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1. 发明授权

US07837305B2 Piezoelectric element, ink jet head, and ink jet recording device 有权
标题翻译：压电元件，喷墨头和喷墨记录装置
公开(公告)号：US07837305B2
公开(公告)日：2010-11-23
申请号：US12021373
申请日：2008-01-29
申请人： Shintarou Hara , Osamu Watanabe , Kazumi Sadamatsu , Hideaki Horio , Eiji Fujii
发明人： Shintarou Hara , Osamu Watanabe , Kazumi Sadamatsu , Hideaki Horio , Eiji Fujii
IPC分类号： B41J2/045
CPC分类号： B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1635 , B41J2/1642 , B41J2/1643 , B41J2/1645 , B41J2/1646 , B41J2202/11 , H01L41/0475 , H01L41/0973
摘要： A piezoelectric element includes a pressure chamber member that has an opening communicating with a nozzle, a vibrating plate that is disposed on the pressure chamber member so as to cover the opening, a lower electrode that is disposed on the vibrating plate, a piezoelectric body that is disposed on the lower electrode, an upper electrode that is disposed on the piezoelectric body and in a region opposed to the opening, and a lead electrode that is disposed on the piezoelectric body, that extends from the upper electrode, and that has a width smaller than that of the upper electrode. The piezoelectric body includes a groove portion that is disposed in a predetermined region along an edge portion of the opening and an inactive region (piezoelectric inactive region) that is a region other than the groove portion, that is disposed along the edge portion of the opening, and that does not substantially serve as a piezoelectric element. The lead electrode is disposed in the piezoelectric inactive region.
摘要翻译：压电元件包括具有与喷嘴连通的开口的压力室构件，设置在压力室构件上以覆盖开口的振动板，设置在振动板上的下电极，压电体，设置在下电极上，上电极设置在压电体上并且与开口相对的区域中，以及引线电极，其设置在压电体上，其从上电极延伸，并且具有宽度小于上电极。压电体包括沿着开口的边缘部分布置在预定区域中的凹槽部分和沿着开口的边缘部分设置的除了凹槽部分之外的区域的非活动区域（压电非活性区域），并且基本上不用作压电元件。引线电极设置在压电无源区域中。

2. 发明授权

US08020974B2 Piezoelectric thin film device and piezoelectric thin film device manufacturing method, and inkjet head and inkjet recording apparatus 有权
标题翻译：压电薄膜器件和压电薄膜器件制造方法，以及喷墨头和喷墨记录设备
公开(公告)号：US08020974B2
公开(公告)日：2011-09-20
申请号：US12022219
申请日：2008-01-30
申请人： Shintarou Hara , Osamu Watanabe , Kazumi Sadamatsu , Yuuji Toyomura , Eiji Fujii
发明人： Shintarou Hara , Osamu Watanabe , Kazumi Sadamatsu , Yuuji Toyomura , Eiji Fujii
IPC分类号： B41J2/045
CPC分类号： C23C14/088 , B41J2/161 , B41J2/1623 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1635 , B41J2/1645 , B41J2/1646 , C23C14/3414 , H01L41/0973 , H01L41/1876 , H01L41/316 , H01L41/319 , Y10T428/25
摘要： One objective of the invention is to provide a highly-efficient and reliable piezoelectric thin film device by improving the piezoelectric function of a piezoelectric thin film and obtaining a crystal structure wherein the dependency of a piezoelectric constant, relative to a voltage, is superior, and to also provide a method for manufacturing this piezoelectric thin film device. Another objective of the invention is to provide an inkjet head that satisfactorily exhibits the piezoelectric performance of the piezoelectric thin film device and that has a superior withstand voltage function and driving reliability, and to provide a high quality inkjet recording apparatus on which this inkjet head can be mounted. A piezoelectric thin film device includes: crystal grains that form piezoelectric thin film and grain boundaries that encircle the crystal grains, wherein the same crystal orientation is established for the grain boundaries and the crystal grains.
摘要翻译：本发明的一个目的是通过改善压电薄膜的压电功能并获得相对于电压的压电常数的依赖性优异的晶体结构，提供了一种高效可靠的压电薄膜器件，以及还提供了制造该压电薄膜器件的方法。本发明的另一个目的是提供一种令人满意地表现出压电薄膜器件的压电性能并且具有优异的耐电压功能和驱动可靠性的喷墨头，并提供一种高质量的喷墨记录装置，被安装。压电薄膜器件包括：形成压电薄膜的晶粒和环绕晶粒的晶界，其中对于晶界和晶粒形成相同的晶体取向。

