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1. 发明授权

US10117639B2 Ultrasonic sensor as well as probe and electronic apparatus 有权
公开(公告)号：US10117639B2
公开(公告)日：2018-11-06
申请号：US14869094
申请日：2015-09-29
申请人： SEIKO EPSON CORPORATION
发明人： Masayoshi Yamada , Hiroshi Matsuda , Tomoaki Nakamura , Hiroshi Ito , Hiromu Miyazawa
IPC分类号： G01N29/24 , A61B8/00 , B06B1/06 , G01N29/06 , G01N29/22 , H01L41/113
摘要： An ultrasonic sensor includes a vibration plate, a first electrode, a piezoelectric body, and a second electrode. The first electrode is laminated on the vibration plate, that has a length along a surface of the vibration plate in a first direction, and that has a width Wbe along the surface of the vibration plate in a second direction that is orthogonal to the first direction. The width Wbe is not more than the length. The piezoelectric body is laminated on the first electrode and has a width Wpz in the second direction. The second electrode is laminated on the piezoelectric body. A ratio Wbe/Wpz between the width Wbe of the first electrode and the width Wpz of the piezoelectric body is not less than 0.1 and not more than 0.8.

2. 发明授权

US09851266B2 Stress-detecting element, sensor module, and electronic apparatus 有权
公开(公告)号：US09851266B2
公开(公告)日：2017-12-26
申请号：US14451844
申请日：2014-08-05
申请人： SEIKO EPSON CORPORATION
发明人： Tomoaki Nakamura , Tsutomu Nishiwaki
IPC分类号： G01L1/00 , G01L1/16 , G01L5/22 , G01L1/26
CPC分类号： G01L1/16 , G01L1/26 , G01L5/228
摘要： A stress-detecting element includes a support body, a support film, a first piezoelectric element, first and second elastic parts. The support body has an opening part with first and second rectilinear sections extending parallel to each other. The support film blocks off the opening part. The first piezoelectric element straddles the first rectilinear section from an interior area to an exterior area of the opening part as seen in plan view. The first elastic part straddles the first rectilinear section from the interior area to the exterior area of the opening part. The second elastic part straddles the second rectilinear section from the interior area to the exterior area of the opening part. The first and second elastic parts respectively have first and second elastic end sections disposed in the interior area of the opening part and spaced apart from each other.

3. 发明授权

US09561527B2 Ultrasonic transducer, ultrasonic probe, and ultrasonic examination device 有权
标题翻译：超声波换能器，超声波探头和超声波检测装置
公开(公告)号：US09561527B2
公开(公告)日：2017-02-07
申请号：US14994461
申请日：2016-01-13
申请人： SEIKO EPSON CORPORATION
发明人： Tomoaki Nakamura , Hironori Suzuki , Jiro Tsuruno
IPC分类号： B06B1/06 , H01L41/08 , G01S15/02 , A61B8/00 , H01L41/053
CPC分类号： B06B1/0644 , A61B8/4444 , B06B1/0622 , G01S15/02 , G10K9/122 , G10K13/00 , H01L41/053 , H01L41/0825
摘要： An ultrasonic transducer includes a substrate, a supporting film disposed on the substrate, and a piezoelectric element disposed on the supporting film. The substrate includes an opening. The piezoelectric element is disposed on an area that overlaps the opening in a plan view in a thickness direction of the substrate. A thickness of the supporting film at an area that overlaps the piezoelectric element in a plan view of the supporting film is smaller than a thickness of the supporting film at a different area different from the area that overlaps the piezoelectric element.
摘要翻译：超声换能器包括基板，设置在基板上的支撑膜和设置在支撑膜上的压电元件。基板包括开口。压电元件设置在与基板的厚度方向的平面图重叠的区域上。在支撑膜的平面图中与压电元件重叠的区域处的支撑膜的厚度小于在与压电元件重叠的区域不同的区域处的支撑膜的厚度。

