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1. 发明申请

US20130200067A1 METHOD OF MANUFACTURING CERAMIC SINTERED BODY, CERAMIC SINTERED BODY, AND CERAMIC HEATER 审中-公开
标题翻译：陶瓷烧结体，陶瓷烧结体和陶瓷加热器的制造方法
公开(公告)号：US20130200067A1
公开(公告)日：2013-08-08
申请号：US13879882
申请日：2011-10-24
申请人： Satoshi Hirano , Toshihiro Tachikawa , Junichi Miyahara , Toshihiko Hanamachi
发明人： Satoshi Hirano , Toshihiro Tachikawa , Junichi Miyahara , Toshihiko Hanamachi
IPC分类号： H05B3/26 , H05B3/18
CPC分类号： H05B3/265 , C04B35/645 , C04B37/025 , C04B37/026 , C04B2237/083 , C04B2237/122 , C04B2237/343 , C04B2237/366 , C04B2237/368 , C04B2237/40 , C04B2237/60 , C04B2237/708 , C04B2237/72 , C04B2237/84 , H05B3/18 , H05B3/283 , H05B3/74 , H05B2203/017
摘要： A method of manufacturing a ceramic sintered body, includes: a film forming step of forming, on a surface of a heat-resistant metal material, a metal coating film made of a metal material having a standard free energy of formation of metal carbides lower than that of the heat-resistant metal material; a molding step of disposing heat-resistant metal material provided with the coating film in the film forming step at a predetermined position in powder that serves as a starting material of a ceramic base, and molding a ceramic green body by press-molding the powder; and a sintering step of generating a ceramic sintered body by sintering the ceramic green body molded in the molding step.
摘要翻译：一种制造陶瓷烧结体的方法，包括：成膜步骤，在耐热金属材料的表面上形成金属涂层，所述金属涂膜由金属材料制成，所述金属涂层具有比金属碳化物形成的标准自由能低于耐热金属材料; 将成膜步骤中设置有涂膜的耐热金属材料设置在用作陶瓷基材原料的粉末中的预定位置并通过压制成型陶瓷坯体的成型步骤; 以及通过烧结在模塑步骤中模制的陶瓷生坯来产生陶瓷烧结体的烧结步骤。

2. 发明授权

US10462850B2 Method of manufacturing ceramic sintered body, ceramic sintered body, and ceramic heater 有权
公开(公告)号：US10462850B2
公开(公告)日：2019-10-29
申请号：US13879882
申请日：2011-10-24
申请人： Satoshi Hirano , Toshihiro Tachikawa , Junichi Miyahara , Toshihiko Hanamachi
发明人： Satoshi Hirano , Toshihiro Tachikawa , Junichi Miyahara , Toshihiko Hanamachi
IPC分类号： H05B3/26 , C04B35/645 , C04B37/02 , H05B3/28 , H05B3/74 , H05B3/18
摘要： A method of manufacturing a ceramic sintered body, includes: a film forming step of forming, on a surface of a heat-resistant metal material, a metal coating film made of a metal material having a standard free energy of formation of metal carbides lower than that of the heat-resistant metal material; a molding step of disposing the heat-resistant metal material provided with the coating film in the film forming step at a predetermined position in powder that serves as a starting material of a ceramic base, and molding a ceramic green body by press-molding the powder; and a sintering step of generating a ceramic sintered body by sintering the ceramic green body molded in the molding step.

