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1. 发明授权

US10942141B2 Multi-parametric sensor with bridge structure 有权
公开(公告)号：US10942141B2
公开(公告)日：2021-03-09
申请号：US16346205
申请日：2017-10-30
申请人： SENSIRION AG
发明人： Matthias Merz , Mark Hornung , Felix Hoehne
IPC分类号： G01N27/18 , G01N27/12 , H05B3/22
摘要： The disclosure relates to a sensor for detecting and/or analysing a gas. The sensor comprises a substrate, a recess or opening arranged in the substrate, a first bridge structure and a second bridge structure. The first bridge structure and the second bridge structure extend over said recess or opening and are anchored in the substrate. The first bridge structure forms a first hotplate and comprises a first patch of sensing material, in particular of a metal oxide material, arranged on the first hotplate, electrodes adapted to measure an electrical property of the first patch and a heater adapted to heat the first hotplate. The second bridge structure comprises a temperature sensor. The sensor comprises circuitry for driving the heater and for processing signals from the electrodes and the temperature sensor. The sensor provides a first operation mode configured to perform a measurement of an electrical property of the first patch and a second operation mode configured to operate the second bridge structure in a sensing mode to perform a measurement of a thermal property of the gas. The thermal property is a thermal capacity and/or a thermal conductivity and/or a thermal diffusivity of the gas.

2. 发明授权

US11674833B2 Detection of contaminations on a sensing surface of a thermal sensor 有权
公开(公告)号：US11674833B2
公开(公告)日：2023-06-13
申请号：US16709043
申请日：2019-12-10
申请人： Sensirion AG
发明人： Mark Hornung , Andreas Rüegg , Harry Figi , Lucas Huber
IPC分类号： G01F1/7084 , G01F1/698 , G01K13/02
CPC分类号： G01F1/7084 , G01F1/698 , G01K13/02
摘要： A thermal sensor comprises an active element (41), e.g., a heater or cooler, at least one temperature sensor (31), and processing circuitry (50). The processing circuitry causes a change of power supplied to the active element (41). It then determines, at a plurality of times, a thermal parameter based on an output signal of the temperature sensors and analyzes the transient behavior of the thermal parameter. Based on this analysis, the processing circuitry determines a contamination signal that is indicative of a contamination on a sensing surface of the thermal sensor. If the thermal sensor comprises a plurality of temperature sensors arranged in different sectors of the sensing surface, a multi-sector thermal signal can be derived from the outputs of the sensors, and determination of the contamination signal can be based on the multi-sector thermal signal.

3. 发明授权

US11226300B2 Determination of fluid parameters 有权
公开(公告)号：US11226300B2
公开(公告)日：2022-01-18
申请号：US15555433
申请日：2015-03-05
申请人： Sensirion AG
发明人： Mark Hornung , Andreas Rüegg
IPC分类号： G01N25/20 , G01N33/22 , G01N25/00
摘要： A method for determining fluid parameters, such as a heat capacity cPρ, a calorific value Hp, a methane number MN, and/or a Wobbe index WI, of an unknown fluid (g). An unknown flow (55) of the fluid (g) is set in a sensor device (10), the sensor device (10) comprising a thermal flow sensor (1) and a pressure sensor device (15) for measuring at least one temperature value T1, T2, a further parameter, and differential pressure value Δρ over a flow restrictor (14). Using these measurement parameters T1, T2, Δρ and calibration data, the calorific value Hp, and/or the Wobbe index WI, or parameters indicative thereof, of an unknown fluid (g) are calculated. The invention also relates to such a sensor device (10) and to a computer program product for carrying out such a method.

4. 发明授权

US10151612B2 Flow sensor package 有权
公开(公告)号：US10151612B2
公开(公告)日：2018-12-11
申请号：US14953914
申请日：2015-11-30
申请人： Sensirion AG
发明人： Werner Hunziker , Mark Hornung , Eric Monnin
IPC分类号： G01F15/14 , G01F1/69 , G01F1/684 , H01L23/495 , H01L21/56 , H01L21/78 , H01L23/00 , H01L23/498 , H01L23/34 , G01F1/688 , H01L23/31
摘要： A flow sensor package comprises a chip comprising a sensitive structure for sensing the flow of a fluid and an encapsulation at least partly encapsulating the chip. A recess in the encapsulation contributes to a flow channel for guiding the fluid, which recess exposes at least the sensitive structure of the chip from the encapsulation, and which recess extends beyond an edge of the chip.

5. 发明授权

US10094691B2 Flow sensor arrangement 有权
公开(公告)号：US10094691B2
公开(公告)日：2018-10-09
申请号：US14976799
申请日：2015-12-21
申请人： Sensirion AG
发明人： Harry Figi , Mark Hornung , Robert Wuest
IPC分类号： G01F1/688 , G01F15/02
摘要： A flow sensor arrangement for determining the flow of a fluid comprises a substrate. A heater is arranged in or on the substrate as well as at least one first thermocouple for generating a first signal proportional to a temperature difference between a location downstream from the heater and a first reference location, and at least one second thermocouple for generating a second signal proportional to a temperature difference between a location upstream from the heater and a second reference location which second reference location is different from the first reference location. In addition, at least one third thermocouple is arranged in or on the substrate for generating a third signal proportional to a temperature difference between the first reference location and the second reference location. Means are provided for determining a sensing signal indicative of the flow of the fluid over the heater and the first and the second thermocouple dependent on the first signal, the second signal and the third signal.

