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1. 发明授权

US06324892B1 Multi-gas analysis system for analyzing high-purity gases 失效
标题翻译：用于分析高纯度气体的多气体分析系统
公开(公告)号：US06324892B1
公开(公告)日：2001-12-04
申请号：US09445398
申请日：1999-12-07
申请人： Akira Nishina , Tsutomu Kikuchi , Makoto Tanaka , Hidetoshi Yoshida , Tetsuya Kimijima
发明人： Akira Nishina , Tsutomu Kikuchi , Makoto Tanaka , Hidetoshi Yoshida , Tetsuya Kimijima
IPC分类号： G01N304
CPC分类号： H01J49/0422 , G01N1/26
摘要： There are provided an apparatus for analyzing gases and a gas analyzing method which can securely detect presence and absence of leakage in a short time and which can carry out analyses successively, safely and accurately in a stable state. The apparatus for analyzing gases is provided with sample gas introducing systems (1 to 5) for introducing a plurality of sample gases selectively, and analyzers (6, 10 and 14), and also has means (9) for monitoring, when a sample gas under determination is changed over to another sample gas, change in the concentration of the sample gas component introduced before the change over.
摘要翻译：提供了一种用于分析气体的装置和气体分析方法，其可以在短时间内可靠地检测泄漏的存在和不存在，并且可以在稳定状态下连续，安全和准确地进行分析。用于分析气体的装置设置有用于选择性地引入多个样品气体的样品气体导入系统（1至5）和分析仪（6,10和14），并且还具有用于监测样品气体的装置（9）在确定之前将其转换为另一个样品气体，改变之前引入的样品气体组分的浓度变化。

2. 发明授权

US06478040B1 Gas supplying apparatus and gas substitution method 失效
标题翻译：供气装置和气体替代方法
公开(公告)号：US06478040B1
公开(公告)日：2002-11-12
申请号：US09611348
申请日：2000-07-06
申请人： Tsutomu Kikuchi , Tetsuya Satou , Akira Nishina , Tetsuya Kimijima
发明人： Tsutomu Kikuchi , Tetsuya Satou , Akira Nishina , Tetsuya Kimijima
IPC分类号： G05D706
CPC分类号： F17C13/045 , F17C2205/0326 , F17C2205/0338 , F17C2221/012 , F17C2221/014 , F17C2221/05 , F17C2223/0123 , F17C2223/033 , F17C2227/044 , F17C2250/0636 , F17C2270/0518 , Y02E60/321 , Y10T137/0318 , Y10T137/0396 , Y10T137/7797 , Y10T137/86461 , Y10T137/87249
摘要： Gas supplying apparatus and gas substitution method where machinery and parts constituting the gas system are not damaged, and where gas substitution in the gas system is carried out in a short time with good efficiency. The gas substitution, method for substituting a gas after switching into a gas supplying passage by switching the kind of gases to be supplied includes carrying out an operation for fluctuating a pressure in the gas supplying passage within a range of pressure limitation of component parts thereof until a concentration of a gas before switching remaining in the gas supplying passage becomes parts per billion (ppb) level while the gas after switching is made to flow in the gas supplying passage; setting the pressure to a predetermined pressure; and carrying out an operation for increasing a flow rate of the gas after switching in the gas supplying passage under a flow rate limitation of the component parts thereof until the concentration of the gas is before switching remaining in the gas supplying passage becomes sub-ppb level.
摘要翻译：气体供给装置和气体替代方法，其中构成气体系统的机械部件不被损坏，并且气体系统中的气体替换在短时间内以良好的效率进行。气体置换，通过切换供给气体的种类而切换为气体供给路径后的气体的取代方法包括在其组成部分的压力限制的范围内进行使气体供给通路的压力波动的动作，直到在切换之前的气体的浓度在气体供给通道中保持在十亿分之一（ppb）水平，而在气体供给通道中流动气体; 将压力设定为预定压力; 并进行在气体供给路径切换后的气体的流量在其成分的流量限制下直到气体浓度在剩余在气体供给通道中的切换之前的气体的流量成为sub-ppb水平的操作。

