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    • 2. 发明申请
    • Heating element
    • 加热元件
    • US20070241095A1
    • 2007-10-18
    • US11783580
    • 2007-04-10
    • Noboru KimuraYoshihiro KubotaWaichi YamamuraShoji Kano
    • Noboru KimuraYoshihiro KubotaWaichi YamamuraShoji Kano
    • F27D11/00
    • H01L21/67103H01L21/67098H05B3/143H05B2203/003
    • There is disclosed a heating element 10 comprising: at least a heat-resistant base member 1; a conductive layer 3 having a heater pattern 3a formed on the heat-resistant base member; a protection layer 4 with an insulating property formed on the conductive layer; and a corrosion-resistant layer 4p having a nitrogen gas permeability of 1×10−2 cm2/sec or less or being made of a compound containing a dopant formed on the protection layer 4. There can be provided a heating element in which a corrosion-resistant layer whose nitrogen gas permeability, resistivity, or hardness are controlled is formed on a protection layer and through which the corrosive gas is difficult to be transmitted even under an environment of a high temperature and a corrosive gas and by which degradation due to corrosion of a conductive layer, particularly, a power-supply-terminal portion can be avoided and additionally which can fulfill a high function as an electrostatic chuck even when having a chuck pattern and which has a long operation life and is capable of being produced at a low cost.
    • 公开了一种加热元件10,其包括:至少一个耐热底座件1; 具有形成在耐热基体上的加热器图案3a的导电层3; 在导电层上形成具有绝缘性的保护层4; 以及氮气渗透率为1×10 -2 cm 2 / sec以下的耐腐蚀层4p,或者由在保护层上形成的含有掺杂剂的化合物构成 第4层。 可以提供一种加热元件,其中在保护层上形成氮气渗透性,电阻率或硬度的耐腐蚀层,即使在高温环境下也难以将腐蚀性气体透过 并且可以避免腐蚀性气体,并且可以避免由于导电层,特别是电源端子部分的腐蚀而导致的劣化,并且另外,即使当具有卡盘图案也能够实现作为静电卡盘的高功能,并且具有 使用寿命长,能够以低成本生产。
    • 4. 发明授权
    • Heating element
    • 加热元件
    • US08115141B2
    • 2012-02-14
    • US11783580
    • 2007-04-10
    • Noboru KimuraYoshihiro KubotaWaichi YamamuraShoji Kano
    • Noboru KimuraYoshihiro KubotaWaichi YamamuraShoji Kano
    • F27D11/00C23C16/00
    • H01L21/67103H01L21/67098H05B3/143H05B2203/003
    • There is disclosed a heating element 10 comprising: at least a heat-resistant base member 1; a conductive layer 3 having a heater pattern 3a formed on the heat-resistant base member; a protection layer 4 with an insulating property formed on the conductive layer; and a corrosion-resistant layer 4p having a nitrogen gas permeability of 1×10−2 cm2/sec or less or being made of a compound containing a dopant formed on the protection layer 4. There can be provided a heating element in which a corrosion-resistant layer whose nitrogen gas permeability, resistivity, or hardness are controlled is formed on a protection layer and through which the corrosive gas is difficult to be transmitted even under an environment of a high temperature and a corrosive gas and by which degradation due to corrosion of a conductive layer, particularly, a power-supply-terminal portion can be avoided and additionally which can fulfill a high function as an electrostatic chuck even when having a chuck pattern and which has a long operation life and is capable of being produced at a low cost.