3. 发明申请

US20120281046A1 PIEZOELECTRIC FILM AND METHOD OF MANUFACTURING THE SAME, INK JET HEAD, METHOD OF FORMING IMAGE BY THE INK JET HEAD, ANGULAR VELOCITY SENSOR, METHOD OF MEASURING ANGULAR VELOCITY BY THE ANGULAR VELOCITY SENSOR, PIEZOELECTRIC GENERATING ELEMENT, AND METHOD OF GENERATING ELECTRIC POWER USING THE PIEZOELECTRIC GENERATING ELEMENT 有权
标题翻译：压电薄膜及其制造方法，喷墨头，由喷墨头，角速度传感器形成图像的方法，通过角速度传感器，压电发生元件测量角速度的方法，以及使用该方法生成电力的方法压电元件
公开(公告)号：US20120281046A1
公开(公告)日：2012-11-08
申请号：US13551058
申请日：2012-07-17
申请人： Takakiyo HARIGAI , Yoshiaki Tanaka , Hideaki Adachi , Eiji Fujii
发明人： Takakiyo HARIGAI , Yoshiaki Tanaka , Hideaki Adachi , Eiji Fujii
IPC分类号： H01L41/04 , G01P3/44 , B41J2/045 , H01L41/09 , H01L41/00
CPC分类号： H01L41/1871 , B41J2/14233 , C23C14/0021 , C23C14/025 , C23C14/088 , G01C19/5621 , G01C19/5628 , G01P3/44 , H01L41/0477 , H01L41/0973 , H01L41/1136
摘要： It is an object of the present invention to provide a lead-free piezoelectric film including a lead-free ferroelectric material and having low dielectric loss and high piezoelectric performance comparable to that of PZT, and a method of manufacturing the lead-free piezoelectric film.The present invention is directed to a piezoelectric film comprising a (NaxBiy)TiO0.5x+1.5y+2−BaTiO3 layer with a (110) orientation, where 0.30≦x≦0. 46 and 0.51≦y≦0.62.
摘要翻译：本发明的目的是提供一种无铅压电薄膜，其包括无铅铁电材料，并且具有与PZT相当的低介电损耗和高压电性能，以及制造无铅压电薄膜的方法。本发明涉及一种包括具有（110）取向的（NaxBiy）TiO0.5x + 1.5y + 2-BaTiO3层的压电膜，其中0.30和n1E; x和n1E; 0。 46和0.51＆nlE; y＆nlE; 0.62。

4. 发明申请

US20120280599A1 PIEZOELECTRIC FILM AND METHOD OF MANUFACTURING THE SAME, INK JET HEAD, METHOD OF FORMING IMAGE BY THE INK JET HEAD, ANGULAR VELOCITY SENSOR, METHOD OF MEASURING ANGULAR VELOCITY BY THE ANGULAR VELOCITY SENSOR, PIEZOELECTRIC GENERATING ELEMENT, AND METHOD OF GENERATING ELECTRIC POWER USING THE PIEZOELECTRIC GENERATING ELEMENT 有权
标题翻译：压电薄膜及其制造方法，喷墨头，由喷墨头，角速度传感器形成图像的方法，通过角速度传感器，压电发生元件测量角速度的方法，以及使用该方法生成电力的方法压电元件
公开(公告)号：US20120280599A1
公开(公告)日：2012-11-08
申请号：US13550994
申请日：2012-07-17
申请人： Takakiyo HARIGAI , Yoshiaki Tanaka , Hideaki Adachi , Eiji Fujii
发明人： Takakiyo HARIGAI , Yoshiaki Tanaka , Hideaki Adachi , Eiji Fujii
IPC分类号： H01L41/02 , B41J2/045 , G01P15/09
CPC分类号： G01P15/09 , B41J2/14233 , B41J2002/14258 , G01C19/56 , G01C19/5628 , H01L41/0478 , H01L41/0805 , H01L41/0973 , H01L41/1136 , H01L41/187 , H01L41/1878 , H01L41/316
摘要： The purpose of the present invention is to provide an angular velocity sensor capable of measuring an exact angular velocity, an ink jet head capable of producing an exact amount of ink, and a piezoelectric generating element capable of generating electric power due to positive piezoelectric effect.In the present invention, a piezoelectric film comprising a first electrode, a piezoelectric layer, and a second electrode is used. The first electrode comprises an electrode layer having a (001) orientation. The piezoelectric layer comprises a (NaxBiy)TiO0.5x+1.5y+2—BaTiO3 layer (0.30≦x≦0.46 and 0.51≦y≦0.62) having a (001) orientation.
摘要翻译：本发明的目的是提供一种能够测量精确角速度的角速度传感器，能够产生精确量的墨水的喷墨头，以及能够由于正的压电效应产生电力的压电发生元件。在本发明中，使用包括第一电极，压电层和第二电极的压电膜。第一电极包括具有（001）取向的电极层。压电层包含具有（001）取向的（NaxBiy）TiO0.5x + 1.5y + 2-BaTiO3层（0.30＆lt; nlE; x＆lt; lE; 0.46和0.51＆nlE; y＆nlE; 0.62）。

