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1. 发明申请

US20180120087A1 CONTROL SYSTEM, AND CONTROL METHOD AND PROGRAM FOR CONTROL SYSTEM 审中-公开
公开(公告)号：US20180120087A1
公开(公告)日：2018-05-03
申请号：US15792813
申请日：2017-10-25
申请人： OMRON Corporation
发明人： Hiroshi SAWARAGI
IPC分类号： G01B9/02 , G01B5/00 , G01B5/04
CPC分类号： G01B9/02055 , B23Q17/20 , G01B5/0021 , G01B5/046 , G01B5/24 , G01B11/24 , G01B21/20 , G05B19/401 , G05B2219/37359 , G05B2219/49231
摘要： A PLC system includes a displacement sensor, drives, and a PLC. In the PLC system, the trace control unit calculates a target position at which a distance between the displacement sensor and the object is constant based on measurement information (1D information) from which measurement noise (noise information) has been removed by the filter and positional information from the drives.

2. 发明授权

US08902425B2 Temperature-stable incoherent light source 有权
标题翻译：温度稳定的非相干光源
公开(公告)号：US08902425B2
公开(公告)日：2014-12-02
申请号：US13857273
申请日：2013-04-05
申请人： Dubravko Ivan Babic
发明人： Dubravko Ivan Babic
IPC分类号： G01B9/02 , G01N21/53
CPC分类号： G01B9/02055 , G01N21/532 , G01N2201/0683 , G01N2201/1211
摘要： Embodiments generally relate to a light source and methods for minimizing temperature sensitivity of a light source light source. In one embodiment a light source includes a light-emitting diode, a light beam having an optical axis, a photodetector and a polarizer. The diode is operatively configured to emit the light beam. The beam splitter, positioned to intercept the light beam, includes a first optical surface operatively configured to reflect a first portion of the light beam and to transmit a second portion of the light beam therethrough. The photodetector is positioned to capture the first portion of the light beam after reflection by the beam splitter and operatively configured to generate photocurrent proportional to an intensity of that captured first portion. The polarizer is positioned between the diode and the beam splitter, and is operatively configured to polarize the light beam along a polarization direction perpendicular to its optical axis.
摘要翻译：实施例通常涉及光源和用于使光源光源的温度敏感度最小化的方法。在一个实施例中，光源包括发光二极管，具有光轴的光束，光电检测器和偏振器。二极管可操作地配置成发射光束。定位成拦截光束的分束器包括可操作地配置为反射光束的第一部分并透射光束的第二部分的第一光学表面。光电检测器被定位成在分束器反射之后捕获光束的第一部分，并且可操作地配置成产生与所捕获的第一部分的强度成比例的光电流。偏振器位于二极管和分束器之间，并且可操作地构造成沿着垂直于其光轴的偏振方向使光束偏振。

3. 发明申请

US20140218745A1 DETECTOR CIRCUITS FOR INTERFEROMETERS 有权
标题翻译：用于干扰计的检测器电路
公开(公告)号：US20140218745A1
公开(公告)日：2014-08-07
申请号：US14239509
申请日：2012-08-08
申请人： Simon Richard Hattersley
发明人： Simon Richard Hattersley
IPC分类号： G01B9/02
CPC分类号： G01B9/02055 , G01B9/02004 , G01B9/02027 , G01B9/02041 , G01B9/02087 , G01B9/02091 , G01B2290/45
摘要： A detector circuit for a multi-channel interferometer, typically as may be used in an optical coherence tomography device, comprising: a plurality of measurement channels (43) each comprising a measurement detector (31); and a balance channel (44) comprising a balance detector (30), each of the measurement detectors (31) and the balance detector (30) having a light sensitive area and an electrical output configured to output a signal indicative of the intensity of light incident on the light sensitive area, in which each measurement channel (43) is provided with a feedback circuit (40) comprising: a variable gain circuit (35) having an input for the signal from the measurement detector (31) and an output, the variable gain circuit (35) being configured to output at its output the signal received at its input with a variable level of gain; a difference circuit (38) having a first input for the output of the variable gain circuit (35), a second input for the signal from the balance detector (30) and an output, and being configured to output at its output a signal indicative of a difference of the signals at its first and second inputs; and a controller (36) for each variable gain circuit (35) configured to vary the variable level of gain dependent upon a low frequency component of the output of the difference circuit (38).
摘要翻译：一种用于多通道干涉仪的检测器电路，通常可用于光学相干断层摄影装置，包括：多个测量通道（43），每个测量通道包括测量探测器（31）; 以及包括平衡检测器（30）的平衡通道（44），每个所述测量检测器（31）和所述平衡检测器（30）具有光敏区域和被配置为输出指示光强度的信号的电输出每个测量通道（43）设置有反馈电路（40），该反馈电路（40）包括：具有来自测量检测器（31）的信号的输入的可变增益电路（35）和输出，所述可变增益电路（35）被配置为在其输出处输出在其输入处接收的信号，其具有可变增益水平; 具有用于可变增益电路（35）的输出的第一输入的差分电路（38），来自余额检测器（30）的信号的第二输入和输出，并且被配置为在其输出端输出指示信号在其第一和第二输入端的差异; 以及用于每个可变增益电路（35）的控制器（36），其被配置为根据差分电路（38）的输出的低频分量来改变增益的可变电平。

