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    • 8. 发明申请
    • Vibration type gyrosensor device
    • 振动式陀螺仪器
    • US20050241395A1
    • 2005-11-03
    • US11088480
    • 2005-03-24
    • Kazuo TakahashiTakashi TamuraJunichi HondaTeruo Inaguma
    • Kazuo TakahashiTakashi TamuraJunichi HondaTeruo Inaguma
    • G01C19/56G01C19/5656G01C19/5663H01L41/08H01L41/18H01L41/22H01L41/29H01L41/311
    • G01C19/5642
    • Disclosed is a small-sized vibration type gyrosensor device of high sensitivity provided with a cantilevered oscillator. A cantilevered oscillator 11, provided with a lower electrode, a piezoelectric film and an upper electrode, formed on a single-crystal silicon substrate by a thin film forming process, includes, as an upper electrode, a driving electrode 6a, formed along the length of the oscillator 11 for applying the voltage for causing oscillations of the oscillator 11, and first and second detection electrodes 6b, 6c, formed on both sides of the driving electrode 6a parallel to the longitudinal direction of the oscillator, without contacting with the driving electrode 6a. With a width W0 of the driving electrode 6a, a width W1 of the first detection electrode 6b, a width W2 of the second detection electrode 6c and with W=W0+W1+W2, the condition of 0.5
    • 公开了一种具有悬臂振荡器的高灵敏度的小型振动式陀螺仪。 通过薄膜形成工艺在单晶硅衬底上形成的具有下电极,压电膜和上电极的悬臂振荡器11包括沿着上电极形成的驱动电极6a, 用于施加用于引起振荡器11的振荡的电压的振荡器11的长度以及形成在驱动电极6的平行于振荡器的纵向的两侧上的第一和第二检测电极6b,6c,而不接触 与驱动电极6a连接。 驱动电极6a的宽度W 0,第一检测电极6b的宽度W 1,第二检测电极6c的宽度W 2,W = W 0 + W 1 + W 2,条件 为0.5 <(W 0 / W)<1。
    • 10. 发明授权
    • Method of manufacturing a magnetic head
    • 制造磁头的方法
    • US07428776B2
    • 2008-09-30
    • US10737566
    • 2003-12-16
    • Teruo Inaguma
    • Teruo Inaguma
    • G11B5/17H05K3/06
    • H01F5/003G11B5/127G11B5/17G11B5/3103G11B5/313H01F17/0006H01F41/042Y10T29/49041Y10T29/4906Y10T29/49062Y10T29/49073Y10T29/49155Y10T29/49156
    • A method of manufacturing a thin-film coil in which a first coil and a second coil each having a desired number of winding are electrically connected in series and the second coil is formed between winding portions of the first coil on substantially the same plane, comprising: forming the first coil having a predetermined number of windings via a first insulating film; forming a second insulating film on a surface of the first coil and between the winding portions of the first coil; forming an underlying conductive film on the second insulating film, and treating the underlying conductive film so as to leave only the bottom portions of the underlying conducting film between the winding portions of the first coil; and growing deposition originating from a remaing portion of the underlying conductive film on the bottom portions of the underlying conducting film between the winding portions of the first coil so as to form the second coil.
    • 一种制造薄膜线圈的方法,其中具有期望数量的绕组的第一线圈和第二线圈串联地电连接,并且第二线圈形成在基本上在同一平面上的第一线圈的绕组部分之间,包括 :经由第一绝缘膜形成具有预定数量的绕组的第一线圈; 在所述第一线圈的表面和所述第一线圈的绕组部之间形成第二绝缘膜; 在第二绝缘膜上形成下面的导电膜,并处理下面的导电膜,以便仅使底层导电膜的底部部分在第一线圈的绕组部分之间; 以及源自在第一线圈的绕组部分之间的下面的导电膜的底部上的下面的导电膜的再一部分的沉积,以形成第二线圈。