5. 发明授权

US08118347B2 Structure of mounting impact absorption material for use with vehicle 有权
标题翻译：用于车辆的安装冲击吸收材料的结构
公开(公告)号：US08118347B2
公开(公告)日：2012-02-21
申请号：US12791932
申请日：2010-06-02
申请人： Akihiro Kawashima , Masami Uratsu , Michinori Kawasumi , Eiji Fujii , Tomonari Masuda , Tadashi Nishimura , Mariko Wada , Mamoru Yamaguchi , Kenichi Uemori
发明人： Akihiro Kawashima , Masami Uratsu , Michinori Kawasumi , Eiji Fujii , Tomonari Masuda , Tadashi Nishimura , Mariko Wada , Mamoru Yamaguchi , Kenichi Uemori
IPC分类号： B60J7/00
CPC分类号： B60R21/04 , B60R21/0428 , B60R2021/0421
摘要： An aspect in accordance with the present invention is a structure of mounting an impact absorption material for use with a vehicle. The structure includes: a door trim 30, a holder, and an EA pad. The holder includes a base and a plurality of legs, the base of the holder being disposed on the compartment outer side surface of the EA pad. The plurality of legs are disposed at intervals around an outer peripheral edge of the base of the holder and extend from the base of the holder, along an outer peripheral side surface of the EA pad, and to the door trim, thereby fixing the base of the holder to the door trim.
摘要翻译：根据本发明的一个方面是安装用于车辆的冲击吸收材料的结构。该结构包括：门装饰件30，保持器和EA垫。保持器包括基部和多个腿，保持器的基部设置在EA垫的隔室外侧表面上。多个支腿围绕保持器的基部的外周边缘间隔设置，并且沿着EA垫的外周侧表面从保持器的基部延伸到门装饰件，从而将持有人到门饰。

6. 发明申请

US20110278991A1 PIEZOELECTRIC POWER GENERATING ELEMENT, AND METHOD OF GENERATING ELECTRIC POWER USING THE PIEZOELECTRIC POWER GENERATING ELEMENT 有权
标题翻译：压电发电元件及使用压电发电元件生成电力的方法
公开(公告)号：US20110278991A1
公开(公告)日：2011-11-17
申请号：US13191139
申请日：2011-07-26
申请人： Takakiyo HARIGAI , Michihito Ueda , Hideaki Adachi , Eiji Fujii
发明人： Takakiyo HARIGAI , Michihito Ueda , Hideaki Adachi , Eiji Fujii
IPC分类号： H02N2/18
CPC分类号： H02N2/186 , H01L41/1134
摘要： Provided is a relatively easy-to-fabricate piezoelectric power generating element capable of generating a large amount of electric power while comprising a bridge-type vibration beam that is resistant to damage from external vibration. This element comprises a support member, a strip-shaped vibration beam, a piezoelectric layer, and electrodes. The first and second ends of the vibration beam are fixed to the support member. The piezoelectric layer and the electrodes are provided on the surface of the vibration beam. The vibration beam extends in a plane when it is not vibrating. The vibration beam has a first portion that extends from the first end fixed to the support member, a second portion that extends from the second end fixed to the support member, and a third portion that connects the end of the first portion opposite to the first end and the end of the second portion opposite to the second end. The vibration beam has a shape such that, when viewed in a direction perpendicular to the plane, a first direction in which the first portion extends is a direction closer to the second end, and a second direction in which the second portion extends is a direction closer to the first end, the first and second directions each make an angle of more than 0° and less than 90° with respect to a straight line connecting the center of the first end and the center of the second end, and the third portion intersects once the straight line.
摘要翻译：提供一种相对容易制造的能够产生大量电力的压电发电元件，同时包括耐外部振动损坏的桥式振动梁。该元件包括支撑构件，条形振动梁，压电层和电极。振动梁的第一和第二端固定在支撑构件上。压电层和电极设置在振动梁的表面上。当振动梁不振动时，振动梁在平面内延伸。振动梁具有从固定到支撑构件的第一端延伸的第一部分，从固定到支撑构件的第二端延伸的第二部分，以及连接第一部分的与第一部分相对的端部的第三部分端部和第二部分的与第二端相对的端部。所述振动梁具有这样的形状：当从垂直于所述平面的方向观察时，所述第一部分延伸的第一方向是更靠近所述第二端的方向，并且所述第二部分延伸的第二方向是方向更靠近第一端，第一和第二方向相对于连接第一端的中心和第二端的中心的直线大于0°且小于90°，并且第三部分相交一次直线。

