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1. 发明授权

US08185242B2 Dynamic alignment of wafers using compensation values obtained through a series of wafer movements 有权
标题翻译：使用通过一系列晶片移动获得的补偿值来动态地对准晶片
公开(公告)号：US08185242B2
公开(公告)日：2012-05-22
申请号：US12116897
申请日：2008-05-07
申请人： Scott Wong , Jeffrey Lin , Andrew D. Bailey, III , Jack Chen , Benjamin W. Mooring , Chung Ho Huang
发明人： Scott Wong , Jeffrey Lin , Andrew D. Bailey, III , Jack Chen , Benjamin W. Mooring , Chung Ho Huang
IPC分类号： G06F19/00 , G06F17/00 , G05B19/18 , G05B15/00 , G05B19/00
CPC分类号： H01L21/68
摘要： Methods and systems to optimize wafer placement repeatability in semiconductor manufacturing equipment using a controlled series of wafer movements are provided. In one embodiment, a preliminary station calibration is performed to teach a robot position for each station interfaced to facets of a vacuum transfer module used in semiconductor manufacturing. The method also calibrates the system to obtain compensation parameters that take into account the station where the wafer is to be placed, position of sensors in each facet, and offsets derived from performing extend and retract operations of a robot arm. In another embodiment where the robot includes two arms, the method calibrates the system to compensate for differences derived from using one arm or the other. During manufacturing, the wafers are placed in the different stations using the compensation parameters.
摘要翻译：提供了使用受控系列的晶片移动来优化半导体制造设备中的晶片布置重复性的方法和系统。在一个实施例中，执行初步站校准以教导与用于半导体制造中的真空传递模块的面连接的每个站的机器人位置。该方法还校准系统以获得考虑要放置晶片的工位的位置的补偿参数，每个面中的传感器的位置以及执行机器人臂的延伸和缩回操作导出的偏移。在机器人包括两个臂的另一实施例中，该方法校准系统以补偿从使用一个臂或另一个臂导出的差异。在制造期间，使用补偿参数将晶片放置在不同的台中。

2. 发明申请

US20090279989A1 DYNAMIC ALIGNMENT OF WAFERS USING COMPENSATION VALUES OBTAINED THROUGH A SERIES OF WAFER MOVEMENTS 有权
标题翻译：使用通过一系列波浪运动获得的补偿值的波形的动态对齐
公开(公告)号：US20090279989A1
公开(公告)日：2009-11-12
申请号：US12116897
申请日：2008-05-07
申请人： Scott Wong , Jeffrey Lin , Andrew D. Bailey, III , Jack Chen , Benjamin W. Mooring , Chung Ho Huang
发明人： Scott Wong , Jeffrey Lin , Andrew D. Bailey, III , Jack Chen , Benjamin W. Mooring , Chung Ho Huang
IPC分类号： H01L21/67
CPC分类号： H01L21/68
摘要： Methods and systems to optimize wafer placement repeatability in semiconductor manufacturing equipment using a controlled series of wafer movements are provided. In one embodiment, a preliminary station calibration is performed to teach a robot position for each station interfaced to facets of a vacuum transfer module used in semiconductor manufacturing. The method also calibrates the system to obtain compensation parameters that take into account the station where the wafer is to be placed, position of sensors in each facet, and offsets derived from performing extend and retract operations of a robot arm. In another embodiment where the robot includes two arms, the method calibrates the system to compensate for differences derived from using one arm or the other. During manufacturing, the wafers are placed in the different stations using the compensation parameters.
摘要翻译：提供了使用受控系列的晶片移动来优化半导体制造设备中的晶片布置重复性的方法和系统。在一个实施例中，执行初步站校准以教导与用于半导体制造中的真空传递模块的面连接的每个站的机器人位置。该方法还校准系统以获得考虑要放置晶片的工位的位置的补偿参数，每个面中的传感器的位置以及执行机器人臂的延伸和缩回操作导出的偏移。在机器人包括两个臂的另一实施例中，该方法校准系统以补偿从使用一个臂或另一个臂导出的差异。在制造期间，使用补偿参数将晶片放置在不同的台中。

