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1. 发明授权

US06308573B1 3-Dimensional comb structure and actuator and inertia detection sensor both using the comb structure 有权
标题翻译：三维梳结构和致动器和惯性检测传感器均采用梳状结构
公开(公告)号：US06308573B1
公开(公告)日：2001-10-30
申请号：US09479892
申请日：2000-01-10
申请人： Ki Bang Lee , Jae-joon Choi , Hee-moon Jeong , Kyu-yong Kim , Sung-gyu Kang
发明人： Ki Bang Lee , Jae-joon Choi , Hee-moon Jeong , Kyu-yong Kim , Sung-gyu Kang
IPC分类号： G01P344
CPC分类号： H02N1/008 , B81B3/0094 , B81B2201/025 , B81B2203/0136 , G01C19/5755 , G01P15/097 , G01P15/125 , G01P2015/0814
摘要： A 3-dimensional comb structure using an electrical force, and an inertial detection sensor and an actuator both using the 3-dimensional comb structure are provided. In the 3-dimensional comb structure, a suspension structure, which is an inertia body, is separated a predetermined height from a substrate, maintaining the predetermined height from the substrate. A movable comb, which has at least one movable comb finger, protrudes perpendicularly from the suspension structure. A fixed comb, which has at least one fixed comb finger, protrudes perpendicularly from the substrate, in mesh with the movable comb. The 3-dimensional comb structure is driven by a voltage provided from a power supply unit which is connected to the movable comb and the fixed comb.
摘要翻译：提供了使用电力的三维梳结构，以及使用三维梳结构的惯性检测传感器和致动器。在三维梳结构中，作为惯性体的悬架结构与衬底分离预定的高度，保持与衬底的预定高度。具有至少一个活动梳指的可动梳子从悬挂结构垂直地突出。具有至少一个固定梳指的固定梳与基底垂直地突出地与可动梳子啮合。三维梳结构由连接到可动梳和固定梳的电源单元提供的电压驱动。

2. 发明授权

US06277712B1 Multilayered wafer with thick sacrificial layer using porous silicon or porous silicon oxide and fabrication method thereof 有权
标题翻译：使用多孔硅或多孔氧化硅的具有厚牺牲层的多层晶片及其制造方法
公开(公告)号：US06277712B1
公开(公告)日：2001-08-21
申请号：US09540552
申请日：2000-03-31
申请人： Sung-gyu Kang , Ki Bang Lee , Jae-joon Choi , Hee-moon Jeong
发明人： Sung-gyu Kang , Ki Bang Lee , Jae-joon Choi , Hee-moon Jeong
IPC分类号： H01L21322
CPC分类号： G01P15/0802 , B81C1/0019 , B81C1/00507 , B81C2201/0115 , H01L21/76251 , H01L21/76262
摘要： A multilayered wafer with a thick sacrificial layer, which is obtained by forming a sacrificial layer of oxidized porous silicon or porous silicon and growing an epitaxial polysilicon layer on the sacrificial layer, and a fabrication method thereof are provided. The multilayered wafer with a thick sacrificial layer adopts a porous silicon layer or an oxidized porous silicon layer as a sacrificial layer such that a sufficient gap can be obtained between a substrate and a suspension structure upon the manufacture of the suspension structure of a semiconductor actuator or a semiconductor inertia sensor. Also, in a fabrication method of the wafer according to the present invention, a p+-type or n+-type wafer doped at a high concentration is prepared for, and then a thick porous silicon layer can be obtained simply by anodic-bonding the surface of the wafer. Also, when polysilicon is grown on a porous silicon layer by an epitaxial process, it is grown faster than when single crystal silicon is grown.
摘要翻译：提供了通过在牺牲层上形成氧化的多孔硅或多孔硅的牺牲层并生长外延多晶硅层而获得的具有厚牺牲层的多层晶片及其制造方法。具有厚牺牲层的多层晶片采用多孔硅层或氧化多孔硅层作为牺牲层，使得在制造半导体致动器的悬架结构时可在衬底和悬架结构之间获得足够的间隙，或者半导体惯性传感器。此外，在根据本发明的晶片的制造方法中，制备以高浓度掺杂的p +型或n +型晶片，然后可以简单地通过阳极结合表面获得厚的多孔硅层的晶片。而且，当通过外延工艺在多孔硅层上生长多晶硅时，其生长比单晶硅生长时更快。

