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    • 6. 发明授权
    • Piezoelectric inkjet head and method of manufacturing the same
    • 压电喷墨头及其制造方法
    • US07891064B2
    • 2011-02-22
    • US11768293
    • 2007-06-26
    • Sung-gyu KangYoung-ki HongJae-woo ChungSe-young Oh
    • Sung-gyu KangYoung-ki HongJae-woo ChungSe-young Oh
    • H01L41/22B41J2/045
    • B41J2/14233B41J2/055B41J2/161B41J2/1628B41J2/1629B41J2/1631B41J2/1632B41J2/1642B41J2002/14403B41J2002/14419B41J2202/03B41J2202/11Y10T29/42
    • A piezoelectric inkjet head and a method of manufacturing the piezoelectric inkjet head. The piezoelectric inkjet head includes three single crystal silicon substrates bonded to each other. An upper substrate includes an ink inlet, a plurality of pressure chambers, and a plurality of piezoelectric actuators, a middle substrate includes a manifold, a plurality of restrictors, and a plurality of first dampers, and a lower substrate includes a plurality of nozzles. The middle substrate also includes a membrane that is formed under the manifold to mitigate a rapid pressure change in the manifold and if formed of a material different from the material used for forming the middle substrate. A cavity located under the membrane and at least one venting channel that connects the cavity to the outside are formed in the middle substrate or the lower substrate. Due to the above configuration, the membrane having flexibility mitigates a rapid pressure change in the manifold caused by backflow of ink, and thus, cross-talk between adjacent pressure chambers during ink ejection can be effectively prevented.
    • 压电喷墨头和压电喷墨头的制造方法。 压电喷墨头包括彼此结合的三个单晶硅衬底。 上基板包括墨入口,多个压力室和多个压电致动器,中间基板包括歧管,多个限流器和多个第一阻尼器,下基板包括多个喷嘴。 中间基板还包括形成在歧管下方的膜,以减轻歧管中的快速压力变化,并且如果由不同于用于形成中间基板的材料形成的材料形成。 在中间基板或下基板中形成位于膜下方的空腔和将空腔连接到外部的至少一个通气通道。 由于上述结构,具有柔性的膜减轻了由于油墨的回流引起的歧管中的快速压力变化,因此可以有效地防止在喷墨期间相邻压力室之间的串扰。