3. 发明申请

US20050239052A1 Cloning of rhadinovirus genome and methods for its use 审中-公开
标题翻译：克隆野毒病毒基因组及其使用方法
公开(公告)号：US20050239052A1
公开(公告)日：2005-10-27
申请号：US10276524
申请日：2001-05-17
申请人： Scott Wong , Michael Axthelm
发明人： Scott Wong , Michael Axthelm
IPC分类号： A01K67/027 , A61K39/12 , A61K39/245 , A61K48/00 , C07H21/04 , C07K14/005 , C07K14/03 , C07K16/08 , C12N7/00 , C12N15/86 , C12Q1/70
CPC分类号： C07K14/005 , A01K67/027 , A01K2227/106 , A01K2267/0325 , A01K2267/0337 , A61K39/12 , A61K39/245 , A61K48/00 , A61K2039/525 , C07K16/085 , C12N7/00 , C12N2710/16022 , C12N2710/16421 , C12N2710/16422 , C12N2710/16432 , C12N2710/16434 , C12Q1/705 , G01N2333/03
摘要： An isolated virus is provided (Japanese Macaque Herpesvirus, JMHV), as deposited with ATCC as deposit accession number PTA-1884, as are viral particles including this virus and host cells infected with this virus. A purified polypeptide is also provided that includes an amino acid sequence that has at least 95% sequence identity to an amino acid sequence as set forth as SEQ ID NO:3, SEQ ID NO:5, SEQ ID NO:8, SEQ ID NO:10, SEQ ID NO:12, SEQ ID NO:14, SEQ ID NO:17, SEQ ID NO:19, SEQ ID NO:21, SEQ ID NO:23, SEQ ID NO:25, and SEQ ID NO:27, as are nucleic acid molecules encoding these polypeptides. A method is provided for testing the efficacy of a drug in the treatment of a condition associated with infection with JMHV. A model for multiple sclerosis is provided, as is a method for testing the efficacy of a candidate vaccine against JMHV infection, or conditions associated with JMHV infection. In a further embodiment, a method is provided for detecting the presence of JMHV or a related virus in a biological specimen, by amplifying by polymerase chain reaction a JMHV nucleic acid sequence, or by using hybridization technology, if such sequence is present in the sample. A method is also provided for detecting the presence of JMHV in a biological specimen. Kits are provided including an antibody that binds to a JMHV polypeptide or an oligonucleotide that hybridizes to a JMHV nucleic acid sequence.
摘要翻译：提供了分离的病毒（日本猕猴疱疹病毒，JMHV），其保藏为ATCC作为保藏登录号PTA-1884，以及包括该病毒的病毒颗粒和感染该病毒的宿主细胞。还提供了纯化的多肽，其包括与SEQ ID NO：3，SEQ ID NO：5，SEQ ID NO：8，SEQ ID NO：1所示的氨基酸序列具有至少95％的序列同一性的氨基酸序列：10，SEQ ID NO：12，SEQ ID NO：14，SEQ ID NO：17，SEQ ID NO：19，SEQ ID NO：21，SEQ ID NO：23，SEQ ID NO：25和SEQ ID NO： 27，编码这些多肽的核酸分子也是如此。提供了一种用于测试药物治疗与JMHV感染相关的病症的功效的方法。提供了多发性硬化的模型，以及用于测试候选疫苗针对JMHV感染或与JMHV感染相关的病症的功效的方法。在另一个实施方案中，提供了用于通过JMHV核酸序列的聚合酶链反应扩增或通过杂交技术来检测生物样本中JMHV或相关病毒的存在的方法，如果该序列存在于样品中。还提供了用于检测生物样品中JMHV的存在的方法。提供试剂盒，包括结合JMHV多肽的抗体或与JMHV核酸序列杂交的寡核苷酸。

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