6. 发明授权

US11703470B2 Sensor device for determining heat transfer parameters of a fluid 有权
公开(公告)号：US11703470B2
公开(公告)日：2023-07-18
申请号：US17353076
申请日：2021-06-21
申请人： Sensirion AG
发明人： Mark Hornung , Eric Monnin
IPC分类号： G01N25/18 , G01N25/48
CPC分类号： G01N25/18 , G01N25/482 , G01N25/4826
摘要： A sensor device for determining at least one heat transfer parameter of a gas comprises a sensor unit (10) comprising at least one heater element and at least one temperature sensor. A first (inner) housing (20) receives the sensor unit. The first housing comprises a first membrane (22) allowing a diffusive gas exchange between the exterior and the interior of the first housing. The first housing is received in a second (outer) housing (30). The second housing comprises a second membrane (32) allowing a diffusive gas exchange between the exterior of the second housing and the exterior of the first housing. Thereby temperature gradients inside the first housing are reduced. The second housing can be made of metal and can be disposed on a support plate (40), taking the form of a cap. An auxiliary sensor (50) can be arranged in the space between the first and second housings.

7. 发明授权

US11474056B2 Sensor for determining the thermal capacity of natural gas 有权
公开(公告)号：US11474056B2
公开(公告)日：2022-10-18
申请号：US17051308
申请日：2019-04-23
申请人： SENSIRION AG
发明人： Mark Hornung , Andreas Rüegg , David Kiliani , Nicolas Möller
IPC分类号： G01N25/18 , G01N25/00 , G01N33/22
摘要： The disclosure concerns a sensor device for determining the thermal capacity of a natural gas. The sensor device comprises a substrate, a recess or opening arranged in the substrate, a first heating component and a first sensing component. The first heating component comprises a first heating structure and a temperature sensor and the first sensing component comprises a temperature sensor. The sensor device is configured to measure the thermal conductivity of the natural gas at a first measuring temperature and at a second measuring temperature. The sensor device is configured to determine a first, in particular a constant, and a second, in particular a linear temperature coefficient of a temperature dependency function of the thermal conductivity and to determine the thermal capacity of the natural gas based on a fitting function. The fitting function is dependent on the first and the second temperature coefficient.

8. 发明授权

US10345829B2 Inlet pressure perturbation insensitive mass flow controller 有权
公开(公告)号：US10345829B2
公开(公告)日：2019-07-09
申请号：US15211249
申请日：2016-07-15
申请人： Sensirion AG
发明人： Mark Hornung , Thomas Huber , Philipp Reibisch , Andreas Rüegg
IPC分类号： G01F1/86 , G05D16/20 , G05D7/06
摘要： A mass flow controller (10) comprises a fluid inlet (15) and at least one first flow meter (11) to measure a first flow rate (F1) and to output a first flow signal (FS1); at least one second flow meter (12) to measure a second flow (F2) rate and to output a second flow signal (FS2); a control device (13) connected to said first and second flow meters (11,12) and configured and arranged to generate a control signal (C); and at least one control valve (14) connected to said control device (13) to control a total flow rate (Fout) through the mass flow controller (10) in response to the control signal (C). The control signal (C) is generated as a function of both the first and second flow signals (FS1,FS2) such that the mass flow controller's (10) sensitivity to perturbations of said inlet pressure is minimized.

9. 发明授权

US12140309B2 Device for regulating a mixing ratio of a gas mixture 有权
公开(公告)号：US12140309B2
公开(公告)日：2024-11-12
申请号：US17282718
申请日：2018-10-05
申请人： Sensirion AG
发明人： Mark Hornung , Andreas Rüegg , Eric Monnin , David Kiliani , Samuel Wehrli , Daniel Traeutlein
IPC分类号： F23N1/02 , F23N5/02 , F23N5/18
CPC分类号： F23N1/022 , F23N5/025 , F23N5/187 , F23N2005/181 , F23N2005/185 , F23N2221/10 , F23N2225/06 , F23N2239/04
摘要： A regulation device for regulating a mixing ratio (x) of a gas mixture comprises a first conduit (1) for carrying a flow of a first gas (e.g., air) and a second conduit (2) for carrying a flow of a second gas (e.g., a fuel gas). The first and second conduits (1, 2) open out into a common conduit (3) in a mixing region (M) to form the gas mixture. A first sensor (S1) is configured to determine at least one thermal parameter of the gas mixture downstream from the mixing region. A control device (10) is configured to receive, from the first sensor, sensor signals indicative of the at least one thermal parameter of the gas mixture and to derive control signals for adjusting device (V1) acting to adjust the mixing ratio, based on the at least one thermal parameter.

10. 发明授权

US11965807B2 Duct sensor with duct probe for sampling a fluid from a duct and method of operation 有权
公开(公告)号：US11965807B2
公开(公告)日：2024-04-23
申请号：US17613461
申请日：2020-05-19
申请人： Sensirion AG
发明人： Nicolas Moeller , Mark Hornung , Stefan Thiele , Patrick Leidenberger , Stefan Kostner
IPC分类号： G01N1/22 , G01N15/02 , G01N15/06
CPC分类号： G01N1/2247 , G01N15/02 , G01N15/06
摘要： A duct probe (20) for sampling a fluid from a main fluid flow (Fm) in a duct (10) defines an elongated supply channel (21) n elongated discharge channel (22). The supply channel has at least one inflow opening (23) for diverting a partial flow (Fp) from the main fluid flow into the supply channel, and the discharge channel has at least one outflow opening for returning the partial flow from the discharge channel into the main fluid flow after it has passed an environmental sensor (30). The duct probe further comprises at least one compensation opening (26) that connects the supply channel and the discharge channel in a region that is located between their closed and open ends. By the presence of the compensation opening (26), a jet flow (Fj) is created, which acts to reduce a pressure difference between the supply channel and the discharge channel when the duct probe is exposed to the main fluid flow (Fm).

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