3. 发明授权

US08898902B2 Printing system, printing apparatuses, and methods of forming nozzles of printing apparatuses 有权
标题翻译：印刷系统，印刷装置和形成印刷装置的喷嘴的方法
公开(公告)号：US08898902B2
公开(公告)日：2014-12-02
申请号：US13604269
申请日：2012-09-05
申请人： Young-ki Hong , Sung-gyu Kang , Jae-woo Chung , Seung-ho Lee , Joong-hyuk Kim , Yong-wan Jin
发明人： Young-ki Hong , Sung-gyu Kang , Jae-woo Chung , Seung-ho Lee , Joong-hyuk Kim , Yong-wan Jin
IPC分类号： B41J2/015 , B21D47/00 , B23P17/00 , B41J2/16 , B41J2/06 , B41J2/14
CPC分类号： B41J2/1433 , B41J2/06 , B41J2/14201 , B41J2/14233 , B41J2/14314 , B41J2/16 , B41J2/161 , B41J2/162 , B41J2/1623 , B41J2/1629 , B41J2/1631 , B41J2/1632 , Y10T29/49401
摘要： A printing apparatus includes: a flow channel plate including, a pressure chamber, a nozzle including an outlet through which ink contained in the pressure chamber is ejected, and a trench disposed around the nozzle, and the outlet extending into the trench; a piezoelectric actuator configured to provide a change in pressure to eject the ink contained in the pressure chamber; and an electrostatic actuator configured to provide an electrostatic driving force to the ink contained in the nozzle.
摘要翻译：打印装置包括：流路板，包括压力室，喷嘴，其包括出口，所述出口通过所述出口排出，所述出口通过所述出口排出，所述出口通过所述出口喷射，所述出口通过所述出口喷射在所述压力室中;墨水槽，压电致动器，被配置为提供压力变化以喷射容纳在压力室中的墨; 以及静电致动器，被配置为向包含在喷嘴中的墨水提供静电驱动力。

4. 发明授权

US08678552B2 Nozzle plate and method of manufacturing the same 有权
标题翻译：喷嘴板及其制造方法
公开(公告)号：US08678552B2
公开(公告)日：2014-03-25
申请号：US13093409
申请日：2011-04-25
申请人： Sung-gyu Kang
发明人： Sung-gyu Kang
IPC分类号： B41J2/14 , B41J2/16 , B21D53/76 , B23P17/00
CPC分类号： B41J2/1433 , B41J2/162 , B41J2/1628 , B41J2/1631
摘要： A nozzle plate including protruding nozzles and a method of manufacturing the nozzle plate. The nozzle plate may include a body unit and at least one nozzle protruding from the body unit. The at least one nozzle may include an exit part having a constant cross-sectional area and a damper part having a cross-sectional area that decreases in a direction toward the exit part, wherein the damper part of the at least one nozzle includes a plurality of inner wall surfaces having different angles of inclination.
摘要翻译：包括突出喷嘴的喷嘴板和制造喷嘴板的方法。喷嘴板可以包括主体单元和从主体单元突出的至少一个喷嘴。所述至少一个喷嘴可以包括具有恒定横截面积的出口部分和具有在朝向出口部分的方向上减小的横截面积的阻尼部分，其中所述至少一个喷嘴的阻尼部分包括多个的内壁表面具有不同的倾斜角。

5. 发明申请

US20080129780A1 NOZZLE PLATE OF INKJET PRINTHEAD AND METHOD OF MANUFACTURING THE NOZZLE PLATE 失效
标题翻译：喷嘴喷嘴板和制造喷嘴板的方法
公开(公告)号：US20080129780A1
公开(公告)日：2008-06-05
申请号：US11766283
申请日：2007-06-21
申请人： Tae-woon Cha , Seung-mo Lim , Sung-gyu Kang , Jae-woo Chung
发明人： Tae-woon Cha , Seung-mo Lim , Sung-gyu Kang , Jae-woo Chung
IPC分类号： B41J2/135 , B05D3/00
CPC分类号： B41J2/1433 , B41J2/1606 , B41J2/162 , B41J2/1642
摘要： A nozzle plate of an inkjet printhead, and a method of manufacturing the nozzle plate. The nozzle plate includes a substrate through which nozzles are formed; an ink-philic coating layer formed on an outer surface of the substrate and inner walls of the nozzles; and an ink-phobic coating layer selectively formed on the ink-philic coating layer disposed around the nozzles.
摘要翻译：喷墨打印头的喷嘴板，以及喷嘴板的制造方法。喷嘴板包括形成喷嘴的基板; 形成在基板的外表面和喷嘴的内壁上的亲油涂层; 以及在设置在喷嘴周围的亲油性涂层上选择性地形成的墨滴涂层。

