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1. 发明授权

US08619528B2 Method and system for optical calibration 有权
公开(公告)号：US08619528B2
公开(公告)日：2013-12-31
申请号：US13223199
申请日：2011-08-31
申请人： Hamid Ghazvini , David Kuo , Minh Huong Le , Kim Yang Lee , HongYing Wang , Nobuo Kurataka , Yautzong Hsu , Henry Hung Yang
发明人： Hamid Ghazvini , David Kuo , Minh Huong Le , Kim Yang Lee , HongYing Wang , Nobuo Kurataka , Yautzong Hsu , Henry Hung Yang
IPC分类号： G11B20/00
CPC分类号： G06K5/00 , G11B5/746 , G11B5/82 , G11B5/84 , G11B5/855 , G11B20/182 , G11B27/36 , G11B2220/2516
摘要： A system and method of calibrating optical measuring equipment includes optically measuring discrete objects of a first known predictable pattern from a calibration apparatus, wherein the first known predictable pattern is a bit pattern. A recording surface optical reader is calibrated based on the optically measuring. Using the first known predictable pattern, contamination is filtered from the results of the optically measuring.

2. 发明申请

US20110132867A1 METHOD AND SYSTEM FOR IMPRINT LITHOGRAPHY 审中-公开
标题翻译：用于印刷图的方法和系统
公开(公告)号：US20110132867A1
公开(公告)日：2011-06-09
申请号：US12915583
申请日：2010-10-29
申请人： Henry Hung Yang , Kim Yang Lee , Yautzong Hsu , Shuaigang Xiao , Xiaomin Yang , HongYing Wang , Zhaoning Yu
发明人： Henry Hung Yang , Kim Yang Lee , Yautzong Hsu , Shuaigang Xiao , Xiaomin Yang , HongYing Wang , Zhaoning Yu
IPC分类号： B29C71/04 , B29C59/16
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00 , G11B5/746 , G11B5/82 , G11B5/855
摘要： A method and apparatus of imprint lithography wherein the method includes depositing a material on a patterned surface of a conductive substrate, and pressing a transparent substrate and the conductive substrate together, wherein the pressing causes the material to conform to the patterned surface. Energy is applied to the material to form patterned material from the material. The transparent substrate and the conductive substrate are separated, wherein the patterned material adheres to the transparent substrate.
摘要翻译：压印光刻的方法和装置，其中所述方法包括在导电衬底的图案化表面上沉积材料，并将透明衬底和导电衬底压在一起，其中所述压制使得材料符合图案化表面。能量被施加到材料上以从材料形成图案化材料。分离透明基板和导电基板，其中图案化材料粘附到透明基板。

3. 发明申请

US20100147797A1 SYSTEM AND METHOD FOR PATTERNING A MASTER DISK FOR NANOIMPRINTING PATTERNED MAGNETIC RECORDING DISKS 审中-公开
标题翻译：用于绘制图形磁记录盘的主磁盘的系统和方法
公开(公告)号：US20100147797A1
公开(公告)日：2010-06-17
申请号：US12711987
申请日：2010-02-24
申请人： Thomas R. Albrecht , Dennis R. McKean , Gurinder Pal Singh , Henry Hung Yang
发明人： Thomas R. Albrecht , Dennis R. McKean , Gurinder Pal Singh , Henry Hung Yang
IPC分类号： C23F1/02
CPC分类号： G11B5/855
摘要： A system and method for patterning a master disk or “stamper” to be used for nanoimprinting magnetic recording disks uses an air-bearing slider that supports an aperture structure within the optical near-field of a resist layer on a rotating master disk substrate. Laser pulses directed to the input side of the aperture are output to the resist layer. The aperture structure includes a metal film reflective to the laser radiation with the aperture formed in it. The aperture has a size less than the wavelength of the incident laser radiation and is maintained by the air-bearing slider near the resist layer to within the radiation wavelength. The timing of the laser pulses is controlled to form a pattern of exposed regions in the resist layer, with this pattern ultimately resulting in the desired pattern of data islands and nondata islands in the magnetic recording disks when they are nanoimprinted by the master disk.
摘要翻译：用于图形化用于纳米压印磁记录盘的母盘或“压模”的系统和方法使用支撑旋转母盘衬底上的抗蚀剂层的光学近场内的孔结构的空气轴承滑块。指向孔径输入侧的激光脉冲输出到抗蚀剂层。孔结构包括反射激光辐射的金属膜，其中形成有孔。孔径的尺寸小于入射激光辐射的波长，并且由抗蚀剂层附近的空气轴承滑块维持在辐射波长内。控制激光脉冲的定时以形成抗蚀剂层中的暴露区域的图案，当这些图案被母盘纳米压印时，该图案最终导致磁记录盘中的数据岛和非数据岛的期望图案。

