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1. 发明授权

US5171717A Method for batch cleaving semiconductor wafers and coating cleaved facets 失效
标题翻译：分批切割半导体晶片和涂层切割面的方法
公开(公告)号：US5171717A
公开(公告)日：1992-12-15
申请号：US647861
申请日：1991-01-30
申请人： Ronald F. Broom , Marcel Gasser , Christoph S. Harder , Ernst E. Latta , Albertus Oosenbrug , Heinz Richard , Peter Vettiger
发明人： Ronald F. Broom , Marcel Gasser , Christoph S. Harder , Ernst E. Latta , Albertus Oosenbrug , Heinz Richard , Peter Vettiger
IPC分类号： B28D5/00 , H01L21/301 , H01S5/00 , H01S5/02
CPC分类号： B28D5/0029 , H01S5/0202 , Y10T225/12
摘要： A method for cleaving semiconductor wafers, or segments thereof, which comprises placing the wafer, provided with scribe lines defining the planes where cleaving is to take place, inbetween a pair of flexible transport bands and guiding it around a curved, large radius surface thereby applying a bending moment. With a moment of sufficient magnitude, individual bars are broken off the wafer as this is advanced, the bars having front-and rear-end facets. On cleaving, each bar, while still pressed against the curved surface, is automatically separated whereby mutual damage of the facets of neighboring bars is prevented. For further handling, e.g. for the transport of the bars to an evaporation station for passivation layer deposition, provisions are made to keep the bars separated. Cleaving and the subsequent passivation coating can be carried out in-situ in a vacuum system to prevent facet contamination prior to applying the passivation.
摘要翻译：一种用于切割半导体晶片或其部分的方法，其包括将设置有限定要进行裂开的平面的切割线的晶片放置在一对柔性传输带之间并将其引导到弯曲的大半径表面上，从而施加一个弯曲的时刻。有了足够的时刻，随着这个进步，单个的条被从晶片上分离出来，这些条具有前端和后端方面。在切割时，每个杆在仍然压靠弯曲表面的同时被自动分离，从而防止相邻杆的小面的相互损坏。为了进一步处理，例如为了将棒运送到用于钝化层沉积的蒸发站，进行了保持棒分离的规定。切割和随后的钝化涂层可以在真空系统中原位进行，以防止在施加钝化之前的小面污染。

2. 发明申请

US20130133433A1 SURFACE STRESS SENSOR 有权
标题翻译：表面应力传感器
公开(公告)号：US20130133433A1
公开(公告)日：2013-05-30
申请号：US13699667
申请日：2011-05-09
申请人： Genki Yoshikawa , Heinrich Rohrer , Terunobu Akiyama , Peter Vettiger
发明人： Genki Yoshikawa , Heinrich Rohrer , Terunobu Akiyama , Peter Vettiger
IPC分类号： G01L1/18
CPC分类号： G01L1/18 , G01N29/022 , G01N2291/02466
摘要： Deflection of a free end of one plate-like member, that is caused by uniform stress, is transmitted to the other plate-like member by moving a free end of the other plate-like member. According to this configuration, the uniform stress applied to the one plate-like member is converted into stress induced by a point force in the other plate-like member, and then, the induced stress is concentrated on a fixed end side narrow portion in which a piezoresistor is provided. Thus, a novel structure for a piezoresistive surface stress sensor having high sensitivity to uniform stress applied to the surface of the sensor is provided.
摘要翻译：由均匀的应力引起的一个板状构件的自由端的偏移通过移动另一个板状构件的自由端而被传递到另一个板状构件。根据该结构，施加到一个板状构件的均匀的应力被转换为由另一个板状构件中的点力引起的应力，然后，感应应力集中在固定端侧窄部，提供一个压敏电阻。因此，提供了对施加到传感器的表面的均匀应力具有高灵敏度的压阻表面应力传感器的新型结构。

