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1. 发明申请

US20050094297A1 Optical tunable filter and method for manufacturing the optical tunable filter 有权
标题翻译：光可调滤波器及其制造方法
公开(公告)号：US20050094297A1
公开(公告)日：2005-05-05
申请号：US10946621
申请日：2004-09-21
申请人： Akihiro Murata , Ryosuke Nakamura , Shinichi Kamisuki
发明人： Akihiro Murata , Ryosuke Nakamura , Shinichi Kamisuki
IPC分类号： G02B26/00 , B81B3/00 , G02B5/20 , G02B5/28 , H01P1/203 , H01P1/20
CPC分类号： H01P1/20381
摘要： An optical tunable filter includes a first substrate 3 having a light transmitting property which includes a movable portion 31, a second substrate 20 having a light transmitting property which is provided so as to be opposed to the first substrate, a first gap 21 and a second gap 22 which are respectively provided between the movable portion 31 and the second substrate 20, an interference portion which causes interference of incident light between the movable portion 31 and the second substrate 20 through the second gap 22, and a driving portion which changes a distance of the second gap 22 by displacing the movable portion 31 with respect to the second substrate 20 using the first gap 21. This makes it possible to provide an optical tunable filter having a simpler structure and a smaller size, which can be manufactured through a simplified manufacturing process without using a release hole and can achieve stable driving of a movable portion, and a method for manufacturing such an optical tunable filter.
摘要翻译：光可调谐滤光器包括具有透光性的第一基板3，其包括可移动部分31，具有与第一基板相对的透光性的第二基板20，第一间隙21和第二基板分别设置在可动部31和第二基板20之间的间隙22，通过第二间隙22引起可动部31和第二基板20之间的入射光的干涉的干涉部，以及改变距离通过使用第一间隙21使可动部31相对于第二基板20移位。这使得可以提供一种具有更简单的结构和更小尺寸的光学可调滤波器，其可以通过简化的制造工艺而不使用释放孔来制造并且可以实现可移动部分的稳定驱动，以及制造这种光学可调滤波器。

2. 发明授权

US07106514B2 Optical tunable filter and method for manufacturing the optical tunable filter 有权
标题翻译：光可调滤波器及其制造方法
公开(公告)号：US07106514B2
公开(公告)日：2006-09-12
申请号：US10946621
申请日：2004-09-21
申请人： Akihiro Murata , Ryosuke Nakamura , Shinichi Kamisuki
发明人： Akihiro Murata , Ryosuke Nakamura , Shinichi Kamisuki
IPC分类号： G02B27/00
CPC分类号： H01P1/20381
摘要： An optical tunable filter includes a first substrate 3 having a light transmitting property which includes a movable portion 31, a second substrate 20 having a light transmitting property which is provided so as to be opposed to the first substrate, a first gap 21 and a second gap 22 which are respectively provided between the movable portion 31 and the second substrate 20, an interference portion which causes interference of incident light between the movable portion 31 and the second substrate 20 through the second gap 22, and a driving portion which changes a distance of the second gap 22 by displacing the movable portion 31 with respect to the second substrate 20 using the first gap 21. This makes it possible to provide an optical tunable filter having a simpler structure and a smaller size, which can be manufactured through a simplified manufacturing process without using a release hole and can achieve stable driving of a movable portion, and a method for manufacturing such an optical tunable filter.
摘要翻译：光可调谐滤光器包括具有透光性的第一基板3，其包括可移动部分31，具有与第一基板相对的透光性的第二基板20，第一间隙21和第二基板分别设置在可动部31和第二基板20之间的间隙22，通过第二间隙22引起可动部31和第二基板20之间的入射光的干涉的干涉部，以及改变距离通过使用第一间隙21使可动部31相对于第二基板20移位。这使得可以提供一种具有更简单的结构和更小尺寸的光学可调滤波器，其可以通过简化的制造工艺而不使用释放孔来制造并且可以实现可移动部分的稳定驱动，以及制造这种光学可调滤波器。