3. 发明授权

US07372001B2 Ceramics heater 有权
标题翻译：陶瓷加热器
公开(公告)号：US07372001B2
公开(公告)日：2008-05-13
申请号：US10321707
申请日：2002-12-17
申请人： Toshihiro Tachikawa , Junichi Miyahara , Toshihiko Hanamachi
发明人： Toshihiro Tachikawa , Junichi Miyahara , Toshihiko Hanamachi
IPC分类号： H05B3/68
CPC分类号： H05B3/143
摘要： A ceramics heater comprises a circular heater plate formed of aluminum nitride and a metal foil heater wire formed of a high-melting metal and having a thickness of 100 μm to 175 μm. The heater wire is embedded in the heater plate. The heater wire has an inside portion located near the center of the heater plate and formed in zigzags at first pitches in the circumferential direction of the heater plate and an outside portion located near the outer periphery of the heater plate and formed in zigzags at second pitches in the circumferential direction of the heater plate. The second pitches are shorter than the first pitches.
摘要翻译：陶瓷加热器包括由氮化铝形成的圆形加热器板和由高熔点金属形成的厚度为100μm至175μm的金属箔加热丝。加热器线嵌入加热板。加热线具有位于加热器板的中心附近的内部，并且在加热板的圆周方向上以第一间距形成为锯齿形，并且位于加热板的外周附近的外侧部分，并以第二间距形成为锯齿状在加热板的圆周方向上。第二个音调比第一个音高短。

4. 发明授权

US06376808B2 Heating apparatus 失效
标题翻译：加热装置
公开(公告)号：US06376808B2
公开(公告)日：2002-04-23
申请号：US09847844
申请日：2001-05-01
申请人： Toshihiro Tachikawa , Toshihiko Hanamachi
发明人： Toshihiro Tachikawa , Toshihiko Hanamachi
IPC分类号： H05B368
CPC分类号： H01L21/67103 , H05B3/06 , H05B3/68
摘要： A heater plate and a support structure are provided in a chamber. First terminals are arranged on the reverse side of the heater plate. The support structure is provided with second terminals in positions opposite to the first terminals, individually. The first and second terminals are coupled mechanically and electrically to one another by means of springy joint members of an electrically-conductive material. The joint members are removably attached to the first and second terminals. The heater plate can be separated from the support structure by disengaging the joint members from the first or second terminals.
摘要翻译：加热板和支撑结构设置在室中。第一端子布置在加热器板的背面。支撑结构分别设置有与第一端子相对的位置的第二端子。第一和第二端子通过导电材料的弹性接头构件彼此机械地和电气地连接。接合构件可拆卸地附接到第一和第二端子。通过使联接构件与第一或第二端子脱离，加热板可以与支撑结构分离。

5. 发明授权

US07241346B2 Apparatus for vapor deposition 有权
标题翻译：气相沉积装置
公开(公告)号：US07241346B2
公开(公告)日：2007-07-10
申请号：US10696519
申请日：2003-10-29
申请人： Toshihiko Hanamachi , Toshihiro Tachikawa
发明人： Toshihiko Hanamachi , Toshihiro Tachikawa
IPC分类号： H01L21/00 , C23C16/00 , C23C14/00
CPC分类号： C23C16/4409 , C23C16/4583 , Y10T279/23
摘要： A stage has a plate, a first seal surface, a stem, a second seal surface, a cover, a conductor and a flow path. A heater is embedded in the plate. A terminal for supplying power to the heater is exposed at one surface of the plate. The first seal surface is provided on the plate, shaped like a ring and surrounds the terminal. The stem is shaped like a hollow cylinder, surrounds the terminal and supports the plate. The second seal surface is provided on that end of the stem which supports the plate, and is shaped like a ring. The cover closes an open end of the stem, which is opposite to the end which supports the plate. The conductor passes through the cover into the stem and is connected to the terminal. The flow path is provided in the cover, for supplying inert gas into the stem at a pressure equal to or higher than the pressure of process gas present outside the stem.
摘要翻译：台具有板，第一密封表面，杆，第二密封表面，盖，导体和流路。加热器嵌入板中。用于向加热器供电的端子在板的一个表面露出。第一密封表面设置在板上，形状像环并且围绕端子。阀杆成形为中空圆筒，围绕端子并支撑板。第二密封表面设置在支撑板的杆的端部上，并且形状如环。盖封闭杆的开口端，其与支撑板的端部相对。导体通过盖子进入阀杆并连接到端子。流路设置在盖中，用于以等于或高于存在于杆外部的处理气体的压力的压力将惰性气体供给到杆中。