4. 发明申请

US20110270562A1 Profile measuring apparatus 有权
标题翻译：型材测量仪器
公开(公告)号：US20110270562A1
公开(公告)日：2011-11-03
申请号：US13064922
申请日：2011-04-26
申请人： Yuka Ito , Haruhiko Fujisawa
发明人： Yuka Ito , Haruhiko Fujisawa
IPC分类号： G06F19/00
CPC分类号： G01B11/25 , G01B9/02055 , G01B11/2518 , G01B21/20
摘要： According to one embodiment, a profile measuring apparatus comprises a profile measuring unit, a position acquiring unit, a profile calculating unit, a deflection detecting unit, and a controlling unit. The profile measuring unit has a projecting unit to project a pattern onto a measured object, and an imaging unit to image the pattern. The position acquiring unit acquires a position of the pattern on the measured object. The profile calculating unit calculates a profile of the measured object, based on image information from the imaging unit and position information from the position acquiring unit. The deflection detecting unit detects deflection of the projecting unit. The controlling unit executes active correction for the profile measuring unit and/or passive correction for the profile calculating unit, based on the deflection of the projecting unit detected by the deflection detecting unit.
摘要翻译：根据一个实施例，轮廓测量装置包括轮廓测量单元，位置获取单元，轮廓计算单元，偏转检测单元和控制单元。型材测量单元具有将图案投影到测量对象上的投影单元和用于对图案进行成像的成像单元。位置获取单元获取所测量对象上的图案的位置。轮廓计算单元基于来自成像单元的图像信息和来自位置获取单元的位置信息来计算测量对象的轮廓。偏转检测单元检测投影单元的偏转。基于由偏转检测单元检测到的投影单元的偏转，控制单元对轮廓测量单元执行主动校正和/或轮廓计算单元的无源校正。

5. 发明授权

US12044844B2 Calibration kit for an optical scanning device 有权
公开(公告)号：US12044844B2
公开(公告)日：2024-07-23
申请号：US17467429
申请日：2021-09-06
申请人： QISDA CORPORATION
发明人： Tzu-Huan Hsu , Po-Fu Wu , Yuan-Yu Hsiao , Ching-Huey Wang , Chih-Kang Peng , Chun-Ming Shen , Chih-Ming Hu , Yi-Ling Lo
IPC分类号： G02B27/00 , G01B5/00 , G01B5/24 , G01B9/02055 , G02B26/10
CPC分类号： G02B27/0031 , G01B5/0004 , G01B5/24 , G01B9/02055 , G02B26/10
摘要： An calibration kit includes a base, a combination of calibration parts, and a manipulation part. The combination of calibration parts is disposed on the base and includes a first calibration part and a second calibration part. The first calibration part has a first calibration surface. The second calibration part has a second calibration surface. The first calibration part and the second calibration part are relatively movable in a movement direction and are movable relative to the base. The manipulation part is movably or rotatably disposed on the base. The manipulation part is configured to be operable to drive the first calibration part and the second calibration part to move in the movement direction relative to the base, so that the combination of calibration parts forms a three-dimensional calibration surface configuration through the first calibration surface and the second calibration surface.