3. 发明申请

US20050122191A1 Optical tunable filter and method of manufacturing the same 有权
标题翻译：光可调滤波器及其制造方法
公开(公告)号：US20050122191A1
公开(公告)日：2005-06-09
申请号：US11002441
申请日：2004-12-02
申请人： Ryosuke Nakamura , Shinichi Kamisuki , Akihiro Murata , Mitsuhiro Yoda
发明人： Ryosuke Nakamura , Shinichi Kamisuki , Akihiro Murata , Mitsuhiro Yoda
IPC分类号： G02B5/20 , B81B3/00 , B81C1/00 , G01J3/26 , G02B5/28 , G02B26/00 , H01P1/20
CPC分类号： G02B26/001 , G01J3/26
摘要： An optical tunable filter is provided including a first substrate having light transmission properties and having a movable part and a supporting member that movably supports the movable part and having a smaller thickness than the movable part, a second substrate having light transmission properties and opposed to the first substrate, a first gap and a second gap provided between the movable part and the second substrate, an interference part causing interference between the movable part and the second substrate through the second gap and a drive member changing an interval of the second gap by moving the movable part to the second substrate by making use of the first gap.
摘要翻译：提供一种光可调谐滤光器，包括具有透光性的第一基板和具有可移动部分和可移动地支撑可移动部分并且具有比可移动部分更小的厚度的支撑部件，具有透光性并与其相对的第二基板第一基板，设置在可动部分和第二基板之间的第一间隙和第二间隙，干涉部分，通过第二间隙引起可动部分和第二基板之间的干涉;以及驱动部件，通过移动来改变第二间隙的间隔通过利用第一间隙将可动部分移动到第二基板。

4. 发明授权

US07304800B2 Optical tunable filter and method of manufacturing the same 有权
标题翻译：光可调滤波器及其制造方法
公开(公告)号：US07304800B2
公开(公告)日：2007-12-04
申请号：US11002441
申请日：2004-12-02
申请人： Ryosuke Nakamura , Shinichi Kamisuki , Akihiro Murata , Mitsuhiro Yoda
发明人： Ryosuke Nakamura , Shinichi Kamisuki , Akihiro Murata , Mitsuhiro Yoda
IPC分类号： H01P1/20
CPC分类号： G02B26/001 , G01J3/26
摘要： An optical tunable filter is provided including a first substrate having light transmission properties and having a movable part and a supporting member that movably supports the movable part and having a smaller thickness than the movable part, a second substrate having light transmission properties and opposed to the first substrate, a first gap and a second gap provided between the movable part and the second substrate, an interference part causing interference between the movable part and the second substrate through the second gap and a drive member changing an interval of the second gap by moving the movable part to the second substrate by making use of the first gap.
摘要翻译：提供一种光可调谐滤光器，包括具有透光性的第一基板和具有可移动部分和可移动地支撑可移动部分并且具有比可移动部分更小的厚度的支撑部件，具有透光性并且与第一基板，设置在可动部分和第二基板之间的第一间隙和第二间隙，干涉部分，通过第二间隙引起可动部分和第二基板之间的干涉;以及驱动部件，通过移动来改变第二间隙的间隔通过利用第一间隙将可动部分移动到第二基板。

5. 发明申请

US20050068627A1 Tunable optical filter and method of manufacturing same 审中-公开
标题翻译：可调光滤波器及其制造方法
公开(公告)号：US20050068627A1
公开(公告)日：2005-03-31
申请号：US10915122
申请日：2004-08-10
申请人： Ryosuke Nakamura , Shinichi Kamisuki , Akihiro Murata , Mitsuhiro Yoda
发明人： Ryosuke Nakamura , Shinichi Kamisuki , Akihiro Murata , Mitsuhiro Yoda
IPC分类号： G02B5/28 , G01J3/26 , G02B5/20 , G02B26/00 , G02B27/00
CPC分类号： G02B26/001 , G01J3/26
摘要： A tunable optical filter is provided by joining a movable unit that supports a movable body moving up and down freely, and whose top surface has a highly reflective film formed thereon, a drive electrode unit in which a drive electrode facing the movable body with an electrostatic gap EG therebetween is formed, and an optical gap unit in which a highly reflective film facing the highly reflective film with an optical gap OG therebetween is formed.
摘要翻译：通过连接支撑可自由上下移动的移动体并且其上表面具有形成在其上的高反射膜的可移动单元来提供可调谐滤光器;驱动电极单元，其中驱动电极面对可移动体具有静电形成间隙EG，并且形成光学间隙单元，其中形成面对具有光学间隙OG的高反射膜的高反射膜。