6. 发明申请

US20060077237A1 Piezoelectric inkjet printhead and method of manufacturing the same 有权
公开(公告)号：US20060077237A1
公开(公告)日：2006-04-13
申请号：US11245131
申请日：2005-10-07
申请人： Su-ho Shin , Sung-gyu Kang , Jae-woo Chung , You-seop Lee , Chang-hoon Jung
发明人： Su-ho Shin , Sung-gyu Kang , Jae-woo Chung , You-seop Lee , Chang-hoon Jung
IPC分类号： B41J2/045
CPC分类号： B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1646 , B41J2002/14419
摘要： A piezoelectric inkjet printhead capable of reducing a crosstalk and a method of manufacturing the same are provided. The inkjet printhead includes an upper substrate, an intermediate substrate, and a lower substrate that are sequentially stacked, wherein the upper substrate includes piezoelectric actuators on an upper surface of the upper substrate and pressure chambers and first restrictors on a lower surface of the upper substrate, the first restrictors extending from the pressure chambers and having a width smaller than a width of the pressure chambers, the intermediate substrate includes dampers passing therethrough, the dampers corresponding to the pressure chambers and second restrictors extending between the first restrictors and a manifold formed from a lower surface of the intermediate substrate and the lower substrate includes nozzles passing therethrough, the nozzles corresponding to the dampers.

7. 发明授权

US08485641B2 Nozzle plate and method of manufacturing the same 有权
标题翻译：喷嘴板及其制造方法
公开(公告)号：US08485641B2
公开(公告)日：2013-07-16
申请号：US12801616
申请日：2010-06-17
申请人： Sung-gyu Kang , Jae-woo Chung , Young-Ki Hong
发明人： Sung-gyu Kang , Jae-woo Chung , Young-Ki Hong
IPC分类号： B41J2/14 , C23F1/00
CPC分类号： B41J2/1642 , B41J2/1433 , B41J2/162 , B41J2/1628 , B41J2/1629 , B41J2/1631
摘要： Provided is a nozzle plate and methods of manufacturing the nozzle plate. The nozzle plate may include a substrate having a nozzle. The nozzle plate may also include a permittivity reducing area in an upper portion of the substrate around the nozzle, wherein the permittivity reducing area includes a plurality of porosities and a plurality of walls between the plurality of porosities. Additionally, the nozzle plate may include a protection layer on the substrate, wherein the protection layer covers the plurality of porosities and the plurality of walls.
摘要翻译：提供一种喷嘴板和制造喷嘴板的方法。喷嘴板可以包括具有喷嘴的基板。喷嘴板还可以包括在喷嘴周围的基板的上部中的介电常数降低区域，其中介电常数降低区域包括多个孔隙率和多个孔隙之间的多个壁。此外，喷嘴板可以在基板上包括保护层，其中保护层覆盖多个孔隙和多个壁。

