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    • 2. 发明申请
    • APPARATUS AND METHOD FOR DIAMOND PRODUCTION
    • 钻石生产的装置和方法
    • US20090038934A1
    • 2009-02-12
    • US12253287
    • 2008-10-17
    • Russell J. HemleyHo-Kwang MaoChih-shiue YanYogesh K. Vohra
    • Russell J. HemleyHo-Kwang MaoChih-shiue YanYogesh K. Vohra
    • C01B31/06
    • C30B25/105C30B25/12C30B29/04Y10T117/1004Y10T117/1008Y10T117/1016Y10T117/108
    • An apparatus for producing diamond in a deposition chamber including a heat-sinking holder for holding a diamond and for making thermal contact with a side surface of the diamond adjacent to an edge of a growth surface of the diamond, a noncontact temperature measurement device positioned to measure temperature of the diamond across the growth surface of the diamond and a main process controller for receiving a temperature measurement from the noncontact temperature measurement device and controlling temperature of the growth surface such that all temperature gradients across the growth surface are less than 20° C. The method for producing diamond includes positioning diamond in a holder such that a thermal contact is made with a side surface of the diamond adjacent to an edge of a growth surface of the diamond, measuring temperature of the growth surface of the diamond to generate temperature measurements, controlling temperature of the growth surface based upon the temperature measurements, and growing single-crystal diamond by microwave plasma chemical vapor deposition on the growth surface, wherein a growth rate of the diamond is greater than 1 micrometer per hour.
    • 一种用于在沉积室中制造金刚石的装置,包括用于保持金刚石并与金刚石的生长表面的边缘相邻的金刚石的侧表面进行热接触的散热支架,非接触式温度测量装置, 测量钻石在金刚石的生长表面上的温度,以及用于接收来自非接触式温度测量装置的温度测量并控制生长表面的温度的主过程控制器,使得生长表面上的所有温度梯度都小于20℃ 制造金刚石的方法包括将金刚石定位在保持器中,使得与钻石的生长表面的边缘相邻的金刚石的侧表面进行热接触,测量金刚石的生长表面的温度以产生温度 测量,基于温度测量控制生长表面的温度 杂质和通过微波等离子体化学气相沉积在生长表面上生长的单晶金刚石,其中金刚石的生长速率大于1微米/小时。
    • 4. 发明授权
    • Colorless single-crystal CVD diamond at rapid growth rate
    • 无色单晶CVD金刚石生长速度快
    • US07883684B2
    • 2011-02-08
    • US11438260
    • 2006-05-23
    • Russell J. HemleyHo-kwang MaoChih-shiue Yan
    • Russell J. HemleyHo-kwang MaoChih-shiue Yan
    • C30B23/00C01B31/06
    • C30B29/04C01B32/25C23C16/274C23C16/277C23C16/279C30B25/105
    • The present invention relates to a method for producing colorless, single-crystal diamonds at a rapid growth rate. The method for diamond production includes controlling temperature of a growth surface of the diamond such that all temperature gradients across the growth surface of the diamond are less than about 20° C., and growing single-crystal diamond by microwave plasma chemical vapor deposition on the growth surface of a diamond at a growth temperature in a deposition chamber having an atmosphere, wherein the atmosphere comprises from about 8% to about 20% CH4 per unit of H2 and from about 5 to about 25% O2 per unit of CH4. The method of the invention can produce diamonds larger than 10 carats. Growth rates using the method of the invention can be greater than 50 μm/hour.
    • 本发明涉及以快速生长速度生产无色单晶金刚石的方法。 用于金刚石生产的方法包括控制金刚石的生长表面的温度,使得穿过金刚石的生长表面的所有温度梯度小于约20℃,并且通过微波等离子体化学气相沉积生长单晶金刚石 在具有气氛的沉积室中的生长温度下金刚石的生长表面,其中所述气氛包含每单位H 2约8%至约20%CH 4和每单位CH 4约5至约25%O 2。 本发明的方法可以生产大于10克拉的钻石。 使用本发明的方法的生长速度可以大于50μm/小时。
    • 7. 发明授权
    • Apparatus and method for diamond production
    • 钻石生产的装置和方法
    • US07452420B2
    • 2008-11-18
    • US11785996
    • 2007-04-23
    • Russell J. HemleyHo-kwang MaoChih-shiue YanYogesh K. Vohra
    • Russell J. HemleyHo-kwang MaoChih-shiue YanYogesh K. Vohra
    • C30B25/12
    • C30B25/105C30B25/12C30B29/04Y10T117/1004Y10T117/1008Y10T117/1016Y10T117/108
    • An apparatus for producing diamond in a deposition chamber including a heat-sinking holder for holding a diamond and for making thermal contact with a side surface of the diamond adjacent to an edge of a growth surface of the diamond, a noncontact temperature measurement device positioned to measure temperature of the diamond across the growth surface of the diamond and a main process controller for receiving a temperature measurement from the noncontact temperature measurement device and controlling temperature of the growth surface such that all temperature gradients across the growth surface are less than 20° C. The method for producing diamond includes positioning diamond in a holder such that a thermal contact is made with a side surface of the diamond adjacent to an edge of a growth surface of the diamond, measuring temperature of the growth surface of the diamond to generate temperature measurements, controlling temperature of the growth surface based upon the temperature measurements, and growing single-crystal diamond by microwave plasma chemical vapor deposition on the growth surface, wherein a growth rate of the diamond is greater than 1 micrometer per hour.
    • 一种用于在沉积室中制造金刚石的装置,包括用于保持金刚石并与金刚石的生长表面的边缘相邻的金刚石的侧表面进行热接触的散热支架,非接触式温度测量装置, 测量钻石在金刚石的生长表面上的温度,以及用于接收来自非接触式温度测量装置的温度测量并控制生长表面的温度的主过程控制器,使得生长表面上的所有温度梯度都小于20℃ 制造金刚石的方法包括将金刚石定位在保持器中,使得与钻石的生长表面的边缘相邻的金刚石的侧表面进行热接触,测量金刚石的生长表面的温度以产生温度 测量,基于温度测量控制生长表面的温度 杂质和通过微波等离子体化学气相沉积在生长表面上生长的单晶金刚石,其中金刚石的生长速率大于1微米/小时。