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1. 发明授权

US07863564B2 Electric charged particle beam microscope and microscopy 有权
标题翻译：带电粒子束显微镜和显微镜
公开(公告)号：US07863564B2
公开(公告)日：2011-01-04
申请号：US12259771
申请日：2008-10-28
申请人： Ruriko Tsuneta , Hideki Kikuchi , Takafumi Yotsuji , Toshie Yaguchi
发明人： Ruriko Tsuneta , Hideki Kikuchi , Takafumi Yotsuji , Toshie Yaguchi
IPC分类号： H01J49/00
CPC分类号： H01J37/20 , H01J2237/20207 , H01J2237/20214 , H01J2237/20242 , H01J2237/20285 , H01J2237/20292 , H01J2237/2611 , H01J2237/262 , H01J2237/28 , H01J2237/2802
摘要： An electric charged particle beam microscope is provided in which a specimen movement due to a specimen rotation is classified into a repeatable movement and a non-repeatable movement, a model of movement is determined for the repeatable movement, a range of movement is determined for the non-repeatable movement, the repeatable movement is corrected on the basis of the movement model through open-loop and the non-repeatable movement is corrected under a condition set on the basis of the range of movement.
摘要翻译：提供一种带电粒子束显微镜，其中由于样本旋转而导致的样本运动被分类为可重复运动和不可重复运动，确定运动模型用于可重复运动，运动范围被确定为不可重复运动，基于运动模型通过开环校正可重复运动，并且在基于运动范围设置的条件下校正不可重复运动。

2. 发明申请

US20120104253A1 CHARGED PARTICLE BEAM MICROSCOPE AND MEASURING METHOD USING SAME 审中-公开
标题翻译：充电颗粒光束显微镜和使用相同的测量方法
公开(公告)号：US20120104253A1
公开(公告)日：2012-05-03
申请号：US13383259
申请日：2010-06-01
申请人： Ruriko Tsuneta , Hideki Kikuchi , Takafumi Yotsuji
发明人： Ruriko Tsuneta , Hideki Kikuchi , Takafumi Yotsuji
IPC分类号： H01J37/28 , G01N23/00
CPC分类号： H01J37/26 , H01J37/20 , H01J37/263 , H01J37/3005 , H01J2237/30461
摘要： A charged particle beam device is equipped with a function of: obtaining an approximation function of a sample drift from a visual field shift amount among plural images (S1); capturing a save image while correcting the drift on the basis of the approximation function (S2); and creating from the save image a target image in which the effect of the sample drift is reduced (S3). This makes it possible to smooth the random errors in the visual field shift measurements by approximating the sample drift to the function and also to predict the sample drift changing over time. Therefore, it is possible to provide a charged particle beam device in which the effect of the sample drift is very limited even in a high magnification and also provide a measuring method using the charged particle beam device.
摘要翻译：带电粒子束装置具有以下功能：从多个图像中的视场偏移量获得样本漂移的近似函数（S1）; 在基于近似函数校正漂移的同时捕获保存图像（S2）; 以及从保存图像创建其中减少样本漂移的影响的目标图像（S3）。这使得可以通过近似于函数的样本漂移并且还预测随时间变化的样本漂移来平滑视野偏移测量中的随机误差。因此，即使在高放大率下也可以提供样品漂移的效果非常有限的带电粒子束装置，并且还提供使用带电粒子束装置的测量方法。

3. 发明申请

US20090127474A1 ELECTRIC CHARGED PARTICLE BEAM MICROSCOPE AND MICROSCOPY 有权
标题翻译：电荷粒子束显微镜和显微镜
公开(公告)号：US20090127474A1
公开(公告)日：2009-05-21
申请号：US12259771
申请日：2008-10-28
申请人： Ruriko TSUNETA , Hideki Kikuchi , Takafumi Yotsuji , Toshie Yaguchi
发明人： Ruriko TSUNETA , Hideki Kikuchi , Takafumi Yotsuji , Toshie Yaguchi
IPC分类号： G21K5/10 , G01N23/00
CPC分类号： H01J37/20 , H01J2237/20207 , H01J2237/20214 , H01J2237/20242 , H01J2237/20285 , H01J2237/20292 , H01J2237/2611 , H01J2237/262 , H01J2237/28 , H01J2237/2802
摘要： An electric charged particle beam microscope is provided in which a specimen movement due to a specimen rotation is classified into a repeatable movement and a non-repeatable movement, a model of movement is determined for the repeatable movement, a range of movement is determined for the non-repeatable movement, the repeatable movement is corrected on the basis of the movement model through open-loop and the non-repeatable movement is corrected under a condition set on the basis of the range of movement.
摘要翻译：提供一种带电粒子束显微镜，其中由于样本旋转而导致的样本运动被分类为可重复运动和不可重复运动，确定运动模型用于可重复运动，运动范围被确定为不可重复运动，基于运动模型通过开环校正可重复运动，并且在基于运动范围设置的条件下校正不可重复运动。