8. 发明申请

US20100167433A1 PIEZOELECTRIC INKJET PRINTHEAD AND METHOD OF MANUFACTURING THE SAME 有权
标题翻译：压电喷墨印刷机及其制造方法
公开(公告)号：US20100167433A1
公开(公告)日：2010-07-01
申请号：US12722843
申请日：2010-03-12
申请人： Jae-chang Lee , Jae-woo Chung , Kyo-yool Lee , Chang-seung Lee , Sung-gyu Kang
发明人： Jae-chang Lee , Jae-woo Chung , Kyo-yool Lee , Chang-seung Lee , Sung-gyu Kang
IPC分类号： H01L21/306
CPC分类号： B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1628 , B41J2/1629 , Y10T29/42 , Y10T29/49401
摘要： A piezoelectric inkjet printhead including an upper substrate formed of a single crystal silicon substrate or an SOI substrate and having an ink inlet therethrough, and a lower substrate formed of an SOI substrate having a sequentially stacked structure with a first silicon layer, an intervening oxide layer, and a second silicon layer in which a manifold, pressure chambers, and dampers are formed in the second silicon layer by wet or dry etching, and nozzles are formed through the intervening oxide layer and the first silicon layer by dry etching, and a method of manufacturing the same.
摘要翻译：一种压电喷墨打印头，包括由单晶硅衬底或SOI衬底形成的上衬底，并且具有墨入口，以及由具有第一硅层的顺序层叠结构的SOI衬底形成的下衬底，中间氧化物层以及通过湿法或干蚀刻在第二硅层中形成歧管，压力室和阻尼器的第二硅层，并且通过干法蚀刻形成穿过中间氧化物层和第一硅层的喷嘴，以及方法的制造相同。

9. 发明授权

US07695118B2 Piezoelectric inkjet printhead and method of manufacturing the same 失效
标题翻译：压电喷墨打印头及其制造方法
公开(公告)号：US07695118B2
公开(公告)日：2010-04-13
申请号：US11468954
申请日：2006-08-31
申请人： Jae-chang Lee , Jae-woo Chung , Kyo-yool Lee , Chang-seung Lee , Sung-gyu Kang
发明人： Jae-chang Lee , Jae-woo Chung , Kyo-yool Lee , Chang-seung Lee , Sung-gyu Kang
IPC分类号： B41J2/045
CPC分类号： B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1628 , B41J2/1629 , Y10T29/42 , Y10T29/49401
摘要： A piezoelectric inkjet printhead including an upper substrate formed of a single crystal silicon substrate or an SOI substrate and having an ink inlet therethrough, and a lower substrate formed of an SOI substrate having a sequentially stacked structure with a first silicon layer, an intervening oxide layer, and a second silicon layer in which a manifold, pressure chambers, and dampers are formed in the second silicon layer by wet or dry etching, and nozzles are formed through the intervening oxide layer and the first silicon layer by dry etching, and a method of manufacturing the same.
摘要翻译：一种压电喷墨打印头，包括由单晶硅衬底或SOI衬底形成的上衬底，并且具有墨入口，以及由具有第一硅层的顺序层叠结构的SOI衬底形成的下衬底，中间氧化物层以及通过湿法或干蚀刻在第二硅层中形成歧管，压力室和阻尼器的第二硅层，并且通过干法蚀刻形成穿过中间氧化物层和第一硅层的喷嘴，以及方法的制造相同。

10. 发明申请

US20090096843A1 INKJET PRINTING DEVICE AND METHOD OF DRIVING THE SAME 有权
标题翻译：喷墨打印装置及其驱动方法
公开(公告)号：US20090096843A1
公开(公告)日：2009-04-16
申请号：US12107133
申请日：2008-04-22
申请人： Jae-woo Chung , Young-ki Hong , Sung-gyu Kang
发明人： Jae-woo Chung , Young-ki Hong , Sung-gyu Kang
IPC分类号： B41J2/045
CPC分类号： B41J2/06 , B41J2/14 , B41J2/14233 , B41J2202/09
摘要： An inkjet printing device includes a flow path plate comprising a manifold to supply ink, a pressure chamber filled with the ink supplied from the manifold, and a nozzle via which the ink is ejected, a piezoelectric actuator which is disposed on a top surface of the flow path plate and includes a lower electrode, a piezoelectric layer, and an upper electrode that are stacked sequentially, a first electrostatic electrode to generate an electrostatic field, and a second electrostatic electrode which is disposed a predetermined distance apart from a bottom surface of the flow path plate to generate the electrostatic field between the first electrostatic electrode and the second electrostatic electrode.
摘要翻译：喷墨打印装置包括流路板，该流路板包括用于供应墨水的歧管，填充有从歧管供应的墨的压力室和喷射墨水的喷嘴，压电致动器，设置在喷嘴的顶表面上流路板，并且包括顺序堆叠的下电极，压电层和上电极，产生静电场的第一静电电极和与所述第一静电电极的底表面隔开设置的第二静电电极流路板以产生第一静电电极和第二静电电极之间的静电场。

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