7. 发明申请

US20110143146A1 PIEZOELECTRIC THIN FILM AND METHOD OF MANUFACTURING THE SAME, INK JET HEAD, METHOD OF FORMING IMAGE WITH THE INK JET HEAD, ANGULAR VELOCITY SENSOR, METHOD OF MEASURING ANGULAR VELOCITY WITH THE ANGULAR VELOCITY SENSOR, PIEZOELECTRIC GENERATING ELEMENT, AND METHOD OF GENERATING ELECTRIC POWER WITH THE PIEZOELECTRIC GENERATING ELEMENT 有权
标题翻译：压电薄膜及其制造方法，喷墨头，用喷墨头形成图像的方法，角速度传感器，用角速度传感器，压电发生元件测量角速度的方法，以及生成电力的方法压电元件
公开(公告)号：US20110143146A1
公开(公告)日：2011-06-16
申请号：US12956772
申请日：2010-11-30
申请人： Takakiyo HARIGAI , Hideaki Adachi , Eiji Fujii
发明人： Takakiyo HARIGAI , Hideaki Adachi , Eiji Fujii
IPC分类号： H01L41/18 , B41J2/045 , G01C19/56 , H01L41/047 , H01L41/113 , B32B9/04 , C23C14/08
CPC分类号： B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1628 , B41J2/1631 , B41J2/1642 , B41J2/1645 , B41J2/1646 , B41J2002/14258 , G01C19/5628 , H01L41/0478 , H01L41/0815 , H01L41/1136 , H01L41/187 , H01L41/316 , H01L41/319
摘要： Provided are a piezoelectric thin film including a lead-free ferroelectric material and exhibiting high piezoelectric performance comparable to that of lead zirconate titanate (PZT), and a method of manufacturing the piezoelectric thin film. The piezoelectric thin film of the present invention comprises: a LaNiO3 film having a (001) orientation; a NaNbO3 film having a (001) orientation; and a (Bi, Na, Ba) TiO3 film having a (001) orientation. The LaNiO3 film, the NaNbO3 film, and the (Bi, Na, Ba)TiO3 film are laminated in this order.
摘要翻译：提供了一种包括无铅铁电材料并表现出与锆钛酸铅（PZT）相当的高压电性能的压电薄膜，以及制造压电薄膜的方法。本发明的压电薄膜包括：具有（001）取向的LaNiO3膜; 具有（001）取向的NaNbO 3膜; 和具有（001）取向的（Bi，Na，Ba）TiO 3膜。依次层叠LaNiO3膜，NaNbO3膜，（Bi，Na，Ba）TiO3膜。

8. 发明申请

US20110072900A1 PIEZOELECTRIC THIN FILM AND METHOD OF MANUFACTURING THE SAME, ANGULAR VELOCITY SENSOR, METHOD OF MEASURING ANGULAR VELOCITY BY THE ANGULAR VELOCITY SENSOR, PIEZOELECTRIC GENERATING ELEMENT, AND METHOD OF GENERATING ELECTRIC POWER USING THE PIEZOELECTRIC GENERATING ELEMENT 有权
标题翻译：压电薄膜及其制造方法，角速度传感器，通过角速度传感器测量角速度的方法，压电发生元件以及使用压电发生元件生成电力的方法
公开(公告)号：US20110072900A1
公开(公告)日：2011-03-31
申请号：US12963223
申请日：2010-12-08
申请人： Takakiyo Harigai , Hideaki Adachi , Eiji Fujii
发明人： Takakiyo Harigai , Hideaki Adachi , Eiji Fujii
IPC分类号： G01C19/56 , H01L41/18 , H01L41/047 , H02N2/18 , H01L41/22
CPC分类号： C23C14/08 , C04B35/475 , C04B2235/3201 , C04B2235/3215 , C04B2235/3236 , G01C19/5607 , G01C19/5642 , H01L41/187 , H01L41/316 , Y10T29/42
摘要： Provided are a piezoelectric thin film including a lead-free ferroelectric material and exhibiting high piezoelectric performance comparable to that of PZT, and a method of manufacturing the piezoelectric thin film. The piezoelectric thin film of the present invention has a multilayer structure in which a metal electrode film having a plane orientation of (100), a (Bi,Na)TiO3 film, and a (Bi,Na,Ba) TiO3 film having a plane orientation of (001) are laminated in this order. The piezoelectric thin film of the present invention can be applied to a wide range of fields and uses. For example, with the piezoelectric thin film of the present invention, an angular velocity sensor of the present invention having high sensitivity and a piezoelectric generating element of the present invention having excellent power generation characteristics can be constructed.
摘要翻译：提供一种包含无铅铁电材料并具有与PZT相当的高压电性能的压电薄膜，以及制造压电薄膜的方法。本发明的压电薄膜具有多层结构，其中具有平面取向为（100）的金属电极膜，（Bi，Na）TiO 3膜和（Bi，Na，Ba）TiO 3膜具有平面（001）的取向依次层叠。本发明的压电薄膜可以应用于广泛的领域和用途。例如，利用本发明的压电薄膜，可以构成具有高灵敏度的本发明的角速度传感器和具有优异发电特性的本发明的压电发生元件。

