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    • 1. 发明申请
    • SOLAR CELL AND METHOD OF FABRICATING THE SAME
    • 太阳能电池及其制造方法
    • US20110083735A1
    • 2011-04-14
    • US12902850
    • 2010-10-12
    • Sang-Joon ParkSeong-Beom ParkYoung-Jun KimJun-Sung Bae
    • Sang-Joon ParkSeong-Beom ParkYoung-Jun KimJun-Sung Bae
    • H01L31/0216H01L31/18
    • H01L31/0232C23C16/308C23C16/403C23C16/45551H01L31/022425H01L31/18H01L31/1804Y02E10/547Y02P70/521
    • A solar cell and a fabricating method thereof are provided. In the method of fabricating the solar cell, a p-type semiconductor substrate on whose light-receiving surface an anti-reflection coating is formed is loaded into a processing chamber. In this case, the p-type semiconductor substrate may be loaded on a substrate support of an apparatus of processing a plurality of substrates along the circumference of the substrate support, in the state where the back surface of the p-type semiconductor substrate faces upward. Then, a back surface field (BSF) layer having the characteristic of Negative Fixed Charge (NFC) is formed with AlO, AlN or ALON on the back surface of the p-type semiconductor substrate. At this time, the BSF layer may be formed by simultaneously injecting an Al source gas, a first purge gas, an oxidizing agent gas and/or a ntiriding agent gas, and a second purge gas through injection holes of individual gas injection units while relatively rotating the substrate support with respect to the shower head. Thereafter, a back surface electrode is formed on the BSF layer such that the back surface electrode is electrically connected to the BSF layer.
    • 提供太阳能电池及其制造方法。 在制造太阳能电池的方法中,将形成有防反射涂层的受光面的p型半导体基板装载到处理室中。 在这种情况下,p型半导体衬底可以在p型半导体衬底的背面向上的状态下装载在沿着衬底支撑件的圆周处理多个衬底的设备的衬底支撑件上 。 然后,具有负固定电荷(NFC)特性的背面场(BSF)层在p型半导体衬底的背面上由AlO,AlN或ALON形成。 此时,BSF层可以通过同时喷射Al源气体,第一吹扫气体,氧化剂气体和/或氮化物气体以及通过各个气体注入单元的注入孔同时喷射第二吹扫气体而形成, 相对于淋浴头旋转基板支撑件。 此后,在BSF层上形成背面电极,使得背面电极与BSF层电连接。
    • 7. 发明授权
    • Plasma chemical vapor deposition apparatus
    • 等离子体化学气相沉积装置
    • US06886491B2
    • 2005-05-03
    • US10102108
    • 2002-03-19
    • Jae-Ho KimSang-Joon Park
    • Jae-Ho KimSang-Joon Park
    • C23C16/455C23C16/44C23C16/515H01L21/205C23C16/00
    • C23C16/45544C23C16/45514C23C16/45538C23C16/45565C23C16/4557C23C16/45574C23C16/515
    • The present invention relates to chemical vapor deposition apparatus. In the chemical vapor deposition apparatus, an RF power source connection portionconnected to an external RF power source is installed on an upper side of a chamber; an RF electrode plate is installed within the chamber to be spaced with a predetermined gap from an inner upper surface of the chamber and to be spaced with a predetermined gap from a showerhead disposed below the RF electrode plate; plasma is generated in a first buffer portion, which is defined by a gap between the RF electrode plate and an upper surface of the showerhead, by means of the electric power applied from the external RF power source to the RF electrode plate; the showerhead is divided into two sections in a vertical direction and a second buffer portion is defined by a space between the two sections; reactant gases are supplied to the first buffer portion in which the plasma is generated; and source gases are supplied to the second buffer portion.
    • 本发明涉及化学气相沉积装置。 在化学气相沉积设备中,连接到外部RF电源的RF电源连接部分安装在室的上侧; 射频电极板安装在腔室内以与腔室的内上表面隔开预定的间隙,并与设置在RF电极板下方的喷头隔开预定间隙; 通过从外部RF电源向RF电极板施加的电力,在由RF电极板和喷头的上表面之间的间隙限定的第一缓冲部分中产生等离子体; 淋浴头在垂直方向上分为两部分,第二缓冲部分由两部分之间的空间限定; 将反应气体供给到其中产生等离子体的第一缓冲部分; 并且源气体被供应到第二缓冲部分。
    • 9. 发明授权
    • Method for cluster based data transmission in wireless sensor networks
    • 无线传感器网络中基于簇数据传输的方法
    • US08605694B2
    • 2013-12-10
    • US12908353
    • 2010-10-20
    • Sang-Joon ParkYoung-Bag MoonYoung-Bae KoKeun-Woo Lim
    • Sang-Joon ParkYoung-Bag MoonYoung-Bae KoKeun-Woo Lim
    • H04W4/00H04B7/00
    • H04W28/06H04W4/06H04W48/16
    • The present invention relates to a method for cluster based data in wireless sensor networks. The method includes: selecting any one of border nodes positioned at the edge of a cluster as a temporary cluster head as a temporary cluster head when a target is sensed in the cluster; bugging data of the temporary cluster head by border nodes in other adjacent cluster which do not sense the target to temporarily change the border node selected as the temporary cluster head to a cluster head of each of the border nodes; when the target is sensed by at least one of the border nodes, collecting data from each of the border nodes by the temporary cluster head to transferring the collected data to an actual cluster head of the temporary cluster head; and aggregating the collected data by actual cluster head of the temporary cluster head.
    • 本发明涉及无线传感器网络中基于簇的数据的方法。 该方法包括:当在群集中感测到目标时,将位于群集边缘处的边界节点中的任一个作为临时簇头选择为临时簇头; 通过不感测目标的其他相邻集群中的边界节点将临时集群头的数据临时改变为临时簇首选择的边界节点到每个边界节点的集群头; 当由至少一个边界节点感测到目标时,通过临时簇头从每个边界节点收集数据以将收集的数据传送到临时簇头的实际簇头; 并通过临时簇头的实际簇头聚合收集的数据。