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    • 3. 发明授权
    • Method of fabricating a high-density dynamic random-access memory
    • 制造高密度动态随机存取存储器的方法
    • US5856219A
    • 1999-01-05
    • US912686
    • 1997-08-18
    • Yasushi NaitoYutaka ItoYuichi Hirofuji
    • Yasushi NaitoYutaka ItoYuichi Hirofuji
    • H01L23/522H01L21/768H01L21/8239H01L21/8242H01L27/10H01L27/108
    • H01L27/1052H01L27/10873
    • The invention relates to a high-density DRAM fabrication technique for forming a source/drain contact between word lines in a self-alignment manner, with the offset length between a source region and a drain region of a peripheral transistor maintained at an adequate value. After gate electrodes (i.e. word lines) are formed, a first insulating layer, which is thin enough not to block up space defined between the word lines, is deposited. The source/drain contact is etched as deep as the first insulating layer is thick to form an extraction electrode made of polycrystalline silicon. A second insulating layer is deposited until a spacer thickness (i.e. the sum of the film thickness of the second insulating layer and the film thickness of the first insulating layer) for determining the offset length is obtained. The first and second insulating layers are etched back for a distance corresponding to the sum of the film thickness of the second insulating layer and the film thickness of the first insulating layer so that a spacer (i.e. the residue of the insulating layers) is left on the side walls of the gate electrode. An implantation of highlevel impurities is performed to form heavily doped source and drain regions of a peripheral transistor. In-cell self-align contact is made possible while maintaining the offset length of the heavily doped source and drain regions
    • 本发明涉及用于以自对准方式在字线之间形成源极/漏极接触的高密度DRAM制造技术,其中外围晶体管的源极区域和漏极区域之间的偏移长度保持在足够的值。 在形成栅电极(即字线)之后,沉积足够薄而不能阻挡字线之间限定的空间的第一绝缘层。 源极/漏极接触被蚀刻为第一绝缘层较厚的深度,以形成由多晶硅制成的引出电极。 沉积第二绝缘层,直到获得用于确定偏移长度的间隔物厚度(即第二绝缘层的膜厚度和第一绝缘层的膜厚度之和)。 第一绝缘层和第二绝缘层被回蚀一段对应于第二绝缘层的膜厚度与第一绝缘层的膜厚之和的距离,使得间隔物(即,绝缘层的残留物)留在 栅电极的侧壁。 执行高级杂质的注入以形成外围晶体管的重掺杂源极和漏极区域。 在保持重掺杂源极和漏极区域的偏移长度的同时使单元内自对准接触成为可能
    • 9. 发明授权
    • Broadcast receiving apparatus, and a tuner and a distributor for the same
    • 广播接收装置,以及调谐器及其分配器
    • US07990480B2
    • 2011-08-02
    • US11604311
    • 2006-11-27
    • Yasushi NaitoKatsunobu KimuraKatsunori Mochizuki
    • Yasushi NaitoKatsunobu KimuraKatsunori Mochizuki
    • H04N5/50H04N5/44
    • H04N5/46H03J1/0083H04N5/4401H04N5/45H04N5/64H04N7/0122H04N21/4263
    • Within a broadcast receiving apparatus, mounting therein two (2) pieces of tuner units, each being receivable at least three (3) kinds of broadcasting signals, and being receivable plural numbers of broadcasting signals, simultaneously, the tuner units, each capable to receive an analog terrestrial broadcasting signal, digital BS/CS broadcasting signals, and a digital terrestrial broadcasting signal, are mounted within a housing 11 of the broadcast receiving apparatus 10, wherein a main tuner 110 and a sub-tuner 120 are mounted on both surfaces of a substrate 100, directing upper and lower surfaces thereof into the same direction, and distributors 130 and 140 for distributing antenna inputs are attached between input terminals 111, 112, 121 and 122 of those tuner units, bridging over both surfaces of the substrate, and thereby providing a technology for mounting or packaging the tuner units, with achieving small-sizing and thin-sizing thereof.
    • 在广播接收装置内,安装有两(2)个调谐器单元,每个调谐器单元可接收至少三种(3)种广播信号,并且可接收多个广播信号,同时,每个能够接收的调谐器单元 模拟地面广播信号,数字BS / CS广播信号和数字地面广播信号安装在广播接收设备10的外壳11内,其中主调谐器110和子调谐器120安装在 将其上表面和下表面引导到相同方向的基板100,并且用于分配天线输入的分配器130和140附接在那些调谐器单元的输入端子111,112,121和122之间,桥接在基板的两个表面上,以及 从而提供了一种用于安装或包装调谐器单元的技术,其实现了小尺寸和薄型化。