4. 发明授权

US07553426B2 Apparatus, system, and method for increasing data storage density in patterned media 有权
标题翻译：用于增加图案化介质中数据存储密度的装置，系统和方法
公开(公告)号：US07553426B2
公开(公告)日：2009-06-30
申请号：US11069874
申请日：2005-03-01
申请人： Thomas Robert Albrecht , Henry Hung Yang
发明人： Thomas Robert Albrecht , Henry Hung Yang
IPC分类号： B44C1/22
CPC分类号： G11B5/59644
摘要： An apparatus, system, and method are disclosed for increasing data storage density in patterned media. One or more deposition sources may apply magnetic material to one or more recesses formed in a substrate, each recess having opposing sidewalls that are effectively coated by the deposition sources. The top surface of the substrate may subsequently be planarized to remove magnetic material from such surface, thereby isolating one or more recordable magnetic regions formed on each sidewall. In this manner, the present invention may provide at least two recordable regions for every recess formed in a substrate.
摘要翻译：公开了用于增加图案化介质中的数据存储密度的装置，系统和方法。一个或多个沉积源可以将磁性材料施加到形成在衬底中的一个或多个凹部，每个凹部具有由沉积源有效地涂覆的相对的侧壁。随后可以将衬底的顶表面平坦化以从这种表面去除磁性材料，从而隔离形成在每个侧壁上的一个或多个可记录磁性区域。以这种方式，本发明可以为形成在基板中的每个凹部提供至少两个可记录区域。

5. 发明申请

US20080141523A1 Planarization methods for patterned media disks 有权
标题翻译：图案化媒体盘的平面化方法
公开(公告)号：US20080141523A1
公开(公告)日：2008-06-19
申请号：US11641237
申请日：2006-12-18
申请人： Zvonimir Z. Bandic , Elizabeth Ann Dobisz , Jui-Lung Li , Henry Hung Yang
发明人： Zvonimir Z. Bandic , Elizabeth Ann Dobisz , Jui-Lung Li , Henry Hung Yang
IPC分类号： B05D5/12 , G11B5/127
CPC分类号： G11B5/82 , B82Y10/00 , G11B5/743 , G11B5/746 , G11B5/855 , Y10T29/49043 , Y10T29/49046 , Y10T29/49048
摘要： A method is provided for forming a plurality of regions of magnetic material in a substrate having a first approximately planar surface. The method comprises the steps of fabricating projections in the first surface of the substrate, depositing onto the first surface a magnetic material in such a way that the tops of the projections are covered with magnetic material, and depositing filler material atop the substrate so produced. The filler material may then be planarized, for example by chemical-mechanical polishing. In an alternative embodiment magnetic material is deposited on a substrate and portions of it are removed, leaving islands of material. Filler material is then deposited, which may be planarized.
摘要翻译：提供了一种用于在具有第一近似平面的基板中形成多个磁性材料区域的方法。该方法包括以下步骤：在衬底的第一表面中制造突起，在第一表面上沉积磁性材料，使得突起的顶部被磁性材料覆盖，并将填充材料沉积在如此制造的衬底上。然后可以例如通过化学机械抛光将填料材料平坦化。在替代实施例中，磁性材料沉积在基底上，并且其部分被去除，留下材料岛。然后沉积填料，其可以被平坦化。