3. 发明授权

US06397660B1 Gas analyzing apparatus 失效
标题翻译：气体分析仪
公开(公告)号：US06397660B1
公开(公告)日：2002-06-04
申请号：US09774730
申请日：2001-01-31
申请人： Tsutomu Kikuchi , Akira Nishina , Tetsuya Kimijima
发明人： Tsutomu Kikuchi , Akira Nishina , Tetsuya Kimijima
IPC分类号： G01N3004
CPC分类号： G01N30/7206 , G01N2030/201 , G01N2030/8886
摘要： There is provided a gas analyzing apparatus capable of minimizing gas remaining by integrating gas switching apparatuses into one and capable of analyzing impurities of ppb level to sub-ppb level contained in various kinds of high-purity gases efficiently and accurately. The gas analyzing apparatus comprises an analyzer introduction passage 22 for introducing a sample gas supplied from a sample gas source 11 into an analyzer 12 via an analyzer introduction valve 22V; a separator introduction passage 23 diverging from a first side passage of the analyzer introduction valve 22V for introducing a sample gas into a separator 13 via a separator introduction valve 23V; a separator flowing out passage 24 for introducing the sample gas flowing out from the separator 13 into a second side passage of the analyzer introduction valve 22V via a separator flowing-out valve 24V; and a gas switching apparatus to be such formed that when the analyzer introduction valve 22V is opened, the separator introduction valve 23V and the separator flowing-out valve 24V are connectively operated to be closed, and when the analyzer introduction valve 22V is closed, the separator introduction valve 23V and the separator flowing-out valve 24V are connectively operated to be opened.
摘要翻译：提供一种气体分析装置，其能够通过将气体切换装置集成为一体而使气体残留最小化，并且能够高效且准确地分析各种高纯度气体中所含的ppb等级和亚ppb等级的杂质。气体分析装置包括分析器引入通道22，用于经由分析器引入阀22V将从样品气体源11供给的样品气体引入分析器12; 从分析器引入阀22V的第一侧通道分离出的分离器引入通道23，用于经由分离器引入阀23V将样品气体引入隔板13; 分离器流出通道24，用于将从分离器13流出的样品气体经由分离器流出阀24V引入分析器导入阀22V的第二侧通道; 以及气体切换装置，其形成为当分析器导入阀22V打开时，分离器导入阀23V和分离器流出阀24V连接动作关闭，当分析器导入阀22V关闭时，分离器引入阀23V和分离器流出阀24V被连接操作以打开。

4. 发明授权

US06550308B2 Gas analyzing apparatus 失效
公开(公告)号：US06550308B2
公开(公告)日：2003-04-22
申请号：US10117599
申请日：2002-04-04
申请人： Tsutomu Kikuchi , Akira Nishina , Tetsuya Kimijima
发明人： Tsutomu Kikuchi , Akira Nishina , Tetsuya Kimijima
IPC分类号： G01N3004
CPC分类号： G01N30/7206 , G01N2030/201 , G01N2030/8886
摘要： There is provided a gas analyzing apparatus capable of minimizing gas remaining by integrating gas switching apparatuses into one and capable of analyzing impurities of ppb level to sub-ppb level contained in various kinds of high-purity gases efficiently and accurately. The gas analyzing apparatus comprises an analyzer introduction passage 22 for introducing a sample gas supplied from a sample gas source 11 into an analyzer 12 via an analyzer introduction valve 22V; a separator introduction passage 23 diverging from a first side passage of the analyzer introduction valve 22V for introducing a sample gas into a separator 13 via a separator introduction valve 23V; a separator flowing-out passage 24 for introducing the sample gas flowing out from the separator 13 into a second side passage of the analyzer introduction valve 22V via a separator flowing-out valve 24V; and a gas switching apparatus to be such formed that when the analyzer introduction valve 22V is opened, the separator introduction valve 23V and the separator flowing-out valve 24V are connectively operated to be closed, and when the analyzer introduction valve 22V is closed, the separator introduction valve 23V and the separator flowing-out valve 24V are connectively operated to be opened.