9. 发明授权

US07530676B2 Piezoelectric element, inkjet head, angular velocity sensor, methods for manufacturing them and inkjet recording device 有权
标题翻译：压电元件，喷墨头，角速度传感器，它们的制造方法和喷墨记录装置
公开(公告)号：US07530676B2
公开(公告)日：2009-05-12
申请号：US10560001
申请日：2005-02-21
申请人： Atsushi Tomozawa , Eiji Fujii , Hideo Torii
发明人： Atsushi Tomozawa , Eiji Fujii , Hideo Torii
IPC分类号： B41J2/045
CPC分类号： G01C19/5628 , B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1646 , B41J2002/1425 , B41J2002/14258 , H01L41/0815 , H01L41/094 , H01L41/0973 , H01L41/1876 , H01L41/316
摘要： A piezoelectric element includes two electrode films and a layered piezoelectric film which is sandwiched between the electrode films and made of two thin piezoelectric films each having preferred orientation along the (111) plane. The two thin piezoelectric films are aggregates of columnar grains, respectively, which are continuously linked to each other. The columnar grains of the second thin piezoelectric film have a larger average cross-sectional diameter than the columnar grains of the first thin piezoelectric film. The ratio of the thickness of the layered piezoelectric film to the average cross-sectional diameter of the columnar grains of the second thin piezoelectric film is 20 to 60 inclusive.
摘要翻译：压电元件包括两个电极膜和层压的压电膜，它被夹在电极膜之间并且由沿着（111）面优选取向的两个薄压电膜构成。两个薄压电薄膜分别是彼此连续地连接的柱状晶粒的聚集体。第二薄压电薄膜的柱状晶粒的平均截面直径比第一薄压电薄膜的柱状晶粒大。层叠型压电体膜的厚度与第二薄型压电膜的柱状晶粒的平均截面直径的比率为20〜60。

10. 发明申请

US20070293007A1 Semiconductor device and method for fabricating the same 有权
标题翻译：半导体装置及其制造方法
公开(公告)号：US20070293007A1
公开(公告)日：2007-12-20
申请号：US11889231
申请日：2007-08-10
申请人： Toyoji Ito , Eiji Fujii , Kazuo Umeda
发明人： Toyoji Ito , Eiji Fujii , Kazuo Umeda
IPC分类号： H01L21/336
CPC分类号： H01L27/11502 , H01L27/105 , H01L27/10852 , H01L27/10894 , H01L27/11507 , H01L27/11509 , H01L28/55 , H01L28/57 , H01L28/65
摘要： A semiconductor device includes: a lower hydrogen-barrier film; a capacitor formed on the lower hydrogen-barrier film and including a lower electrode, a capacitive insulating film, and an upper electrode; an interlayer dielectric film formed so as to cover the periphery of the capacitor; and an upper hydrogen-barrier film covering the top and lateral portions of the capacitor. An opening, which exposes the lower hydrogen-barrier film where the lower hydrogen-barrier film is located around the capacitor, and which is tapered and flares upward, is formed in the interlayer dielectric film, and the upper hydrogen-barrier film is formed along the lateral and bottom faces of the opening, and is in contact with the lower hydrogen-barrier film in the opening.
摘要翻译：半导体器件包括：下阻氢膜; 形成在下部氢阻挡膜上并具有下部电极，电容绝缘膜和上部电极的电容器; 形成为覆盖电容器周围的层间绝缘膜; 以及覆盖电容器的顶部和侧部的上部氢阻挡膜。在层间电介质膜中形成开口，该开口暴露出下阻氢膜位于电容器周围并在其间呈锥形并向上凸起的下阻氢膜，上阻氢膜沿着开口的侧面和底面，并与开口中的下阻氢膜接触。

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