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1. 发明授权

US06777679B2 Method of observing a sample by a transmission electron microscope 失效
标题翻译：通过透射电子显微镜观察样品的方法
公开(公告)号：US06777679B2
公开(公告)日：2004-08-17
申请号：US10353039
申请日：2003-01-29
申请人： Isao Nagaoki , Hiroyuki Kobayashi , Takafumi Yotsuji , Toshiyuki Ohyagi
发明人： Isao Nagaoki , Hiroyuki Kobayashi , Takafumi Yotsuji , Toshiyuki Ohyagi
IPC分类号： H01J3726
CPC分类号： G01N23/04 , H01J37/265 , H01J2237/216
摘要： Automatically corrected is a movement of a field of view caused upon changing a magnification. A field of view is searched for with a first magnification. A sample stage coordinate of a designated subject of recording is computed, for storage, on a transmission electron beam image of a sample displayed on an image display section. A subject-of-recording image is cut out of the transmission electron beam image of the sample in the first magnification and stored as a first image. The magnification of the transmission electron microscope is set to a magnification twice a magnification in the recording mode, to move the sample stage to the stored sample stage coordinate of the subject of recording. The transmission electron beam image in the second magnification is captured with the same number of pixels as the first image to compute a movement amount of between the two images from a correlation intensity of the first and second images. Then, the transmission electron beam image in the second magnification is corrected in position with respect to imaging means such that the movement amount is zero, to store an obtained transmission electron beam image (S29).
摘要翻译：自动校正是在改变放大倍数时引起的视野的移动。以第一放大率搜索视野。计算指定的记录对象的样本台坐标，以存储在显示在图像显示部分上的样本的透射电子束图像上。以第一倍率从样本的透射电子束图像中切下记录图像，并作为第一图像存储。在记录模式下，透射电子显微镜的倍率设定为放大倍率的两倍，将样品台移动到记录对象的存储的样品台坐标。以与第一图像相同数量的像素捕获第二放大率的透射电子束图像，以从第一和第二图像的相关强度计算两个图像之间的移动量。然后，相对于成像装置将第二倍率的透射电子束图像校正到移动量为零的位置，以存储获得的透射电子束图像（S29）。

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