6. 发明申请

US20060008200A1 Tunable filter and method of manufacturing the same, and sensing device 有权
标题翻译：可调谐滤波器及其制造方法以及感测装置
公开(公告)号：US20060008200A1
公开(公告)日：2006-01-12
申请号：US11143553
申请日：2005-06-02
申请人： Ryosuke Nakamura , Akihiro Murata
发明人： Ryosuke Nakamura , Akihiro Murata
IPC分类号： G02B6/26
CPC分类号： G02B26/001
摘要： A tunable filter including; a fixed substrate provided with a fixed reflecting film and capable of transmitting light having a shorter wavelength than infrared light; a movable substrate provided with a movable section equipped with a movable reflecting film and disposed to the fixed substrate so that the movable reflecting film and the fixed reflecting film faces each other with a predetermined length of gap; and a drive section for varying the length of the gap by displacing the movable section with respect to the fixed substrate, wherein light entering the gap from the outside is repeatedly reflected by the movable reflecting film and the fixed reflecting film for outputting light having a wavelength corresponding to the length of the gap, and the movable section is provided, at an area to which the movable reflecting film is disposed, with a light transmitting section capable of transmitting light having a shorter wavelength than infrared light and for inputting/outputting light from/to the outside.
摘要翻译：可调滤波器包括：固定基板，设置有固定反射膜，能够透射波长比红外光短的光; 可移动基板，设置有具有可移动反射膜的可移动部分并且设置在固定基板上，使得可移动反射膜和固定反射膜以预定长度的间隙彼此面对; 以及用于通过使可移动部分相对于固定基板移动来改变间隙的长度的驱动部分，其中从外部进入间隙的光被可移动反射膜和固定反射膜反射反射，该反射膜用于输出具有波长对应于间隙的长度，并且可移动部分在可移动反射膜设置的区域处设置有能够透射比红外光短的波长的光的透光部分，并用于输入/输出来自 /到外面

7. 发明授权

US07301703B2 Tunable filter and method of manufacturing the same, and sensing device 有权
标题翻译：可调谐滤波器及其制造方法以及感测装置
公开(公告)号：US07301703B2
公开(公告)日：2007-11-27
申请号：US11143553
申请日：2005-06-02
申请人： Ryosuke Nakamura , Akihiro Murata
发明人： Ryosuke Nakamura , Akihiro Murata
IPC分类号： G02B27/00 , G02B6/26
CPC分类号： G02B26/001
摘要： A tunable filter including; a fixed substrate provided with a fixed reflecting film and capable of transmitting light having a shorter wavelength than infrared light; a movable substrate provided with a movable section equipped with a movable reflecting film and disposed to the fixed substrate so that the movable reflecting film and the fixed reflecting film faces each other with a predetermined length of gap; and a drive section for varying the length of the gap by displacing the movable section with respect to the fixed substrate, wherein light entering the gap from the outside is repeatedly reflected by the movable reflecting film and the fixed reflecting film for outputting light having a wavelength corresponding to the length of the gap, and the movable section is provided, at an area to which the movable reflecting film is disposed, with a light transmitting section capable of transmitting light having a shorter wavelength than infrared light and for inputting/outputting light from/to the outside.
摘要翻译：可调滤波器包括：固定基板，设置有固定反射膜，能够透射波长比红外光短的光; 可移动基板，设置有具有可移动反射膜的可移动部分并且设置在固定基板上，使得可移动反射膜和固定反射膜以预定长度的间隙彼此面对; 以及用于通过使可移动部分相对于固定基板移动来改变间隙长度的驱动部分，其中从外部进入间隙的光被可移动反射膜和固定反射膜反射反射，该反射膜用于输出具有波长对应于间隙的长度，并且可移动部分在可移动反射膜设置的区域处设置有能够透射比红外光短的波长的光的透光部分，并用于输入/输出来自 /到外面