4. 发明授权

US09462995B2 Biological testing device including ultrasonic wave transmitting/receiving part 有权
标题翻译：生物检测装置包括超声波发射/接收部分
公开(公告)号：US09462995B2
公开(公告)日：2016-10-11
申请号：US13973256
申请日：2013-08-22
申请人： SEIKO EPSON CORPORATION
发明人： Tomoaki Nakamura
IPC分类号： H01L41/08 , A61B8/00 , B06B1/06 , G01H11/08 , G10K11/00 , H01L41/113 , A61B8/13 , A61B8/04 , A61B8/06 , A61B5/00
CPC分类号： A61B8/429 , A61B5/6826 , A61B8/04 , A61B8/06 , A61B8/13 , A61B8/4281 , A61B8/4444 , A61B8/4494 , B06B1/06 , B06B1/0603 , G01H11/08 , G10K11/004 , H01L41/1138
摘要： A biological testing device includes a main unit including an ultrasonic wave transmitting/receiving part, and an attaching member for attaching the main unit on a tested object. The ultrasonic wave transmitting/receiving part includes a sensor array substrate including ultrasonic transducers, first and second resin material parts, and an ultrasonic wave transmitting medium. The first resin material part forms a first space closed off from an outside space between the first resin material part and the sensor array substrate with the first resin material part facing the ultrasonic transducers. The second resin material part forms a second space communicating with the first space. The second space is closed off from the outside space, at least a portion of the second resin material part including a flexible portion configured and arranged to bulge toward the outside space. The ultrasonic wave transmitting medium fills the first space and the second space.
摘要翻译：一种生物检测装置，具备包括超声波收发部的主体部以及将被检查物体附着在主体上的安装部。超声波收发部包括具有超声波振子，第一和第二树脂材料部以及超声波传输介质的传感器阵列基板。第一树脂材料部分形成从第一树脂材料部分和传感器阵列基板之间的外部空间封闭的第一空间，第一树脂材料部分面向超声换能器。第二树脂材料部分形成与第一空间连通的第二空间。第二空间从外部空间封闭，第二树脂材料部分的至少一部分包括被构造和布置成朝向外部空间凸出的柔性部分。超声波发送介质填充第一空间和第二空间。

5. 发明授权

US09456803B2 Ultrasonic probe and ultrasonic inspection apparatus 有权
公开(公告)号：US09456803B2
公开(公告)日：2016-10-04
申请号：US14859901
申请日：2015-09-21
申请人： SEIKO EPSON CORPORATION
发明人： Tomoaki Nakamura , Hiroaki Hosomi
IPC分类号： A61B8/00 , B06B1/06
CPC分类号： A61B8/4494 , A61B8/4444 , B06B1/0629 , B06B1/0674
摘要： An ultrasonic probe includes a substrate, a diaphragm, a thin-film piezoelectric element, a communication passage, and an air hole. The substrate has first and second cavities thereon. The diaphragm is configured at the first cavity. The thin-film piezoelectric element is configured to the diaphragms. The communicating passage is configured in the substrate and extending from the first cavity to the second cavity. The air hole extends between the communicating passage to an outside of the substrate.

6. 发明授权

US09456801B2 Biological testing device 有权
标题翻译：生物检测装置
公开(公告)号：US09456801B2
公开(公告)日：2016-10-04
申请号：US14587734
申请日：2014-12-31
申请人： SEIKO EPSON CORPORATION
发明人： Tomoaki Nakamura
IPC分类号： B06B1/06 , A61B8/00 , G01H11/08 , G10K11/00 , H01L41/113 , A61B8/13 , A61B8/04 , A61B8/06 , A61B5/00
CPC分类号： A61B8/429 , A61B5/6826 , A61B8/04 , A61B8/06 , A61B8/13 , A61B8/4281 , A61B8/4444 , A61B8/4494 , B06B1/06 , B06B1/0603 , G01H11/08 , G10K11/004 , H01L41/1138
摘要： An ultrasonic probe includes an ultrasonic transducer, a liquid filled section filled with a liquid, a contact section, and a flexible section. The contact section includes a deformable resin material, is positioned outside the ultrasonic transducer, and forms a portion of the liquid filled section. The flexible section includes the deformable resin material and forms a portion of the liquid filled section. The ultrasonic transducer is configured to transmit ultrasonic waves through the contact section.
摘要翻译：超声波探头包括超声波换能器，充满液体的液体填充部分，接触部分和柔性部分。接触部分包括可变形的树脂材料，位于超声波换能器外部，并形成液体填充部分的一部分。柔性部分包括可变形的树脂材料并形成液体填充部分的一部分。超声波换能器被配置为通过接触部分传输超声波。

