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1. 发明授权

US6040915A Analysis method for gases and apparatus therefor 失效
标题翻译：气体及其设备分析方法
公开(公告)号：US6040915A
公开(公告)日：2000-03-21
申请号：US147349
申请日：1998-12-07
申请人： Shang-Qian Wu , Jun-ichi Morishita , Yoshio Ishihara , Tetsuya Kimijima
发明人： Shang-Qian Wu , Jun-ichi Morishita , Yoshio Ishihara , Tetsuya Kimijima
IPC分类号： G01N21/39 , G01N21/61
CPC分类号： G01N21/39 , G01N21/3504
摘要： A method for analyzing an impurity in a gas including the steps of: introducing a gas with an impurity into a first cell; introducing a gas with no impurity into a second cell; maintaining identical pressures in the first and second cells; irradiating a light from a light irradiating source; varying the frequency of the light over a frequency spectrum including an absorption frequency of the impurity; splitting the light by a splitting device in order to pass a first beam through the first cell and to pass a second beam through the second cell; measuring the intensity of the light passing through the first cell over the frequency spectrum with a first measuring device and the intensity of the light passing through the second cell over the frequency spectrum with a second measuring device; and determining an absorption spectrum of the impurity in the gas based on the difference between data measured with the first measuring device and data from measured with the second measuring device.
摘要翻译： PCT No.PCT / JP98 / 01608 Sec。 371日期1998年12月7日第 102（e）日期1998年12月7日PCT提交1998年4月8日PCT公布。 WO98 / 45686 PCT公开日期：1998年10月15日一种用于分析气体中的杂质的方法，包括以下步骤：将具有杂质的气体引入第一电池; 将无杂质的气体引入第二电池; 在第一和第二细胞中保持相同的压力; 照射来自光照射源的光; 在包括杂质的吸收频率的频谱上改变光的频率; 通过分离装置分离光，以使第一光束通过第一单元并使第二光束通过第二单元; 利用第一测量装置测量在频谱上通过第一单元的光的强度，并用第二测量装置测量通过频谱通过第二单元的光的强度; 以及基于由第一测量装置测量的数据与由第二测量装置测量的数据之间的差异来确定气体中的杂质的吸收光谱。

2. 发明授权

US06823743B2 Method and apparatus for measuring concentrations of components of fluid 失效
标题翻译：用于测量流体组分浓度的方法和装置
公开(公告)号：US06823743B2
公开(公告)日：2004-11-30
申请号：US10108073
申请日：2002-03-26
申请人： Tetsuya Sato , Shang-Qian Wu , Tetsuya Kimijima
发明人： Tetsuya Sato , Shang-Qian Wu , Tetsuya Kimijima
IPC分类号： G01F142
CPC分类号： G01N7/00 , G01N30/62
摘要： A method and an apparatus for measuring the concentrations of the components of a fluid are described, which can be used to measure the concentrations of the components continuously in real time and to monitor a high pressure gas, and is suitably used for in-line monitoring. In the method and the apparatus, a fluid sample is conducted through a measuring tube, wherein the measuring tube has a small aperture with a constant diameter in a fluid flow path. The pressure difference (P1−P2) between the upstream and the downstream of the small aperture and the flow rate at the downstream of the small aperture are measured to determine the concentrations of the components of the fluid.
摘要翻译：描述了用于测量流体组分浓度的方法和装置，其可用于实时连续地测量组分的浓度并监测高压气体，并且适用于在线监测。在该方法和装置中，流体样品通过测量管传导，其中测量管在流体流动路径中具有恒定直径的小孔径。测量小孔的上游和下游之间的压力差（P1-P2）和小孔下游的流速以确定流体组分的浓度。