4. 发明授权

US06777679B2 Method of observing a sample by a transmission electron microscope 失效
标题翻译：通过透射电子显微镜观察样品的方法
公开(公告)号：US06777679B2
公开(公告)日：2004-08-17
申请号：US10353039
申请日：2003-01-29
申请人： Isao Nagaoki , Hiroyuki Kobayashi , Takafumi Yotsuji , Toshiyuki Ohyagi
发明人： Isao Nagaoki , Hiroyuki Kobayashi , Takafumi Yotsuji , Toshiyuki Ohyagi
IPC分类号： H01J3726
CPC分类号： G01N23/04 , H01J37/265 , H01J2237/216
摘要： Automatically corrected is a movement of a field of view caused upon changing a magnification. A field of view is searched for with a first magnification. A sample stage coordinate of a designated subject of recording is computed, for storage, on a transmission electron beam image of a sample displayed on an image display section. A subject-of-recording image is cut out of the transmission electron beam image of the sample in the first magnification and stored as a first image. The magnification of the transmission electron microscope is set to a magnification twice a magnification in the recording mode, to move the sample stage to the stored sample stage coordinate of the subject of recording. The transmission electron beam image in the second magnification is captured with the same number of pixels as the first image to compute a movement amount of between the two images from a correlation intensity of the first and second images. Then, the transmission electron beam image in the second magnification is corrected in position with respect to imaging means such that the movement amount is zero, to store an obtained transmission electron beam image (S29).
摘要翻译：自动校正是在改变放大倍数时引起的视野的移动。以第一放大率搜索视野。计算指定的记录对象的样本台坐标，以存储在显示在图像显示部分上的样本的透射电子束图像上。以第一倍率从样本的透射电子束图像中切下记录图像，并作为第一图像存储。在记录模式下，透射电子显微镜的倍率设定为放大倍率的两倍，将样品台移动到记录对象的存储的样品台坐标。以与第一图像相同数量的像素捕获第二放大率的透射电子束图像，以从第一和第二图像的相关强度计算两个图像之间的移动量。然后，相对于成像装置将第二倍率的透射电子束图像校正到移动量为零的位置，以存储获得的透射电子束图像（S29）。

5. 发明授权

US06472663B2 Electron microscope 有权
标题翻译：电子显微镜
公开(公告)号：US06472663B2
公开(公告)日：2002-10-29
申请号：US09182356
申请日：1998-10-29
申请人： Isao Nagaoki , Hiroyuki Kobayashi , Takafumi Yotsuji
发明人： Isao Nagaoki , Hiroyuki Kobayashi , Takafumi Yotsuji
IPC分类号： H01J3126
CPC分类号： G01N23/04 , H01J37/26
摘要： Relationship among an exciting current of each lens of an irradiation lens system including at least two stages of irradiation lenses and an electron beam aperture, an irradiation electron beam density on a sample and an area of the sample surface irradiated with an electron beam is stored in a form of a table or equations, and an exciting condition of each of the lenses of the irradiation lens system is retrieved from the relationship and set the irradiation lens system to the retrieved condition, for example, when the enlarging magnification is changed under a condition of keeping the irradiation electron beam density at a constant value. Further, trails of a region of the sample surface irradiated with the electron beam is displayed on a display unit.
摘要翻译：包括至少两级照射透镜和电子束孔径的照射透镜系统的每个透镜的激发电流与样品上的照射电子束密度以及用电子束照射的样品表面的面积之间的关系被存储在从该关系中检索照射透镜系统的每个透镜的表格或方程式的形式以及激光条件，并将照射透镜系统设置为检索条件，例如当放大倍率在条件将照射电子束密度保持在恒定值。此外，在显示单元上显示用电子束照射的样品表面的区域的迹线。

6. 发明申请

US20130062519A1 ELECTRON MICROSCOPE, AND METHOD FOR ADJUSTNG OPTICAL AXIS OF ELECTRON MICROSCOPE 审中-公开
标题翻译：电子显微镜和电子显微镜调光光轴的方法
公开(公告)号：US20130062519A1
公开(公告)日：2013-03-14
申请号：US13699008
申请日：2011-04-20
申请人： Toshiyuki Oyagi , Takafumi Yotsuji , Yasuyuki Nodera , Isao Nagaoki
发明人： Toshiyuki Oyagi , Takafumi Yotsuji , Yasuyuki Nodera , Isao Nagaoki
IPC分类号： H01J37/153 , H01J37/26
CPC分类号： H01J37/26 , H01J37/1471 , H01J37/222 , H01J37/224 , H01J2237/1501
摘要： An electron microscope is provided that can automatically adjust the optical axis even in a state of deviation of the optical axis according to which the position of an electron beam on a fluorescent plate cannot be verified after replacement of an electron source. The microscope measures current of a fluorescent plate and determining whether the fluorescent plate is irradiated with an electron beam or not; without irradiation, controls a deflector to move the electron beam such that the fluorescent plate is irradiated with the electron beam; and, with irradiation, controls the deflector such that the current becomes a local maximum and a magnitude of luminance acquired from the image of the electron beam with which the fluorescent plate is irradiated becomes a local maximum.
摘要翻译：即使在光电子偏移的状态下也能够自动调整光轴的电子显微镜，在更换电子源之后，荧光板上的电子束的位置不能被验证。显微镜测量荧光板的电流并确定荧光板是否用电子束照射; 无照射，控制偏转器移动电子束，使得荧光板被电子束照射; 并且通过照射来控制偏转器，使得电流变为局部最大值，并且从照射荧光板的电子束的图像获取的亮度的大小变为局部最大值。

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