC分类号： H01L41/187 , B41J2/14032 , G01C19/5621 , G01C19/5628 , H01L41/0478 , H01L41/0815 , H01L41/0973 , H01L41/1136 , H01L41/316
摘要： The purpose of the present invention is to provide a lead-free piezoelectric film including a lead-free ferroelectric material and having low dielectric loss and high piezoelectric performance comparable to that of PZT, and a method of manufacturing the lead-free piezoelectric film.The present invention is directed to a piezoelectric film comprising a NaxLa1-xNiO3-x layer with a (001) orientation and a (Na,Bi)TiO3—BaTiO3 layer with a (001) orientation, wherein x is not less than 0.01 and not more than 0.1, and the NaxLa1-xNiO3-x layer (0.01≦x≦0.1) and the (Na,Bi)TiO3—BaTiO3 layer are laminated.
摘要翻译：本发明的目的是提供一种包含无铅铁电材料的无铅压电膜，其具有与PZT相当的低介电损耗和高压电性能，以及制造无铅压电膜的方法。本发明涉及一种包括具有（001）取向的NaxLa1-xNiO3-x层和（001）取向的（Na，Bi）TiO3-BaTiO3层的压电膜，其中x不小于0.01而不是大于0.1，NaxLa1-xNiO3-x层（0.01＆nlE; x＆nlE; 0.1）和（Na，Bi）TiO3-BaTiO3层层叠。

10. 发明申请

US20120281046A1 PIEZOELECTRIC FILM AND METHOD OF MANUFACTURING THE SAME, INK JET HEAD, METHOD OF FORMING IMAGE BY THE INK JET HEAD, ANGULAR VELOCITY SENSOR, METHOD OF MEASURING ANGULAR VELOCITY BY THE ANGULAR VELOCITY SENSOR, PIEZOELECTRIC GENERATING ELEMENT, AND METHOD OF GENERATING ELECTRIC POWER USING THE PIEZOELECTRIC GENERATING ELEMENT 有权
标题翻译：压电薄膜及其制造方法，喷墨头，由喷墨头，角速度传感器形成图像的方法，通过角速度传感器，压电发生元件测量角速度的方法，以及使用该方法生成电力的方法压电元件
公开(公告)号：US20120281046A1
公开(公告)日：2012-11-08
申请号：US13551058
申请日：2012-07-17
申请人： Takakiyo HARIGAI , Yoshiaki Tanaka , Hideaki Adachi , Eiji Fujii
发明人： Takakiyo HARIGAI , Yoshiaki Tanaka , Hideaki Adachi , Eiji Fujii
IPC分类号： H01L41/04 , G01P3/44 , B41J2/045 , H01L41/09 , H01L41/00
CPC分类号： H01L41/1871 , B41J2/14233 , C23C14/0021 , C23C14/025 , C23C14/088 , G01C19/5621 , G01C19/5628 , G01P3/44 , H01L41/0477 , H01L41/0973 , H01L41/1136
摘要： It is an object of the present invention to provide a lead-free piezoelectric film including a lead-free ferroelectric material and having low dielectric loss and high piezoelectric performance comparable to that of PZT, and a method of manufacturing the lead-free piezoelectric film.The present invention is directed to a piezoelectric film comprising a (NaxBiy)TiO0.5x+1.5y+2−BaTiO3 layer with a (110) orientation, where 0.30≦x≦0. 46 and 0.51≦y≦0.62.
摘要翻译：本发明的目的是提供一种无铅压电薄膜，其包括无铅铁电材料，并且具有与PZT相当的低介电损耗和高压电性能，以及制造无铅压电薄膜的方法。本发明涉及一种包括具有（110）取向的（NaxBiy）TiO0.5x + 1.5y + 2-BaTiO3层的压电膜，其中0.30和n1E; x和n1E; 0。 46和0.51＆nlE; y＆nlE; 0.62。

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