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    • 9. 发明申请
    • TRENCH ANTI-FUSE STRUCTURES FOR A PROGRAMMABLE INTEGRATED CIRCUIT
    • 用于可编程集成电路的抗融合结构
    • US20100230781A1
    • 2010-09-16
    • US12537473
    • 2009-08-07
    • Roger A. Booth, JR.Kangguo ChengJack A. MandelmanWilliam R. Tonti
    • Roger A. Booth, JR.Kangguo ChengJack A. MandelmanWilliam R. Tonti
    • H01L23/525H01L21/768
    • H01L23/5252H01L2924/0002H01L2924/00
    • Trench anti-fuse structures, design structures embodied in a machine readable medium for designing, manufacturing, or testing a programmable integrated circuit. The anti-fuse structure includes a trench having a plurality of sidewalls that extend into a substrate, a doped region in the semiconductor material of the substrate proximate to the sidewalls of the trench, a conductive plug in the trench, and a dielectric layer on the sidewalls of the trench. The dielectric layer is disposed between the conductive plug and the doped region. The dielectric layer is configured so that a programming voltage applied between the doped region and the conductive plug causes a breakdown of the dielectric layer within a region of the trench. The trench sidewalls are arranged with a cross-sectional geometrical shape that is independent of position between a bottom wall of the deep trench and a top surface of the substrate.
    • 沟槽反熔丝结构,设计结构体现在用于设计,制造或测试可编程集成电路的机器可读介质中。 反熔丝结构包括具有延伸到衬底中的多个侧壁的沟槽,靠近沟槽侧壁的衬底的半导体材料中的掺杂区域,沟槽中的导电插塞以及沟槽中的介电层 沟槽的侧壁。 电介质层设置在导电插塞和掺杂区域之间。 电介质层被配置为使得施加在掺杂区域和导电插塞之间的编程电压导致沟槽区域内的电介质层的击穿。 沟槽侧壁布置成具有与深沟槽的底壁和基板的顶表面之间的位置无关的横截面几何形状。
    • 10. 发明授权
    • Electrically programmable π-shaped fuse structures and methods of fabrication thereof
    • 电气可编程的pi形熔丝结构及其制造方法
    • US07656005B2
    • 2010-02-02
    • US11768254
    • 2007-06-26
    • Roger A. Booth, Jr.Kangguo ChengJack A. MandelmanWilliam R. Tonti
    • Roger A. Booth, Jr.Kangguo ChengJack A. MandelmanWilliam R. Tonti
    • H01L29/00
    • H01L23/5256H01L2924/0002H01L2924/00
    • Electrically programmable fuse structures for an integrated circuit and methods of fabrication thereof are presented, wherein the electrically programmable fuse has a first terminal portion and a second terminal portion interconnected by a fuse element. The first terminal portion and the second terminal portion reside over a first support and a second support, respectively, with the first support and the second support being spaced apart, and the fuse element bridging the distance between the first terminal portion over the first support and the second terminal portion over the second support. The fuse, first support and second support define a π-shaped structure in elevational cross-section through the fuse element. The first terminal portion, second terminal portion and fuse element are coplanar, with the fuse element residing above a void, which in one embodiment is filed by a thermally insulating dielectric material that surrounds the fuse element.
    • 提出了用于集成电路的电可编程熔丝结构及其制造方法,其中电可编程熔丝具有由熔丝元件互连的第一端子部分和第二端子部分。 第一端子部分和第二端子部分分别驻留在第一支撑件和第二支撑件上,第一支撑件和第二支撑件间隔开,并且熔丝元件将第一端子部分之间的距离跨越第一支撑件和 在第二支撑件上方的第二端子部分。 保险丝,第一支撑件和第二支撑件通过保险丝元件在垂直截面中限定了一个pi形结构。 第一端子部分,第二端子部分和熔丝元件是共面的,其中熔丝元件位于空隙上方,在一个实施例中,熔断元件由围绕熔丝元件的绝热介电材料覆盖。