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    • 9. 发明申请
    • Apparatus and method of fabricating emitter using arc
    • 使用电弧制造发射体的装置和方法
    • US20060181220A1
    • 2006-08-17
    • US11254793
    • 2005-10-21
    • Chang-wook MoonIn-kyeong Yoo
    • Chang-wook MoonIn-kyeong Yoo
    • H01L21/00H01J7/24
    • H01J9/025
    • A method and apparatus for fabricating an emitter by colliding an arc with the surface of a wafer inside a vacuum chamber are provided. The apparatus includes: a vacuum chamber in which a wafer is inserted; a magnetic field generating unit for generating a uniform magnetic field inside the vacuum chamber; an electric field generating unit for forming an electric field parallel to the magnetic field inside the vacuum chamber; and a master emitter for emitting electrons towards the wafer. The electrons emitted from the master emitter move along the magnetic field and the electric field. The arc is generated when the electric field or the driving voltage surpasses a threshold by controlling the strength of the electric field and the driving voltage of the master emitter. Thus, the surface of the wafer is instantaneously melted and solidified by the arc, thereby forming the emitter with a sharp tip on the surface of the wafer.
    • 提供了一种用于通过使电弧与真空室内的晶片的表面碰撞来制造发射器的方法和装置。 该装置包括:其中插入有晶片的真空室; 磁场产生单元,用于在真空室内产生均匀的磁场; 电场产生单元,用于形成与真空室内的磁场平行的电场; 以及用于向晶片发射电子的主发射器。 从主发射器发射的电子沿着磁场和电场移动。 当电场或驱动电压通过控制电场的强度和主发射极的驱动电压而超过阈值时,产生电弧。 因此,晶片的表面被电弧瞬间熔化和凝固,从而在晶片的表面上形成具有尖锐尖端的发射极。