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1. 发明授权

US10094691B2 Flow sensor arrangement 有权
公开(公告)号：US10094691B2
公开(公告)日：2018-10-09
申请号：US14976799
申请日：2015-12-21
申请人： Sensirion AG
发明人： Harry Figi , Mark Hornung , Robert Wuest
IPC分类号： G01F1/688 , G01F15/02
摘要： A flow sensor arrangement for determining the flow of a fluid comprises a substrate. A heater is arranged in or on the substrate as well as at least one first thermocouple for generating a first signal proportional to a temperature difference between a location downstream from the heater and a first reference location, and at least one second thermocouple for generating a second signal proportional to a temperature difference between a location upstream from the heater and a second reference location which second reference location is different from the first reference location. In addition, at least one third thermocouple is arranged in or on the substrate for generating a third signal proportional to a temperature difference between the first reference location and the second reference location. Means are provided for determining a sensing signal indicative of the flow of the fluid over the heater and the first and the second thermocouple dependent on the first signal, the second signal and the third signal.

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