3. 发明授权

US06717666B2 Method and apparatus for measuring nitrogen in a gas 失效
标题翻译：用于测量气体中的氮的方法和装置
公开(公告)号：US06717666B2
公开(公告)日：2004-04-06
申请号：US10098451
申请日：2002-03-18
申请人： Tetsuya Satou , Shang-Qian Wu , Tetsuya Kimijima
发明人： Tetsuya Satou , Shang-Qian Wu , Tetsuya Kimijima
IPC分类号： G01N2169
CPC分类号： G01N21/69
摘要： The present invention provides a method and an apparatus for analyzing nitrogen in a gas, in which the concentration of nitrogen can be continuously measured with good sensitivity without wasting a sample gas. At least one wavelength for measuring a concentration of nitrogen according to the intensity of a light generated by discharge, is selected from a group consisting of 215±2 nm, 226±2 nm, 238±2 nm, 242±2 nm, 246±1 nm, 256±2 nm, 260±2 nm, 266±2 nm, 271±1 nm, 276±4 nm, 285±2 nm, 294±1 nm, and 300±2 nm.
摘要翻译：本发明提供了一种用于分析气体中的氮气的方法和装置，其中氮气的浓度可以在不浪费样品气体的情况下以良好的灵敏度连续测量。至少一个波长根据强度测量氮的浓度由放电产生的光选自215±2nm，226±2nm，238±2nm，242±2nm，246±1nm，256±2nm，260±2nm，266± 2nm，271±1nm，276±4nm，285±2nm，294±1nm和300±2nm。

4. 发明授权

US06857324B2 Method and apparatus for measuring concentrations of components of fluid 失效
标题翻译：用于测量流体组分浓度的方法和装置
公开(公告)号：US06857324B2
公开(公告)日：2005-02-22
申请号：US10413964
申请日：2003-04-14
申请人： Tetsuya Sato , Shang-Qian Wu , Tetsuya Kimijima
发明人： Tetsuya Sato , Shang-Qian Wu , Tetsuya Kimijima
IPC分类号： G01N9/26 , G01F1/42 , G01F1/68 , G01N7/00 , G01N11/02 , G01N30/62
CPC分类号： G01N7/00 , G01N30/62
摘要： A method and an apparatus for measuring the concentrations of the components of a fluid are described, which can be used to measure the concentrations of the components continuously in real time and to monitor a high pressure gas, and is suitably used for in-line monitoring. In the method and the apparatus, a fluid sample is conducted through a measuring tube, wherein the measuring tube has a small aperture with a constant diameter in a fluid flow path. The pressure difference (P1−P2) between the upstream and the downstream of the small aperture and the flow rate at the downstream of the small aperture are measured to determine the concentrations of the components of the fluid.
摘要翻译：描述了用于测量流体组分浓度的方法和装置，其可用于实时连续地测量组分的浓度并监测高压气体，并且适用于在线监测。在该方法和装置中，流体样品通过测量管传导，其中测量管在流体流动路径中具有恒定直径的小孔径。测量小孔的上游和下游之间的压力差（P1-P2）和小孔下游的流速以确定流体组分的浓度。

5. 发明授权

US06375911B1 Method and device for treating exhaust gas 失效
标题翻译：废气处理方法及装置
公开(公告)号：US06375911B1
公开(公告)日：2002-04-23
申请号：US09355937
申请日：1999-08-13
申请人： Tadahiro Ohmi , Yoshio Ishihara , Koh Matsumoto , Tetsuya Kimijima
发明人： Tadahiro Ohmi , Yoshio Ishihara , Koh Matsumoto , Tetsuya Kimijima
IPC分类号： B01D5386
CPC分类号： B01D53/8659
摘要： A process and an apparatus for treating an exhaust gas, in which a raw gas and high-boiling intermediate products contained in the exhaust gas let out from a CVD system employing a silicon-containing gas is brought into contact with a transition metal such as nickel or a silicide of such transition metals to decompose or convert them into stable halides, followed by detoxication treatment of the harmful components contained in the exhaust gas.
摘要翻译：一种用于处理废气的方法和装置，其中使含有含硅气体的CVD系统排出的废气中含有的原料气体和高沸点中间产物与诸如镍的过渡金属接触或这种过渡金属的硅化物分解或将其转化成稳定的卤化物，然后对废气中包含的有害成分进行解毒处理。

