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    • 5. 发明授权
    • Method for chemical vapor depositing a titanium nitride layer on a
semiconductor wafer and method of annealing tin films
    • 在半导体晶片上化学气相沉积氮化钛层的方法和退火锡膜的方法
    • US5416045A
    • 1995-05-16
    • US19084
    • 1993-02-18
    • Ralph E. KauffmanMichael J. PruchaJames BeckRandhir P. S. ThakurAnnette L. Martin
    • Ralph E. KauffmanMichael J. PruchaJames BeckRandhir P. S. ThakurAnnette L. Martin
    • C30B33/00H01L21/768H01L21/324
    • H01L21/76856C30B29/38C30B33/00H01L21/76843Y10S438/909
    • A method of chemical vapor depositing a titanium nitride layer on a semiconductor wafer within a chemical vapor deposition reactor includes: a) positioning a wafer within a chemical vapor deposition reactor; b) injecting gaseous TiCl.sub.4, NH.sub.3 and N.sub.2 to within the reactor; and c) maintaining the reactor at a selected pressure and a selected temperature which are effective for reacting the TiCl.sub.4 and NH.sub.3 to deposit a uniform film comprising titanium nitride on the wafer, the selected temperature being less than or equal to about 500.degree. C. With a TiN film outwardly exposed, a wafer is annealed by the sequential steps of, a) rapid thermal processing the wafer having the outwardly exposed TiN film to a temperature from about 580.degree. C. to about 700.degree. C.; b) exposing the wafer to NH.sub.3 gas at a temperature from about 580.degree. C. to about 700.degree. C. for at least about 5 seconds to drive chlorine from the TiN film; c) rapid thermal processing the wafer to a temperature of at least about 780.degree. C.; and d) exposing the wafer to N.sub.2 gas at a temperature of at least about 780.degree. C. for at least about 10 seconds.
    • 在化学气相沉积反应器内的半导体晶片上化学气相沉积氮化钛层的方法包括:a)将晶片定位在化学气相沉积反应器内; b)将气态TiCl4,NH3和N2注入反应器内; 和c)将反应器保持在选择的压力和选定的温度下,这对于使TiCl 4和NH 3反应在晶片上沉积包含氮化钛的均匀的膜是有效的,所选择的温度小于或等于约500℃。 向外暴露的TiN膜,通过以下顺序的步骤对晶片进行退火:a)将具有向外暴露的TiN膜的晶片快速热处理至约580℃至约700℃的温度; b)在约580℃至约700℃的温度下将晶片暴露于NH 3气体至少约5秒以从TiN膜驱动氯; c)将晶片快速热处理至至少约780℃的温度; 和d)在至少约780℃的温度下将晶片暴露于N 2气体至少约10秒。