8. 发明申请

US20090133830A1 Laminated metal sheet and method of production of same 有权
标题翻译：层压金属板及其生产方法
公开(公告)号：US20090133830A1
公开(公告)日：2009-05-28
申请号：US12317201
申请日：2008-12-18
申请人： Hayato Kazeoka , Sotoji Ohsasa , Akihiro Murata , Tadaaki Ochiai
发明人： Hayato Kazeoka , Sotoji Ohsasa , Akihiro Murata , Tadaaki Ochiai
IPC分类号： B32B37/10
CPC分类号： B32B37/206 , B32B5/142 , B32B7/005 , B32B15/08 , B32B15/085 , B32B15/09 , B32B27/20 , B32B2250/40 , B32B2307/4026 , B32B2307/714 , B32B2307/75 , B32B2309/105 , B32B2311/00 , B32B2439/66 , B32B2439/70 , Y10T428/31678
摘要： When laminating two types of film (1, 2) with different melting points on the two sides of a metal sheet (3), the thickness of the low melting point side film (2) is adjusted. Specifically, the thickness d2 of the low melting point side film (2) at the part sandwiched between the lamination roll (10) and metal sheet (3) is made a range defined by d2≧k(ΔMP−ΔT)/V. Here, ΔMP is the difference of melting points of the two types of film, k is k≧2, O
摘要翻译：当在金属片（3）的两侧层压具有不同熔点的两种类型的膜（1,2）时，调节低熔点侧膜（2）的厚度。具体地说，夹在层叠辊（10）和金属片（3）之间的部分处的低熔点侧膜（2）的厚度d2被制成由d2> = k（DeltaMP-ΔT）/ V限定的范围。这里，DeltaMP是两种类型的膜的熔点的差，k是k> = 2，O <ΔT= MP1-PhiTi <= 50（℃）（Ti是入口侧的金属片温度辊V是片材运行速度，Phi是通过层压时的除热条件确定的常数，其中0.75 <= Phi <1）。由此，可以防止将低熔点侧膜（2）粘附到层叠辊（10）上。

9. 发明授权

US07096579B2 Method of manufacturing an optical device 有权
标题翻译：制造光学装置的方法
公开(公告)号：US07096579B2
公开(公告)日：2006-08-29
申请号：US10778107
申请日：2004-02-17
申请人： Akihiro Murata
发明人： Akihiro Murata
IPC分类号： H05K3/30
CPC分类号： H01L33/56 , H01L33/54 , H01L2224/16225 , H01L2924/00014 , H01L2924/15151 , H01S5/0222 , H01S5/02228 , H01S5/02248 , H01S5/02272 , H01S5/183 , Y10T29/49002 , Y10T29/49117 , Y10T29/4913 , Y10T29/53191 , H01L2224/0401
摘要： The invention provides an optical device having an optical element, a substrate, and a flexible member. A first portion of the flexible member is disposed so as to be spaced from the substrate, a second portion surrounding the first portion is adhered to the substrate, and a closed space is defined between the first portion and the substrate. The optical element is mounted on the substrate within the closed space.
摘要翻译：本发明提供了一种具有光学元件，基底和柔性构件的光学装置。柔性构件的第一部分设置成与衬底间隔开，围绕第一部分的第二部分粘附到衬底上，并且在第一部分和衬底之间限定封闭空间。光学元件安装在封闭空间内的基板上。

10. 发明授权

US06961182B2 Micro electro mechanical systems device, method of manufacturing the same and micro electro mechanical systems module 有权
标题翻译：微机电系统装置，制造方法及微机电系统模块
公开(公告)号：US06961182B2
公开(公告)日：2005-11-01
申请号：US10910795
申请日：2004-08-03
申请人： Akihiro Murata
发明人： Akihiro Murata
IPC分类号： B81B7/02 , B81B7/00 , G02B26/08 , H01H59/00 , G02B27/00
CPC分类号： B81B7/007 , B81C2203/0118 , G02B26/0841 , H01H59/0009 , H01L2224/48091 , H01L2224/73265 , H01L2924/10155 , Y10S359/90 , H01L2924/00014
摘要： A micro electro mechanical systems (MEMS) device includes a first substrate on which an electrode is formed, a movable substrate having at least a moving part and a periphery supporting member, and a second substrate having a concave portion. A space that includes a part of the concave portion is formed by jointing the first substrate, the movable substrate, and the second substrate together. The moving part inside the space moves when a voltage is applied between the electrode and the moving part through the periphery supporting member, and a part of the first substrate protrudes outside a side surface of the second substrate.
摘要翻译：微电子机械系统（MEMS）装置包括其上形成有电极的第一基板，至少具有移动部分和周边支撑部件的可移动基板以及具有凹部的第二基板。包括凹部的一部分的空间通过将第一基板，可动基板和第二基板接合在一起而形成。当通过周边支撑构件在电极和移动部件之间施加电压时，空间内的移动部分移动，并且第一基板的一部分突出到第二基板的侧表面的外侧。

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