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    • 9. 发明授权
    • Photoelectric microscope
    • 光电显微镜
    • US4045141A
    • 1977-08-30
    • US695556
    • 1976-06-14
    • Shigeo MoriyamaYoshio Kawamura
    • Shigeo MoriyamaYoshio Kawamura
    • G01B9/04G01B11/02
    • G01B9/04G01B11/02
    • Description is made of improvements in a photoelectric microscope which is employed for the measurement of a very small distance. According to this invention, an optical system for making point-symmetric images is disposed in an optical path of an objective of a photoelectric microscope so as to form on an identical focal plane a pair of (two) images of a reference line (or mark) on a test piece which are in the relation of point symmetry to each other, and the distance between the pair of (two) images is measured, whereby the deviating distance of the reference line (or mark) on the test piece from the optic axis of the objective is evaluated. The distance between the pair of images is evaluated by gauging the time difference between two detection signals which are obtained by scanning the pair of images at equal speeds with photoelectric detectors.
    • 描述用于测量非常小距离的光电显微镜的改进。 根据本发明,用于制造点对称图像的光学系统设置在光电显微镜的物镜的光路中,以便在同一焦平面上形成参考线(或标记)的一对(两个)图像 ),并且测量一对(两个)图像之间的距离,由此测试片上的参考线(或标记)与光学元件的偏离距离 评估目标轴。 通过测量通过用光电检测器以等速扫描一对图像而获得的两个检测信号之间的时间差来评估该对图像之间的距离。