5. 发明授权

US06418781B1 System for analyzing trace amounts of impurities in gases 失效
标题翻译：用于分析气体中微量杂质的系统
公开(公告)号：US06418781B1
公开(公告)日：2002-07-16
申请号：US09445413
申请日：1999-12-08
申请人： Akira Nishina , Tsutomu Kikuchi , Makoto Tanaka , Hidetoshi Yoshida , Tetsuya Kimijima
发明人： Akira Nishina , Tsutomu Kikuchi , Makoto Tanaka , Hidetoshi Yoshida , Tetsuya Kimijima
IPC分类号： B01D1508
CPC分类号： H01J49/0422 , G01N30/7206 , G01N33/0022 , G01N33/0032
摘要： An analyzing apparatus for assaying various kinds of trace impurity contents in various kinds of high-purity gases, having an atmospheric pressure ionization mass spectrometer useful for determination of trace impurity contents in such high-purity gases on the ppb to sub ppb levels and a gas chromatograph integrated therewith, enabling high efficiency determination of trace impurity contents in high-purity gases. The analyzing apparatus having a gas chromatograph (8) and an atmospheric pressure ionization mass spectrometer (6), is provided with a system (10) for introducing a sample gas introduced from a sample gas introduction source directly to the atmospheric pressure ionization mass spectrometer (6); a system (14a, 14b) for introducing the sample gas via the gas chromatograph (8) to the atmospheric pressure ionization mass spectrometer (6); and a channel selector (11, 13, 15) for changing over the channel of the sample gas to either of these two systems.
摘要翻译：一种用于测定各种高纯度气体中各种痕量杂质含量的分析装置，具有可用于测定这些高纯气体中ppb至亚ppb水平的微量杂质含量的气压电离质谱仪和气体与其集成的色谱仪，可以高效率地测定高纯度气体中的痕量杂质含量。具有气相色谱仪（8）和大气压电离质谱仪（6）的分析装置设置有用于将从样品气体导入源引入的样品气体直接引入大气压电离质谱仪（10）的系统（10） 6）; 用于将样品气体经由气相色谱仪（8）导入大气压电离质谱仪（6）的系统（14a，14b）; 以及用于将样品气体的通道切换到这两个系统中的任一个的通道选择器（11,13,15）。

6. 发明授权

US6000275A Method for analyzing impurities in gas and its analyzer 失效
标题翻译：分析气体中杂质及其分析仪的方法
公开(公告)号：US6000275A
公开(公告)日：1999-12-14
申请号：US051800
申请日：1998-04-23
申请人： Akira Nishina , Hitomi Umehara , Tetsuya Kimijima
发明人： Akira Nishina , Hitomi Umehara , Tetsuya Kimijima
IPC分类号： H01J49/04 , G01N7/00
CPC分类号： H01J49/0422 , H01J49/0009
摘要： A method of analysis of an impurity in a gas is characterized in that an impurity gas in a sample gas is quantified by ionizing the sample gas, and measuring by a mass spectrometer 6 the intensity of cluster ions which are formed from a main component gas and an impurity gas in the sample gas. In addition, a device for analysis of an impurity in a gas is characterized by comprising a mass spectrometer 6 having a means for ionizing a gas which is introduced thereinto, an analysis line 4 which introduces a sample gas into the aforesaid mass spectrometer 6, and a calibration line 10 which adjusts a concentration of an impurity in the sample gas and thereafter introduces the gas into the aforesaid mass spectrometer 6.
摘要翻译： PCT No.PCT / JP97 / 02948 Sec。 371日期：1998年4月23日 102（e）日期1998年4月23日PCT 1997年8月26日PCT公布。公开号WO98 / 09162 日期：1998年3月5日气体中杂质的分析方法的特征在于，样品气体中的杂质气体通过电离样品气体进行定量，并通过质谱仪6测量由样品气体中的主要成分气体和杂质气体。此外，用于分析气体中的杂质的装置的特征在于包括：质量分析器6，其具有用于电离引入其中的气体的装置;将样品气体引入前述质谱仪6的分析线4;以及校准线10，其调节样品气体中的杂质的浓度，然后将气体引入前述质谱仪6中。