    • 公开了一种加热元件10,其包括:至少一个耐热底座件1; 导电层3,其具有形成在耐热基底构件上的加热器图案3a; 在导电层上形成具有绝缘性的保护层4; 以及氮气渗透率为1×10 -2 cm 2 / sec以下的耐腐蚀层4p,或由保护层4上形成的含有掺杂剂的化合物构成。可以提供一种加热元件,其中腐蚀 氮气渗透性,电阻率或硬度被控制的耐热层形成在保护层上,即使在高温环境和腐蚀性气体环境下腐蚀性气体也难以透过,腐蚀性降低 导电层,特别是电源端子部分,可以避免和附加地,即使当具有卡盘图案并且具有长的使用寿命并且能够在 低成本。
    • 8. 发明授权
    • Heating element
    • 加热元件
    • US07952054B2
    • 2011-05-31
    • US11783581
    • 2007-04-10
    • Noboru KimuraYoshihiro KubotaWaichi YamamuraShoji Kano
    • Noboru KimuraYoshihiro KubotaWaichi YamamuraShoji Kano
    • F27D11/00C23C16/00
    • H01L21/67103H05B3/143
    • There is disclosed a heating element 10 comprising: at least a heat-resistant base member 1; a conductive layer 3 having a heater pattern 3a formed on the heat-resistant base member; a protection layer 4 with an insulating property formed on the conductive layer; and a corrosion-resistant layer 4p that is an oxide having an oxygen amount of stoichiometric ratio or less formed on the protection layer. There can be provided a heating element in which a corrosion-resistant layer whose resistivity or hardness is controlled is formed on a protection layer and through which the corrosive gas is difficult to be transmitted even under an environment of a high temperature and a corrosive gas and by which degradation due to corrosion of a conductive layer, particularly, a power-supply-terminal portion can be avoided and additionally which can fulfill a high function as an electrostatic chuck even when having a chuck pattern and which has a long operation life and is capable of being produced at a low cost.
    • 公开了一种加热元件10,其包括:至少一个耐热底座件1; 导电层3,其具有形成在耐热基底构件上的加热器图案3a; 在导电层上形成具有绝缘性的保护层4; 以及作为在保护层上形成的具有化学计量比的氧的量的氧化物的耐腐蚀层4p。 可以提供一种加热元件,其中在保护层上形成电阻率或硬度被控制的耐腐蚀层,即使在高温环境和腐蚀性气体的环境下腐蚀性气体难以透过, 由此,能够避免由于导电层,特别是电源端子部分的腐蚀而导致的劣化,另外即使具有卡盘图案也能够实现作为静电卡盘的高功能,并且具有长的使用寿命并且是 能够以低成本生产。
    • 9. 发明申请
    • Corrosion-resistant multilayer ceramic member
    • 耐腐蚀多层陶瓷构件
    • US20100003510A1
    • 2010-01-07
    • US12457781
    • 2009-06-22
    • Shoji KanoWaichi YamamuraYoshihiro Kubota
    • Shoji KanoWaichi YamamuraYoshihiro Kubota
    • B32B7/00
    • H01L21/6831H01L21/67103Y10T428/26Y10T428/263Y10T428/264Y10T428/265
    • The present invention is a corrosion-resistant multilayer ceramic member including at least: a ceramic substrate, an electrode layer formed on the ceramic substrate, a feeding member that supplies electricity to the electrode layer, and a protection layer that prevents corrosion; wherein the electrode layer is formed on one surface or both surfaces of the ceramic substrate, the feeding member is connected with the electrode layer, the protection layer is formed with a thickness of 0.02 mm or above and 10 mm or less on that surface of the ceramic substrate where the electrode layer is formed so as to cover the electrode layer, and the protection layer contains any one of silicon oxide, rare-earth oxide, aluminum nitride, and aluminum oxide as a main component. Hereby, there is provided a corrosion-resistant multilayer ceramic member that has excellent corrosion resistance and a long life duration even when exposed to a corrosive gas.
    • 本发明是一种耐腐蚀性多层陶瓷构件,至少包括:陶瓷基板,形成在陶瓷基板上的电极层,向电极层供电的进给构件和防止腐蚀的保护层; 其中所述电极层形成在所述陶瓷基板的一个表面或两个表面上,所述馈送构件与所述电极层连接,所述保护层在所述表面上形成为0.02mm以上且10mm以下的厚度 陶瓷基板,其中形成电极层以覆盖电极层,并且保护层包含氧化硅,稀土氧化物,氮化铝和氧化铝中的任一种作为主要成分。 因此,提供了即使暴露于腐蚀性气体时也具有优异的耐腐蚀性和长寿命的耐腐蚀性多层陶瓷构件。