6. 发明授权

US07230800B2 Microactuator for a hard disk drive with an integrated gimbal function 有权
标题翻译：具有集成万向节功能的硬盘驱动器的微型制动器
公开(公告)号：US07230800B2
公开(公告)日：2007-06-12
申请号：US10627096
申请日：2003-07-24
申请人： Toshiki Hirano , Ullal Vasant Nayak , Henry Hung Yang
发明人： Toshiki Hirano , Ullal Vasant Nayak , Henry Hung Yang
IPC分类号： G11B5/596 , G11B5/48
CPC分类号： G11B5/4826
摘要： A micro-fabricated chip having a stationary structure and a movable structure with a gimbal structure allows pitch and roll motion of the movable structure with respect to the stationary structure. One embodiment of the gimbal structure includes a dimple surface making a rolling-type contact with the stationary structure, and a center bar and a plurality of bar members. An alternative embodiment of the gimbal structure includes a plurality of torsion bar members. Another alternative embodiment of the gimbal structure includes a plurality of flexible members. The micro-fabricated chip can be a passive chip structure or, alternatively, a microactuator having a movable structure that moves in a rotational direction or a translational direction with respect to the stationary structure.
摘要翻译：具有静止结构的微制造芯片和具有万向架结构的可移动结构允许可移动结构相对于固定结构的俯仰和滚动运动。万向架结构的一个实施例包括形成与静止结构的滚动型接触的凹坑表面，以及中心杆和多个杆构件。万向节结构的一个替代实施例包括多个扭杆构件。万向架结构的另一个实施例包括多个柔性构件。微制造芯片可以是无源芯片结构，或者具有可移动结构的微致动器，该可移动结构相对于固定结构在旋转方向或平移方向上移动。

7. 发明授权

US07046476B1 Method apparatus and system for accessing discontinuous media tracks 有权
标题翻译：用于访问不连续媒体轨道的方法装置和系统
公开(公告)号：US07046476B1
公开(公告)日：2006-05-16
申请号：US11032355
申请日：2005-01-10
申请人： Thomas Robert Albrecht , Henry Hung Yang
发明人： Thomas Robert Albrecht , Henry Hung Yang
IPC分类号： G11B5/596
CPC分类号： G11B5/59627 , G11B5/59688
摘要： An apparatus, system, and method are disclosed for accessing discontinuous media tracks. The apparatus, in one embodiment, accesses discontinuous media tracks of a storage medium having one or more independently formed storage regions thereon. Each storage region may include a set of track segments. A memory may be provided to store track offset information for each storage region. A mapping module may collect track offset information, calculate a physical offset between adjacent storage regions, define a track, create a table, and store the track offset information in the memory. The apparatus may further include a tracking module to sense a position of a head relative to a centerline of a track segment within a current storage region, access offset information, and align a storage head with a closely aligned track segment within a subsequent storage region. Consequently, discontinuous media tracks may be accessed by a storage access device.
摘要翻译：公开了用于访问不连续媒体轨道的装置，系统和方法。在一个实施例中，该装置访问其上具有一个或多个独立形成的存储区域的存储介质的不连续介质轨道。每个存储区域可以包括一组轨道段。可以提供存储器来存储每个存储区域的轨道偏移信息。映射模块可以收集轨道偏移信息，计算相邻存储区域之间的物理偏移量，定义轨道，创建表格，以及将轨道偏移信息存储在存储器中。该装置还可以包括跟踪模块，用于感测头部相对于当前存储区域内的轨道段的中心线的位置，访问偏移信息，以及使存储头与随后存储区域内的紧密对准的轨道段对准。因此，不连续媒体轨道可以被存储访问设备访问。

8. 发明申请

US20110258841A1 Planarization Methods For Patterned Media Disks 失效
标题翻译：图案化媒体盘的平面化方法
公开(公告)号：US20110258841A1
公开(公告)日：2011-10-27
申请号：US13082189
申请日：2011-04-07
申请人： Zvonimir Z. Bandic , Elizabeth Ann Dobisz , Jui-Lung Li , Henry Hung Yang
发明人： Zvonimir Z. Bandic , Elizabeth Ann Dobisz , Jui-Lung Li , Henry Hung Yang
IPC分类号： G11B5/127
CPC分类号： G11B5/82 , B82Y10/00 , G11B5/743 , G11B5/746 , G11B5/855 , Y10T29/49043 , Y10T29/49046 , Y10T29/49048
摘要： A method is provided for forming a plurality of regions of magnetic material in a substrate having a first approximately planar surface. The method comprises the steps of fabricating projections in the first surface of the substrate, depositing onto the first surface a magnetic material in such a way that the tops of the projections are covered with magnetic material, and depositing filler material atop the substrate so produced. The filler material may then be planarized, for example by chemical-mechanical polishing. In an alternative embodiment magnetic material is deposited on a substrate and portions of it are removed, leaving islands of material. Filler material is then deposited, which may be planarized.
摘要翻译：提供了一种用于在具有第一近似平面的基板中形成多个磁性材料区域的方法。该方法包括以下步骤：在衬底的第一表面中制造突起，在第一表面上沉积磁性材料，使得突起的顶部被磁性材料覆盖，并将填充材料沉积在如此制造的衬底上。然后可以例如通过化学机械抛光将填料材料平坦化。在替代实施例中，磁性材料沉积在基底上，并且其部分被去除，留下材料岛。然后沉积填料，其可以被平坦化。

