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    • 6. 发明授权
    • Field emission gun and electron beam instruments
    • 场发射枪和电子束仪器
    • US07151268B2
    • 2006-12-19
    • US11059511
    • 2005-02-17
    • Tadashi FujiedaKishio HidakaMitsuo Hayashibara
    • Tadashi FujiedaKishio HidakaMitsuo Hayashibara
    • H01J37/073
    • H01J37/073H01J37/304H01J2237/0653H01J2237/30455H01J2237/30472
    • A field-emission electron gun includes a field-emission cathode including a single fiber-like carbon substance and an electrically-conductive substrate for supporting the substance, an extractor for field-emitting electrons, an accelerating electrode for accelerating the electrons, an extracting power-supply for applying extracting voltage to the extractor, an accelerating power-supply for applying accelerating voltage to the accelerating electrode, and a unit for detecting and monitoring a part of emission current. In this field-emission electron gun, if emission-variation amount has become larger than a predetermined value, the extracting voltage is automatically boosted for a constant length of time, thereby increasing the emission current up to a predetermined value. Further, extracting voltage at the time of boosting the extracting voltage, voltage-boosting time, and the emission current are recorded, then being feed-backed to voltage-boosting conditions for the next-time extracting voltage. Moreover, the accelerating voltage is varied in correspondence with the voltage-boosting of the extracting voltage.
    • 场致发射电子枪包括:包含单纤维状碳物质的场致发射阴极和用于支撑物质的导电基板,用于场发射电子的提取器,用于加速电子的加速电极,提取电力 - 用于向提取器施加提取电压,用于向加速电极施加加速电压的加速电源,以及用于检测和监测部分发射电流的单元。 在该场发射电子枪中,如果发射变化量大于预定值,则提取电压自动升高恒定的时间长度,从而将发射电流提高到预定值。 此外,记录提升电压提升时的提取电压,升压时间和发射电流,然后将其反馈到下一次提取电压的升压条件。 此外,加速电压根据提取电压的升压而变化。