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    • 7. 发明授权
    • Micropump with valve structure
    • 微型阀门结构
    • US5259737A
    • 1993-11-09
    • US724697
    • 1991-07-02
    • Shinichi KamisukiYasuto NoseNobuo ShimizuShinichi Yotsuya
    • Shinichi KamisukiYasuto NoseNobuo ShimizuShinichi Yotsuya
    • B81B3/00F04B43/04F04B53/10H01L21/308F04B35/04
    • B81B3/0005F04B43/046F04B53/102H01L21/3083B81B2201/036B81B2201/054B81B2203/0127
    • A micropump for pumping liquid from an entry channel to an exit channel is disclosed. The micropump is formed in a semiconductor substrate sealed by two glass substrates. The micropump includes first and second chambers and flow channel means coupled between the two chambers. The micropump also includes a valve coupled between the entry channel and the first chamber. The valve includes a flexible valve membrane positioned closer to a second side of the semiconductor substrate than to its first side for causing the valve to be or not to be in contact with the second side of the semiconductor substrate for closing or opening the valve on the glass substrate. Additionally, the micropump includes a diaphragm forming part of a flexible wall of the second chamber and positioned closer to the second side of the semiconductor substrate than to its first side. The diaphragm is responsive to external pressure for causing liquid to be pumped from the entry channel to the exit channel. Thus, the height of the valve is reduced, preventing deformation due to strength such as its own weight and may impact due to a dropping. As a result, the valve sealing is improve on the glass substrate. Therefore, the micropump can accurately discharge a small quantity of liquid.
    • 公开了一种用于将液体从进入通道泵送到出口通道的微型泵。 微型泵形成在由两块玻璃基板密封的半导体基板中。 微型泵包括连接在两个室之间的第一和第二室和流动通道装置。 微型泵还包括连接在入口通道和第一室之间的阀。 阀包括位于比半导体衬底的第二侧更靠近第一侧的柔性阀膜,用于使阀与半导体衬底的第二侧接触或不与第二侧接触,以关闭或打开阀 玻璃基板。 此外,微型泵包括形成第二室的柔性壁的一部分并且比其第一侧更靠近半导体衬底的第二侧的膜片。 隔膜响应于外部压力,以使液体从入口通道泵送到出口通道。 因此,阀的高度减小,防止由于其自身重量等强度而引起的变形,并且可能由于跌落而撞击。 结果,玻璃基板上的阀密封得到改善。 因此,微型泵可以精确地排出少量的液体。
    • 9. 发明申请
    • Optical tunable filter and method for manufacturing the optical tunable filter
    • 光可调滤波器及其制造方法
    • US20050094297A1
    • 2005-05-05
    • US10946621
    • 2004-09-21
    • Akihiro MurataRyosuke NakamuraShinichi Kamisuki
    • Akihiro MurataRyosuke NakamuraShinichi Kamisuki
    • G02B26/00B81B3/00G02B5/20G02B5/28H01P1/203H01P1/20
    • H01P1/20381
    • An optical tunable filter includes a first substrate 3 having a light transmitting property which includes a movable portion 31, a second substrate 20 having a light transmitting property which is provided so as to be opposed to the first substrate, a first gap 21 and a second gap 22 which are respectively provided between the movable portion 31 and the second substrate 20, an interference portion which causes interference of incident light between the movable portion 31 and the second substrate 20 through the second gap 22, and a driving portion which changes a distance of the second gap 22 by displacing the movable portion 31 with respect to the second substrate 20 using the first gap 21. This makes it possible to provide an optical tunable filter having a simpler structure and a smaller size, which can be manufactured through a simplified manufacturing process without using a release hole and can achieve stable driving of a movable portion, and a method for manufacturing such an optical tunable filter.
    • 光可调谐滤光器包括具有透光性的第一基板3,其包括可移动部分31,具有与第一基板相对的透光性的第二基板20,第一间隙21和第二基板 分别设置在可动部31和第二基板20之间的间隙22,通过第二间隙22引起可动部31和第二基板20之间的入射光的干涉的干涉部,以及改变距离 通过使用第一间隙21使可动部31相对于第二基板20移位。 这使得可以提供一种具有更简单的结构和更小尺寸的光学可调滤波器,其可以通过简化的制造工艺而不使用释放孔来制造并且可以实现可移动部分的稳定驱动,以及制造这种 光学可调滤波器。