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    • 8. 发明授权
    • Plasma chemical vapor deposition apparatus
    • 等离子体化学气相沉积装置
    • US06886491B2
    • 2005-05-03
    • US10102108
    • 2002-03-19
    • Jae-Ho KimSang-Joon Park
    • Jae-Ho KimSang-Joon Park
    • C23C16/455C23C16/44C23C16/515H01L21/205C23C16/00
    • C23C16/45544C23C16/45514C23C16/45538C23C16/45565C23C16/4557C23C16/45574C23C16/515
    • The present invention relates to chemical vapor deposition apparatus. In the chemical vapor deposition apparatus, an RF power source connection portionconnected to an external RF power source is installed on an upper side of a chamber; an RF electrode plate is installed within the chamber to be spaced with a predetermined gap from an inner upper surface of the chamber and to be spaced with a predetermined gap from a showerhead disposed below the RF electrode plate; plasma is generated in a first buffer portion, which is defined by a gap between the RF electrode plate and an upper surface of the showerhead, by means of the electric power applied from the external RF power source to the RF electrode plate; the showerhead is divided into two sections in a vertical direction and a second buffer portion is defined by a space between the two sections; reactant gases are supplied to the first buffer portion in which the plasma is generated; and source gases are supplied to the second buffer portion.
    • 本发明涉及化学气相沉积装置。 在化学气相沉积设备中,连接到外部RF电源的RF电源连接部分安装在室的上侧; 射频电极板安装在腔室内以与腔室的内上表面隔开预定的间隙,并与设置在RF电极板下方的喷头隔开预定间隙; 通过从外部RF电源向RF电极板施加的电力,在由RF电极板和喷头的上表面之间的间隙限定的第一缓冲部分中产生等离子体; 淋浴头在垂直方向上分为两部分,第二缓冲部分由两部分之间的空间限定; 将反应气体供给到其中产生等离子体的第一缓冲部分; 并且源气体被供应到第二缓冲部分。
    • 10. 发明授权
    • Method for cluster based data transmission in wireless sensor networks
    • 无线传感器网络中基于簇数据传输的方法
    • US08605694B2
    • 2013-12-10
    • US12908353
    • 2010-10-20
    • Sang-Joon ParkYoung-Bag MoonYoung-Bae KoKeun-Woo Lim
    • Sang-Joon ParkYoung-Bag MoonYoung-Bae KoKeun-Woo Lim
    • H04W4/00H04B7/00
    • H04W28/06H04W4/06H04W48/16
    • The present invention relates to a method for cluster based data in wireless sensor networks. The method includes: selecting any one of border nodes positioned at the edge of a cluster as a temporary cluster head as a temporary cluster head when a target is sensed in the cluster; bugging data of the temporary cluster head by border nodes in other adjacent cluster which do not sense the target to temporarily change the border node selected as the temporary cluster head to a cluster head of each of the border nodes; when the target is sensed by at least one of the border nodes, collecting data from each of the border nodes by the temporary cluster head to transferring the collected data to an actual cluster head of the temporary cluster head; and aggregating the collected data by actual cluster head of the temporary cluster head.
    • 本发明涉及无线传感器网络中基于簇的数据的方法。 该方法包括:当在群集中感测到目标时,将位于群集边缘处的边界节点中的任一个作为临时簇头选择为临时簇头; 通过不感测目标的其他相邻集群中的边界节点将临时集群头的数据临时改变为临时簇首选择的边界节点到每个边界节点的集群头; 当由至少一个边界节点感测到目标时,通过临时簇头从每个边界节点收集数据以将收集的数据传送到临时簇头的实际簇头; 并通过临时簇头的实际簇头聚合收集的数据。