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1. 发明授权

US10942141B2 Multi-parametric sensor with bridge structure 有权
公开(公告)号：US10942141B2
公开(公告)日：2021-03-09
申请号：US16346205
申请日：2017-10-30
申请人： SENSIRION AG
发明人： Matthias Merz , Mark Hornung , Felix Hoehne
IPC分类号： G01N27/18 , G01N27/12 , H05B3/22
摘要： The disclosure relates to a sensor for detecting and/or analysing a gas. The sensor comprises a substrate, a recess or opening arranged in the substrate, a first bridge structure and a second bridge structure. The first bridge structure and the second bridge structure extend over said recess or opening and are anchored in the substrate. The first bridge structure forms a first hotplate and comprises a first patch of sensing material, in particular of a metal oxide material, arranged on the first hotplate, electrodes adapted to measure an electrical property of the first patch and a heater adapted to heat the first hotplate. The second bridge structure comprises a temperature sensor. The sensor comprises circuitry for driving the heater and for processing signals from the electrodes and the temperature sensor. The sensor provides a first operation mode configured to perform a measurement of an electrical property of the first patch and a second operation mode configured to operate the second bridge structure in a sensing mode to perform a measurement of a thermal property of the gas. The thermal property is a thermal capacity and/or a thermal conductivity and/or a thermal diffusivity of the gas.

2. 发明授权

US11879752B2 Sensor module for air quality measurement 有权
公开(公告)号：US11879752B2
公开(公告)日：2024-01-23
申请号：US16961714
申请日：2018-10-23
申请人： Sensirion AG
发明人： Stephan Braun , Tobias Schmid , Thomas Brugger , Matthias Merz , Manuel Becker
IPC分类号： G01D11/26 , G01K1/08 , G01K7/16 , G01K13/02 , G01N25/66 , G01N27/12 , G01N33/00 , G01K13/024
CPC分类号： G01D11/26 , G01K1/08 , G01K7/16 , G01K13/02 , G01N25/66 , G01N27/12 , G01N33/0027 , G01K13/024
摘要： A sensor module as well as a method for manufacturing a sensor module for determining a property of a fluid, in particular for measuring air quality, comprises a printed circuit board, at least one sensor on the printed circuit board for measuring a parameter of the surrounding air and a housing for the printed circuit board. A part of the printed circuit board protrudes from an opening in the housing (10), wherein the at least one sensor (21, 22) is located on a front side of the protruding part of the printed circuit board. In addition, at least the front side of the protruding part of the printed circuit board, with the exception of a recess for the at least one sensor, is encapsulated with a filling compound. The sensor module can be used in an interior or an air duct of motor vehicles or buildings. In one embodiment, the sensor module measures temperature, relative humidity and gas concentration in a fluid, especially in the surrounding air.

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