6. 发明申请

US20180306569A1 Intensity Noise Reduction Methods and Apparatus for Interferometric Sensing and Imaging Systems 审中-公开
公开(公告)号：US20180306569A1
公开(公告)日：2018-10-25
申请号：US16017545
申请日：2018-06-25
申请人： LightLab Imaging, Inc.
发明人： Joseph M. Schmitt , Victor Grinberg
IPC分类号： G01B9/02 , H04B10/61 , H03G3/30 , H04B10/67
CPC分类号： G01B9/02055 , G01B9/02004 , G01B9/02044 , G01B9/02074 , G01B9/02083 , H03G3/3084 , H04B10/616 , H04B10/671
摘要： In part, aspects of the invention relate to methods, apparatus, and systems for intensity and/or pattern line noise reduction in a data collection system such as an optical coherence tomography system that uses an electromagnetic radiation source and interferometric principles. In one embodiment, the noise is intensity noise or line pattern noise and the source is a laser such as a swept laser. One or more attenuators responsive to one or more control signals can be used in conjunction with an analog or digital feedback network in one embodiment.

7. 发明授权

US09740003B2 Compact, low dispersion, and low aberration adaptive optics scanning system and method 有权
公开(公告)号：US09740003B2
公开(公告)日：2017-08-22
申请号：US14931994
申请日：2015-11-04
申请人： Thorlabs, Inc.
发明人： Benjamin Michael Potsaid , John Joseph Taranto , Alex Ezra Cable
IPC分类号： G02B26/00 , G02B27/00 , G01B9/02 , G02B26/08 , G02B26/10 , A61B3/10 , A61B3/14 , G02B21/00 , G02B26/06
CPC分类号： G02B27/0068 , A61B3/102 , A61B3/14 , G01B9/02055 , G01B9/02091 , G02B21/00 , G02B26/06 , G02B26/08 , G02B26/105
摘要： An adaptive optics scanning system and method using a beam projection module with four or more axes of motion that can project and control the position and angle of a beam of light to or from an adaptive optics element. The adaptive optics scanning system is compact in size, overcoming the challenges of a traditional lens and mirror based pupil relay design. The adaptive optics scanning system has little to no dispersion, chromatic aberration, and off-axis aberration for improved optical performance. The system and methods for calibrating and optimizing the system are described. A modular adaptive optics unit that scans and interfaces an adaptive optics element is described.

8. 发明授权

US09470518B2 Daily checking and calibrating method of length measuring machine 有权
标题翻译：长度测量机的日常检查和校准方法
公开(公告)号：US09470518B2
公开(公告)日：2016-10-18
申请号：US14003041
申请日：2013-06-28
申请人： Shenzhen China Star Optoelectronics Technology Co., Ltd.
发明人： Wende Huang , Yueyan Zhang , Houyi Zhu
IPC分类号： G01B21/04 , G01B9/02
CPC分类号： G01B21/042 , G01B9/02055 , G01B9/02072 , G01B21/04 , G01B21/045
摘要： A daily checking and calibrating method includes the following steps. Step (1) is for detecting a state of the length measuring machine at a predetermined daily check time. Step (2) is for stopping the transportation of substrates upon determining the length measuring machine is in an idle state. Step (3) is for measuring coordinates of positioning marks on a substrate-carrying platform to generate a measured data file and comparing the measured coordinates of the positioning marks with predetermined coordinates. Step (4) is for automatically calculating a calibration value when a difference between the measured coordinates of the positioning marks and the predetermined coordinates is smaller than a predetermined value and updating the calibration value to a coordinate parameter file to complete automatic calibration. Otherwise, an alarm is activated. Step (5) is for determining follow-up measures when the difference between the measured coordinates of the positioning marks and the predetermined coordinates is larger than the predetermined value.
摘要翻译：日常检查和校准方法包括以下步骤。步骤（1）用于在预定的每日检查时间检测长度测量机的状态。步骤（2）用于在确定长度测量机处于空闲状态时停止输送基板。步骤（3）用于测量基板承载平台上的定位标记的坐标以产生测量的数据文件，并将测量的定位标记的坐标与预定的坐标进行比较。步骤（4）用于当定位标记的测量坐标与预定坐标之间的差值小于预定值时自动计算校准值，并将校准值更新为坐标参数文件以完成自动校准。否则，激活报警。步骤（5）用于当定位标记的测量坐标与预定坐标之间的差大于预定值时确定后续措施。

