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    • 5. 发明申请
    • SEMICONDUCTOR WAFER CLEANING SYSTEM AND METHOD
    • 半导体清洗系统及方法
    • US20110168211A1
    • 2011-07-14
    • US13052173
    • 2011-03-21
    • Ki-Hwan ParkTae-Joon KimYoung-Choul Kook
    • Ki-Hwan ParkTae-Joon KimYoung-Choul Kook
    • B08B3/00
    • H01L21/67051B08B3/02B08B3/048B08B3/102H01L21/67028Y10S134/902
    • A method of and system for cleaning semiconductor wafers minimizes the exposure of the wafers to the air by washing, rinsing and drying the wafers in one cleaning chamber. The system includes a wafer support by which a plurality of wafers can be supported in the cleaning chamber as oriented vertically and spaced from each other, and tubular de-ionized water supply nozzles extending longitudinally in the direction in which the wafers are spaced from each other as disposed to the sides of the wafers. Each de-ionized water supply nozzle has an inner nozzle passageway, and a plurality of sets of nozzle holes extending radially through the main body of the nozzle from the inner nozzle passageway. Each such set of nozzle holes subtends an angle of 80˜100° in a vertical plane and is directed towards a surface of a respective wafer W. During a primary rinse procedure, the de-ionized water is supplied to the de-ionized water spray nozzles, and the liquid in the cleaning chamber is simultaneously discharged from a lower part of the chamber and by being allowed to overflow the chamber. The supplying of the de-ionized water to the de-ionized water spray nozzles and the discharging of the cleaning chamber are carried out in proportions that minimize differences in the etching rate of a wafer across the surface thereof.
    • 用于清洁半导体晶片的方法和系统通过在一个清洁室中洗涤,漂洗和干燥晶片来最小化晶片对空气的暴露。 该系统包括晶片支撑件,通过该晶片支撑件可将多个晶片支撑在清洁室中,其方式为垂直定向并彼此间隔开,并且管状去离子水供应喷嘴在晶片彼此间隔开的方向上纵向延伸 设置在晶片的侧面。 每个去离子水供应喷嘴具有内部喷嘴通道,以及从喷嘴通道径向延伸穿过喷嘴主体的多组喷嘴孔。 每个这样的一组喷嘴孔在垂直平面中对着80〜100°的角度并且指向相应晶片W的表面。在初次漂洗过程中,将去离子水供应到去离子水喷雾 喷嘴,并且清洁室中的液体同时从腔室的下部排出并且被允许使腔室溢出。 将去离子水供应到去离子水喷嘴和排出清洁室的比例以使晶片在其表面上的蚀刻速率的差异最小化的比例进行。
    • 8. 发明授权
    • Liquid crystal display
    • 液晶显示器
    • US08736786B2
    • 2014-05-27
    • US12904096
    • 2010-10-13
    • Tae-Eun KimTae-Joon Kim
    • Tae-Eun KimTae-Joon Kim
    • G02F1/1333
    • G09G3/36
    • A liquid crystal display is disclosed. In one embodiment, the display includes i) a liquid crystal display panel configured to display images, ii) a backlight unit configured to provide light to the liquid crystal display panel and iii) a mold frame comprising a frame main body and a plurality of first side walls, wherein the frame main body is configured to receive the backlight unit, and wherein the first side walls are formed on a top surface of the frame main body. The display may further include a bottom chassis comprising a bottom plate and a plurality of second side walls, wherein the bottom plate is configured to support the mold frame and wherein the second side walls are formed at edges of the bottom plate. The first and second side walls surround side surfaces of the liquid crystal display panel while not contacting the side surfaces, and the first and second side walls are alternately disposed along a circumferential direction of the liquid crystal display panel.
    • 公开了一种液晶显示器。 在一个实施例中,显示器包括i)被配置为显示图像的液晶显示面板,ii)被配置为向液晶显示面板提供光的背光单元,以及iii)包括框架主体和多个第一 其中所述框架主体被配置为容纳所述背光单元,并且其中所述第一侧壁形成在所述框架主体的顶表面上。 所述显示器还可包括底架,所述底架包括底板和多个第二侧壁,其中所述底板构造成支撑所述模架,并且其中所述第二侧壁形成在所述底板的边缘处。 第一侧壁和第二侧壁围绕液晶显示面板的侧面而不与侧面接触,并且第一和第二侧壁沿着液晶显示面板的圆周方向交替设置。