3. 发明授权

US07713789B2 Semiconductor device with a high thermal dissipation efficiency 有权
标题翻译：具有高散热效率的半导体器件
公开(公告)号：US07713789B2
公开(公告)日：2010-05-11
申请号：US11852317
申请日：2007-09-09
申请人： Thomas J. Brunschwiler , Michel Despont , Mark A. Lantz , Bruno Michel , Peter Vettiger
发明人： Thomas J. Brunschwiler , Michel Despont , Mark A. Lantz , Bruno Michel , Peter Vettiger
IPC分类号： H01L21/00
CPC分类号： H01L21/4882 , H01L21/4871 , H01L21/4875 , H01L23/3677 , H01L2224/16 , H01L2224/73253 , H01L2924/09701 , H01L2924/1461 , H01L2924/00
摘要： Provides semiconductor devices and method for fabricating devices having a high thermal dissipation efficiency. An example device comprises a thermally conducting structure attached to a surface of the semiconductor device via soldering. The thermally conducting structure is essentially formed of a thermally conducting material and comprises an array of freestanding fins, studs or frames, or a grid of connected fins. A process for fabricating such a semiconductor device includes forming a thermally conducting structure on a carrier and attaching the thermally conducting structure formed on the carrier to a surface of the semiconductor device via soldering.
摘要翻译：提供用于制造具有高散热效率的器件的半导体器件和方法。示例性装置包括通过焊接附接到半导体器件的表面的导热结构。导热结构基本上由导热材料形成，并且包括独立的翅片，螺柱或框架的阵列或连接的翅片的格栅。制造这种半导体器件的方法包括在载体上形成导热结构，并通过焊接将形成在载体上的导热结构附着在半导体器件的表面上。

4. 发明申请

US20080225679A1 Data Read/Write Systems Comprising A Tip 失效
标题翻译：数据读/写系统包括一个提示
公开(公告)号：US20080225679A1
公开(公告)日：2008-09-18
申请号：US12131231
申请日：2008-06-02
申请人： Gerd K. Binning , Walter Haeberle , Peter Vettiger
发明人： Gerd K. Binning , Walter Haeberle , Peter Vettiger
IPC分类号： G11B9/00
CPC分类号： B82Y10/00 , G11B9/14 , G11B11/007 , G11B13/00
摘要： A method for writing data to and/or reading data from locations on a surface via a tip comprises moving the tip between the locations on the surface. At each location, energy is selectively applied to the surface via the tip and the tip and the surface are selectively forced together in synchronization with the application of energy.
摘要翻译：通过尖端将数据写入和/或从表面上的位置读取数据的方法包括在表面上的位置之间移动尖端。在每个位置，通过尖端选择性地将能量施加到表面，并且尖端和表面与能量的施加同步地选择性地强制在一起。

5. 发明授权

US07180847B2 Apparatus and method for storing and reading high data capacities 失效
标题翻译：用于存储和读取高数据容量的装置和方法
公开(公告)号：US07180847B2
公开(公告)日：2007-02-20
申请号：US10669851
申请日：2003-09-23
申请人： Gerd K. Binnig , Walter Haeberle , Peter Vettiger
发明人： Gerd K. Binnig , Walter Haeberle , Peter Vettiger
IPC分类号： G11B9/00
CPC分类号： B82Y10/00 , G11B9/14 , G11B9/1409 , G11B9/1418 , G11B25/06 , G11B25/063
摘要： In accordance with the present invention, there is provided an apparatus comprising a tape having an information layer on which information is storable in the form of perturbations, an array of probes that in function faces the tape such that the probes scan the surface of the tape, means for selectively forming the perturbations via the probes, means for detecting the presence of the perturbations via the probes, and drive means for moving the tape relative to the array of probes. The apparatus allows to store high data capacities at a small form factor.
摘要翻译：根据本发明，提供了一种装置，包括具有信息层的信息层，信息层可以以扰动的形式存储在信息层上，探针的阵列在功能上面向带，使得探针扫描带的表面用于选择性地通过探针形成扰动的装置，用于检测经由探针的扰动的存在的装置，以及用于相对于探针阵列移动带的驱动装置。该设备允许以小尺寸存储高数据容量。