6. 发明授权

US09414441B2 Shaft-equipped heater unit and method for manufacturing shaft-equipped heater unit 有权
标题翻译：装有轴的加热器单元和用于制造装有轴的加热器单元的方法
公开(公告)号：US09414441B2
公开(公告)日：2016-08-09
申请号：US14119991
申请日：2012-05-29
申请人： Gou Takahara , Toshihiro Tachikawa , Junichi Miyahara
发明人： Gou Takahara , Toshihiro Tachikawa , Junichi Miyahara
IPC分类号： H05B3/10 , F27D5/00 , H01L21/67 , H01L21/687 , H05B3/68 , H05B3/28 , H05B3/12 , C23C24/04
CPC分类号： H05B3/10 , C23C24/04 , H01L21/67103 , H01L21/68792 , H05B3/12 , H05B3/283 , H05B3/688 , H05B2203/014
摘要： A shaft-equipped heater unit includes a heater plate that heats an object to be heated placed thereon, and a shaft part that supports the heater plate, wherein the shaft part is formed by spraying material powder which constitutes the shaft part on the heater plate at a temperature lower than a melting point of the material powder by heated compressed gas.
摘要翻译：具有轴的加热器单元包括加热放置在其上的待加热物体的加热板和支撑加热板的轴部，其中轴部通过将构成轴部的材料粉末喷射在加热器板上而形成通过加热的压缩气体低于材料粉末的熔点的温度。

7. 发明申请

US20140083995A1 SHAFT-EQUIPPED HEATER UNIT AND METHOD FOR MANUFACTURING SHAFT-EQUIPPED HEATER UNIT 有权
标题翻译：轴装置加热器单元和制造轴装置的加热器单元的方法
公开(公告)号：US20140083995A1
公开(公告)日：2014-03-27
申请号：US14119991
申请日：2012-05-29
申请人： Gou Takahara , Toshihiro Tachikawa , Junichi Miyahara
发明人： Gou Takahara , Toshihiro Tachikawa , Junichi Miyahara
IPC分类号： H05B3/10 , H05B3/68
CPC分类号： H05B3/10 , C23C24/04 , H01L21/67103 , H01L21/68792 , H05B3/12 , H05B3/283 , H05B3/688 , H05B2203/014
摘要： A shaft-equipped heater unit includes a heater plate that heats an object to be heated placed thereon, and a shaft part that supports the heater plate, wherein the shaft part is formed by spraying material powder which constitutes the shaft part on the heater plate at a temperature lower than a melting point of the material powder by heated compressed gas.
摘要翻译：具有轴的加热器单元包括加热放置在其上的待加热物体的加热板和支撑加热板的轴部，其中轴部通过将构成轴部的材料粉末喷射在加热器板上而形成通过加热的压缩气体低于材料粉末的熔点的温度。

8. 发明授权

US07045747B2 Heater unit 有权
标题翻译：加热器单元
公开(公告)号：US07045747B2
公开(公告)日：2006-05-16
申请号：US11042724
申请日：2005-01-24
申请人： Jun Futakuchiya , Toshihiro Tachikawa
发明人： Jun Futakuchiya , Toshihiro Tachikawa
IPC分类号： H05B3/68 , C23C16/00
CPC分类号： H01L21/67126 , H01L21/67103
摘要： A heater unit has a heater plate including a resistive heat generator, and a hollow shaft portion of a short type with a length of 20 to 50 mm, which is provide on the side of the lower face of the heater plate. The shaft portion is made from aluminum alloy. The bottom face of the shaft portion is fixed to a heater mounting portion of a casing. A sealing member is provided between the bottom face of the shaft portion and the casing. The thickness of the shaft portion is set to 0.5 to 5.0 mm, and the length, area of heat-transfer surface, and material of the shaft portion are selected such that the thermal resistance Rth of the shaft portion is 0.4 K/W or more.
摘要翻译：加热器单元具有包括电阻式发热体的加热板和长度为20〜50mm的短型空心轴部，其设置在加热板的下表面侧。轴部由铝合金制成。轴部的底面固定在壳体的加热器安装部上。密封构件设置在轴部的底面和壳体之间。将轴部的厚度设定为0.5〜5.0mm，并且选择轴部的长度，面积和轴部的材料，使得轴的热阻R th < 部分为0.4K / W以上。