7. 发明授权

US09231190B2 Method for manufacturing an ultrasonic transducer, biological sensor 有权
标题翻译：超声波换能器制造方法，生物传感器
公开(公告)号：US09231190B2
公开(公告)日：2016-01-05
申请号：US14448407
申请日：2014-07-31
申请人： SEIKO EPSON CORPORATION
发明人： Tomoaki Nakamura , Hironori Suzuki
IPC分类号： H01L41/312 , H01L41/23 , H03H3/02 , H03H3/04 , H01L41/09 , B06B1/06 , A61B8/08 , A61B8/00 , G01N29/36
CPC分类号： H01L41/23 , A61B8/0891 , A61B8/4227 , A61B8/4455 , B06B1/0651 , G01N29/36 , H01L41/0973 , H01L41/22 , H01L41/312 , H03H3/02 , H03H3/04 , H03H2003/045 , Y10T29/42 , Y10T29/49005 , Y10T29/49126
摘要： A method for manufacturing an ultrasonic transducer includes: forming a piezoelectric element by laminating a lower electrode, a piezoelectric body, and an upper electrode on a first face of a support film; affixing a reinforcing substrate that covers the piezoelectric element to the first face of the support film; forming a photosensitive resin substrate to a second face of the support film that is on an opposite side from the first face; forming an opening in the resin substrate by irradiating the resin substrate with light; and removing the reinforcing substrate.
摘要翻译：一种制造超声换能器的方法包括：通过在支撑膜的第一面上层叠下电极，压电体和上电极来形成压电元件; 将覆盖所述压电元件的增强基板固定到所述支撑膜的第一面; 在与所述第一面相反一侧的所述支撑膜的第二面上形成感光性树脂基板; 通过用光照射树脂基板在树脂基板中形成开口; 并移除加强基板。

8. 发明授权

US11474342B2 Wavelength-tunable interference filter 有权
公开(公告)号：US11474342B2
公开(公告)日：2022-10-18
申请号：US16905962
申请日：2020-06-19
申请人： Seiko Epson Corporation
发明人： Yasushi Matsuno , Tomoaki Nakamura
IPC分类号： G02B26/00 , G02B5/00
摘要： A wavelength-tunable interference filter includes: a first substrate where a first mirror and a first electrode are provided; a second substrate where a second mirror corresponding to the first mirror and a second electrode facing the first electrode are provided; and a bonding part bonding the first substrate and the second substrate together. The first substrate includes a moving part where the first mirror is arranged, a diaphragm part holding the moving part in such a way that the moving part is movable in the Z-direction, and an outer circumferential part provided outside of the diaphragm part. The diaphragm part includes a planar part having a uniform thickness, and a first slope part having a thickness in the Z-direction incrementing as it goes from the planar part toward the outer circumferential part. The first electrode is provided over a range from the planar part to the first slope part. An outer edge of the first electrode, which is an edge opposite to the first mirror, is located at the first slope part. The bonding part is provided over a range from a part of the first slope part to the outer circumferential part.

9. 发明授权

US10813623B2 Ultrasonic device, ultrasonic apparatus, and thickness design method 有权
公开(公告)号：US10813623B2
公开(公告)日：2020-10-27
申请号：US15817665
申请日：2017-11-20
申请人： Seiko Epson Corporation
发明人： Tomoaki Nakamura
IPC分类号： B06B1/06 , A61B8/00 , G01N29/22 , A61B8/08 , G01N29/06 , G01N29/24 , G01N29/32
摘要： An ultrasonic device includes: a substrate that is provided with a first surface and a second surface as a back surface of the first surface and has an opening opened from the first surface to the second surface; a support that blocks the opening on the first surface side; a vibrator provided on the support; and a metal membrane provided in an unopened region, which is not opened by the opening, on the second surface of the substrate.

10. 发明授权

US09592534B2 Ultrasonic transducer element chip, probe, electronic instrument, and ultrasonic diagnostic device 有权
标题翻译：超声波换能器元件芯片，探头，电子仪器和超声波诊断装置
公开(公告)号：US09592534B2
公开(公告)日：2017-03-14
申请号：US14753121
申请日：2015-06-29
申请人： SEIKO EPSON CORPORATION
发明人： Tomoaki Nakamura , Jiro Tsuruno , Kanechika Kiyose
IPC分类号： B06B1/06 , A61B8/00 , H01L41/053
CPC分类号： B06B1/0629 , A61B8/4427 , A61B8/4488 , A61B8/4494 , B06B1/0622 , H01L41/053
摘要： An ultrasonic transducer element chip includes a substrate, a plurality of ultrasonic transducer elements and a plate-shaped member. The substrate includes a partition wall section defining a plurality of openings arranged in an array pattern. A wall thickness of the partition wall section is smaller than a wall height of partition wall section. Each of the ultrasonic transducer elements is provided in each of the openings. The plate-shaped member is fixed on a surface of the substrate opposite to a surface of the substrate on which the ultrasonic transducer elements are provided. The plate-shaped member covers at least one of the openings in a plan view seen along a thickness direction of the substrate.
摘要翻译：超声波换能器元件芯片包括基板，多个超声波换能器元件和板状构件。衬底包括限定以阵列图案布置的多个开口的分隔壁部分。分隔壁部的壁厚小于分隔壁部的壁高。每个超声换能器元件设置在每个开口中。板状构件固定在与设置有超声波换能器元件的基板的表面相反的基板的表面上。板状构件在沿着基板的厚度方向观察的平面图中覆盖至少一个开口。

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