6. 发明授权

US07057746B2 Scanner for precise movement and low power consumption 失效
公开(公告)号：US07057746B2
公开(公告)日：2006-06-06
申请号：US09952773
申请日：2001-09-14
申请人： Gerd K. Binnig , Walter Häberle , Peter Vettiger
发明人： Gerd K. Binnig , Walter Häberle , Peter Vettiger
IPC分类号： H04N1/40
CPC分类号： H02N2/021
摘要： An apparatus and method for moving a first object relative to a second object is provided. One of the first and second objects is moved and thereby guided by a tracking device. The tracking device uses a pattern on the first object and/or second object and a releasable clamping device for holding the first and second object in contact. The first and second object can then be releasably clamped such that the patterns match and the clamping device holds the first and second object in a position defined by the pattern. This invention is particularly well suited for nanomechanical or micromechanical applications.

7. 发明授权

US06680808B2 Magnetic millipede for ultra high density magnetic storage 失效
标题翻译：磁性千斤顶用于超高密度磁存储
公开(公告)号：US06680808B2
公开(公告)日：2004-01-20
申请号：US09798237
申请日：2001-03-01
申请人： Rolf Allenspach , Gerd K. Binnig , Walter Haeberle , Peter Vettiger
发明人： Rolf Allenspach , Gerd K. Binnig , Walter Haeberle , Peter Vettiger
IPC分类号： G11B502
CPC分类号： G11B5/00 , B82Y10/00 , G11B5/012 , G11B5/255 , G11B5/488 , G11B5/4886 , G11B5/74 , G11B5/82 , G11B9/14 , G11B9/1409 , G11B9/1418 , G11B9/1463 , G11B13/045 , G11B2005/0002 , G11B2005/0005 , G11B2005/0021
摘要： The present invention relates to computer storage systems which have a tip (24) directed close or in contact to the storage medium (10) by which bit-writing and bit-reading is enforced. It is proposed to use a magnetizable storage medium (10), expose it to an artificial, external magnetic field H coupled externally to the storage medium, and—during bit writing—to concurrently apply heat very locally in bit size dimension in order to let the external magnetic field become locally larger than the (temperature-dependent) coercive field at the location (32) where heat is applied. Further, a two-dimensional array of cantilever tips (24) is advantageously used in an inventional storage system each of which tips serves as a heat source when it is activated by a current flowing through a resistive path within said tip (24) and producing the necessary temperature at the small storage medium location (32) where the bit writing is intended in order to approach the Curie temperature or the compensation temperature of the magnetic material.
摘要翻译：本发明涉及具有尖端（24）的计算机存储系统，所述尖端（24）紧密地或与存储介质（10）接触，由此执行位写入和位读取。建议使用可磁化存储介质（10），将其暴露于外部耦合到存储介质的人造外部磁场H，并且在位写入期间同时以比特尺寸尺寸局部施加热量，以使外部磁场局部地大于施加热量的位置（32）处的（温度依赖）矫顽场。此外，悬臂尖端（24）的二维阵列有利地用于本发明的存储系统中，每个尖端在由流过所述尖端（24）内的电阻路径的电流激活时用作热源，并产生在小存储介质位置（32）处必需的温度，其中位写入旨在接近居里温度或磁性材料的补偿温度。