6. 发明授权

US06605134B2 Method and apparatus for collecting rare gas 有权
标题翻译：收集稀有气体的方法和装置
公开(公告)号：US06605134B2
公开(公告)日：2003-08-12
申请号：US09953480
申请日：2001-09-14
申请人： Yoshio Ishihara , Shigeru Hayashida , Toru Nagasaka , Tetsuya Kimijima , Tadahiro Ohmi
发明人： Yoshio Ishihara , Shigeru Hayashida , Toru Nagasaka , Tetsuya Kimijima , Tadahiro Ohmi
IPC分类号： B01D5304
CPC分类号： B01D53/22 , B01D53/04 , B01D53/0446 , B01D2258/0216 , B01D2259/402
摘要： There is provided a method and an apparatus for collecting a rare gas, which are capable of effectively collecting the rare gas contained in an exhaust gas exhausted from a rare gas using apparatus such as a plasma apparatus or the like, and moreover capable of securely supplying the rare gas having a predetermined purity to the rare gas using apparatus, and the method for collecting rare gas which comprises collecting a rare gas contained in an exhaust gas exhausted from a rare gas using apparatus operated under decompression, the method comprises the step of collecting the rare gas by separating the rare gas and impurities contained in the exhaust gas via at least two gas separating steps.
摘要翻译：提供一种用于收集稀有气体的方法和装置，其能够使用诸如等离子体装置等的装置有效地收集从稀有气体排出的废气中所含的稀有气体，并且还能够可靠地供给对于稀有气体使用装置，具有预定纯度的稀有气体，以及收集稀有气体的方法，其特征在于，使用在减压下运转的装置收集从稀有气体排出的废气中所含的稀有气体，所述方法包括：通过至少两个气体分离步骤分离废气中所含的稀有气体和杂质的稀有气体。

7. 发明申请

US20100247395A1 Gas purifying process and device 失效
公开(公告)号：US20100247395A1
公开(公告)日：2010-09-30
申请号：US12801052
申请日：2010-05-19
申请人： Tadahiro Ohmi , Ryuichi Yazaki , Masato Kawai , Tetsuya Kimijima , Kunio Matsuda
发明人： Tadahiro Ohmi , Ryuichi Yazaki , Masato Kawai , Tetsuya Kimijima , Kunio Matsuda
IPC分类号： B01D50/00
CPC分类号： C01B21/0466 , B01D53/04 , B01D53/26 , B01D53/75 , B01D53/86 , B01D2253/108 , B01D2257/80 , C01B5/00 , C01B21/0416 , C01B21/0422 , C01B23/0021 , C01B23/0026 , C01B2210/0035 , C01B2210/0037 , C01B2210/0053 , C01B2210/0075 , Y02C20/10
摘要： This gas purifying process removes trace constituents from a mixed gas that includes a rare gas and nitrogen as main components, and at least one from among hydrogen, nitrogen and hydrogen reaction products, and water vapor as the trace constituent. This process sequentially carries out an adsorbing step for removing water vapor and nitrogen and hydrogen reaction products; a hydrogen oxidation step for converting the hydrogen into water vapor by means of a hydrogen oxidation catalytic reaction in the presence of oxygen; and a drying step for removing water vapor generated in the hydrogen oxidation step. When nitrogen oxides are included as a trace constituent, then a denitration step is carried out prior to the adsorbing step, to convert nitrogen oxides into nitrogen and water vapor by means of a catalytic denitration reaction in the presence of a reducing substance.

8. 发明授权

US06324892B1 Multi-gas analysis system for analyzing high-purity gases 失效
标题翻译：用于分析高纯度气体的多气体分析系统
公开(公告)号：US06324892B1
公开(公告)日：2001-12-04
申请号：US09445398
申请日：1999-12-07
申请人： Akira Nishina , Tsutomu Kikuchi , Makoto Tanaka , Hidetoshi Yoshida , Tetsuya Kimijima
发明人： Akira Nishina , Tsutomu Kikuchi , Makoto Tanaka , Hidetoshi Yoshida , Tetsuya Kimijima
IPC分类号： G01N304
CPC分类号： H01J49/0422 , G01N1/26
摘要： There are provided an apparatus for analyzing gases and a gas analyzing method which can securely detect presence and absence of leakage in a short time and which can carry out analyses successively, safely and accurately in a stable state. The apparatus for analyzing gases is provided with sample gas introducing systems (1 to 5) for introducing a plurality of sample gases selectively, and analyzers (6, 10 and 14), and also has means (9) for monitoring, when a sample gas under determination is changed over to another sample gas, change in the concentration of the sample gas component introduced before the change over.
摘要翻译：提供了一种用于分析气体的装置和气体分析方法，其可以在短时间内可靠地检测泄漏的存在和不存在，并且可以在稳定状态下连续，安全和准确地进行分析。用于分析气体的装置设置有用于选择性地引入多个样品气体的样品气体导入系统（1至5）和分析仪（6,10和14），并且还具有用于监测样品气体的装置（9）在确定之前将其转换为另一个样品气体，改变之前引入的样品气体组分的浓度变化。