9. 发明申请

US20060081601A1 Device for heating or cooling workpieces and manufacturing method therefor 审中-公开
标题翻译：用于加热或冷却工件的装置及其制造方法
公开(公告)号：US20060081601A1
公开(公告)日：2006-04-20
申请号：US11194424
申请日：2005-08-01
申请人： Jun Futakuchiya , Toshihiro Tachikawa
发明人： Jun Futakuchiya , Toshihiro Tachikawa
IPC分类号： H05B3/68
CPC分类号： H01L21/67109
摘要： A heater unit comprises a shaft member and a plate member. The shaft member has a body and a flange portion formed on an end portion of the shaft body. The plate member is formed by brazing a plurality of plate elements together. One of the plate elements has a recess in which the flange portion is inserted. A gap is formed between a peripheral surface of the flange portion and an inner peripheral surface of the recess. An end face of the flange portion is brazed to the plate element in a manner such that the flange portion is inserted into the recess and the flange portion is loaded and heated by a pressurizing jig.
摘要翻译：加热器单元包括轴构件和板构件。轴构件具有形成在轴体的端部上的主体和凸缘部。板构件通过将多个板元件钎焊在一起而形成。板元件之一具有凸缘部分插入其中的凹部。在凸缘部的周面与凹部的内周面之间形成间隙。凸缘部的端面以这样的方式钎焊到板状元件，使得凸缘部分插入凹部中，并且凸缘部分被加压夹具加载和加热。

10. 再颁专利

USRE43837E1 Substrate supporting apparatus 有权
标题翻译：基板支撑装置
公开(公告)号：USRE43837E1
公开(公告)日：2012-12-04
申请号：US13049056
申请日：2011-03-16
申请人： Naoya Kida , Toshihiro Tachikawa , Jun Futakuchiya
发明人： Naoya Kida , Toshihiro Tachikawa , Jun Futakuchiya
IPC分类号： H01L21/00 , C23C14/00 , C23C16/00
CPC分类号： C23C16/4581 , F16C29/046 , H01L21/6875 , H01L21/68757 , Y10T29/49165
摘要： A substrate supporting apparatus includes a plate member of an aluminum alloy having a flat upper surface, bottomed pits formed in the plate member, and spacer members held in the pits, individually. The spacer members are sapphire spheres. The diameter of each spacer member is a little smaller than that of each pit. The upper end of each spacer member projects from the upper surface of the plate member. A spot facing is formed in a region that includes the open edge portion of the pit. A bending portion which is obtained by plastically deforming the open edge portion of the pit toward the spacer member is formed on a bottom surface of the spot facing. A V-shaped groove is formed behind the bending portion.
摘要翻译：基板支撑装置包括具有平坦的上表面的铝合金的板构件，形成在板构件中的底部凹坑和分别保持在凹坑中的间隔件。间隔件是蓝宝石球。每个间隔件的直径比每个凹坑的直径稍小。每个间隔件的上端从板件的上表面突出。在包括凹坑的开口边缘部分的区域中形成一个光斑。通过将凹坑的开口边缘部分朝向间隔件塑性变形而获得的弯曲部分形成在点面对的底表面上。在弯曲部分的后面形成V形槽。

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