9. 发明授权

US08003236B2 Method for making a master mold with high bit-aspect-ratio for nanoimprinting patterned magnetic recording disks, master mold made by the method, and disk imprinted by the master mold 有权
标题翻译：用于制造具有高比特宽比的用于纳米压印图案化磁记录盘的母模的方法，通过该方法制造的母模和由母模印制的盘
公开(公告)号：US08003236B2
公开(公告)日：2011-08-23
申请号：US12141060
申请日：2008-06-17
申请人： Thomas R. Albrecht , Barry Cushing Stipe , Henry Hung Yang
发明人： Thomas R. Albrecht , Barry Cushing Stipe , Henry Hung Yang
IPC分类号： G11B5/64
CPC分类号： G11B5/855
摘要： A method for making a master mold to be used for nanoimprinting patterned-media magnetic recording disks results in a master mold having topographic pillars arranged in a pattern of annular bands of concentric rings. The ratio of circumferential density of the pillars to the radial density of the concentric rings in a band is greater than 1. The method uses sidewall lithography to first form a pattern of generally radially-directed pairs of parallel lines on the master mold substrate, with the lines being grouped into annular zones or bands. The sidewall lithography process can be repeated, resulting in a doubling of the number of lines each time the process is repeated. Conventional lithography is used to form concentric rings over the radially-directed pairs of parallel lines. After etching and resist removal, the master mold has pillars arranged in circular rings, with the rings grouped into annular bands. The master mold may be used to nanoimprint the disks, resulting in disks having a BAR greater than 1, wherein BAR is the ratio of data track spacing in the radial direction to the data island spacing in the circumferential direction.
摘要翻译：用于制造用于纳米压印图案化介质磁记录盘的母模的方法导致具有布置成同心环的环形带图案的形状柱的母模。柱的圆周密度与带中同心环的径向密度的比率大于1.该方法使用侧壁光刻法首先在母模基底上形成大致径向定向的平行线对图案，其中，线路被分组成环形区域或带。可以重复侧壁光刻处理，导致每次重复该过程的行数加倍。常规光刻用于在径向对平行线上形成同心环。在蚀刻和抗蚀剂去除之后，主模具有布置成圆形环的柱，其中环被分组成环形带。主模可以用于纳米压印盘，导致具有大于1的BAR的盘，其中BAR是径向方向上的数据轨道间隔与圆周方向上的数据岛间隔的比率。

10. 发明授权

US07969686B2 Self-assembly structures used for fabricating patterned magnetic media 有权
标题翻译：用于制造图案化磁性介质的自组装结构
公开(公告)号：US07969686B2
公开(公告)日：2011-06-28
申请号：US11964680
申请日：2007-12-26
申请人： Thomas R. Albrecht , Xiao Z. Wu , Henry Hung Yang
发明人： Thomas R. Albrecht , Xiao Z. Wu , Henry Hung Yang
IPC分类号： G11B5/82
CPC分类号： G11B5/855 , B82Y10/00 , G11B5/743 , G11B5/82 , G11B5/865
摘要： Methods of defining servo patterns and data patterns for forming patterned magnetic media are described. For one method, a lithographic process is performed to define a servo pattern in servo regions on a substrate. The lithographic process also defines a first data pattern in data regions of the substrate. The first data pattern is then transferred to (i.e., etched into) the data regions. Self-assembly structures are then formed on the data pattern in the data regions to define a second data pattern. The servo pattern is then transferred to the servo regions and the second data pattern is transferred to the data regions. Thus, the servo pattern is defined through lithographic processes while the data pattern is defined by a combination of lithographic processes and self-assembly.
摘要翻译：描述了定义用于形成图案化磁性介质的伺服图案和数据图案的方法。对于一种方法，执行光刻处理以在衬底上的伺服区域中定义伺服图案。光刻工艺还定义了衬底的数据区域中的第一数据模式。然后将第一数据模式转移到（即蚀刻）数据区。然后在数据区域中的数据模式上形成自组装结构以定义第二数据模式。然后将伺服模式传送到伺服区域，并将第二数据模式传送到数据区域。因此，通过光刻工艺定义伺服图案，同时通过光刻工艺和自组装的组合来定义数据图案。

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