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    • 3. 发明申请
    • Profile measuring apparatus
    • 型材测量仪器
    • US20110270562A1
    • 2011-11-03
    • US13064922
    • 2011-04-26
    • Yuka ItoHaruhiko Fujisawa
    • Yuka ItoHaruhiko Fujisawa
    • G06F19/00
    • G01B11/25G01B9/02055G01B11/2518G01B21/20
    • According to one embodiment, a profile measuring apparatus comprises a profile measuring unit, a position acquiring unit, a profile calculating unit, a deflection detecting unit, and a controlling unit. The profile measuring unit has a projecting unit to project a pattern onto a measured object, and an imaging unit to image the pattern. The position acquiring unit acquires a position of the pattern on the measured object. The profile calculating unit calculates a profile of the measured object, based on image information from the imaging unit and position information from the position acquiring unit. The deflection detecting unit detects deflection of the projecting unit. The controlling unit executes active correction for the profile measuring unit and/or passive correction for the profile calculating unit, based on the deflection of the projecting unit detected by the deflection detecting unit.
    • 根据一个实施例,轮廓测量装置包括轮廓测量单元,位置获取单元,轮廓计算单元,偏转检测单元和控制单元。 型材测量单元具有将图案投影到测量对象上的投影单元和用于对图案进行成像的成像单元。 位置获取单元获取所测量对象上的图案的位置。 轮廓计算单元基于来自成像单元的图像信息和来自位置获取单元的位置信息来计算测量对象的轮廓。 偏转检测单元检测投影单元的偏转。 基于由偏转检测单元检测到的投影单元的偏转,控制单元对轮廓测量单元执行主动校正和/或轮廓计算单元的无源校正。