8. 发明授权

US06249747B1 Investigation and/or manipulation device 失效
标题翻译：调查和/或操纵装置
公开(公告)号：US06249747B1
公开(公告)日：2001-06-19
申请号：US09147867
申请日：1999-03-17
申请人： Gerd K. Binnig , Jürgen Brugger , Walter Haeberle , Peter Vettiger
发明人： Gerd K. Binnig , Jürgen Brugger , Walter Haeberle , Peter Vettiger
IPC分类号： G01B734
CPC分类号： G01N25/72 , G01Q20/04 , G01Q80/00 , G11B9/14 , G11B9/1409 , G11B11/007 , G11B2005/0021 , Y10S977/867 , Y10S977/871
摘要： An investigation and/or manipulation tool for a sample which is locally deformed when subjected to a local heat treatment includes a power supply for heating a tip of the tool wherein the tool has a structure such that the power supplied to the tip heats substantially only the tip of the tool and includes a region of relatively high heat conductivity that provides fast cooling of the tip when power is not supplied to the tip.
摘要翻译：用于当进行局部热处理时局部变形的样品的调查和/或操作工具包括用于加热工具尖端的电源，其中该工具具有使得提供给尖端的功率基本上仅加热工具的尖端并且包括相对高的导热性的区域，当未向尖端供电时，其提供尖端的快速冷却。

9. 发明授权

US06218086B1 Method of forming ultrasmall structures and apparatus therefor 有权
标题翻译：形成超小型结构的方法及其设备
公开(公告)号：US06218086B1
公开(公告)日：2001-04-17
申请号：US09147865
申请日：1999-03-17
申请人： Gerd K. Binnig , Michel Despont , Walter Haeberle , Peter Vettiger
发明人： Gerd K. Binnig , Michel Despont , Walter Haeberle , Peter Vettiger
IPC分类号： G03F700
CPC分类号： G03F7/0002 , G01Q70/10 , G01Q80/00 , G11B9/14 , G11B11/007 , Y10S977/856 , Y10S977/878
摘要： The present invention discloses a method of forming ultrasmall (nano) structures in a thin film provided on a substrate by means of a tip which is movable relative to the surface of the thin film. According to principles of the invention, the penetration depth of the tip is limited, thereby avoiding wear of the tip. Furthermore, an apparatus for carrying out the method is disclosed.
摘要翻译：本发明公开了一种通过能够相对于薄膜表面移动的尖端在基片上形成超薄（nano）结构的方法。根据本发明的原理，尖端的穿透深度受到限制，从而避免了尖端的磨损。此外，公开了一种用于执行该方法的装置。

10. 发明授权

US6079255A Mechanically coupled alternatively usable cantilever structures for scanning a surface 失效
标题翻译：用于扫描表面的机械耦合的可选择的悬臂结构
公开(公告)号：US6079255A
公开(公告)日：2000-06-27
申请号：US142796
申请日：1998-09-14
申请人： Gerd K. Binnig , Jurgen Brugger , Walter Haeberle , Heinrich Rohrer , Peter Vettiger
发明人： Gerd K. Binnig , Jurgen Brugger , Walter Haeberle , Heinrich Rohrer , Peter Vettiger
IPC分类号： G01B21/30 , G01B5/28 , G01B7/34 , G01N37/00 , G01Q60/32 , G01Q70/10 , G11B9/00 , G11B9/14 , G12B1/00
CPC分类号： G01Q70/10 , B82Y35/00 , Y10S977/873
摘要： The present invention concerns a cantilever arrangement for scanning a surface. This arrangement comprises a first cantilever having a first probe and a second cantilever having a second probe. Both cantilevers are mechanically coupled such that the second cantilever follows the movement of the first cantilever, i.e. the deflection of the first cantilever defines the deflection of the second cantilever.
摘要翻译： PCT No.PCT / IB96 / 00209 Sec。 371日期：1998年9月14日 102（e）1998年9月14日PCT 1996年3月13日PCT公布。第WO97 / 34122号公报日期1997年9月18日本发明涉及用于扫描表面的悬臂装置。这种布置包括具有第一探针的第一悬臂和具有第二探针的第二悬臂。这两个悬臂机械联接，使得第二悬臂跟随第一悬臂的移动，即第一悬臂的偏转限定了第二悬臂的偏转。

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