9. 发明申请

US20130222810A1 APOLARIZED INTERFEROMETRIC SYSTEM, AND APOLARIZED INTERFEROMETRIC MEASUREMENT METHOD 有权
标题翻译：非对称干涉仪系统和非平衡干涉测量方法
公开(公告)号：US20130222810A1
公开(公告)日：2013-08-29
申请号：US13882800
申请日：2011-11-02
申请人： Herve Lefevre , Cedric Molucon , Jean-Jacques Bonnefois , Karl Aubry
发明人： Herve Lefevre , Cedric Molucon , Jean-Jacques Bonnefois , Karl Aubry
IPC分类号： G01B9/02
CPC分类号： G01B9/02055 , G01J9/0246 , G01J2009/023 , G01J2009/0261 , G01J2009/0288
摘要： An interferometric system includes a polarization separation element (10), a first polarization conversion element (11), a Mach-Zehnder interferometer (2) including a first (4) and second (5) arms connected to one another by a first (6) and second (7) ends in order for a first and second beams (20, 21) having the same polarization to pass through the interferometer in a reciprocal manner in opposite directions of propagation, respectively, so as to form a first and second interferometric beam (22, 23), a second polarization conversion element (11) for obtaining an interferometric beam (24), the polarization of which is converted, a polarization-combining element (10), and a detection element (8) suitable for detecting an output beam (25).
摘要翻译：干涉测量系统包括偏振分离元件（10），第一偏振转换元件（11），马赫曾德尔干涉仪（2），其包括通过第一（6）和第二（6）彼此连接的第一（4）和第二（5））和第二（7）端部，以使具有相同偏振的第一和第二光束（20,21）分别以相反的传播方向以相互的方式穿过干涉仪，以便形成第一和第二干涉仪光束（22,23），用于获得其偏振变换的干涉光束（24）的第二偏振转换元件（11），偏振组合元件（10）和适于检测的检测元件（8）输出光束（25）。

10. 发明申请

US20110228280A1 Intensity Noise Reduction Methods and Apparatus for Interferometric Sensing and Imaging Systems 有权
标题翻译：用于干涉测量和成像系统的强度降噪方法和装置
公开(公告)号：US20110228280A1
公开(公告)日：2011-09-22
申请号：US13050410
申请日：2011-03-17
申请人： Joseph M. Schmitt , Victor Grinberg
发明人： Joseph M. Schmitt , Victor Grinberg
IPC分类号： G01B9/02
CPC分类号： G01B9/02055 , G01B9/02004 , G01B9/02044 , G01B9/02074 , G01B9/02083 , H03G3/3084 , H04B10/616 , H04B10/671
摘要： In part, aspects of the invention relate to methods, apparatus, and systems for intensity and/or pattern line noise reduction in a data collection system such as an optical coherence tomography system that uses an electromagnetic radiation source and interferometric principles. In one embodiment, the noise is intensity noise or line pattern noise and the source is a laser such as a swept laser. One or more attenuators responsive to one or more control signals can be used in conjunction with an analog or digital feedback network in one embodiment.
摘要翻译：部分地，本发明的方面涉及数据采集系统中的强度和/或图案线噪声降低的方法，装置和系统，例如使用电磁辐射源和干涉原理的光学相干断层摄影系统。在一个实施例中，噪声是强度噪声或线图案噪声，并且源是诸如扫描激光器的激光器。在一个实施例中，响应于一个或多个控制信号的一个或多个衰减器可以与模拟或数字反馈网络结合使用。

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