9. 发明授权

US08597584B2 Gas purifying process and device 失效
标题翻译：气体净化工艺及装置
公开(公告)号：US08597584B2
公开(公告)日：2013-12-03
申请号：US12801052
申请日：2010-05-19
申请人： Tadahiro Ohmi , Ryuichi Yazaki , Masato Kawai , Tetsuya Kimijima , Kunio Matsuda
发明人： Tadahiro Ohmi , Ryuichi Yazaki , Masato Kawai , Tetsuya Kimijima , Kunio Matsuda
IPC分类号： B01D53/46 , B01D53/60
CPC分类号： C01B21/0466 , B01D53/04 , B01D53/26 , B01D53/75 , B01D53/86 , B01D2253/108 , B01D2257/80 , C01B5/00 , C01B21/0416 , C01B21/0422 , C01B23/0021 , C01B23/0026 , C01B2210/0035 , C01B2210/0037 , C01B2210/0053 , C01B2210/0075 , Y02C20/10
摘要： This gas purifying process removes trace constituents from a mixed gas that includes a rare gas and nitrogen as main components, and at least one from among hydrogen, nitrogen and hydrogen reaction products, and water vapor as the trace constituent. This process sequentially carries out an adsorbing step for removing water vapor and nitrogen and hydrogen reaction products; a hydrogen oxidation step for converting the hydrogen into water vapor by means of a hydrogen oxidation catalytic reaction in the presence of oxygen; and a drying step for removing water vapor generated in the hydrogen oxidation step. When nitrogen oxides are included as a trace constituent, then a denitration step is carried out prior to the adsorbing step, to convert nitrogen oxides into nitrogen and water vapor by means of a catalytic denitration reaction in the presence of a reducing substance.
摘要翻译：该气体净化处理从作为主要成分的稀有气体和氮气以及氢，氮和氢反应产物中的至少一种以及作为微量成分的水蒸汽的混合气体中除去微量成分。该方法依次进行用于除去水蒸汽和氮气和氢气反应产物的吸附步骤; 通过在氧的存在下通过氢氧化催化反应将氢转化为水蒸汽的氢氧化步骤; 以及用于除去在氢氧化步骤中产生的水蒸汽的干燥步骤。当包含氮氧化物作为微量成分时，在吸附步骤之前进行脱硝步骤，通过在还原物质存在下通过催化脱硝反应将氮氧化物转化为氮和水蒸气。

10. 发明授权

US06550308B2 Gas analyzing apparatus 失效
公开(公告)号：US06550308B2
公开(公告)日：2003-04-22
申请号：US10117599
申请日：2002-04-04
申请人： Tsutomu Kikuchi , Akira Nishina , Tetsuya Kimijima
发明人： Tsutomu Kikuchi , Akira Nishina , Tetsuya Kimijima
IPC分类号： G01N3004
CPC分类号： G01N30/7206 , G01N2030/201 , G01N2030/8886
摘要： There is provided a gas analyzing apparatus capable of minimizing gas remaining by integrating gas switching apparatuses into one and capable of analyzing impurities of ppb level to sub-ppb level contained in various kinds of high-purity gases efficiently and accurately. The gas analyzing apparatus comprises an analyzer introduction passage 22 for introducing a sample gas supplied from a sample gas source 11 into an analyzer 12 via an analyzer introduction valve 22V; a separator introduction passage 23 diverging from a first side passage of the analyzer introduction valve 22V for introducing a sample gas into a separator 13 via a separator introduction valve 23V; a separator flowing-out passage 24 for introducing the sample gas flowing out from the separator 13 into a second side passage of the analyzer introduction valve 22V via a separator flowing-out valve 24V; and a gas switching apparatus to be such formed that when the analyzer introduction valve 22V is opened, the separator introduction valve 23V and the separator flowing-out valve 24V are connectively operated to be closed, and when the analyzer introduction valve 22V is closed, the separator introduction valve 23V and the separator flowing-out valve 24V are connectively operated to be opened.

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