7. 发明授权

US06523567B2 Apparatus and process for supplying gas 失效
公开(公告)号：US06523567B2
公开(公告)日：2003-02-25
申请号：US10131666
申请日：2002-04-24
申请人： Tetsuya Satou , Tsutomu Kikuchi , Akira Nishina
发明人： Tetsuya Satou , Tsutomu Kikuchi , Akira Nishina
IPC分类号： F17D100
CPC分类号： F17D1/04 , F17C13/04 , F17C2205/0323 , F17C2221/011 , F17C2221/012 , F17C2221/013 , F17C2221/014 , F17C2221/015 , F17C2221/016 , F17C2221/017 , F17C2227/044 , F17C2250/0636 , F17C2270/0518 , G01N1/22 , Y02E60/321 , Y02E60/34 , Y10T137/4259 , Y10T137/87249 , Y10T137/87595
摘要： There is provided a gas supplying apparatus capable of rapidly switching the gas to be supplied to an instrument and preventing reactive gases from mixing each other. The gas supplying apparatus comprises: a 4-way block valve which is a main switching valve 10, having two inflow ports 11, 12 and two outflow ports 13, 14; an instrument connection passage 1 connected to an instrument, such as an analyzer, to which the outflow ports 13 is connected; an exhaust passage 4 to which the two outflow ports 14 is connected; common gas supplying passages 2, 3 respectively connected to the two inflow ports 11, 12 of the 4-way block valve; a switching valve(s) 20 made of a 2-connected 3-way block valve(s) or a 4-way block valve(s) connected to the at least one of the two common gas supplying passages 2, 3; and two gas supplying passages 21, 22 switchably connected the 2-connected 3-way block valve(s) or the 4-way block valve(s).

8. 发明授权

US06653144B1 Method and an apparatus for analyzing trace impurities in gases 失效
公开(公告)号：US06653144B1
公开(公告)日：2003-11-25
申请号：US09491101
申请日：2000-01-25
申请人： Akira Nishina , Tetsuya Satou
发明人： Akira Nishina , Tetsuya Satou
IPC分类号： G01N3300
CPC分类号： H01J49/0422 , G01N30/7206 , Y10T436/100833 , Y10T436/214 , Y10T436/22 , Y10T436/24
摘要： The present invention relates to a method and an apparatus for analyzing trace impurities in gases, which enable to analyze a very small quantity of impurities by only a simple operation, without making the column arrangement or the structure of flow complicated. In the apparatus and the method, when the trace impurities are measured in ppb-sub ppb level by a combined analyzer which is equipped with an atmospheric pressure ionization mass spectrometer to the back of a gas chromatography, a mixed gas of various gases is used as a carrier gas or purified gases added to the gases outflowed from a gas chromatography.

9. 发明授权

US06474136B1 Method and apparatus for analyzing impurities in gases 失效
标题翻译：用于分析气体中的杂质的方法和装置
公开(公告)号：US06474136B1
公开(公告)日：2002-11-05
申请号：US09698732
申请日：2000-10-27
申请人： Akira Nishina , Makoto Tanaka , Tetsuya Satou
发明人： Akira Nishina , Makoto Tanaka , Tetsuya Satou
IPC分类号： G01N3004
CPC分类号： G01N30/62 , G01N30/466 , G01N30/8631 , G01N2030/025 , G01N2030/626
摘要： There are provided a method and an apparatus capable of accurately analyzing impurity component having high adsorptivity or reactivity in a short time. Prior to starting measurement, predetermined amount of sample gas is introduced into analyzing system in plural times with predetermined time interval and then, analysis of impurities is started.
摘要翻译：提供了能够在短时间内精确地分析具有高吸附性或反应性的杂质成分的方法和装置。在开始测量之前，将预定量的样品气体以预定的时间间隔多次引入分析系统中，然后开始杂质分析。

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