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    • 6. 发明授权
    • Micropump with valve structure
    • 微型阀门结构
    • US5259737A
    • 1993-11-09
    • US724697
    • 1991-07-02
    • Shinichi KamisukiYasuto NoseNobuo ShimizuShinichi Yotsuya
    • Shinichi KamisukiYasuto NoseNobuo ShimizuShinichi Yotsuya
    • B81B3/00F04B43/04F04B53/10H01L21/308F04B35/04
    • B81B3/0005F04B43/046F04B53/102H01L21/3083B81B2201/036B81B2201/054B81B2203/0127
    • A micropump for pumping liquid from an entry channel to an exit channel is disclosed. The micropump is formed in a semiconductor substrate sealed by two glass substrates. The micropump includes first and second chambers and flow channel means coupled between the two chambers. The micropump also includes a valve coupled between the entry channel and the first chamber. The valve includes a flexible valve membrane positioned closer to a second side of the semiconductor substrate than to its first side for causing the valve to be or not to be in contact with the second side of the semiconductor substrate for closing or opening the valve on the glass substrate. Additionally, the micropump includes a diaphragm forming part of a flexible wall of the second chamber and positioned closer to the second side of the semiconductor substrate than to its first side. The diaphragm is responsive to external pressure for causing liquid to be pumped from the entry channel to the exit channel. Thus, the height of the valve is reduced, preventing deformation due to strength such as its own weight and may impact due to a dropping. As a result, the valve sealing is improve on the glass substrate. Therefore, the micropump can accurately discharge a small quantity of liquid.
    • 公开了一种用于将液体从进入通道泵送到出口通道的微型泵。 微型泵形成在由两块玻璃基板密封的半导体基板中。 微型泵包括连接在两个室之间的第一和第二室和流动通道装置。 微型泵还包括连接在入口通道和第一室之间的阀。 阀包括位于比半导体衬底的第二侧更靠近第一侧的柔性阀膜,用于使阀与半导体衬底的第二侧接触或不与第二侧接触,以关闭或打开阀 玻璃基板。 此外,微型泵包括形成第二室的柔性壁的一部分并且比其第一侧更靠近半导体衬底的第二侧的膜片。 隔膜响应于外部压力,以使液体从入口通道泵送到出口通道。 因此,阀的高度减小,防止由于其自身重量等强度而引起的变形,并且可能由于跌落而撞击。 结果,玻璃基板上的阀密封得到改善。 因此,微型泵可以精确地排出少量的液体。