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    • 3. 发明授权
    • Method and apparatus for forming film by ion beam
    • 用离子束形成薄膜的方法和装置
    • US4687939A
    • 1987-08-18
    • US668843
    • 1984-11-06
    • Tateoki MiyauchiHiroshi YamaguchiMikio HongoKatsuro MizukoshiAkira ShimaseRyohei Satoh
    • Tateoki MiyauchiHiroshi YamaguchiMikio HongoKatsuro MizukoshiAkira ShimaseRyohei Satoh
    • C23C14/48C23C14/22H01J37/305H01J37/317H01J37/00
    • H01J37/3056C23C14/221H01J37/3178H01J2237/31749
    • An ion beam apparatus which comprises an enclosure defining a chamber of high vacuum. A crucible for producing vapor of a material, ionizing means, ion accelerating means, and a substrate to be deposited with the vaporized material to thereby form a film thereon are disposed within the chamber. An accelerating voltage is applied across the crucible and the accelerating means such that the crucible is of positive polarity while the accelerating means is of negative polarity. The material contained in the crucible is vaporized by heating. A pressure difference is maintained between the vapor pressure within the crucible and the vacuum chamber. The crucible is provided with a small hole for ejecting the vapor of the material into the vacuum chamber to thereby form atom clouds referred to as clusters under adiabatic expansion and supercooling, a part of the clusters being ionized through irradiation of electrons by the ionizing means and accelerated by the accelerating means so that the ionized and accelerated clusters deposit on the substrate to form a thin film thereon. The apparatus further comprises electrostatic optical system interposed between the cluster ionizing region and the substrate to be deposited with the ionized clusters, wherein the electrostatic optical system serves to focus the ionized clusters onto the element to form the thin film thereon through deposition of the ionized clusters.
    • 一种离子束装置,其包括限定高真空室的外壳。 用于产生材料的蒸气的坩埚,离子化装置,离子加速装置以及待蒸发的材料沉积以形成其上的膜的基板设置在室内。 在坩埚和加速装置之间施加加速电压,使得坩埚具有正极性,而加速装置是负极性的。 包含在坩埚中的材料通过加热而蒸发。 在坩埚内的蒸汽压力与真空室之间保持压力差。 该坩埚设置有用于将材料的蒸气喷射到真空室中的小孔,从而在绝热膨胀和过冷却下形成称为簇的原子云,通过电离装置照射电子而使部分簇离子化; 通过加速装置加速,使得电离和加速的团簇沉积在基底上以在其上形成薄膜。 该装置还包括插入群集电离区域和要沉积离子簇的基板之间的静电光学系统,其中静电光学系统用于将离子化的聚集体聚集到元件上以通过沉积离子簇而在其上形成薄膜 。
    • 7. 发明申请
    • DESIGN WORKFLOW CONSTRUCTION APPARATUS, DESIGN WORKFLOW CONSTRUCTION METHOD, DESIGN SYSTEM, DESIGN METHOD, DESIGN WORKFLOW CONSTRUCTION PROGRAM, AND COMPUTER READABLE RECORDING MEDIUM IN WHICH DESIGN WORKFLOW CONSTRUCTION PROGRAM IS STORED
    • 设计工作流施工设备,设计工作流程施工方法,设计系统,设计方法,设计工作流程构造程序和设计工作流程构建程序存储的计算机可读记录介质
    • US20120053905A1
    • 2012-03-01
    • US13201854
    • 2010-02-16
    • Yoshiharu IwataRyohei SatohKeiji KudoAtsushi TayaKazuya OkamotoHidenori MurataKoichiro AtsumiEiji AraiEiji Morinaga
    • Yoshiharu IwataRyohei SatohKeiji KudoAtsushi TayaKazuya OkamotoHidenori MurataKoichiro AtsumiEiji AraiEiji Morinaga
    • G06F17/50
    • G06Q10/06G06Q10/0633
    • A design system (1) is provided with a function of acquiring a design specification of an object to be designed and an evaluation index for evaluating a value of the object to be designed in the design specification; a function of acquiring profile data of the object to be designed; a function (design order determining section (12)) of extracting entity design elements and important design variables from the profile data and prioritizing the entity design elements and the important design variables so as to construct a design workflow; a function (evaluation approach construction section (13)) of constructing an evaluation formula for performance/evaluation of a design result of each of the entity design elements in conformity with the design workflow; a function of finding an appropriate solution by performing automatic optimization while evaluating the design result with use of the evaluation index in accordance with the design workflow with which the evaluation formula is associated; and a function of outputting the appropriate solution thus found. This allows the object to be designed to be parametrically handled, and makes it possible to create a design workflow for efficiently finding an optimum design solution by properly combining a series of design elements and to find an appropriate solution with the use of the design workflow.
    • 设计系统(1)具有获取要设计的对象的设计规范和评估设计规范中要设计的对象的值的评估指标的功能; 获取要设计的对象的简档数据的功能; 从简档数据中提取实体设计元素和重要设计变量的功能(设计顺序确定部分(12)),并对实体设计元素和重要设计变量进行优先排序,从而构建设计工作流程; (评估方法构建部(13)),其根据设计工作流程构建用于对每个实体设计元素的设计结果进行性能/评估的评估公式; 通过根据与评估公式相关联的设计工作流程使用评估指数来评估设计结果,通过执行自动优化来找到适当的解决方案的功能; 以及输出由此找到的适当解决方案的功能。 这允许将对象设计为参数化处理,并且可以创建设计工作流,以通过适当地组合一系列设计元素来有效地找到最佳设计解决方案,并使用设计工作流程找到适当的解决方案。